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SG10201503294XA - Silicon and silicon germanium nanowire structures - Google Patents

Silicon and silicon germanium nanowire structures

Info

Publication number
SG10201503294XA
SG10201503294XA SG10201503294XA SG10201503294XA SG10201503294XA SG 10201503294X A SG10201503294X A SG 10201503294XA SG 10201503294X A SG10201503294X A SG 10201503294XA SG 10201503294X A SG10201503294X A SG 10201503294XA SG 10201503294X A SG10201503294X A SG 10201503294XA
Authority
SG
Singapore
Prior art keywords
silicon
nanowire structures
germanium nanowire
silicon germanium
structures
Prior art date
Application number
SG10201503294XA
Inventor
Kelin J Kuhn
Seiyon Kim
Rafael Rios
Stephen M Cea
Martin D Giles
Annalisa Cappellani
Titash Rakshit
Peter Chang
Willy Rachmady
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of SG10201503294XA publication Critical patent/SG10201503294XA/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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