KR101483876B1 - 인덕터 소자 및 이의 제조방법 - Google Patents
인덕터 소자 및 이의 제조방법 Download PDFInfo
- Publication number
- KR101483876B1 KR101483876B1 KR20130096645A KR20130096645A KR101483876B1 KR 101483876 B1 KR101483876 B1 KR 101483876B1 KR 20130096645 A KR20130096645 A KR 20130096645A KR 20130096645 A KR20130096645 A KR 20130096645A KR 101483876 B1 KR101483876 B1 KR 101483876B1
- Authority
- KR
- South Korea
- Prior art keywords
- plating layer
- opening
- layer
- width
- plating
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title description 7
- 238000007747 plating Methods 0.000 claims abstract description 132
- 238000000034 method Methods 0.000 claims description 45
- 239000000654 additive Substances 0.000 claims description 12
- 230000000996 additive effect Effects 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 239000000945 filler Substances 0.000 claims description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 3
- 238000009713 electroplating Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910007565 Zn—Cu Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
- C25D5/022—Electroplating of selected surface areas using masking means
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Coils Or Transformers For Communication (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20130096645A KR101483876B1 (ko) | 2013-08-14 | 2013-08-14 | 인덕터 소자 및 이의 제조방법 |
| JP2013262916A JP6120764B2 (ja) | 2013-08-14 | 2013-12-19 | インダクタ素子及びその製造方法 |
| US14/459,963 US20150048920A1 (en) | 2013-08-14 | 2014-08-14 | Inductor element and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20130096645A KR101483876B1 (ko) | 2013-08-14 | 2013-08-14 | 인덕터 소자 및 이의 제조방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR101483876B1 true KR101483876B1 (ko) | 2015-01-16 |
Family
ID=52466441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR20130096645A KR101483876B1 (ko) | 2013-08-14 | 2013-08-14 | 인덕터 소자 및 이의 제조방법 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20150048920A1 (ja) |
| JP (1) | JP6120764B2 (ja) |
| KR (1) | KR101483876B1 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190044980A (ko) * | 2017-10-23 | 2019-05-02 | 삼성전기주식회사 | 코일 부품 |
| KR102029586B1 (ko) * | 2018-05-28 | 2019-10-07 | 삼성전기주식회사 | 코일 전자부품 |
| KR20240101082A (ko) | 2022-12-23 | 2024-07-02 | 삼성전기주식회사 | 코일 부품 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6447368B2 (ja) * | 2015-05-29 | 2019-01-09 | Tdk株式会社 | コイル部品 |
| KR20170112522A (ko) * | 2016-03-31 | 2017-10-12 | 주식회사 모다이노칩 | 코일 패턴 및 그 형성 방법, 이를 구비하는 칩 소자 |
| JP6767274B2 (ja) * | 2017-02-01 | 2020-10-14 | 新光電気工業株式会社 | インダクタ装置及びその製造方法 |
| KR102511870B1 (ko) * | 2017-12-15 | 2023-03-20 | 삼성전기주식회사 | 인덕터 |
| KR102069632B1 (ko) * | 2018-02-22 | 2020-01-23 | 삼성전기주식회사 | 인덕터 |
| KR20200069803A (ko) * | 2018-12-07 | 2020-06-17 | 삼성전기주식회사 | 코일 전자 부품 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002324962A (ja) | 2001-02-21 | 2002-11-08 | Toppan Printing Co Ltd | インダクタ内蔵のプリント配線板及びその製造方法 |
| KR20030020603A (ko) * | 2001-09-04 | 2003-03-10 | 한국전기연구원 | 저손실 박막 인덕터의 제조방법 |
| JP2003318053A (ja) | 2002-04-25 | 2003-11-07 | Jfe Steel Kk | 平面磁気素子の製造方法 |
| JP2006253372A (ja) | 2005-03-10 | 2006-09-21 | Matsushita Electric Ind Co Ltd | 多層プリント配線基板とその製造方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10241983A (ja) * | 1997-02-26 | 1998-09-11 | Toshiba Corp | 平面インダクタ素子とその製造方法 |
| US6245670B1 (en) * | 1999-02-19 | 2001-06-12 | Advanced Micro Devices, Inc. | Method for filling a dual damascene opening having high aspect ratio to minimize electromigration failure |
| KR100324209B1 (ko) * | 2000-01-28 | 2002-02-16 | 오길록 | 은을 이용한 인덕터 제조 방법 |
| US7394043B2 (en) * | 2002-04-24 | 2008-07-01 | Sumitomo Electric Industries, Ltd. | Ceramic susceptor |
| JP3874268B2 (ja) * | 2002-07-24 | 2007-01-31 | Ｔｄｋ株式会社 | パターン化薄膜およびその形成方法 |
| JP4191506B2 (ja) * | 2003-02-21 | 2008-12-03 | Ｔｄｋ株式会社 | 高密度インダクタおよびその製造方法 |
| US6903644B2 (en) * | 2003-07-28 | 2005-06-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Inductor device having improved quality factor |
| KR100547360B1 (ko) * | 2003-09-16 | 2006-01-26 | 삼성전기주식회사 | 권선 코일이 일체화된 보빈, 이를 채용한 광픽업액추에이터 및 그 제조 방법 |
| KR100689665B1 (ko) * | 2003-11-06 | 2007-03-08 | 삼성전자주식회사 | 시스템 온 칩용 인덕터의 제조 방법 |
| JP2005191408A (ja) * | 2003-12-26 | 2005-07-14 | Matsushita Electric Ind Co Ltd | コイル導電体とその製造方法およびこれを用いた電子部品 |
| KR100688744B1 (ko) * | 2004-11-15 | 2007-02-28 | 삼성전기주식회사 | 고밀도 인쇄회로기판 및 이의 제조방법 |
| JP4518013B2 (ja) * | 2005-12-14 | 2010-08-04 | Ｔｄｋ株式会社 | 電子部品 |
| JP4806265B2 (ja) * | 2006-01-27 | 2011-11-02 | 株式会社沖データ | 交換ユニット及び画像形成装置 |
| JP2008010783A (ja) * | 2006-06-30 | 2008-01-17 | Tdk Corp | 薄膜デバイス |
-
2013
- 2013-08-14 KR KR20130096645A patent/KR101483876B1/ko active IP Right Grant
- 2013-12-19 JP JP2013262916A patent/JP6120764B2/ja active Active
-
2014
- 2014-08-14 US US14/459,963 patent/US20150048920A1/en not_active Abandoned
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002324962A (ja) | 2001-02-21 | 2002-11-08 | Toppan Printing Co Ltd | インダクタ内蔵のプリント配線板及びその製造方法 |
| KR20030020603A (ko) * | 2001-09-04 | 2003-03-10 | 한국전기연구원 | 저손실 박막 인덕터의 제조방법 |
| JP2003318053A (ja) | 2002-04-25 | 2003-11-07 | Jfe Steel Kk | 平面磁気素子の製造方法 |
| JP2006253372A (ja) | 2005-03-10 | 2006-09-21 | Matsushita Electric Ind Co Ltd | 多層プリント配線基板とその製造方法 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190044980A (ko) * | 2017-10-23 | 2019-05-02 | 삼성전기주식회사 | 코일 부품 |
| KR102016494B1 (ko) * | 2017-10-23 | 2019-09-02 | 삼성전기주식회사 | 코일 부품 |
| US11017926B2 (en) | 2017-10-23 | 2021-05-25 | Samsung Electro-Mechanics Co., Ltd. | Coil component |
| KR102029586B1 (ko) * | 2018-05-28 | 2019-10-07 | 삼성전기주식회사 | 코일 전자부품 |
| KR20240101082A (ko) | 2022-12-23 | 2024-07-02 | 삼성전기주식회사 | 코일 부품 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20150048920A1 (en) | 2015-02-19 |
| JP6120764B2 (ja) | 2017-04-26 |
| JP2015037179A (ja) | 2015-02-23 |
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| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
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