KR102200961B1 - 표면 품질이 개선된 고후도 폴리이미드 필름 및 이의 제조방법 - Google Patents
표면 품질이 개선된 고후도 폴리이미드 필름 및 이의 제조방법 Download PDFInfo
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- KR102200961B1 KR102200961B1 KR1020180125122A KR20180125122A KR102200961B1 KR 102200961 B1 KR102200961 B1 KR 102200961B1 KR 1020180125122 A KR1020180125122 A KR 1020180125122A KR 20180125122 A KR20180125122 A KR 20180125122A KR 102200961 B1 KR102200961 B1 KR 102200961B1
- Authority
- KR
- South Korea
- Prior art keywords
- polyimide film
- dianhydride
- polyamic acid
- mole
- acid solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229920001721 polyimide Polymers 0.000 title claims abstract description 138
- 238000000034 method Methods 0.000 title claims description 45
- 230000001976 improved effect Effects 0.000 title description 3
- 229920005575 poly(amic acid) Polymers 0.000 claims abstract description 105
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 claims description 47
- 239000000178 monomer Substances 0.000 claims description 42
- 229920000642 polymer Polymers 0.000 claims description 29
- 150000004985 diamines Chemical class 0.000 claims description 22
- 230000007547 defect Effects 0.000 claims description 14
- -1 3,4-dicarboxyphenoxy Chemical group 0.000 claims description 12
- 239000002253 acid Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 10
- 239000003795 chemical substances by application Substances 0.000 claims description 8
- 239000012024 dehydrating agents Substances 0.000 claims description 8
- NUIURNJTPRWVAP-UHFFFAOYSA-N 3,3'-Dimethylbenzidine Chemical group C1=C(N)C(C)=CC(C=2C=C(C)C(N)=CC=2)=C1 NUIURNJTPRWVAP-UHFFFAOYSA-N 0.000 claims description 6
- QYIMZXITLDTULQ-UHFFFAOYSA-N 4-(4-amino-2-methylphenyl)-3-methylaniline Chemical group CC1=CC(N)=CC=C1C1=CC=C(N)C=C1C QYIMZXITLDTULQ-UHFFFAOYSA-N 0.000 claims description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 6
- 150000008065 acid anhydrides Chemical class 0.000 claims description 6
- 238000006116 polymerization reaction Methods 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 239000003960 organic solvent Substances 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical group NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 claims description 4
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 claims description 4
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 claims description 4
- FYYYKXFEKMGYLZ-UHFFFAOYSA-N 4-(1,3-dioxo-2-benzofuran-5-yl)-2-benzofuran-1,3-dione Chemical compound C=1C=C2C(=O)OC(=O)C2=CC=1C1=CC=CC2=C1C(=O)OC2=O FYYYKXFEKMGYLZ-UHFFFAOYSA-N 0.000 claims description 3
- SXGMVGOVILIERA-UHFFFAOYSA-N (2R,3S)-2,3-diaminobutanoic acid Natural products CC(N)C(N)C(O)=O SXGMVGOVILIERA-UHFFFAOYSA-N 0.000 claims description 2
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 claims description 2
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 claims description 2
- VOZKAJLKRJDJLL-UHFFFAOYSA-N 2,4-diaminotoluene Chemical compound CC1=CC=C(N)C=C1N VOZKAJLKRJDJLL-UHFFFAOYSA-N 0.000 claims description 2
- RLYCRLGLCUXUPO-UHFFFAOYSA-N 2,6-diaminotoluene Chemical compound CC1=C(N)C=CC=C1N RLYCRLGLCUXUPO-UHFFFAOYSA-N 0.000 claims description 2
- UENRXLSRMCSUSN-UHFFFAOYSA-N 3,5-diaminobenzoic acid Chemical compound NC1=CC(N)=CC(C(O)=O)=C1 UENRXLSRMCSUSN-UHFFFAOYSA-N 0.000 claims description 2
- ZBMISJGHVWNWTE-UHFFFAOYSA-N 3-(4-aminophenoxy)aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(N)=C1 ZBMISJGHVWNWTE-UHFFFAOYSA-N 0.000 claims description 2
- WECDUOXQLAIPQW-UHFFFAOYSA-N 4,4'-Methylene bis(2-methylaniline) Chemical compound C1=C(N)C(C)=CC(CC=2C=C(C)C(N)=CC=2)=C1 WECDUOXQLAIPQW-UHFFFAOYSA-N 0.000 claims description 2
- ICNFHJVPAJKPHW-UHFFFAOYSA-N 4,4'-Thiodianiline Chemical compound C1=CC(N)=CC=C1SC1=CC=C(N)C=C1 ICNFHJVPAJKPHW-UHFFFAOYSA-N 0.000 claims description 2
- YBRVSVVVWCFQMG-UHFFFAOYSA-N 4,4'-diaminodiphenylmethane Chemical compound C1=CC(N)=CC=C1CC1=CC=C(N)C=C1 YBRVSVVVWCFQMG-UHFFFAOYSA-N 0.000 claims description 2
- YARZEPAVWOMMHZ-UHFFFAOYSA-N 4-(3,4-dicarboxy-4-phenylcyclohexa-1,5-dien-1-yl)phthalic acid Chemical compound OC(=O)C1C=C(C=2C=C(C(C(O)=O)=CC=2)C(O)=O)C=CC1(C(O)=O)C1=CC=CC=C1 YARZEPAVWOMMHZ-UHFFFAOYSA-N 0.000 claims description 2
- VILWHDNLOJCHNJ-UHFFFAOYSA-N 4-(3,4-dicarboxyphenyl)sulfanylphthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1SC1=CC=C(C(O)=O)C(C(O)=O)=C1 VILWHDNLOJCHNJ-UHFFFAOYSA-N 0.000 claims description 2
- QNLCDRXVEPWSBQ-UHFFFAOYSA-N 4-(4,5-dicarboxy-5-phenylcyclohexa-1,3-dien-1-yl)phthalic acid Chemical compound OC(=O)C1=CC=C(C=2C=C(C(C(O)=O)=CC=2)C(O)=O)CC1(C(O)=O)C1=CC=CC=C1 QNLCDRXVEPWSBQ-UHFFFAOYSA-N 0.000 claims description 2
- IWXCYYWDGDDPAC-UHFFFAOYSA-N 4-[(3,4-dicarboxyphenyl)methyl]phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1CC1=CC=C(C(O)=O)C(C(O)=O)=C1 IWXCYYWDGDDPAC-UHFFFAOYSA-N 0.000 claims description 2
- OMHOXRVODFQGCA-UHFFFAOYSA-N 4-[(4-amino-3,5-dimethylphenyl)methyl]-2,6-dimethylaniline Chemical compound CC1=C(N)C(C)=CC(CC=2C=C(C)C(N)=C(C)C=2)=C1 OMHOXRVODFQGCA-UHFFFAOYSA-N 0.000 claims description 2
- GEYAGBVEAJGCFB-UHFFFAOYSA-N 4-[2-(3,4-dicarboxyphenyl)propan-2-yl]phthalic acid Chemical compound C=1C=C(C(O)=O)C(C(O)=O)=CC=1C(C)(C)C1=CC=C(C(O)=O)C(C(O)=O)=C1 GEYAGBVEAJGCFB-UHFFFAOYSA-N 0.000 claims description 2
- JYZPDAUOQGFBKT-UHFFFAOYSA-N 4-[2-[2-[2-(3,4-dicarboxyphenoxy)phenyl]propan-2-yl]phenoxy]phthalic acid Chemical compound C=1C=CC=C(OC=2C=C(C(C(O)=O)=CC=2)C(O)=O)C=1C(C)(C)C1=CC=CC=C1OC1=CC=C(C(O)=O)C(C(O)=O)=C1 JYZPDAUOQGFBKT-UHFFFAOYSA-N 0.000 claims description 2
- GQUSLIBGUTZKJZ-UHFFFAOYSA-N 4-[3-(3,4-dicarboxyphenoxy)phenoxy]phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1OC1=CC=CC(OC=2C=C(C(C(O)=O)=CC=2)C(O)=O)=C1 GQUSLIBGUTZKJZ-UHFFFAOYSA-N 0.000 claims description 2
- XPAQFJJCWGSXGJ-UHFFFAOYSA-N 4-amino-n-(4-aminophenyl)benzamide Chemical compound C1=CC(N)=CC=C1NC(=O)C1=CC=C(N)C=C1 XPAQFJJCWGSXGJ-UHFFFAOYSA-N 0.000 claims description 2
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 claims description 2
- QQGYZOYWNCKGEK-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)oxy]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(OC=2C=C3C(=O)OC(C3=CC=2)=O)=C1 QQGYZOYWNCKGEK-UHFFFAOYSA-N 0.000 claims description 2
- ZHBXLZQQVCDGPA-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)sulfonyl]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(S(=O)(=O)C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 ZHBXLZQQVCDGPA-UHFFFAOYSA-N 0.000 claims description 2
- QHHKLPCQTTWFSS-UHFFFAOYSA-N 5-[2-(1,3-dioxo-2-benzofuran-5-yl)-1,1,1,3,3,3-hexafluoropropan-2-yl]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)(C(F)(F)F)C(F)(F)F)=C1 QHHKLPCQTTWFSS-UHFFFAOYSA-N 0.000 claims description 2
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims description 2
- DOBFTMLCEYUAQC-UHFFFAOYSA-N naphthalene-2,3,6,7-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C=C2C=C(C(O)=O)C(C(=O)O)=CC2=C1 DOBFTMLCEYUAQC-UHFFFAOYSA-N 0.000 claims description 2
- YTVNOVQHSGMMOV-UHFFFAOYSA-N naphthalenetetracarboxylic dianhydride Chemical compound C1=CC(C(=O)OC2=O)=C3C2=CC=C2C(=O)OC(=O)C1=C32 YTVNOVQHSGMMOV-UHFFFAOYSA-N 0.000 claims description 2
- 230000000379 polymerizing effect Effects 0.000 claims description 2
- OSFBJERFMQCEQY-UHFFFAOYSA-N propylidene Chemical group [CH]CC OSFBJERFMQCEQY-UHFFFAOYSA-N 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- HUWXDEQWWKGHRV-UHFFFAOYSA-N 3,3'-Dichlorobenzidine Chemical compound C1=C(Cl)C(N)=CC=C1C1=CC=C(N)C(Cl)=C1 HUWXDEQWWKGHRV-UHFFFAOYSA-N 0.000 claims 1
- NVKGJHAQGWCWDI-UHFFFAOYSA-N 4-[4-amino-2-(trifluoromethyl)phenyl]-3-(trifluoromethyl)aniline Chemical group FC(F)(F)C1=CC(N)=CC=C1C1=CC=C(N)C=C1C(F)(F)F NVKGJHAQGWCWDI-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 description 36
- 239000007789 gas Substances 0.000 description 31
- 230000000052 comparative effect Effects 0.000 description 28
- 230000008569 process Effects 0.000 description 13
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical compound CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 12
- 239000000945 filler Substances 0.000 description 12
- 238000005266 casting Methods 0.000 description 11
- 239000004642 Polyimide Substances 0.000 description 9
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- 239000003054 catalyst Substances 0.000 description 6
- 238000006358 imidation reaction Methods 0.000 description 5
- 125000005462 imide group Chemical group 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
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- 230000000704 physical effect Effects 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 238000007363 ring formation reaction Methods 0.000 description 3
- ITQTTZVARXURQS-UHFFFAOYSA-N 3-methylpyridine Chemical compound CC1=CC=CN=C1 ITQTTZVARXURQS-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- 206010067482 No adverse event Diseases 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 238000007792 addition Methods 0.000 description 2
- 150000001408 amides Chemical class 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000006297 dehydration reaction Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 230000009931 harmful effect Effects 0.000 description 2
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 239000002798 polar solvent Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- AURKDQJEOYBJSQ-UHFFFAOYSA-N 2-hydroxypropanoyl 2-hydroxypropanoate Chemical compound CC(O)C(=O)OC(=O)C(C)O AURKDQJEOYBJSQ-UHFFFAOYSA-N 0.000 description 1
- NBAUUNCGSMAPFM-UHFFFAOYSA-N 3-(3,4-dicarboxyphenyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C1=CC=CC(C(O)=O)=C1C(O)=O NBAUUNCGSMAPFM-UHFFFAOYSA-N 0.000 description 1
- LPDSNGAFAJYVKH-UHFFFAOYSA-N 4-(4-aminophenyl)-2,3-dichloroaniline Chemical compound C1=CC(N)=CC=C1C1=CC=C(N)C(Cl)=C1Cl LPDSNGAFAJYVKH-UHFFFAOYSA-N 0.000 description 1
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 1
- WXNZTHHGJRFXKQ-UHFFFAOYSA-N 4-chlorophenol Chemical compound OC1=CC=C(Cl)C=C1 WXNZTHHGJRFXKQ-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 1
- FUFJGUQYACFECW-UHFFFAOYSA-L calcium hydrogenphosphate Chemical compound [Ca+2].OP([O-])([O-])=O FUFJGUQYACFECW-UHFFFAOYSA-L 0.000 description 1
- 239000001506 calcium phosphate Substances 0.000 description 1
- 229910000389 calcium phosphate Inorganic materials 0.000 description 1
- 235000011010 calcium phosphates Nutrition 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
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- 230000003111 delayed effect Effects 0.000 description 1
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- 235000019700 dicalcium phosphate Nutrition 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
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- 150000002466 imines Chemical class 0.000 description 1
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- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- RTWNYYOXLSILQN-UHFFFAOYSA-N methanediamine Chemical compound NCN RTWNYYOXLSILQN-UHFFFAOYSA-N 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
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- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000013557 residual solvent Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- QORWJWZARLRLPR-UHFFFAOYSA-H tricalcium bis(phosphate) Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O QORWJWZARLRLPR-UHFFFAOYSA-H 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1003—Preparatory processes
- C08G73/1007—Preparatory processes from tetracarboxylic acids or derivatives and diamines
- C08G73/101—Preparatory processes from tetracarboxylic acids or derivatives and diamines containing chain terminating or branching agents
- C08G73/1014—Preparatory processes from tetracarboxylic acids or derivatives and diamines containing chain terminating or branching agents in the form of (mono)anhydrid
-
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Abstract
Description
도 2는 비교예 1에 따른 폴리이미드 필름의 표면을 촬영한 사진이다.
폴리아믹산 용액의 점도(V) (단위: cP) |
폴리아믹산의 수 평균 분자량(Mn) (단위: g/mole) |
폴리이미드 필름의 두께(T) (단위: ㎛) |
파라미터 A 값 | |
실시예 1 | 216,000 | 120,000 | 75 | 0.76 |
실시예 2 | 205,000 | 114,000 | 75 | 0.67 |
실시예 3 | 236,000 | 145,000 | 75 | 1.01 |
실시예 4 | 216,000 | 120,000 | 55 | 0.70 |
실시예 5 | 200,000 | 110,000 | 55 | 0.56 |
실시예 6 | 225,000 | 132,000 | 55 | 0.82 |
실시예 7 | 216,000 | 120,000 | 110 | 0.85 |
실시예 8 | 205,000 | 114,000 | 110 | 0.76 |
실시예 9 | 230,000 | 140,000 | 110 | 1.04 |
실시예 10 | 216,000 | 120,000 | 100 | 0.83 |
비교예 1 | 260,000 | 155,000 | 75 | 1.21 |
비교예 2 | 180,000 | 90,000 | 75 | 0.36 |
비교예 3 | 270,000 | 160,000 | 55 | 1.14 |
비교예 4 | 180,000 | 90,000 | 55 | 0.29 |
비교예 5 | 260,000 | 155,000 | 110 | 1.22 |
비교예 6 | 250,000 | 150,000 | 100 | 1.15 |
표면 결함 등급** | 모듈러스 (단위: GPa) |
신율 (단위:%) |
인장강도 (단위: MPa) |
|
실시예 1 | S | 3.65 | 79 | 27.2 |
실시예 2 | S | 3.50 | 82 | 27.0 |
실시예 3 | S | 3.55 | 76 | 27.4 |
실시예 4 | S | 3.64 | 82 | 28.3 |
실시예 5 | S | 3.64 | 87 | 27.8 |
실시예 6 | S | 3.63 | 88 | 28.0 |
실시예 7 | S | 3.43 | 89 | 25.9 |
실시예 8 | S | 3.40 | 88 | 26.1 |
실시예 9 | S | 3.39 | 91 | 26.1 |
실시예 10 | S | 3.45 | 91 | 26.2 |
비교예 1 | B | 3.51 | 78 | 27.4 |
비교예 2 | S | 2.82 | 65 | 22.8 |
비교예 3 | C | 3.54 | 80 | 28.5 |
비교예 4 | S | 2.89 | 62 | 23.2 |
비교예 5 | B | 3.44 | 89 | 26.3 |
비교예 6 | B | 3.42 | 88 | 26.7 |
Claims (17)
- 제1항에 있어서,
상기 폴리아믹산은 그것의 수 평균 분자량에 대한 중량 평균 분자량의 비(=Mw/Mn)가 1.5 내지 1.8인 폴리이미드 필름. - 제1항에 있어서,
상기 폴리아믹산은,
수 평균 분자량이 10,000 g/mole 내지 80,000 g/mole 인 제1 고분자 사슬;
수 평균 분자량이 80,000 g/mole 초과 내지 170,000 g/mole 이하인 제2 고분자 사슬; 및
수 평균 분자량이 170,000 g/mole 초과 400,000 g/mole 이하인 제3 고분자 사슬을 포함하는 폴리이미드 필름. - 제3항에 있어서,
상기 폴리아믹산의 총 중량을 기준으로,
상기 제1 고분자 사슬의 함량이 5 % 내지 20 %이고,
상기 제2 고분자 사슬의 함량이 70 % 내지 90 %이고,
상기 제3 고분자 사슬의 함량이 5 % 내지 10 %인 폴리이미드 필름. - 제1항에 있어서,
상기 폴리이미드 필름을 코로나 처리하고 접착제를 이용하여 테스트 시, 폴리이미드 필름의 접착력이 1,100 gf/mm 이상인 폴리이미드 필름. - 제1항에 있어서,
모듈러스가 3.3 Gpa 이상이고,
신율이 75 % 이상이며,
인장강도가 25 Mpa 이상이고,
10 cm * 10 cm의 면적 당 표면 결함 개수가 1개 이하인 폴리이미드 필름. - 제1항에 있어서,
상기 V는 215,000 cP 내지 245,000 cP이고, 상기 Mn은 110,000 g/mole 내지 140,000 g/mole이고, 상기 T는 65 ㎛ 내지 100 ㎛인 폴리이미드 필름. - 제1항에 있어서,
상기 파라미터 A가 0.5 내지 1.05를 만족하는 폴리이미드 필름. - 제1항에 있어서,
상기 파라미터 A가 0.6 내지 1.00을 만족하는 폴리이미드 필름. - 제1항에 있어서,
상기 폴리아믹산은 디안하이드라이드 단량체 및 디아민 단량체의 중합으로 제조되는 폴리이미드 필름. - 제10항에 있어서,
상기 디안하이드라이드 단량체는, 피로멜리틱 디안하이드라이드(또는 PMDA), 3,3',4,4'-바이페닐테트라카르복실릭 디안하이드라이드(또는 s-BPDA), 2,3,3',4'-바이페닐테트라카르복실릭 디안하이드라이드(또는 a-BPDA), 옥시디프탈릭 디안하이드라이드(또는 ODPA), 디페닐설폰-3,4,3',4'-테트라카르복실릭 디안하이드라이드(또는 DSDA), 비스(3,4-디카르복시페닐)설파이드 디안하이드라이드, 2,2-비스(3,4-디카르복시페닐)-1,1,1,3,3,3-헥사플루오로프로판 디안하이드라이드, 2,3,3',4'- 벤조페논테트라카르복실릭 디안하이드라이드, 3,3',4,4'-벤조페논테트라카르복실릭 디안하이드라이드(또는 BTDA), 비스(3,4-디카르복시페닐)메탄 디안하이드라이드, 2,2-비스(3,4-디카르복시페닐)프로판 디안하이드라이드, p-페닐렌비스(트라이멜리틱 모노에스터 애시드 안하이드라이드), p-바이페닐렌비스(트라이멜리틱 모노에스터 애시드 안하이드라이드), m-터페닐-3,4,3',4'-테트라카르복실릭 디안하이드라이드, p-터페닐-3,4,3',4'-테트라카르복실릭 디안하이드라이드, 1,3-비스(3,4-디카르복시페녹시)벤젠 디안하이드라이드, 1,4-비스(3,4-디카르복시페녹시)벤젠 디안하이드라이드, 1,4-비스(3,4-디카르복시페녹시)바이페닐 디안하이드라이드, 2,2-비스〔(3,4-디카르복시 페녹시)페닐〕프로판 디안하이드라이드(또는 BPADA), 2,3,6,7-나프탈렌테트라카복실산 디안하이드라이드, 1,4,5,8-나프탈렌테트라카르복실릭 디안하이드라이드 및 4,4'-(2,2-헥사플루오로아이소프로필리덴)디프탈산 디안하이드라이드로 이루어진 군에서 선택되는 적어도 1종인 폴리이미드 필름. - 제10항에 있어서,
상기 디아민 단량체는, 1,4-디아미노벤젠(또는 파라페닐렌디아민, PDA, PPD), 1,3-디아미노벤젠, 2,4-디아미노톨루엔, 2,6-디아미노톨루엔, 3,5-디아미노벤조익 애시드(또는 DABA), 4,4'-디아미노디페닐에테르(또는 옥시디아닐린, ODA), 3,4'-디아미노디페닐에테르, 4,4'-디아미노디페닐메탄(또는 4,4'-메틸렌디아민, MDA), 3,3'-디메틸-4,4'-디아미노바이페닐, 2,2'-디메틸-4,4'-디아미노바이페닐, 2,2'-비스(트라이플루오로메틸)-4,4'-디아미노바이페닐, 3,3'-디메틸-4,4'-디아미노디페닐메탄, 3,3'-디카르복시-4,4'-디아미노디페닐메탄, 3,3',5,5'-테트라메틸-4,4'-디아미노디페닐메탄, 비스(4-아미노페닐)설파이드, 4,4'-디아미노벤즈아닐라이드, 3,3'-디클로로벤지딘, 3,3'-디메틸벤지딘(또는 o-톨리딘) 및 2,2'-디메틸벤지딘(또는 m-톨리딘)으로 이루어진 군에서 선택되는 적어도 1종인 폴리이미드 필름. - 폴리이미드 필름을 제조하는 방법으로서,
(a) 적어도 1종의 성분을 포함하는 디안하이드라이드 단량체 및 적어도 1종의 성분을 포함하는 디아민 단량체를 유기용매 중에서 중합하여 폴리아믹산 용액을 제조하는 단계; 및
(b) 상기 폴리아믹산 용액을 이미드화하여 폴리이미드 필름을 수득하는 단계를 포함하고,
하기 파라미터 A가 0.4 내지 1.13을 만족하는 제조방법:
여기서, V는 상기 폴리아믹산 용액의 점도로서 고형분 함량이 18.5 중량%일 때 23 ℃에서 측정한 점도가 200,000 cP 내지 250,000 cP이고, Mn은 상기 폴리아믹산 용액에 용해되어 있는 폴리아믹산의 수 평균 분자량으로서 100,000 g/mole 내지 150,000 g/mole 이고, T는 상기 폴리이미드 필름의 두께로서 50 ㎛ 내지 110 ㎛이다. - 제13항에 있어서,
상기 (a) 단계에서, 디안하이드라이드 단량체 또는 디아민 단량체에서 선택된 1종의 성분을 2회 이상 분할 투입하여 점도를 조절하는 제조방법. - 제14항에 있어서,
상기 분할 투입되는 단량체의 총 투입량은, 나머지 단량체의 총 투입량 대비 98.8 몰% 내지 99.3 몰%인 제조방법. - 제13항에 있어서,
상기 (b) 단계는,
(b-1) 상기 폴리아믹산 용액에, 탈수제 및 이미드화제를 혼합하여 제막 조성물을 제조하는 단계;
(b-2) 상기 제막 조성물을 기재상에 제막하고 50 내지 150℃로 제1 열처리하여 필름 중간체를 제조하는 단계; 및
(b-3) 상기 필름 중간체를 200 내지 600℃로 제2 열처리하는 단계를 포함하는 제조방법. - 제1항에 따른 폴리이미드 필름을 절연 필름으로서 포함하는 전자부품.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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KR1020180125122A KR102200961B1 (ko) | 2018-10-19 | 2018-10-19 | 표면 품질이 개선된 고후도 폴리이미드 필름 및 이의 제조방법 |
JP2021520112A JP7148717B2 (ja) | 2018-10-19 | 2018-11-22 | 表面品質が改善された高厚度ポリイミドフィルムおよびその製造方法 |
US17/276,188 US11945922B2 (en) | 2018-10-19 | 2018-11-22 | Thick polyimide film having improved surface quality and method of manufacturing same |
PCT/KR2018/014445 WO2020080598A1 (ko) | 2018-10-19 | 2018-11-22 | 표면 품질이 개선된 고후도 폴리이미드 필름 및 이의 제조방법 |
CN201880098774.9A CN112867753B (zh) | 2018-10-19 | 2018-11-22 | 具有改善的表面质量的厚聚酰亚胺膜及其制造方法 |
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KR20200044404A (ko) | 2020-04-29 |
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