KR20130029543A - Light emitting device, light emitting device package, and light unit - Google Patents

Abstract

PURPOSE: A light emitting device, and a light emitting device package and a light unit are provided to improve process stability by connecting serially light emitting cells. CONSTITUTION: Light emitting cells(C11-C35) include an active layer on a second conductive semiconductor layer. The light emitting cells include a first conductive semiconductor layer on the active layer. A contact part(114) is in contact with the side of the first conductive semiconductor layer of a first light emitting cell. The contact part is electrically connected to the second conductive semiconductor layer of a second light emitting cell.

Description

Light-Emitting Device, Light-Emitting Device Package and Light Unit {LIGHT EMITTING DEVICE, LIGHT EMITTING DEVICE PACKAGE, AND LIGHT UNIT}

Embodiments relate to a light emitting device, a light emitting device package, and a light unit.

Light emitting diodes (LEDs) are widely used as light emitting devices. Light-emitting diodes use the properties of compound semiconductors to convert electrical signals into light, such as infrared, visible and ultraviolet light.

As the light efficiency of light emitting devices increases, light emitting devices have been applied to various fields including display devices and lighting devices.

The embodiment provides a light emitting device, a light emitting device package, and a light unit including a plurality of light emitting cells electrically connected in series to improve process stability.

The embodiment provides a light emitting device package and a light unit capable of improving light extraction efficiency of white light.

In the light emitting device according to the embodiment, a plurality of light emitting cells each including a second conductive semiconductor layer, an active layer on the second conductive semiconductor layer, and a first conductive semiconductor layer on the active layer are arranged in an M * N matrix structure. And the first conductive semiconductor layer of the light emitting cell disposed at the L * 1 (1≤L <M) position and the second conductive semiconductor layer of the light emitting cell disposed at the L * 2 position are electrically connected, and L * The first conductive semiconductor layer of the light emitting cell disposed at the N position and the second conductive semiconductor layer of the light emitting cell arranged at the position (L + 1) * 1 are electrically connected.

The light emitting device package according to the embodiment includes a body; A light emitting element disposed on the body; A first lead electrode and a second lead electrode electrically connected to the light emitting device; The light emitting device includes a second conductive semiconductor layer, a plurality of light emitting cells each including an active layer on the second conductive semiconductor layer, and a first conductive semiconductor layer on the active layer in an M * N matrix structure. Arranged, the first conductive semiconductor layer of the light emitting cell disposed at the L * 1 (1≤L <M) position and the second conductive semiconductor layer of the light emitting cell arranged at the L * 2 position are electrically connected, and L The first conductive semiconductor layer of the light emitting cell disposed in the * N position and the second conductive semiconductor layer of the light emitting cell disposed in the (L + 1) * 1 position are electrically connected.

According to an embodiment, a light unit includes a substrate; A light emitting device disposed on the substrate; An optical member through which light provided from the light emitting device passes; The light emitting device includes a second conductive semiconductor layer, a plurality of light emitting cells each including an active layer on the second conductive semiconductor layer, and a first conductive semiconductor layer on the active layer in an M * N matrix structure. Arranged, the first conductive semiconductor layer of the light emitting cell disposed at the L * 1 (1≤L <M) position and the second conductive semiconductor layer of the light emitting cell arranged at the L * 2 position are electrically connected, and L The first conductive semiconductor layer of the light emitting cell disposed in the * N position and the second conductive semiconductor layer of the light emitting cell disposed in the (L + 1) * 1 position are electrically connected.

The light emitting device, the light emitting device package, and the light unit according to the embodiment may improve process stability and provide a plurality of light emitting cells electrically connected in series.

The light emitting device package and the light unit according to the embodiment have an advantage of improving light extraction efficiency of white light.

1 is a view conceptually showing a light emitting device according to an embodiment.
2 and 3 are views showing a modified example of the light emitting device according to the embodiment.
4 is a view showing a light emitting device according to an embodiment.
5 to 9 illustrate a method of manufacturing a light emitting device according to the embodiment.
10 and 11 illustrate modified examples of the light emitting device according to the embodiment.
12 is a view showing a light emitting device package according to an embodiment.
13 is a diagram illustrating a display device according to an exemplary embodiment.
14 is a diagram illustrating another example of a display device according to an exemplary embodiment.
15 is a view showing a lighting apparatus according to an embodiment.

In the description of the embodiments, it is to be understood that each layer (film), region, pattern or structure may be referred to as being "on" or "under" a substrate, each layer It is to be understood that the terms " on "and " under" include both " directly "or" indirectly " do. In addition, the criteria for the top / bottom or bottom / bottom of each layer are described with reference to the drawings.

The thickness and size of each layer in the drawings are exaggerated, omitted, or schematically shown for convenience and clarity of explanation. Also, the size of each component does not fully reflect its actual size.

Hereinafter, a light emitting device, a light emitting device package, a light unit, and a light emitting device manufacturing method according to embodiments will be described in detail with reference to the accompanying drawings.

1 is a view conceptually showing a light emitting device according to an embodiment.

As shown in FIG. 1, the light emitting device according to the embodiment includes a plurality of light emitting cells C11, C12, C13, C14, C15, C21, C22, C23, C24, C25, C31, C32, C33, C34, and C35. It may include. Here, a case where a plurality of light emitting cells are arranged in three columns and five rows is shown as an example, but the number of columns and rows may be large or small. That is, the plurality of light emitting cells may be arranged in a matrix structure of M rows and N columns.

In the light emitting device according to the embodiment, a plurality of light emitting cells each including a second conductive semiconductor layer, an active layer on the second conductive semiconductor layer, and a first conductive semiconductor layer on the active layer are arranged in an M * N matrix structure. And the first conductive semiconductor layer of the light emitting cell disposed at the L * 1 (1≤L <M) position and the second conductive semiconductor layer of the light emitting cell disposed at the L * 2 position are electrically connected, and L * The first conductive semiconductor layer of the light emitting cell disposed in the N position and the second conductive semiconductor layer of the light emitting cell disposed in the position (L + 1) * 1 may be electrically connected.

For example, the first electrode 111 of the C14 light emitting cell and the second electrode 112 of the C15 light emitting cell may be electrically connected to each other. A protective layer 113 may be disposed around the second electrode 112. The first electrode 111 and the second electrode 112 may be electrically connected through the contact portion 114. In addition, the first electrode of the C15 light emitting cell may be electrically connected to the second electrode of the C21 light emitting cell. The first electrode of the C15 light emitting cell and the second electrode of the C21 light emitting cell may be electrically connected through the connection line 115.

In addition, the width of the contact portion 114 may be formed, for example, wider than 1/3 of the length of one side of the light emitting cell and narrower than the length of one side of the light emitting cell. In addition, for example, the width of the connection line 115 may be formed to be wider than 1/2 of the interval between adjacent light emitting cells and narrower than the interval between adjacent light emitting cells.

As such, when the first electrode of the C15 light emitting cell is electrically connected to the second electrode of the C21 light emitting cell, when the light emitting device according to the embodiment is applied to the package, the white light provided from the light emitting device package is connected to the connection wiring. By reflecting at 115, the external light extraction effect can be improved. That is, the length of the connection line 115 can be longer than that of the C15 light emitting cell and the C25 light emitting cell, so that the external light extraction effect can be relatively improved.

Meanwhile, as shown in FIG. 2, when the first electrode of the C15 light emitting cell is electrically connected to the second electrode of the C21 light emitting cell, the connection line 115 may be drawn out from the upper direction of the C15 light emitting cell. have.

For example, the width of the contact portion 114 may be formed to be wider than 1/3 of the length of one side of the light emitting cell and narrower than the length of one side of the light emitting cell. In addition, for example, the width of the connection line 115 may be formed to be wider than 1/2 of the interval between adjacent light emitting cells and narrower than the interval between adjacent light emitting cells.

In addition, as shown in FIG. 3, when the first electrode of the C15 light emitting cell is electrically connected to the second electrode of the C21 light emitting cell, the connection line 115 may be drawn out from the right direction of the C15 light emitting cell. have.

For example, the width of the contact portion 114 may be formed to be wider than 1/3 of the length of one side of the light emitting cell and narrower than the length of one side of the light emitting cell. In addition, for example, the width of the connection line 115 may be formed to be wider than 1/2 of the interval between adjacent light emitting cells and narrower than the interval between adjacent light emitting cells.

4 is a view illustrating an electrical connection between light emitting cells of a light emitting device according to an embodiment.

As shown in FIG. 4, the light emitting device according to the embodiment includes a first light emitting structure 10, a second light emitting structure 20, a third light emitting structure 30, a first reflective electrode 17, and a second light emitting device. The reflective electrode 27, the third reflective electrode 37, and the electrode 80 may be included. 4 illustrates a case in which three light emitting structures are disposed, the light emitting device according to the embodiment may include two light emitting structures and may also include four or more light emitting structures. The plurality of light emitting structures may be electrically connected in series. The first light emitting structure 10 and the second light emitting structure 20 may be electrically connected by the first contact portion 43. The second light emitting structure 20 and the third light emitting structure 30 may be electrically connected by the second contact portion 53. The plurality of light emitting structures may be disposed on the support substrate 70.

The first light emitting structure 10 may include a first semiconductor layer 11 of a first conductivity type, a first active layer 12, and a second semiconductor layer 13 of a second conductivity type. The first active layer 12 may be disposed between the first semiconductor layer 11 of the first conductivity type and the second semiconductor layer 13 of the second conductivity type. The first active layer 12 may be disposed under the first semiconductor layer 11 of the first conductivity type, and the second semiconductor layer 13 of the second conductivity type may be below the first active layer 12. Can be placed in.

For example, the first semiconductor layer 11 of the first conductivity type is formed of an n-type semiconductor layer to which an n-type dopant is added as the first conductivity type dopant, and the second semiconductor layer 13 of the second conductivity type. The second conductive dopant may be formed of a p-type semiconductor layer to which a p-type dopant is added. Further, the first semiconductor layer 11 of the first conductivity type may be formed of a p-type semiconductor layer, and the second semiconductor layer 13 of the second conductivity type may be formed of an n-type semiconductor layer.

The first semiconductor layer 11 of the first conductivity type may include, for example, an n-type semiconductor layer. A first semiconductor layer (11) of the first conductivity type having the compositional formula of _{In x Al y Ga 1 -x- y} N (0≤x≤1, 0≤y≤1, 0≤x + y≤1) It can be implemented with a semiconductor material. The first semiconductor layer 11 of the first conductivity type may be selected from, for example, GaN, AlN, AlGaN, InGaN, InN, InAlGaN, AlInN, AlGaAs, GaP, GaAs, GaAsP, AlGaInP, and the like. N-type dopants such as Sn, Se, Te, and the like may be doped.

The first active layer 12 is electrons (or holes) injected through the first semiconductor layer 11 of the first conductivity type and holes injected through the second semiconductor layer 13 of the second conductivity type ( Or electrons) meet each other and emit light due to a band gap difference of an energy band according to a material of forming the first active layer 12. The first active layer 12 may be formed of any one of a single quantum well structure, a multi quantum well structure (MQW), a quantum dot structure, or a quantum line structure, but is not limited thereto.

The first active layer 12 is implemented as an example of a semiconductor material having a compositional formula of _{In x Al y Ga 1 -x- y} N (0≤x≤1, 0≤y≤1, 0≤x + y≤1) Can be. When the first active layer 12 is implemented as the multi quantum well structure, the first active layer 12 may be implemented by stacking a plurality of well layers and a plurality of barrier layers, for example, an InGaN well layer. It can be implemented in the cycle of the / GaN barrier layer.

The second semiconductor layer 13 of the second conductivity type may be implemented with, for example, a p-type semiconductor layer. A second semiconductor layer (13) of the second conductivity type having the compositional formula of _{In x Al y Ga 1 -x- y} N (0≤x≤1, 0≤y≤1, 0≤x + y≤1) It can be implemented with a semiconductor material. The second conductive second semiconductor layer 13 may be selected from, for example, GaN, AlN, AlGaN, InGaN, InN, InAlGaN, AlInN, AlGaAs, GaP, GaAs, GaAsP, AlGaInP, and the like. P-type dopants such as, Ca, Sr, and Ba may be doped.

The first semiconductor layer 11 of the first conductivity type may include a p-type semiconductor layer, and the second semiconductor layer 13 of the second conductivity type may include an n-type semiconductor layer. In addition, a semiconductor layer including an n-type or p-type semiconductor layer may be further formed under the second conductive layer 13 of the second conductivity type. Accordingly, the first light emitting structure 10 may have at least one of np, pn, npn, and pnp junction structures. In addition, the doping concentrations of the impurities in the first semiconductor layer 11 of the first conductivity type and the second semiconductor layer 13 of the second conductivity type may be uniformly or nonuniformly formed. That is, the structure of the first light emitting structure 10 may be variously formed, but is not limited thereto.

In addition, a first conductive InGaN / GaN superlattice structure or an InGaN / InGaN superlattice structure may be formed between the first semiconductor layer 11 of the first conductivity type and the first active layer 12. In addition, a second conductive AlGaN layer may be formed between the second semiconductor layer 13 of the second conductivity type and the first active layer 12.

The second light emitting structure 20 may include a third semiconductor layer 21 of a first conductivity type, a second active layer 22, and a fourth semiconductor layer 23 of a second conductivity type. The second active layer 22 may be disposed between the third semiconductor layer 21 of the first conductivity type and the fourth semiconductor layer 23 of the second conductivity type. The second active layer 22 may be disposed below the third semiconductor layer 21 of the first conductivity type, and the fourth semiconductor layer 23 of the second conductivity type may be below the second active layer 22. Can be placed in. The second light emitting structure 20 may be similarly formed in accordance with the first light emitting structure 10 described above.

In addition, the third light emitting structure 30 may include a fifth semiconductor layer 31 of a first conductivity type, a third active layer 32, and a sixth semiconductor layer 33 of a second conductivity type. The third active layer 32 may be disposed between the fifth semiconductor layer 31 of the first conductivity type and the sixth semiconductor layer 33 of the second conductivity type. The third active layer 32 may be disposed under the fifth semiconductor layer 31 of the first conductivity type, and the sixth semiconductor layer 33 of the second conductivity type may be below the third active layer 32. Can be placed in. The third light emitting structure 30 may be similarly formed in accordance with the first light emitting structure 10 described above.

The first ohmic contact layer 15 and the first reflective electrode 17 may be disposed under the first light emitting structure 10. The first metal layer 19 may be disposed under the first light emitting structure 10 and around the first reflective electrode 17. The first metal layer 19 may be disposed around the first ohmic contact layer 15 and below the first reflective electrode 17.

The first ohmic contact layer 15 may be formed of, for example, a transparent conductive oxide layer. The first ohmic contact layer 15 may be formed of, for example, indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), aluminum gallium zinc oxide (AGZO), indium zinc tin oxide (IZTO) or IAZO. (Indium Aluminum Zinc Oxide), IGZO (Indium Gallium Zinc Oxide), IGTO (Indium Gallium Tin Oxide), ATO (Antimony Tin Oxide), GZO (Gallium Zinc Oxide), IZON (IZO Nitride), ZnO, IrOx, RuOx, NiO It may be formed of at least one material selected from Pt, Ag.

The first reflective electrode 17 may be formed of a metal material having a high reflectance. For example, the first reflective electrode 17 may be formed of a metal or an alloy including at least one of Ag, Ni, Al, Rh, Pd, Ir, Ru, Mg, Zn, Pt, Cu, Au, and Hf. In addition, the first reflecting electrode 17 may be formed of the metal or the alloy, Indium-Tin-Oxide (ITO), Indium-Zinc-Oxide (IZO), Indium-Zinc-Tin-Oxide (IZTO), and Indium-Aluminum (AZO). Transmissive conductive materials such as -Zinc-Oxide), Indium-Gallium-Zinc-Oxide (IGZO), Indium-Gallium-Tin-Oxide (IGTO), Aluminum-Zinc-Oxide (AZO), and Antimony-Tin-Oxide (ATO) It can be formed in a multi-layer using. For example, in an embodiment, the first reflective electrode 17 may include at least one of Ag, Al, Ag-Pd-Cu alloy, or Ag-Cu alloy.

The first ohmic contact layer 15 may be formed to be in ohmic contact with the first light emitting structure 10. In addition, the first reflective electrode 17 may function to increase the amount of light extracted to the outside by reflecting light incident from the first light emitting structure 10.

The first metal layer 19 may function to prevent a material included in the bonding layer 60 from diffusing toward the first reflective electrode 17 in a process in which the bonding layer 60 is provided. . The first metal layer 19 may prevent a material such as tin (Sn) included in the bonding layer 60 from affecting the first reflective electrode 17 or the like. The first metal layer 19 may include at least one of Cu, Ni, Ti-W, W, Pt, V, Fe, Mo, Ti, and Cr. The first metal layer 19 may be implemented as a transparent conductive oxide layer. The first metal layer 19 may be referred to as an isolation layer or a channel layer.

In addition, a second ohmic contact layer 25 and the second reflective electrode 27 may be disposed under the second light emitting structure 20. The second metal layer 29 may be disposed under the second light emitting structure 20 and around the second reflective electrode 27. The second metal layer 29 may be disposed around the second ohmic contact layer 25 and below the second reflective electrode 27.

The second ohmic contact layer 25 may be formed of, for example, a transparent conductive oxide layer. The second ohmic contact layer 25 may be formed of, for example, indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), aluminum gallium zinc oxide (AGZO), indium zinc tin oxide (IZTO), or IAZO. (Indium Aluminum Zinc Oxide), IGZO (Indium Gallium Zinc Oxide), IGTO (Indium Gallium Tin Oxide), ATO (Antimony Tin Oxide), GZO (Gallium Zinc Oxide), IZON (IZO Nitride), ZnO, IrOx, RuOx, NiO It may be formed of at least one material selected from Pt, Ag.

The second reflecting electrode 27 may be formed of a metal material having a high reflectance. For example, the second reflective electrode 27 may be formed of a metal or an alloy including at least one of Ag, Ni, Al, Rh, Pd, Ir, Ru, Mg, Zn, Pt, Cu, Au, and Hf. In addition, the second reflecting electrode 27 may be formed of the metal or the alloy and Indium-Tin-Oxide (ITO), Indium-Zinc-Oxide (IZO), Indium-Zinc-Tin-Oxide (IZTO), and Indium-Aluminum (AZO). Transmissive conductive materials such as -Zinc-Oxide), Indium-Gallium-Zinc-Oxide (IGZO), Indium-Gallium-Tin-Oxide (IGTO), Aluminum-Zinc-Oxide (AZO), and Antimony-Tin-Oxide (ATO) It can be formed in a multi-layer using. For example, in the exemplary embodiment, the second reflective electrode 27 may include at least one of Ag, Al, Ag-Pd-Cu alloy, or Ag-Cu alloy.

The second ohmic contact layer 25 may be formed in ohmic contact with the second light emitting structure 20. In addition, the second reflective electrode 27 may perform a function of increasing the amount of light extracted to the outside by reflecting light incident from the second light emitting structure 20.

The second metal layer 29 may serve to prevent the material included in the bonding layer 60 from diffusing toward the second reflective electrode 27 in the process of providing the bonding layer 60. have. The second metal layer 29 may prevent a material such as tin (Sn) included in the bonding layer 60 from affecting the second reflective electrode 27 or the like. The second metal layer 29 is formed of Cu, Ni, Ti-W, W, Pt, V, Fe, Mo, Ti. It may include at least one of Cr. The second metal layer 29 may be implemented as a transparent conductive oxide layer.

In addition, a third ohmic contact layer 35 and the third reflective electrode 37 may be disposed under the third light emitting structure 30. A third metal layer 39 may be disposed under the third light emitting structure 30 and around the third reflective electrode 37. The third metal layer 39 may be disposed around the third ohmic contact layer 35 and below the third reflective electrode 37.

The third ohmic contact layer 35 may be formed of, for example, a transparent conductive oxide layer. For example, the third ohmic contact layer 35 may be formed of indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), aluminum gallium zinc oxide (AGZO), indium zinc tin oxide (IZTO) or IAZO. (Indium Aluminum Zinc Oxide), IGZO (Indium Gallium Zinc Oxide), IGTO (Indium Gallium Tin Oxide), ATO (Antimony Tin Oxide), GZO (Gallium Zinc Oxide), IZON (IZO Nitride), ZnO, IrOx, RuOx, NiO It may be formed of at least one material selected from Pt, Ag.

The third reflective electrode 37 may be formed of a metal material having a high reflectance. For example, the third reflective electrode 37 may be formed of a metal or an alloy including at least one of Ag, Ni, Al, Rh, Pd, Ir, Ru, Mg, Zn, Pt, Cu, Au, and Hf. In addition, the third reflecting electrode 37 may be formed of the metal or the alloy, Indium-Tin-Oxide (ITO), Indium-Zinc-Oxide (IZO), Indium-Zinc-Tin-Oxide (IZTO), and Indium-Aluminum (AZO). Transmissive conductive materials such as -Zinc-Oxide), Indium-Gallium-Zinc-Oxide (IGZO), Indium-Gallium-Tin-Oxide (IGTO), Aluminum-Zinc-Oxide (AZO), and Antimony-Tin-Oxide (ATO) It can be formed in a multi-layer using. For example, in an embodiment, the third reflective electrode 37 may include at least one of Ag, Al, Ag-Pd-Cu alloy, or Ag-Cu alloy.

The third ohmic contact layer 35 may be formed to be in ohmic contact with the third light emitting structure 30. In addition, the third reflective electrode 37 may perform a function of increasing the amount of light extracted to the outside by reflecting light incident from the third light emitting structure 30.

The third metal layer 39 may perform a function of preventing the material included in the bonding layer 60 from diffusing toward the third reflective electrode 37 in a process in which the bonding layer 60 is provided. have. The third metal layer 39 may prevent a material such as tin (Sn) included in the bonding layer 60 from affecting the third reflective electrode 37 or the like. The third metal layer 39 may include at least one of Cu, Ni, Ti-W, W, Pt, V, Fe, Mo, Ti, and Cr.

The first contact portion 43 may be disposed between the first light emitting structure 10 and the second light emitting structure 20. The first contact portion 43 may be in contact with an upper surface of the first semiconductor layer 11 of the first conductivity type. The first contact portion 43 may be in contact with a side surface of the first semiconductor layer 11 of the first conductivity type. The first contact portion 43 may be in contact with the second metal layer 29. The first contact portion 43 may contact the upper surface of the second metal layer 29. Since the second metal layer 29 is electrically connected to the second reflective electrode 27 and the second ohmic contact layer 25, the first contact portion 43 may be a fourth semiconductor of the second conductivity type. It may be electrically connected to layer 23. Accordingly, the first semiconductor layer 11 of the first conductivity type may be electrically connected to the fourth semiconductor layer 23 of the second conductivity type through the first contact portion 43.

The first contact portion 43 may be formed of at least one material selected from, for example, Cr, Al, Ti, Ni, Pt, V, and Ag. In addition, the first contact portion 43 may be formed of, for example, a transparent conductive oxide layer. The first contact portion 43 may include, for example, indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), aluminum gallium zinc oxide (AGZO), indium zinc tin oxide (IZTO), and IAZO ( Among Indium Aluminum Zinc Oxide (IGZO), Indium Gallium Zinc Oxide (IGZO), Indium Gallium Tin Oxide (IGTO), Antimony Tin Oxide (ATO), Gallium Zinc Oxide (GZO), IZON (IZO Nitride), ZnO, IrOx, RuOx, NiO It may be formed of at least one material selected.

The first contact portion 43 may be in contact with an upper surface of the first semiconductor layer 11 of the first conductivity type. For example, the first semiconductor layer 11 of the first conductivity type may be implemented including a GaN layer. In this case, considering the growth direction and the etching direction of the semiconductor layer, the first contact portion 43 may be in contact with the N face (N face) of the first semiconductor layer 11 of the first conductivity type.

The first insulating layer 41 may be disposed between the first contact portion 43 and the second semiconductor layer 13 of the second conductivity type. The first insulating layer 41 may be disposed between the first contact portion 43 and the first active layer 12. The first insulating layer 41 may be disposed under the first semiconductor layer 11 of the first conductivity type. The first insulating layer 41 may be in contact with the first contact portion 43. Side surfaces of the first insulating layer 41 may be in contact with the first contact portion 43. The first insulating layer 41 may be made of a light transmissive or insulating material. The first insulating layer 41 is, for example, SiO ₂ , SiO _x , SiO _x N _y , It may be formed of a material such as Si ₃ N ₄ , Al ₂ O ₃ , TiO ₂ , AlN.

A second contact portion 53 may be disposed between the second light emitting structure 20 and the third light emitting structure 30. The second contact portion 53 may be in contact with an upper surface of the third semiconductor layer 21 of the first conductivity type. The second contact portion 53 may be in contact with a side surface of the third semiconductor layer 21 of the first conductivity type. The second contact portion 53 may be in contact with the third metal layer 39. The second contact portion 53 may contact the upper surface of the third metal layer 39. Since the third metal layer 39 is electrically connected to the third reflective electrode 37 and the third ohmic contact layer 35, the second contact portion 53 may be the sixth semiconductor of the second conductivity type. It may be electrically connected to layer 33. Accordingly, the third semiconductor layer 21 of the first conductivity type may be electrically connected to the sixth semiconductor layer 33 of the second conductivity type through the second contact portion 53.

The second contact portion 53 may be formed of at least one material selected from, for example, Cr, Al, Ti, Ni, Pt, V, and Ag. In addition, the second contact portion 53 may be formed of, for example, a transparent conductive oxide layer. The second contact portion 53 may be formed of, for example, indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), aluminum gallium zinc oxide (AGZO), indium zinc tin oxide (IZTO) or IAZO Among Indium Aluminum Zinc Oxide (IGZO), Indium Gallium Zinc Oxide (IGZO), Indium Gallium Tin Oxide (IGTO), Antimony Tin Oxide (ATO), Gallium Zinc Oxide (GZO), IZON (IZO Nitride), ZnO, IrOx, RuOx, NiO It may be formed of at least one material selected.

The second contact portion 53 may contact an upper surface of the third semiconductor layer 21 of the first conductivity type. For example, the third semiconductor layer 21 of the first conductivity type may be implemented including a GaN layer. In this case, considering the growth direction and the etching direction of the semiconductor layer, the second contact portion 53 may contact the N face of the third semiconductor layer 21 of the first conductivity type.

A second insulating layer 51 may be disposed between the second contact portion 53 and the fourth semiconductor layer 23 of the second conductivity type. The second insulating layer 51 may be disposed between the second contact portion 53 and the second active layer 22. The second insulating layer 51 may be disposed under the third semiconductor layer 21 of the first conductivity type. The second insulating layer 51 may be in contact with the second contact portion 53. Side surfaces of the second insulating layer 51 may be in contact with the second contact portion 53. The second insulating layer 51 may be made of a light transmissive or insulating material. The second insulating layer 51 is, for example, SiO ₂ , SiO _x , SiO _x N _y , It may be formed of a material such as Si ₃ N ₄ , Al ₂ O ₃ , TiO ₂ , AlN.

The third insulating layer 40 may be disposed under the second metal layer 29 and the third metal layer 39. The third insulating layer 40 may be formed of oxide or nitride. The third insulating layer 40 is, for example, SiO ₂ , SiO _x , SiO _x N _y , Si ₃ N ₄ , Al ₂ O ₃ It may be formed of a material having a light transmitting and insulating properties. In addition, the third insulating layer 40 may be disposed under contact with the first insulating layer 41. In addition, the third insulating layer 40 may be disposed under contact with the second insulating layer 51. The first region of the third insulating layer 40 may be disposed between the first metal layer 19 and the second metal layer 29. The second region of the third insulating layer 40 may be disposed between the second metal layer 29 and the third metal layer 39.

A diffusion barrier layer 50, a bonding layer 60, and a support member 70 may be disposed under the first metal layer 19 and the third insulating layer 40.

In the diffusion barrier layer 50, a material included in the bonding layer 60 may be formed in the process of providing the bonding layer 60 with the first reflecting electrode 17, the second reflecting electrode 27, and the first reflecting layer 60. A function of preventing diffusion in the direction of the three reflective electrodes 37 may be performed. In the diffusion barrier layer 50, a material such as tin (Sn) included in the bonding layer 60 may be formed of the first reflective electrode 17, the second reflective electrode 27, and the third reflective electrode 37. ), Etc. can be prevented. The diffusion barrier layer 50 may include at least one of Cu, Ni, Ti-W, W, Pt, V, Fe, Mo, and Ti.

The bonding layer 60 may include at least one of Ti, Au, Sn, Ni, Cr, Ga, In, Bi, Cu, Ag, Nb, Pd, . The support member 70 supports the light emitting device according to the embodiment and may be electrically connected to an external electrode to provide power to the first light emitting structure 10. The bonding layer 60 may be implemented as a seed layer.

The supporting member 70 may be a semiconductor substrate (for example, Si, Ge, GaN, GaAs, or the like) into which Ti, Cr, Ni, Al, Pt, Au, W, Cu, Mo, Cu- ZnO, SiC, SiGe, and the like). In addition, the support member 70 may be implemented with an insulating material. The support member 70 may be made of a material such as Al ₂ O ₃ , SiO ₂ .

Meanwhile, the electrode 80 may be disposed on the fifth semiconductor layer 31 of the first conductivity type. The electrode 80 may be electrically connected to the fifth semiconductor layer 31 of the first conductivity type. The electrode 80 may be in contact with an upper surface of the fifth semiconductor layer 31 of the first conductivity type.

Accordingly, the first light emitting structure 10 by the electrode 80 and the first reflective electrode 17. Power may be provided to the second light emitting structure 20 and the third light emitting structure 30. The first light emitting structure 10, the second light emitting structure 20, and the third light emitting structure 30 are electrically connected in series. Accordingly, when power is applied through the electrode 80 and the first reflective electrode 17, the first light emitting structure 10, the second light emitting structure 20, and the third light emitting structure 30 may be removed. Light can be provided.

According to an embodiment, the electrode 80 may be implemented in a multilayer structure. The electrode 80 may be implemented as an ohmic contact layer, an intermediate layer, and an upper layer. The ohmic contact layer may implement an ohmic contact by including a material selected from Cr, V, W, Ti, and Zn. The intermediate layer may be formed of a material selected from Ni, Cu, Al, and the like. The upper layer may comprise, for example, Au.

A light extraction pattern may be provided on upper surfaces of the first light emitting structure 10, the second light emitting structure 20, and the third light emitting structure 30. Concave-convex patterns may be provided on upper surfaces of the first light emitting structure 10, the second light emitting structure 20, and the third light emitting structure 30. Accordingly, according to the embodiment, the effect of extracting external light can be increased.

According to the embodiment, the upper surface of the first light emitting structure 10, the second light emitting structure 20, the third light emitting structure 30 may be formed in the N plane, when the Ga surface Compared with the surface roughness, the light extraction efficiency can be further improved. In addition, an undoped GaN layer may be further disposed between the electrode 80 and the fifth semiconductor layer 31 of the first conductivity type. As a result, the undoped GaN layer may serve as a kind of balance resistance with respect to the electrode 80 in contact with the N plane, and may change the operating voltage.

A protective layer may be further disposed on the first light emitting structure 10, the second light emitting structure 20, and the third light emitting structure 30. The protective layer may be formed of an oxide or a nitride. The protective layer is, for example, SiO ₂ , SiO _x , SiO _x N _y , Si ₃ N ₄ , Al ₂ O ₃ It may be formed of a material having a light transmitting and insulating properties. The protective layer may be provided around the first light emitting structure 10 and the third light emitting structure 30.

According to an embodiment, the light emitting structures adjacent to each other may be electrically connected in series through the first contact portion 43 and the second contact portion 53. In addition, as a separate insulating layer is not disposed between the first light emitting structure 10 and the second light emitting structure 20, etching the insulating layer in forming the first contact portion 43. This is not necessary. Accordingly, in forming the first contact portion 43, it is possible to increase the manufacturing stability. That is, since the process for forming the insulating layer and the etching process for the insulating layer do not have to go through, it is possible to secure a relatively stable process.

The light emitting device according to the embodiment includes a plurality of light emitting cells. Each of the light emitting cells may include a reflective electrode, a second conductive semiconductor layer on the reflective electrode, an active layer on the second conductive semiconductor layer, and a first conductive semiconductor layer on the active layer. The light emitting device may include a contact portion contacting a side surface of the first conductivity-type semiconductor layer of the first light emitting cell and electrically connecting the reflective electrode of the second light emitting cell adjacent to the first light emitting cell. In this case, the contact portion may be in contact with an upper surface of the first conductive semiconductor layer of the first light emitting cell and electrically connected to the reflective electrode of the second light emitting cell. An insulating layer may be disposed between the contact portion and the active layer of the first light emitting cell and between the contact portion and the second conductive semiconductor layer of the first light emitting cell. The insulating layer may be disposed under the first conductive semiconductor layer of the first light emitting cell. The electrode may include an electrode electrically connected to the first conductivity-type semiconductor layer of the second light emitting cell. Accordingly, when power is supplied to the reflective electrode included in the first light emitting cell and the electrode included in the second light emitting cell, the first light emitting cell and the second light emitting cell are electrically connected in series to emit light. It can emit light.

Next, a method of manufacturing the light emitting device according to the embodiment will be described with reference to FIGS. 5 to 9.

According to the method of manufacturing the light emitting device according to the embodiment, as shown in FIG. 5, the first conductive semiconductor layer 11a, the active layer 12a, and the second conductive semiconductor layer 13a are formed on the growth substrate 5. Form. The first conductive semiconductor layer 11a, the active layer 12a, and the second conductive semiconductor layer 13a may be defined as a light emitting structure 10a.

The growth substrate 5 may be formed of, for example, at least one of sapphire substrate (Al ₂ O ₃ ), SiC, GaAs, GaN, ZnO, Si, GaP, InP, Ge, but is not limited thereto. A buffer layer may be further formed between the first semiconductor layer 11 of the first conductivity type and the growth substrate 5.

For example, the first conductivity type semiconductor layer 11a is formed of an n type semiconductor layer to which an n type dopant is added as a first conductivity type dopant, and the second conductivity type semiconductor layer 13a is a second conductivity type dopant. As a p-type dopant may be formed as a p-type semiconductor layer. In addition, the first conductivity type semiconductor layer 11a may be formed of a p-type semiconductor layer, and the second conductivity type semiconductor layer 13a may be formed of an n-type semiconductor layer.

The first conductivity-type semiconductor layer 11a may include, for example, an n-type semiconductor layer. The first conductive semiconductor layer (11a) is of a semiconductor material having a compositional formula of _{In x Al y Ga 1 -x- y} N (0≤x≤1, 0≤y≤1, 0≤x + y≤1) Can be formed. The first conductive semiconductor layer 11a may be selected from, for example, InAlGaN, GaN, AlGaN, AlInN, InGaN, AlN, InN, and the like, and doped with n-type dopants such as Si, Ge, Sn, Se, Te, or the like. Can be.

In the active layer 12a, electrons (or holes) injected through the first conductive semiconductor layer 11a and holes (or electrons) injected through the second conductive semiconductor layer 13a meet each other. It is a layer that emits light due to a band gap difference of an energy band according to a material forming the active layer 12a. The active layer 12a may be formed of any one of a single quantum well structure, a multi quantum well structure (MQW), a quantum dot structure, or a quantum line structure, but is not limited thereto.

It said active layer (12a) may be formed of a semiconductor material having a compositional formula of _{In x Al y Ga 1 -x- y} N (0≤x≤1, 0≤y≤1, 0≤x + y≤1). When the active layer 12a is formed of the multi quantum well structure, the active layer 12a may be formed by stacking a plurality of well layers and a plurality of barrier layers, for example, an InGaN well layer / GaN barrier layer. It may be formed in a cycle.

The second conductivity-type semiconductor layer 13a may be implemented as, for example, a p-type semiconductor layer. The second conductive type semiconductor layer (13a) is of a semiconductor material having a compositional formula of _{In x Al y Ga 1 -x- y} N (0≤x≤1, 0≤y≤1, 0≤x + y≤1) Can be formed. The second conductive semiconductor layer 13a may be selected from, for example, InAlGaN, GaN, AlGaN, InGaN, AlInN, AlN, InN, and the like, and dopants such as Mg, Zn, Ca, Sr, and Ba may be doped. Can be.

Meanwhile, the first conductivity type semiconductor layer 11a may include a p-type semiconductor layer, and the second conductivity type semiconductor layer 13a may include an n-type semiconductor layer. In addition, a semiconductor layer including an n-type or p-type semiconductor layer may be further formed on the second conductive type semiconductor layer 13a. Thus, the light emitting structure 10a may include a np, pn, npn, Or a structure thereof. In addition, the doping concentrations of the impurities in the first conductive semiconductor layer 11a and the second conductive semiconductor layer 13a may be uniformly or non-uniformly formed. That is, the structure of the light emitting structure 10a may be variously formed, but is not limited thereto.

In addition, a first conductivity type InGaN / GaN superlattice structure or an InGaN / InGaN superlattice structure may be formed between the first conductivity type semiconductor layer 11a and the active layer 12a. In addition, a second conductive AlGaN layer may be formed between the second conductive semiconductor layer 13a and the active layer 12a.

Subsequently, as shown in FIG. 6, a first ohmic contact layer 15 and a first reflective electrode 17 are formed on the first region of the second conductive semiconductor layer 13a. In addition, a second ohmic contact layer 25 and a second reflective electrode 27 are formed on the second region of the second conductive semiconductor layer 13a, and the third region of the second conductive semiconductor layer 13a is formed. The third ohmic contact layer 35 and the third reflective electrode 37 are formed thereon.

The first ohmic contact layer 15, the second ohmic contact layer 25, and the third ohmic contact layer 35 may be formed of, for example, a transparent conductive oxide layer. The first ohmic contact layer 15, the second ohmic contact layer 25, and the third ohmic contact layer 35 are, for example, indium tin oxide (ITO), indium zinc oxide (IZO), and aluminum zinc (AZO). Oxide), Aluminum Gallium Zinc Oxide (AGZO), Indium Zinc Tin Oxide (IZTO), Indium Aluminum Zinc Oxide (IAZO), Indium Gallium Zinc Oxide (IGZO), Indium Gallium Tin Oxide (IGTO), Antimony Tin Oxide (ATO), It may be formed of at least one material selected from gallium zinc oxide (GZO), IZO (IZO Nitride), ZnO, IrOx, RuOx, NiO, Pt, Ag.

The first reflective electrode 17, the second reflective electrode 27, and the third reflective electrode 37 may be formed of a metal material having high reflectance. For example, the first reflection electrode 17, the second reflection electrode 27, and the third reflection electrode 37 may be formed of Ag, Ni, Al, Rh, Pd, Ir, Ru, Mg, Zn, Pt, Cu, It may be formed of a metal or an alloy containing at least one of Au and Hf. In addition, the first reflection electrode 17, the second reflection electrode 27, and the third reflection electrode 37 may be formed of the metal or the alloy, indium tin oxide (ITO), or indium zinc oxide (IZO). ), Indium-Zinc-Tin-Oxide (IZTO), Indium-Aluminum-Zinc-Oxide (IAZO), Indium-Gallium-Zinc-Oxide (IGZO), Indium-Gallium-Tin-Oxide (IGTO), Aluminum- It may be formed in multiple layers using a light transmissive conductive material such as Zinc-Oxide) or ATO (Antimony-Tin-Oxide). For example, the first reflective electrode 17, the second reflective electrode 27, and the third reflective electrode 37 may be formed of Ag, Al, Ag-Pd-Cu alloy, or Ag-Cu. It may include at least one of the alloys.

Subsequently, as shown in FIG. 7, a first insulating layer 41 is formed between the second semiconductor layer 13 of the second conductivity type and the fourth semiconductor layer 23 of the second conductivity type. The first insulating layer 41 is also formed between the first active layer 12 and the second active layer 22. A portion of the first insulating layer 41 may be formed in contact with the first ohmic contact layer 15. The first insulating layer 41 may be formed to be in contact with the first conductive semiconductor layer 11a. The first insulating layer 41 may be made of a light transmissive or insulating material. The first insulating layer 41 is, for example, SiO ₂ , SiO _x , SiO _x N _y , It may be formed of a material such as Si ₃ N ₄ , Al ₂ O ₃ , TiO ₂ , AlN.

In addition, a second insulating layer 51 is formed between the fourth semiconductor layer 23 of the second conductivity type and the sixth semiconductor layer 33 of the second conductivity type. The second insulating layer 51 is also formed between the second active layer 22 and the third active layer 32. A portion of the second insulating layer 51 may be formed in contact with the second ohmic contact layer 25. The second insulating layer 51 may be formed in contact with the first conductive semiconductor layer 11a. The second insulating layer 51 is, for example, SiO ₂ , SiO _x , SiO _x N _y , It may be formed of a material such as Si ₃ N ₄ , Al ₂ O ₃ , TiO ₂ , AlN.

Subsequently, as shown in FIG. 8, the first reflective electrode 17, the second reflective electrode 27, the third reflective electrode 37, the first insulating layer 41, and the second insulation A metal layer is formed on the layer 51, and a third insulating layer 40 is formed. The metal layer may be separated into the first metal layer 19, the second metal layer 29, and the third metal layer 39 by the third insulating layer 40. The first metal layer 19, the second metal layer 29, and the third metal layer 39 may be electrically insulated by the third insulating layer 40. The third insulating layer 40 may be formed in contact with the first insulating layer 41. The third insulating layer 40 may be formed in contact with the second insulating layer 51.

The first metal layer 19, the second metal layer 29, and the third metal layer 39 may be, for example, at least one selected from Ni, Ti-W, W, Pt, V, Fe, Mo, Ti, and Cr. It may include. In addition, the first metal layer 19, the second metal layer 29, and the third metal layer 39 may be implemented with a transparent conductive oxide film. The third insulating layer 40 may be made of a light transmissive or insulating material. The third insulating layer 40 is, for example, SiO ₂ , SiO _x , SiO _x N _y , It may be formed of a material such as Si ₃ N ₄ , Al ₂ O ₃ , TiO ₂ , AlN.

The process of forming the first metal layer 19, the second metal layer 29, the third metal layer 39, and the third insulating layer 40 may be variously modified. For example, the third insulating layer 40 may be formed through a plurality of processes. In addition, the first metal layer 19, the second metal layer 29, and the third metal layer 39 may be formed in separate processes.

Next, as shown in FIG. 8, the diffusion barrier layer 50, the bonding layer 60, and the support member 70 are formed on the first metal layer 19 and the third insulating layer 40.

The diffusion barrier layer 50 may perform a function of preventing the material included in the bonding layer 60 from diffusing toward the first reflective electrode 17 in a process in which the bonding layer 60 is provided. have. The diffusion barrier layer 50 may prevent a material such as tin (Sn) included in the bonding layer 60 from affecting the first reflective electrode 17 or the like. The diffusion barrier layer 50 may include at least one of Cu, Ni, Ti-W, W, and Pt materials.

The bonding layer 60 may include a barrier metal or a bonding metal, and may include, for example, at least one of Ti, Au, Sn, Ni, Cr, Ga, In, Bi, Cu, Ag, or Ta. . The support member 70 may support the light emitting device according to the embodiment and may be electrically connected to an external electrode to provide power to the first reflective electrode 17.

The supporting member 70 may be a semiconductor substrate (for example, Si, Ge, GaN, GaAs, or the like) into which Ti, Cr, Ni, Al, Pt, Au, W, Cu, Mo, Cu- ZnO, SiC, SiGe, and the like). In addition, the support member 70 may be implemented with an insulating material. The support member 70 may be made of a material such as Al ₂ O ₃ , SiO ₂ .

Next, the growth substrate 5 is removed from the first conductivity type semiconductor layer 11a. As one example, the growth substrate 5 may be removed by a laser lift off (LLO) process. The laser lift-off process (LLO) is a step of peeling the growth substrate 5 and the first conductive semiconductor layer 11a from each other by irradiating a laser onto the lower surface of the growth substrate 5.

Subsequently, as illustrated in FIG. 9, isolation etching is performed to separate the first light emitting structure 10, the second light emitting structure 20, and the third light emitting structure 30. The isolation etching can be performed by, for example, dry etching such as ICP (Inductively Coupled Plasma), but is not limited thereto. Partial regions of the first metal layer 19, the second metal layer 29, and the third metal layer 39 may be exposed by the isolation etching. In addition, a portion of the first insulating layer 41 and a portion of the second insulating layer 51 are exposed by the isolation etching.

Next, as shown in FIG. 9, the first contact portion 43 and the second contact portion 53 may be formed. The first contact portion 43 may be formed between the first light emitting structure 10 and the second light emitting structure 20. The first contact portion 43 electrically connects the first conductive layer 11 of the first conductivity type to the second reflective electrode 27. The first contact portion 43 may be in contact with an upper surface of the first semiconductor layer 11 of the first conductivity type. The first contact portion 43 may be in contact with a side surface of the first semiconductor layer 11 of the first conductivity type. The first contact portion 43 may be in contact with the second metal layer 29. The first contact portion 43 may contact the upper surface of the second metal layer 29. The first contact portion 43 may be electrically connected to the fourth semiconductor layer 23 of the second conductivity type. The first semiconductor layer 11 of the first conductivity type may be electrically connected to the fourth semiconductor layer 23 of the second conductivity type through the first contact portion 43. A portion of the first contact portion 43 may be in contact with a side surface of the first insulating layer 41.

The first contact portion 43 may be formed of at least one material selected from, for example, Cr, Al, Ti, Ni, Pt, V, and Ag. In addition, the first contact portion 43 may be formed of, for example, a transparent conductive oxide layer. The first contact portion 43 may include, for example, indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), aluminum gallium zinc oxide (AGZO), indium zinc tin oxide (IZTO), and IAZO ( Among Indium Aluminum Zinc Oxide (IGZO), Indium Gallium Zinc Oxide (IGZO), Indium Gallium Tin Oxide (IGTO), Antimony Tin Oxide (ATO), Gallium Zinc Oxide (GZO), IZON (IZO Nitride), ZnO, IrOx, RuOx, NiO It may be formed of at least one material selected.

The first contact portion 43 may be in contact with an upper surface of the first semiconductor layer 11 of the first conductivity type. For example, the first semiconductor layer 11 of the first conductivity type may be implemented including a GaN layer. In this case, considering the growth direction and the etching direction of the semiconductor layer, the first contact portion 43 may be in contact with the N face (N face) of the first semiconductor layer 11 of the first conductivity type.

The first insulating layer 41 may be disposed between the first contact portion 43 and the second semiconductor layer 13 of the second conductivity type. The first insulating layer 41 may be disposed between the first contact portion 43 and the first active layer 12. The first insulating layer 41 may be disposed under the first semiconductor layer 11 of the first conductivity type. Side surfaces of the first insulating layer 41 may be in contact with the first contact portion 43.

In addition, the second contact portion 53 may be formed between the second light emitting structure 20 and the third light emitting structure 30. The second contact portion 53 electrically connects the third conductive layer 21 of the first conductivity type to the third reflective electrode 37. The second contact portion 53 may be in contact with an upper surface of the third semiconductor layer 21 of the first conductivity type. The second contact portion 53 may be in contact with a side surface of the third semiconductor layer 21 of the first conductivity type. The second contact portion 53 may be in contact with the third metal layer 39. The second contact portion 53 may contact the upper surface of the third metal layer 39. The second contact portion 53 may be electrically connected to the sixth semiconductor layer 33 of the second conductivity type. The third semiconductor layer 21 of the first conductivity type may be electrically connected to the sixth semiconductor layer 33 of the second conductivity type through the second contact portion 53. A portion of the second contact portion 53 may be in contact with a side surface of the second insulating layer 51.

The second contact portion 53 may be formed of at least one material selected from, for example, Cr, Al, Ti, Ni, Pt, V, and Ag. In addition, the second contact portion 53 may be formed of, for example, a transparent conductive oxide layer. The second contact portion 53 may be formed of, for example, indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), aluminum gallium zinc oxide (AGZO), indium zinc tin oxide (IZTO) or IAZO Among Indium Aluminum Zinc Oxide (IGZO), Indium Gallium Zinc Oxide (IGZO), Indium Gallium Tin Oxide (IGTO), Antimony Tin Oxide (ATO), Gallium Zinc Oxide (GZO), IZON (IZO Nitride), ZnO, IrOx, RuOx, NiO It may be formed of at least one material selected.

The second contact portion 53 may contact an upper surface of the third semiconductor layer 21 of the first conductivity type. For example, the third semiconductor layer 21 of the first conductivity type may be implemented including a GaN layer. In this case, considering the growth direction and the etching direction of the semiconductor layer, the second contact portion 53 may contact the N face of the third semiconductor layer 21 of the first conductivity type.

A second insulating layer 51 may be disposed between the second contact portion 53 and the fourth semiconductor layer 23 of the second conductivity type. The second insulating layer 51 may be disposed between the second contact portion 53 and the second active layer 22. The second insulating layer 51 may be disposed under the third semiconductor layer 21 of the first conductivity type. The second insulating layer 51 may be in contact with the second contact portion 53.

In addition, a light extraction pattern may be provided on an upper surface of the first light emitting structure 10, the second light emitting structure 20, and the third light emitting structure 30. Concave-convex patterns may be provided on upper surfaces of the first light emitting structure 10, the second light emitting structure 20, and the third light emitting structure 30. Accordingly, according to the embodiment, the effect of extracting external light can be increased. According to the embodiment, the upper surface of the first light emitting structure 10, the second light emitting structure 20, the third light emitting structure 30 may be formed in the N plane, when the Ga surface Compared with the surface roughness, the light extraction efficiency can be further improved.

Meanwhile, the electrode 80 may be disposed on the fifth semiconductor layer 31 of the first conductivity type. The electrode 80 may be electrically connected to the fifth semiconductor layer 31 of the first conductivity type. The electrode 80 may be in contact with an upper surface of the fifth semiconductor layer 31 of the first conductivity type.

Accordingly, the first light emitting structure 10 by the electrode 80 and the first reflective electrode 17. Power may be provided to the second light emitting structure 20 and the third light emitting structure 30. The first light emitting structure 10, the second light emitting structure 20, and the third light emitting structure 30 are electrically connected in series. Accordingly, when power is applied through the electrode 80 and the first reflective electrode 17, the first light emitting structure 10, the second light emitting structure 20, and the third light emitting structure 30 may be removed. Light can be provided.

According to an embodiment, the electrode 80 may be implemented in a multilayer structure. The electrode 80 may be implemented as an ohmic contact layer, an intermediate layer, and an upper layer. The ohmic contact layer may implement an ohmic contact by including a material selected from Cr, V, W, Ti, and Zn. The intermediate layer may be formed of a material selected from Ni, Cu, Al, and the like. The upper layer may comprise, for example, Au.

A protective layer may be further disposed on the first light emitting structure 10, the second light emitting structure 20, and the third light emitting structure 30. The protective layer may be formed of an oxide or a nitride. The protective layer is, for example, SiO ₂ , SiO _x , SiO _x N _y , Si ₃ N ₄ , Al ₂ O ₃ It may be formed of a material having a light transmitting and insulating properties. The protective layer may be provided around the first light emitting structure 10 and the third light emitting structure 30.

According to an embodiment, the light emitting structures adjacent to each other may be electrically connected in series through the first contact portion 43 and the second contact portion 53. In addition, as a separate insulating layer is not disposed between the first light emitting structure 10 and the second light emitting structure 20, etching the insulating layer in forming the first contact portion 43. This is not necessary. Accordingly, in forming the first contact portion 43, it is possible to increase the manufacturing stability. That is, since the process for forming the insulating layer and the etching process for the insulating layer do not have to go through, it is possible to secure a relatively stable process.

Meanwhile, the process of forming each layer described above is one example, and the process order may be variously modified.

10 is a view showing another example of a light emitting device according to the embodiment. In the description of the light emitting device according to the exemplary embodiment illustrated in FIG. 10, the description of parts overlapping with those described with reference to FIG. 4 will be omitted.

The first contact portion 43 may be disposed between the first light emitting structure 10 and the second light emitting structure 20. The first contact portion 43 electrically connects the first conductive layer 11 of the first conductivity type to the second reflective electrode 27. The first contact portion 43 may be in contact with an upper surface of the first semiconductor layer 11 of the first conductivity type. The first contact portion 43 may be in contact with a side surface of the first semiconductor layer 11 of the first conductivity type. The first contact portion 43 may be in contact with the second metal layer 29. The first contact portion 43 may contact the upper surface of the second metal layer 29. The first contact portion 43 may be electrically connected to the fourth semiconductor layer 23 of the second conductivity type. The first semiconductor layer 11 of the first conductivity type may be electrically connected to the fourth semiconductor layer 23 of the second conductivity type through the first contact portion 43.

The first contact portion 43 may be formed of at least one material selected from, for example, Cr, Al, Ti, Ni, Pt, V, and Ag. In addition, the first contact portion 43 may be formed of, for example, a transparent conductive oxide layer. The first contact portion 43 may include, for example, indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), aluminum gallium zinc oxide (AGZO), indium zinc tin oxide (IZTO), and IAZO ( Among Indium Aluminum Zinc Oxide (IGZO), Indium Gallium Zinc Oxide (IGZO), Indium Gallium Tin Oxide (IGTO), Antimony Tin Oxide (ATO), Gallium Zinc Oxide (GZO), IZON (IZO Nitride), ZnO, IrOx, RuOx, NiO It may be formed of at least one material selected.

The first contact portion 43 may be in contact with an upper surface of the first semiconductor layer 11 of the first conductivity type. For example, the first semiconductor layer 11 of the first conductivity type may be implemented including a GaN layer. In this case, considering the growth direction and the etching direction of the semiconductor layer, the first contact portion 43 may be in contact with the N face (N face) of the first semiconductor layer 11 of the first conductivity type.

The first insulating layer 41 may be disposed between the first contact portion 43 and the second semiconductor layer 13 of the second conductivity type. The first insulating layer 41 may be disposed between the first contact portion 43 and the first active layer 12. The first insulating layer 41 may be disposed under the first semiconductor layer 11 of the first conductivity type. The first insulating layer 41 may be in contact with the first contact portion 43. The first insulating layer 41 may be made of a light transmissive or insulating material. The first insulating layer 41 is, for example, SiO ₂ , SiO _x , SiO _x N _y , It may be formed of a material such as Si ₃ N ₄ , Al ₂ O ₃ , TiO ₂ , AlN.

A second contact portion 53 may be disposed between the second light emitting structure 20 and the third light emitting structure 30. The second contact portion 53 electrically connects the third conductive layer 21 of the first conductivity type to the third reflective electrode 37. The second contact portion 53 may be in contact with an upper surface of the third semiconductor layer 21 of the first conductivity type. The second contact portion 53 may be in contact with a side surface of the third semiconductor layer 21 of the first conductivity type. The second contact portion 53 may be in contact with the third metal layer 39. The second contact portion 53 may contact the upper surface of the third metal layer 39. The second contact portion 53 may be electrically connected to the sixth semiconductor layer 33 of the second conductivity type. The third semiconductor layer 21 of the first conductivity type may be electrically connected to the sixth semiconductor layer 33 of the second conductivity type through the second contact portion 53.

The second contact portion 53 may be formed of at least one material selected from, for example, Cr, Al, Ti, Ni, Pt, V, and Ag. In addition, the second contact portion 53 may be formed of, for example, a transparent conductive oxide layer. The second contact portion 53 may be formed of, for example, indium tin oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO), aluminum gallium zinc oxide (AGZO), indium zinc tin oxide (IZTO) or IAZO Among Indium Aluminum Zinc Oxide (IGZO), Indium Gallium Zinc Oxide (IGZO), Indium Gallium Tin Oxide (IGTO), Antimony Tin Oxide (ATO), Gallium Zinc Oxide (GZO), IZON (IZO Nitride), ZnO, IrOx, RuOx, NiO It may be formed of at least one material selected.

The second contact portion 53 may contact an upper surface of the third semiconductor layer 21 of the first conductivity type. For example, the third semiconductor layer 21 of the first conductivity type may be implemented including a GaN layer. In this case, considering the growth direction and the etching direction of the semiconductor layer, the second contact portion 53 may contact the N face of the third semiconductor layer 21 of the first conductivity type.

A second insulating layer 51 may be disposed between the second contact portion 53 and the fourth semiconductor layer 23 of the second conductivity type. The second insulating layer 51 may be disposed between the second contact portion 53 and the second active layer 22. The second insulating layer 51 may be disposed under the third semiconductor layer 21 of the first conductivity type. The second insulating layer 51 may be in contact with the second contact portion 53. The second insulating layer 51 may be made of a light transmissive or insulating material. The second insulating layer 51 is, for example, SiO ₂ , SiO _x , SiO _x N _y , It may be formed of a material such as Si ₃ N ₄ , Al ₂ O ₃ , TiO ₂ , AlN.

The third insulating layer 40 may be disposed under the second metal layer 29 and the third metal layer 39. The third insulating layer 40 may be formed of oxide or nitride. The second wing insulation layer may be made of a light transmissive or insulating material. The third insulating layer 40 is, for example, SiO ₂ , SiO _x , SiO _x N _y , It may be formed of a material such as Si ₃ N ₄ , Al ₂ O ₃ . In addition, the third insulating layer 40 may be disposed under contact with the first insulating layer 41. In the contacted area, an upper surface area of the third insulating layer 40 may be equal to a lower surface area of the first insulating layer 41. In addition, the third insulating layer 40 may be disposed under contact with the second insulating layer 51. An upper surface area of the third insulating layer 40 in the contacted area may be equal to a lower surface area of the second insulating layer 51. A partial region of the third insulating layer 40 may be disposed between the first metal layer 19 and the second metal layer 29. In addition, another partial region of the third insulating layer 40 may be disposed between the second metal layer 29 and the third metal layer 39.

11 is a view showing another example of a light emitting device according to the embodiment. In the description of the light emitting device according to the exemplary embodiment illustrated in FIG. 11, the description of parts overlapping with those described with reference to FIG. 4 will be omitted.

According to the light emitting device according to the embodiment, the first ohmic reflective electrode 16 may be disposed under the first light emitting structure 10. The first ohmic reflective electrode 16 may be implemented to perform the functions of both the first reflective electrode 17 and the first ohmic contact layer 15 described with reference to FIG. 4. Accordingly, the first ohmic reflective electrode 16 is in ohmic contact with the second semiconductor layer 13 of the second conductivity type, and may perform a function of reflecting light incident from the first light emitting structure 10. have.

In addition, a second ohmic reflective electrode 26 may be disposed under the second light emitting structure 20. The second ohmic reflective electrode 26 may be implemented to perform both the functions of the second reflective electrode 27 and the second ohmic contact layer 25 described with reference to FIG. 4. Accordingly, the second ohmic reflective electrode 26 is in ohmic contact with the fourth semiconductor layer 23 of the second conductivity type, and may perform a function of reflecting light incident from the second light emitting structure 20. have.

In addition, a third ohmic reflective electrode 36 may be disposed under the third light emitting structure 30. The third ohmic reflective electrode 36 may be implemented to perform both the functions of the third reflective electrode 37 and the third ohmic contact layer 35 described with reference to FIG. 4. Accordingly, the third ohmic reflective electrode 36 is in ohmic contact with the sixth semiconductor layer 33 of the second conductivity type, and may function to reflect light incident from the third light emitting structure 30. have.

12 is a view showing a light emitting device package to which the light emitting device according to the embodiment is applied.

Referring to FIG. 12, the light emitting device package according to the embodiment may include a body 120, a first lead electrode 131 and a second lead electrode 132 disposed on the body 120, and the body 120. The light emitting device 100 according to the embodiment, which is provided to and electrically connected to the first lead electrode 131 and the second lead electrode 132, and the molding member 140 surrounding the light emitting device 100. Include.

The body 120 may include a silicon material, a synthetic resin material, or a metal material, and an inclined surface may be formed around the light emitting device 100.

The first lead electrode 131 and the second lead electrode 132 are electrically separated from each other, and provide power to the light emitting device 100. In addition, the first lead electrode 131 and the second lead electrode 132 may increase light efficiency by reflecting light generated from the light emitting device 100, and heat generated from the light emitting device 100. It may also play a role in discharging it to the outside.

The light emitting device 100 may be disposed on the body 120 or on the first lead electrode 131 or the second lead electrode 132.

The light emitting device 100 may be electrically connected to the first lead electrode 131 and the second lead electrode 132 by any one of a wire method, a flip chip method, and a die bonding method.

The molding member 140 may surround the light emitting device 100 to protect the light emitting device 100. In addition, the molding member 140 may include a phosphor to change the wavelength of light emitted from the light emitting device 100.

A plurality of light emitting devices or light emitting device packages may be arranged on a substrate, and an optical member such as a lens, a light guide plate, a prism sheet, and a diffusion sheet may be disposed on an optical path of the light emitting device package. Such a light emitting device package, a substrate, and an optical member can function as a light unit. The light unit may be implemented as a top view or a side view type and may be provided in a display device such as a portable terminal and a notebook computer, or may be variously applied to a lighting device and a pointing device. Still another embodiment may be embodied as a lighting device including the light emitting device or the light emitting device package described in the above embodiments. For example, the lighting device may include a lamp, a streetlight, an electric signboard, and a headlight.

The light emitting device according to the embodiment may be applied to the light unit. The light unit includes a structure in which a plurality of light emitting elements are arranged, and may include the display device shown in FIGS. 13 and 14 and the lighting device shown in FIG. 15.

Referring to FIG. 13, the display device 1000 according to the embodiment includes a light guide plate 1041, a light emitting module 1031 providing light to the light guide plate 1041, and a reflective member 1022 under the light guide plate 1041. ), An optical sheet 1051 on the light guide plate 1041, a display panel 1061, a light guide plate 1041, a light emitting module 1031, and a reflective member 1022 on the optical sheet 1051. The bottom cover 1011 may be included, but is not limited thereto.

The bottom cover 1011, the reflective sheet 1022, the light guide plate 1041, and the optical sheet 1051 can be defined as a light unit 1050.

The light guide plate 1041 diffuses light to serve as a surface light source. The light guide plate 1041 is made of a transparent material, for example, acrylic resin-based such as polymethyl metaacrylate (PMMA), polyethylene terephthlate (PET), polycarbonate (PC), cycloolefin copolymer (COC), and polyethylene naphthalate (PEN). It may include one of the resins.

The light emitting module 1031 provides light to at least one side of the light guide plate 1041, and ultimately serves as a light source of the display device.

At least one light emitting module 1031 may be provided, and light may be provided directly or indirectly from one side of the light guide plate 1041. The light emitting module 1031 may include a substrate 1033 and a light emitting device or a light emitting device package 200 according to the embodiment described above. The light emitting device package 200 may be arranged on the substrate 1033 at predetermined intervals.

The substrate 1033 may be a printed circuit board (PCB) including a circuit pattern. However, the substrate 1033 may include not only a general PCB but also a metal core PCB (MCPCB, Metal Core PCB), a flexible PCB (FPCB, Flexible PCB) and the like, but is not limited thereto. When the light emitting device package 200 is provided on the side surface of the bottom cover 1011 or on the heat dissipation plate, the substrate 1033 may be removed. Here, a part of the heat dissipation plate may contact the upper surface of the bottom cover 1011.

In addition, the plurality of light emitting device packages 200 may be mounted such that an emission surface from which light is emitted is spaced apart from the light guide plate 1041 by a predetermined distance, but is not limited thereto. The light emitting device package 200 may directly or indirectly provide light to a light incident portion that is one side of the light guide plate 1041, but is not limited thereto.

The reflective member 1022 may be disposed under the light guide plate 1041. The reflective member 1022 may improve the luminance of the light unit 1050 by reflecting light incident to the lower surface of the light guide plate 1041 and pointing upward. The reflective member 1022 may be formed of, for example, PET, PC, or PVC resin, but is not limited thereto. The reflective member 1022 may be an upper surface of the bottom cover 1011, but is not limited thereto.

The bottom cover 1011 may house the light guide plate 1041, the light emitting module 1031, the reflective member 1022, and the like. To this end, the bottom cover 1011 may be provided with a housing portion 1012 having a box-like shape with an opened upper surface, but the present invention is not limited thereto. The bottom cover 1011 may be combined with the top cover, but is not limited thereto.

The bottom cover 1011 may be formed of a metal material or a resin material, and may be manufactured using a process such as press molding or extrusion molding. In addition, the bottom cover 1011 may include a metal or a non-metal material having good thermal conductivity, but the present invention is not limited thereto.

The display panel 1061 is, for example, an LCD panel, including first and second transparent substrates facing each other, and a liquid crystal layer interposed between the first and second substrates. A polarizing plate may be attached to at least one surface of the display panel 1061, but the present invention is not limited thereto. The display panel 1061 displays information by light passing through the optical sheet 1051. The display device 1000 may be applied to various portable terminals, monitors of notebook computers, monitors of laptop computers, televisions, and the like.

The optical sheet 1051 is disposed between the display panel 1061 and the light guide plate 1041 and includes at least one light transmissive sheet. The optical sheet 1051 may include at least one of a sheet such as, for example, a diffusion sheet, a horizontal and vertical prism sheet, and a brightness enhancement sheet. The diffusion sheet diffuses the incident light, the horizontal and / or vertical prism sheet focuses the incident light into the display area, and the brightness enhancement sheet reuses the lost light to improve the brightness. A protective sheet may be disposed on the display panel 1061, but the present invention is not limited thereto.

Here, the optical path of the light emitting module 1031 may include the light guide plate 1041 and the optical sheet 1051 as an optical member, but the present invention is not limited thereto.

14 is a diagram illustrating another example of a display device according to an exemplary embodiment.

Referring to FIG. 14, the display device 1100 includes a bottom cover 1152, a substrate 1020 on which the light emitting device 100 disclosed above is arranged, an optical member 1154, and a display panel 1155.

The substrate 1020 and the light emitting device package 200 may be defined as a light emitting module 1060. The bottom cover 1152, at least one light emitting module 1060, and the optical member 1154 may be defined as a light unit.

The bottom cover 1152 may include an accommodating part 1153, but is not limited thereto.

Here, the optical member 1154 may include at least one of a lens, a light guide plate, a diffusion sheet, a horizontal and vertical prism sheet, and a brightness enhancement sheet. The light guide plate may be made of a PC material or a poly methy methacrylate (PMMA) material, and the light guide plate may be removed. The diffusion sheet diffuses the incident light, the horizontal and vertical prism sheets focus the incident light onto the display area, and the brightness enhancement sheet reuses the lost light to improve the brightness.

The optical member 1154 is disposed on the light emitting module 1060, and performs surface light source, diffusion, condensing, etc. of the light emitted from the light emitting module 1060.

15 is a perspective view of a lighting apparatus according to an embodiment.

Referring to FIG. 15, the lighting device 1500 may include a case 1510, a light emitting module 1530 installed in the case 1510, and a connection terminal installed in the case 1510 and receiving power from an external power source. 1520).

The case 1510 may be formed of a material having good heat dissipation, and may be formed of, for example, a metal material or a resin material.

The light emitting module 1530 may include a substrate 1532 and a light emitting device or a light emitting device package 200 according to an embodiment provided on the substrate 1532. The plurality of light emitting device packages 200 may be arranged in a matrix form or spaced apart at predetermined intervals.

The substrate 1532 may be a circuit pattern printed on an insulator. For example, a general printed circuit board (PCB), a metal core PCB, a flexible PCB, a ceramic PCB, FR-4 substrates and the like.

In addition, the substrate 1532 may be formed of a material that reflects light efficiently, or a surface may be coated with a color, for example, white or silver, in which the light is efficiently reflected.

At least one light emitting device package 200 may be disposed on the substrate 1532. Each of the light emitting device packages 200 may include at least one light emitting diode (LED) chip. The LED chip may include a colored light emitting diode emitting red, green, blue or white colored light, and a UV emitting diode emitting ultraviolet (UV) light.

The light emitting module 1530 may be arranged to have a combination of various light emitting device packages 200 to obtain color and luminance. For example, a white light emitting diode, a red light emitting diode, and a green light emitting diode may be combined to secure high color rendering (CRI).

The connection terminal 1520 may be electrically connected to the light emitting module 1530 to supply power. The connection terminal 1520 is coupled to an external power source in a socket manner, but is not limited thereto. For example, the connection terminal 1520 may be formed in a pin shape and inserted into an external power source, or may be connected to the external power source by a wire.

According to the embodiment, the light emitting device may be packaged and mounted on the substrate to be implemented as a light emitting module, or may be mounted and packaged as an LED chip to be implemented as a light emitting module.

Features, structures, effects, and the like described in the above embodiments are included in at least one embodiment of the present invention, and are not necessarily limited to only one embodiment. Further, the features, structures, effects, and the like illustrated in the embodiments can be combined and modified by other persons having ordinary skill in the art to which the embodiments belong. Therefore, it should be understood that the present invention is not limited to these combinations and modifications.

In addition, the above description has been made with reference to the embodiments, which are merely exemplary and are not intended to limit the present invention. Those skilled in the art to which the present invention pertains will be illustrated above in the range without departing from the essential characteristics of the present embodiment. It will be appreciated that various modifications and applications are possible. For example, each component specifically shown in the embodiments can be modified and implemented. It is to be understood that all changes and modifications that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

10: first light emitting structure 11: first semiconductor layer
12: first active layer 13: second semiconductor layer
15: first ohmic contact layer 17: first reflective electrode
19: first metal layer 20: second light emitting structure
21: third semiconductor layer 22: second active layer
23: fourth semiconductor layer 25: second ohmic contact layer
27: second reflective electrode 29: second metal layer
30: third light emitting structure 31: fifth semiconductor layer
32: third active layer 33: sixth semiconductor layer
35: third ohmic contact layer 37: third reflective electrode
39: third metal layer 40: third insulating layer
41: first insulating layer 43: first contact portion
50: diffusion barrier layer 53: second contact portion
60: bonding layer 70: support member
80: electrode 111: first electrode
112: second electrode 113: protective layer
114: contact portion 115: connection wiring

Claims (9)

A plurality of light emitting cells each including a second conductive semiconductor layer, an active layer on the second conductive semiconductor layer, and a first conductive semiconductor layer on the active layer are arranged in an M * N matrix structure,
The first conductive semiconductor layer of the light emitting cell disposed at the L * 1 (1≤L <M) position and the second conductive semiconductor layer of the light emitting cell disposed at the L * 2 position are electrically connected;
A light emitting device in which a first conductive semiconductor layer of a light emitting cell disposed in an L * N position and a second conductive semiconductor layer of a light emitting cell arranged in an (L + 1) * 1 position are electrically connected. The semiconductor light emitting device of claim 1, wherein one of the plurality of light emitting cells is electrically connected to a second conductive semiconductor layer of a second light emitting cell adjacent to the first light emitting cell and in contact with a side surface of the first conductive semiconductor layer. Contact portion; Light emitting device comprising a. The light emitting device of claim 2, wherein the contact portion is in contact with an upper surface of the first conductive semiconductor layer of the first light emitting cell. The light emitting device of claim 2, further comprising an insulating layer between the contact portion and the active layer of the first light emitting cell and between the contact portion and the second conductive semiconductor layer of the first light emitting cell. The light emitting device of claim 4, wherein the insulating layer is disposed under the first conductive semiconductor layer of the first light emitting cell. The light emitting device of claim 2, wherein a width of the contact portion is wider than 1/3 of a length of one side of the first light emitting cell and narrower than a length of one side of the first light emitting cell. The semiconductor device of claim 1, wherein the first conductive semiconductor layer of the light emitting cell disposed at the L * N position and the second conductive semiconductor layer of the light emitting cell disposed at the (L + 1) * 1 position are electrically connected to each other. And a wire, wherein the width of the connection wire is wider than half of the gap between adjacent light emitting cells and narrower than the gap between adjacent light emitting cells. Body;
A light emitting device disposed on the body and according to any one of claims 1 to 7;
A first lead electrode and a second lead electrode electrically connected to the light emitting device;
Emitting device package. Board;
A light emitting device disposed on the substrate and according to any one of claims 1 to 7;
An optical member through which light provided from the light emitting device passes;
Light unit comprising a.

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