JPWO2015033463A1 - 半導体装置およびその製造方法、電力変換装置、3相モータシステム、自動車、ならびに鉄道車両 - Google Patents
半導体装置およびその製造方法、電力変換装置、3相モータシステム、自動車、ならびに鉄道車両 Download PDFInfo
- Publication number
- JPWO2015033463A1 JPWO2015033463A1 JP2015535257A JP2015535257A JPWO2015033463A1 JP WO2015033463 A1 JPWO2015033463 A1 JP WO2015033463A1 JP 2015535257 A JP2015535257 A JP 2015535257A JP 2015535257 A JP2015535257 A JP 2015535257A JP WO2015033463 A1 JPWO2015033463 A1 JP WO2015033463A1
- Authority
- JP
- Japan
- Prior art keywords
- region
- semiconductor device
- semiconductor
- type
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 120
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 238000006243 chemical reaction Methods 0.000 title claims description 9
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 53
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 53
- 238000000034 method Methods 0.000 claims abstract description 21
- 239000012535 impurity Substances 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 23
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 22
- 229910052782 aluminium Inorganic materials 0.000 claims description 22
- 230000002093 peripheral effect Effects 0.000 abstract description 13
- 230000009467 reduction Effects 0.000 abstract description 2
- 230000015556 catabolic process Effects 0.000 description 27
- 238000010586 diagram Methods 0.000 description 14
- 239000000463 material Substances 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- 238000002513 implantation Methods 0.000 description 7
- 230000005684 electric field Effects 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009499 grossing Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 208000025174 PANDAS Diseases 0.000 description 1
- 208000021155 Paediatric autoimmune neuropsychiatric disorders associated with streptococcal infection Diseases 0.000 description 1
- 240000000220 Panda oleosa Species 0.000 description 1
- 235000016496 Panda oleosa Nutrition 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
- B60L50/00—Electric propulsion with power supplied within the vehicle
- B60L50/50—Electric propulsion with power supplied within the vehicle using propulsion power supplied by batteries or fuel cells
- B60L50/51—Electric propulsion with power supplied within the vehicle using propulsion power supplied by batteries or fuel cells characterised by AC-motors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/36—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/6606—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/8611—Planar PN junction diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P27/00—Arrangements or methods for the control of AC motors characterised by the kind of supply voltage
- H02P27/04—Arrangements or methods for the control of AC motors characterised by the kind of supply voltage using variable-frequency supply voltage, e.g. inverter or converter supply voltage
- H02P27/06—Arrangements or methods for the control of AC motors characterised by the kind of supply voltage using variable-frequency supply voltage, e.g. inverter or converter supply voltage using dc to ac converters or inverters
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/60—Other road transportation technologies with climate change mitigation effect
- Y02T10/70—Energy storage systems for electromobility, e.g. batteries
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Transportation (AREA)
- Mechanical Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Inverter Devices (AREA)
Abstract
Description
Ni=[NHai+NL(P−ai)]/P
で表される。
Ni+1=[NHai+1+NL(P−ai+1)]/P
で表される。
S=(Ni−Ni+1)/P
=(ai−ai+1)(NH−NL)/P2
と求められる。
まず、図8に示すように、炭化ケイ素を主に含むn型の基板11を準備する。続いて、基板11の表面に炭化ケイ素からなるエピタキシャル層10をエピタキシャル成長法により形成する。エピタキシャル層10はドリフト層12として利用することができる。基板11およびエピタキシャル層10はn型不純物(例えば窒素)を含んでおり、基板11の不純物濃度はエピタキシャル層10の不純物濃度よりも高い。
次に、図9に示すように、エピタキシャル層10の上面にマスク材料層RP1を形成し、マスク材料層RP1から露出するエピタキシャル層10の上面にp型不純物(例えばアルミニウム)をイオン注入することにより、エピタキシャル層10の上面にp型の低濃度領域18を形成する。低濃度領域18のp型不純物(例えばアルミニウム)の濃度は、例えば2×1017cm−3、注入深さは、例えば0.8μmである。
次に、図10に示すように、マスク材料層RP1を除去した後、エピタキシャル層10の上面にマスク材料層RP2を形成し、マスク材料層RP2から露出するエピタキシャル層10の上面にp型不純物(例えばアルミニウム)をイオン注入することにより、エピタキシャル層10の上面にp型領域20、高濃度領域17、および中濃度領域19を形成する。この際、p型不純物(例えばアルミニウム)のイオン注入は、仮にイオン注入を行っていない領域に行ったとしたら、p型不純物(例えばアルミニウム)の濃度が、例えば4×1017cm−3、注入深さが、例えば0.8μmとなる条件で行う。
次に、図11に示すように、マスク材料層RP2を除去した後、エピタキシャル層10の上面にマスク材料層RP3を形成し、マスク材料層RP3から露出するエピタキシャル層10の上面にp型不純物(例えばアルミニウム)をイオン注入することにより、エピタキシャル層10の上面の中央領域にp型領域13を形成する。p型領域13のp型不純物(例えばアルミニウム)の濃度は、例えば2×1019cm−3、注入深さは、例えば0.8μmである。
次に、マスク材料層RP3を除去した後、アニールを行い、イオン注入した不純物の活性化を行う。これにより、エピタキシャル層10の上面の中央領域にp型領域13とドリフト層12とから構成される炭化ケイ素pnダイオードが形成され、その周囲に高濃度領域17、中濃度領域19、および低濃度領域18から構成されるJTE16が形成される。
次に、図12に示すように、p型領域13の上面にアノード電極15を、例えばスパッタリング法などにより形成する。続いて、アノード電極15の上面を露出するようにエピタキシャル層10の上面に絶縁膜(図示は省略)を形成する。
次に、図13に示すように、基板11の裏面にカソード電極14を、例えばスパッタリング法などにより形成する。
2 インバータ
3 制御回路
4 スイッチング素子
5 ダイオード
7 コンバータ
8 キャパシタ
9 トランス
10 エピタキシャル層
11 基板
12 ドリフト層
13 p型領域
14 カソード電極
15 アノード電極
16 JTE
17 高濃度領域
18 低濃度領域
19 中濃度領域
20 p型領域
21 基板
22 ドリフト層
23 p型領域
24 カソード電極
25 アノード電極
26 JTE
27 高濃度領域
28 低濃度領域
30 p型領域
101a,101b 駆動輪
102 駆動軸
103 3相モータ
104 インバータ
105 バッテリ
106,107 電力ライン
108 昇圧コンバータ
109 リレー
110 電子制御ユニット
111 リアクトル
112 平滑用コンデンサ
113 インバータ
114 スイッチング素子
115 ダイオード
AR1 第1の領域
AR2 第2の領域
AR3 第3の領域
IF 絶縁膜
L1,L2,L3 幅
OW 架線
PG パンダグラフ
RP1,RP2,RP3 マスク材料層
RT 線路
S 濃度勾配
S1 第1の濃度勾配
S2 第2の濃度勾配
S3 第3の濃度勾配
WH 車輪
Claims (15)
- 半導体基板と、
前記半導体基板の表面に形成されたn型の半導体層と、
前記半導体層の上面側に形成された接合終端部と、
を備える半導体装置であって、
前記接合終端部は、
p型の第1領域と、
前記第1領域よりも前記半導体基板の端部側に設けられたp型の第2領域と、
を備え、
前記第1領域は、第1濃度勾配を有し、
前記第2領域は、前記第1濃度勾配よりも大きい第2濃度勾配を有する、半導体装置。 - 請求項1記載の半導体装置において、
前記第1濃度勾配が、1.6×1015cm−3/μm以下であり、
前記第2濃度勾配が、1.6×1015cm−3/μmよりも大きく、6.3×1015cm−3/μm以下である、半導体装置。 - 請求項1記載の半導体装置において、
前記半導体層は、炭化ケイ素である、半導体装置。 - 請求項1記載の半導体装置において、
前記第1領域および前記第2領域は、アルミニウムを含有する、半導体装置。 - 請求項1記載の半導体装置において、
前記接合終端部は、
前記第2領域よりも前記半導体基板の端部側に設けられたp型の第3領域、を備え、
前記第3領域は、前記第2濃度勾配よりも小さい第3濃度勾配を有する、半導体装置。 - 請求項5記載の半導体装置において、
前記第1濃度勾配および前記第3濃度勾配が、1.6×1015cm−3/μm以下であり、
前記第2濃度勾配が、1.6×1015cm−3/μmよりも大きく、6.3×1015cm−3/μm以下である、半導体装置。 - 半導体基板と、
前記半導体基板の表面に形成されたn型の半導体層と、
前記半導体層の上面側に形成された接合終端部と、
を備える半導体装置であって、
前記接合終端部は、
第1不純物濃度を有するp型の第1半導体領域と、
前記第1不純物濃度よりも低い第2不純物濃度を有するp型の第2半導体領域と、
前記第2不純物濃度よりも低い第3不純物濃度を有するp型の第3半導体領域と、
を備え、
第1領域において、前記第2半導体領域が前記第1半導体領域に挟まれ、
前記第1領域よりも前記半導体基板の端部側に設けられた第2領域において、前記第3半導体領域が前記第1半導体領域に挟まれている、半導体装置。 - 請求項7記載の半導体装置において、
前記半導体層は、炭化ケイ素である、半導体装置。 - 請求項7記載の半導体装置において、
前記第1半導体領域、前記第2半導体領域、および前記第3半導体領域は、アルミニウムを含有する、半導体装置。 - (a)半導体基板の表面にn型の半導体層を形成する工程と、
(b)前記半導体層の上面側に、第1濃度勾配を有するp型の第1領域と、第2濃度勾配を有するp型の第2領域とが、前記半導体基板の端部に向かって順に配置される接合終端部を形成する工程と、
を含む半導体装置の製造方法において、
前記(b)工程は、
(b1)前記第1領域の一部、および前記第2領域に、p型の第1不純物をイオン注入する工程と、
(b2)前記第1領域、および前記第2領域の一部に、p型の第2不純物をイオン注入する工程と、
を含み、
前記第1領域には、前記第1不純物と前記第2不純物とが重畳してイオン注入された第1不純物領域、および前記第2不純物のみがイオン注入された第2不純物領域が形成され、
前記第2領域には、前記第1不純物と前記第2不純物とが重畳してイオン注入された第3不純物領域、および前記第1不純物のみがイオン注入された第4不純物領域が形成される、半導体装置の製造方法。 - 請求項10記載の半導体装置の製造方法において、
前記第1濃度勾配が、1.6×1015cm−3/μm以下であり、
前記第2濃度勾配が、1.6×1015cm−3/μmよりも大きく、6.3×1015cm−3/μm以下である、半導体装置の製造方法。 - 請求項1記載の半導体装置を備える、電力変換装置。
- 請求項12記載の電力変換装置を備える、3相モータシステム。
- 請求項13記載の3相モータシステムを備える、自動車。
- 請求項13記載の3相モータシステムを備える、鉄道車両。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2013/074222 WO2015033463A1 (ja) | 2013-09-09 | 2013-09-09 | 半導体装置およびその製造方法、電力変換装置、3相モータシステム、自動車、ならびに鉄道車両 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2015033463A1 true JPWO2015033463A1 (ja) | 2017-03-02 |
JP6236456B2 JP6236456B2 (ja) | 2017-11-22 |
Family
ID=52627968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015535257A Active JP6236456B2 (ja) | 2013-09-09 | 2013-09-09 | 半導体装置およびその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9711600B2 (ja) |
EP (1) | EP3046149B1 (ja) |
JP (1) | JP6236456B2 (ja) |
CN (1) | CN105493293B (ja) |
WO (1) | WO2015033463A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016103814A1 (ja) * | 2014-12-25 | 2016-06-30 | 富士電機株式会社 | 半導体装置 |
JP6523886B2 (ja) * | 2015-09-11 | 2019-06-05 | 株式会社東芝 | 半導体装置 |
JP6787690B2 (ja) * | 2016-05-19 | 2020-11-18 | ローム株式会社 | 高速ダイオード及びその製造方法 |
WO2018012159A1 (ja) * | 2016-07-15 | 2018-01-18 | 富士電機株式会社 | 炭化珪素半導体装置 |
JP6798377B2 (ja) * | 2017-03-17 | 2020-12-09 | 富士電機株式会社 | 半導体集積回路装置 |
JP2019054170A (ja) * | 2017-09-15 | 2019-04-04 | 株式会社東芝 | 半導体装置 |
CN107910379A (zh) * | 2017-11-22 | 2018-04-13 | 北京燕东微电子有限公司 | 一种SiC结势垒肖特基二极管及其制作方法 |
WO2019159237A1 (ja) | 2018-02-13 | 2019-08-22 | 新電元工業株式会社 | 半導体装置及び半導体装置の製造方法 |
US10937869B2 (en) * | 2018-09-28 | 2021-03-02 | General Electric Company | Systems and methods of masking during high-energy implantation when fabricating wide band gap semiconductor devices |
CN111211157A (zh) * | 2018-11-21 | 2020-05-29 | 深圳比亚迪微电子有限公司 | 快恢复二极管及其制备方法 |
CN114342209A (zh) | 2019-09-13 | 2022-04-12 | 米沃奇电动工具公司 | 具有宽带隙半导体的功率转换器 |
US20220157951A1 (en) * | 2020-11-17 | 2022-05-19 | Hamza Yilmaz | High voltage edge termination structure for power semicondcutor devices and manufacturing method thereof |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010267783A (ja) * | 2009-05-14 | 2010-11-25 | Mitsubishi Electric Corp | 炭化珪素半導体装置の製造方法 |
JP2012195519A (ja) * | 2011-03-18 | 2012-10-11 | Kyoto Univ | 半導体素子及び半導体素子の製造方法 |
JP2012527117A (ja) * | 2009-05-12 | 2012-11-01 | クリー インコーポレイテッド | シリコンカーバイドデバイス用の拡散接合終端構造及びこれを組み込むシリコンカーバイドデバイスの製造方法 |
WO2013136550A1 (ja) * | 2012-03-16 | 2013-09-19 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
WO2014045480A1 (ja) * | 2012-09-21 | 2014-03-27 | 三菱電機株式会社 | 半導体装置及び半導体装置の製造方法 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6393153A (ja) * | 1986-10-07 | 1988-04-23 | Toshiba Corp | 半導体装置の製造方法 |
JP3171888B2 (ja) | 1991-10-25 | 2001-06-04 | 松下電工株式会社 | シャフト盤 |
US6002159A (en) * | 1996-07-16 | 1999-12-14 | Abb Research Ltd. | SiC semiconductor device comprising a pn junction with a voltage absorbing edge |
JP4562835B2 (ja) * | 1999-11-05 | 2010-10-13 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP5088993B2 (ja) * | 2001-02-16 | 2012-12-05 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US7589032B2 (en) * | 2001-09-10 | 2009-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment |
US7026650B2 (en) | 2003-01-15 | 2006-04-11 | Cree, Inc. | Multiple floating guard ring edge termination for silicon carbide devices |
JP2005079339A (ja) * | 2003-08-29 | 2005-03-24 | National Institute Of Advanced Industrial & Technology | 半導体装置、およびその半導体装置を用いた電力変換器、駆動用インバータ、汎用インバータ、大電力高周波通信機器 |
JP4186919B2 (ja) * | 2004-12-07 | 2008-11-26 | 三菱電機株式会社 | 半導体装置 |
US20060194400A1 (en) * | 2005-01-21 | 2006-08-31 | Cooper James A | Method for fabricating a semiconductor device |
US7498633B2 (en) * | 2005-01-21 | 2009-03-03 | Purdue Research Foundation | High-voltage power semiconductor device |
JP2008103529A (ja) | 2006-10-19 | 2008-05-01 | Toyota Central R&D Labs Inc | 半導体装置 |
JP4286877B2 (ja) * | 2007-03-13 | 2009-07-01 | Okiセミコンダクタ株式会社 | 炭化珪素半導体装置およびその製造方法 |
JP5452062B2 (ja) * | 2009-04-08 | 2014-03-26 | 三菱電機株式会社 | 炭化珪素半導体装置の製造方法 |
JP5601849B2 (ja) | 2010-02-09 | 2014-10-08 | 三菱電機株式会社 | 炭化珪素半導体装置の製造方法 |
KR102344452B1 (ko) * | 2010-04-23 | 2021-12-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
CN103125024B (zh) * | 2010-10-15 | 2016-04-13 | 三菱电机株式会社 | 半导体装置及其制造方法 |
JP2012094683A (ja) * | 2010-10-27 | 2012-05-17 | National Institute Of Advanced Industrial & Technology | ワイドバンドギャップ半導体装置 |
JP5697744B2 (ja) * | 2011-04-04 | 2015-04-08 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
KR101916223B1 (ko) * | 2012-04-13 | 2018-11-07 | 삼성전자 주식회사 | 반도체 장치 및 그 제조 방법 |
JP6029397B2 (ja) * | 2012-09-14 | 2016-11-24 | 三菱電機株式会社 | 炭化珪素半導体装置 |
CN105027288B (zh) * | 2013-03-25 | 2018-09-18 | 新电元工业株式会社 | 半导体元件 |
-
2013
- 2013-09-09 EP EP13892962.5A patent/EP3046149B1/en active Active
- 2013-09-09 JP JP2015535257A patent/JP6236456B2/ja active Active
- 2013-09-09 US US14/916,801 patent/US9711600B2/en active Active
- 2013-09-09 CN CN201380079101.6A patent/CN105493293B/zh active Active
- 2013-09-09 WO PCT/JP2013/074222 patent/WO2015033463A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012527117A (ja) * | 2009-05-12 | 2012-11-01 | クリー インコーポレイテッド | シリコンカーバイドデバイス用の拡散接合終端構造及びこれを組み込むシリコンカーバイドデバイスの製造方法 |
JP2010267783A (ja) * | 2009-05-14 | 2010-11-25 | Mitsubishi Electric Corp | 炭化珪素半導体装置の製造方法 |
JP2012195519A (ja) * | 2011-03-18 | 2012-10-11 | Kyoto Univ | 半導体素子及び半導体素子の製造方法 |
WO2013136550A1 (ja) * | 2012-03-16 | 2013-09-19 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
WO2014045480A1 (ja) * | 2012-09-21 | 2014-03-27 | 三菱電機株式会社 | 半導体装置及び半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP6236456B2 (ja) | 2017-11-22 |
US9711600B2 (en) | 2017-07-18 |
EP3046149A4 (en) | 2017-04-12 |
US20160218187A1 (en) | 2016-07-28 |
CN105493293A (zh) | 2016-04-13 |
WO2015033463A1 (ja) | 2015-03-12 |
CN105493293B (zh) | 2018-08-24 |
EP3046149A1 (en) | 2016-07-20 |
EP3046149B1 (en) | 2019-08-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6236456B2 (ja) | 半導体装置およびその製造方法 | |
JP6309656B2 (ja) | 半導体装置及びその製造方法、電力変換装置、3相モータシステム、自動車並びに鉄道車両 | |
JP6336055B2 (ja) | 半導体装置、半導体装置の製造方法、電力変換装置、3相モータシステム、自動車、および鉄道車両 | |
JP6290457B2 (ja) | 半導体装置及びその製造方法、電力変換装置、3相モータシステム、自動車、並びに鉄道車両 | |
JP2017201644A (ja) | ダイオード、およびそれを用いた電力変換装置 | |
JP6255111B2 (ja) | 半導体装置、インバータモジュール、インバータ、鉄道車両、および半導体装置の製造方法 | |
JP6283122B2 (ja) | 半導体スイッチング素子および炭化珪素半導体装置の製造方法 | |
US10236370B2 (en) | Semiconductor device and method of manufacturing the same, power converter, three-phase motor system, automobile and railway vehicle | |
WO2016002057A1 (ja) | 半導体装置、パワーモジュール、電力変換装置、3相モータシステム、自動車、並びに鉄道車両 | |
JP2019125760A (ja) | 炭化ケイ素半導体装置およびその製造方法、電力変換装置、自動車並びに鉄道車両 | |
US20190115465A1 (en) | Silicon carbide semiconductor device, power module, and power conversion device | |
JP2018037621A (ja) | 半導体装置およびその製造方法、電力変換装置 | |
JP2020038944A (ja) | 半導体装置およびその製造方法、電力変換装置、3相モータシステム、自動車並びに鉄道車両 | |
JP6592119B2 (ja) | 半導体スイッチング素子および炭化珪素半導体装置の製造方法 | |
JP6556892B2 (ja) | 半導体装置、半導体装置の製造方法、電力変換装置、3相モータシステム、自動車、および鉄道車両 | |
WO2020137124A1 (ja) | 炭化ケイ素半導体装置、電力変換装置、3相モータシステム、自動車および鉄道車両 | |
JP2017108030A (ja) | 半導体装置およびその製造方法、パワーモジュール、電力変換装置、自動車並びに鉄道車両 | |
JP6473073B2 (ja) | 半導体装置、パワーモジュール、電力変換装置、自動車および鉄道車両 | |
JP2019207906A (ja) | 半導体装置及びその製造方法、電力変換装置、3相モータシステム、自動車、並びに鉄道車両 | |
WO2015193965A1 (ja) | 半導体装置、パワーモジュール、電力変換装置、鉄道車両、および半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170307 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170421 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20170704 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170920 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20171002 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20171024 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20171030 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6236456 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |