JPS6251415B2 - - Google Patents
Info
- Publication number
- JPS6251415B2 JPS6251415B2 JP22643383A JP22643383A JPS6251415B2 JP S6251415 B2 JPS6251415 B2 JP S6251415B2 JP 22643383 A JP22643383 A JP 22643383A JP 22643383 A JP22643383 A JP 22643383A JP S6251415 B2 JPS6251415 B2 JP S6251415B2
- Authority
- JP
- Japan
- Prior art keywords
- load
- sample
- lever
- indenter
- electromagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
- G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Description
【発明の詳細な説明】
(イ) 産業上の利用分野
この発明は、圧子によつて試料台の試料にくぼ
みを生じさせ、試料の硬度を求める硬度計に関す
るものである。[Detailed Description of the Invention] (a) Field of Industrial Application This invention relates to a hardness meter that measures the hardness of a sample by creating a depression in the sample on a sample stage using an indenter.
(ロ) 従来技術
試料の硬度を求めるには、圧子によつて試料台
の試料にくぼみを生じさせればよい。そして、く
ぼみの表面積を算出すると、圧子に加えた荷重と
くぼみの表面積によつて試料の硬度を求めること
ができる。この種の硬度計において、小さい荷重
に対する試料の硬度を求めるには、圧子に加える
荷重の精度を高くする必要がある。従来は、圧子
に加える荷重の精度が低く、小さい荷重に対する
試料の硬度を求めることはできなかつた。普通の
硬度計は、10gf程度の荷重に対する試料の硬度を
求めることができるだけである。最も精度の高い
硬度計でも10mgf程度の荷重が限界であつた。し
かしながら、最近、種々の材料が開発され、
10mgf以下の荷重に対する試料の硬度を求めるこ
とが要求されている。(b) Prior Art To determine the hardness of a sample, it is sufficient to create a depression in the sample on the sample stage using an indenter. Then, by calculating the surface area of the depression, the hardness of the sample can be determined from the load applied to the indenter and the surface area of the depression. In this type of hardness meter, in order to determine the hardness of a sample under a small load, it is necessary to increase the accuracy of the load applied to the indenter. Conventionally, the accuracy of the load applied to the indenter was low, and it was not possible to determine the hardness of the sample under small loads. An ordinary hardness tester can only measure the hardness of a sample under a load of about 10 gf. Even with the most accurate hardness tester, a load of about 10 mgf was the limit. However, recently, various materials have been developed,
It is required to determine the hardness of the sample under a load of 10 mgf or less.
(ハ) 目的
したがつて、この発明は、圧子によつて試料台
の試料にくぼみを生じさせる硬度計において、圧
子に加える荷重の精度を高くし、前記従来の要求
に応じることを目的としてなされたものである。(C) Purpose Therefore, the present invention has been made with the aim of meeting the above-mentioned conventional requirements by increasing the accuracy of the load applied to the indenter in a hardness tester that uses an indenter to create an indentation in a sample on a sample stage. It is something that
(ニ) 構成
この発明は、コイルの電磁力によつて荷重を加
える電磁式負荷装置と、コイルの電磁力によつて
荷重を平衡させる電磁式平衡装置と、一対のレバ
ーを組み合わせ、圧子に加える荷重の精度を高く
し、10mgf以下の小さい荷重に対する試料の硬度
を求めることに成功したものである。この発明
は、一対のレバーをそれぞれ支点のまわりに揺動
可能に支持し、一方のレバーの作用点に圧子を設
け、この一方のレバーの力点を電磁式負荷装置に
連結し、負荷装置の荷重を一方のレバーによつて
縮小し、圧子に伝達する。これによつて圧子に荷
重を加える。そして、他方のレバーの力点に試料
台を設け、この他方のレバーの作用点を電磁式平
衡装置に連結し、圧子に加えられる荷重、すなわ
ち試料台の試料が受ける荷重を他方のレバーによ
つて拡大し、電磁式平衡装置に伝達する。さら
に、電磁式平衡装置を電磁式負荷装置に接続し、
電磁式平衡装置によつて試料の荷重を検出し、電
磁式負荷装置をフイードバツク制御するようにし
たことを特徴とするものである。(D) Configuration This invention combines an electromagnetic load device that applies a load using the electromagnetic force of a coil, an electromagnetic balance device that balances the load using the electromagnetic force of the coil, and a pair of levers to apply a load to an indenter. By increasing the accuracy of the load, we succeeded in determining the hardness of the sample under a small load of 10mgf or less. This invention supports a pair of levers so as to be able to swing around their respective fulcrums, provides an indenter at the point of action of one of the levers, connects the point of force of this one lever to an electromagnetic load device, and loads the load device. is reduced by one lever and transmitted to the indenter. This applies a load to the indenter. Then, a sample stage is installed at the force point of the other lever, and the point of action of this other lever is connected to an electromagnetic balance device, so that the load applied to the indenter, that is, the load received by the sample on the sample stage, is controlled by the other lever. Magnify and transmit to electromagnetic balance device. Furthermore, connect the electromagnetic balance device to the electromagnetic load device,
The present invention is characterized in that the load of the sample is detected by an electromagnetic balance device, and the electromagnetic load device is subjected to feedback control.
(ホ) 実施例
以下、この発明の実施例を図面について説明す
る。(E) Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図において、圧子１は試料台２の試料３に接触
し、試料３にくぼみを生じさせる。この実施例で
は、上下一対のレバー４Ｈ，４Ｌが水平に、かつ
互いに平行に配置され、それぞれ支点５Ｈ，５Ｌ
のまわりに揺動可能に支持されている。圧子１は
上方のレバー４Ｈの作用点に設けられ、試料台２
は下方のレバー４Ｌの力点に設けられている。レ
バー４Ｈ，４Ｌの支点５Ｈ，５Ｌは本体６に固定
されている。 In the figure, the indenter 1 contacts the sample 3 on the sample stage 2 and creates a depression in the sample 3. In this embodiment, a pair of upper and lower levers 4H, 4L are arranged horizontally and parallel to each other, with supporting points 5H, 5L, respectively.
is swingably supported around the The indenter 1 is installed at the point of action of the upper lever 4H, and
is provided at the power point of the lower lever 4L. Support points 5H and 5L of the levers 4H and 4L are fixed to the main body 6.
荷重は電磁式負荷装置７によつて加えられ、電
磁式平衡装置８によつて検出される。電磁式負荷
装置７はコイル９とヨーク１０からなり、コイル
９の電磁力によつて荷重を加えることができる。
上方のレバー４Ｈの力点は負荷装置７のコイル９
に連結され、ヨーク１０は本体６に固定されてい
る。電磁式平衡装置８は電子天秤に使用されてい
る平衡装置と同様のものであり、コイル１１、ヨ
ーク１２および零点検出器１３からなり、下方の
レバー４Ｌの作用点は平衡装置８のコイル１１に
連結され、ヨーク１２は本体６に固定されてい
る。零点検出器１３は下方のレバー４Ｌの先端に
対向するよう配置され、アンプ１４を介してコイ
ル１１に接続されている。 The load is applied by an electromagnetic load device 7 and detected by an electromagnetic balance device 8. The electromagnetic load device 7 includes a coil 9 and a yoke 10, and can apply a load using the electromagnetic force of the coil 9.
The force point of the upper lever 4H is the coil 9 of the load device 7.
The yoke 10 is fixed to the main body 6. The electromagnetic balance device 8 is similar to the balance device used in electronic balances, and consists of a coil 11, a yoke 12, and a zero point detector 13, and the point of action of the lower lever 4L is on the coil 11 of the balance device 8. The yoke 12 is connected to the main body 6. The zero point detector 13 is arranged to face the tip of the lower lever 4L, and is connected to the coil 11 via an amplifier 14.
電磁式負荷装置７の荷重は制御装置１５によつ
て設定され、制御される。電磁式負荷装置７のコ
イル９は制御装置１５に接続され、電磁式平衡装
置８のコイル１１も制御装置１５に接続されてい
る。 The load of the electromagnetic load device 7 is set and controlled by the control device 15. The coil 9 of the electromagnetic load device 7 is connected to the control device 15, and the coil 11 of the electromagnetic balance device 8 is also connected to the control device 15.
さらに、この実施例では、試料３のくぼみの深
さを検出するため、変位検出器１６がレバー４
Ｈ，４Ｌの先端間に配置されている。変位検出器
１６はコイル１７と鉄心１８からなり、コイル１
７は上方のレバー４Ｈの先端に連結され、アンプ
１９を介して制御装置１５に接続されている。鉄
心１８は下方のレバー４Ｌの先端に連結されてい
る。 Furthermore, in this embodiment, in order to detect the depth of the recess in the sample 3, the displacement detector 16 is connected to the lever 4.
It is placed between the tips of H and 4L. The displacement detector 16 consists of a coil 17 and an iron core 18.
7 is connected to the tip of the upper lever 4H, and is connected to the control device 15 via an amplifier 19. The iron core 18 is connected to the tip of the lower lever 4L.
前記のように構成された硬度計において、電磁
式負荷装置７の荷重、すなわちコイル９の電磁力
は上方のレバー４Ｈによつて縮小され、圧子１に
伝達される。これによつて圧子１に荷重が加えら
れる。したがつて、圧子１が試料台２の試料３に
押し付けられ、試料３にくぼみが生じる。圧子１
に加えられる荷重、すなわち試料３が受ける荷重
は下方のレバー４Ｌによつて拡大され、電磁式平
衡装置８に伝達される。平衡装置８の零点検出器
１３は下方のレバー４Ｌの位置を検出し、その検
出信号はアンプ１４によつて拡大され、コイル１
１に送られる。これによつてコイル１１の電流が
制御される。コイル１１は試料３が受ける荷重を
平衡させ、レバー４Ｌを水平に保つ。したがつ
て、コイル１１の電流によつて試料３の荷重を検
出することができる。要するに、電子天秤の荷重
検出原理によつて試料３の荷重を検出することが
できるものである。 In the hardness meter configured as described above, the load of the electromagnetic load device 7, that is, the electromagnetic force of the coil 9, is reduced by the upper lever 4H and transmitted to the indenter 1. A load is thereby applied to the indenter 1. Therefore, the indenter 1 is pressed against the sample 3 on the sample stage 2, creating a depression in the sample 3. Indenter 1
The load applied to the sample 3, that is, the load applied to the sample 3 is magnified by the lower lever 4L and transmitted to the electromagnetic balance device 8. The zero point detector 13 of the balance device 8 detects the position of the lower lever 4L, and the detection signal is amplified by the amplifier 14 and sent to the coil 1.
Sent to 1. The current in the coil 11 is thereby controlled. The coil 11 balances the load applied to the sample 3 and keeps the lever 4L horizontal. Therefore, the load on the sample 3 can be detected by the current flowing through the coil 11. In short, the load on the sample 3 can be detected using the load detection principle of an electronic balance.
電磁式平衡装置８の検出信号は制御装置１５に
送られ、制御装置１５はその荷重設定値と電磁式
平衡装置８の検出信号を比較し、その差を電磁式
負荷装置７のコイル９に送る。したがつて、電磁
式平衡装置８および制御装置１５によつて電磁式
負荷装置７がフイードバツク制御される。 The detection signal of the electromagnetic balance device 8 is sent to the control device 15, and the control device 15 compares the load setting value with the detection signal of the electromagnetic balance device 8, and sends the difference to the coil 9 of the electromagnetic load device 7. . Therefore, the electromagnetic load device 7 is feedback-controlled by the electromagnetic balance device 8 and the control device 15.
さらに、圧子１に荷重が加えられ、試料３にく
ぼみが生じると、それに追随して上方のレバー４
Ｈが傾斜する。したがつて、変位検出器１６のコ
イル１７と鉄心１８が相対的に変位し、コイル１
７の電流が変化する。これによつて試料３のくぼ
みの深さが検出される。変位検出器１６の検出信
号はアンプ１９によつて増幅され、制御装置１５
に送られる。 Furthermore, when a load is applied to the indenter 1 and a dent is created in the sample 3, the upper lever 4 follows it.
H is tilted. Therefore, the coil 17 and the iron core 18 of the displacement detector 16 are relatively displaced, and the coil 1
7 current changes. As a result, the depth of the depression in the sample 3 is detected. The detection signal of the displacement detector 16 is amplified by the amplifier 19, and
sent to.
制御装置１５は電磁式平衡装置８の検出信号に
よつて試料３の荷重を読み取る。これと同時に、
変位検出器１６の検出信号によつて試料３のくぼ
みの深さを読み取り、試料３のくぼみの表面積を
演算する。さらに、試料３の荷重とそのくぼみの
表面積から試料３の硬度を演算し、これを表示す
る。 The control device 15 reads the load of the sample 3 based on the detection signal of the electromagnetic balance device 8. At the same time,
The depth of the depression in the sample 3 is read based on the detection signal of the displacement detector 16, and the surface area of the depression in the sample 3 is calculated. Furthermore, the hardness of the sample 3 is calculated from the load on the sample 3 and the surface area of the recess, and this is displayed.
この硬度計は、電磁式負荷装置７の荷重がレバ
ー４Ｈによつて減少され、圧子１に伝達されるた
め、圧子１に小さい荷重を加えることができる。
さらに、その荷重がレバー４Ｌによつて拡大さ
れ、電磁式平衡装置８に伝達され、平衡装置８に
よつて検出され、電磁式負荷装置７がフイードバ
ツク制御されるため、圧子１に加えられる荷重は
制御装置１５の荷重設定値に対応する。したがつ
て、圧子１に加えられる荷重の精度は高い。した
がつて、小さい荷重に対する試料３の硬度を求め
ることができる。 In this hardness tester, the load of the electromagnetic load device 7 is reduced by the lever 4H and transmitted to the indenter 1, so that a small load can be applied to the indenter 1.
Further, the load is magnified by the lever 4L, transmitted to the electromagnetic balance device 8, detected by the balance device 8, and feedback-controlled to the electromagnetic load device 7, so that the load applied to the indenter 1 is It corresponds to the load setting value of the control device 15. Therefore, the accuracy of the load applied to the indenter 1 is high. Therefore, the hardness of sample 3 against a small load can be determined.
この硬度計は圧子１に1mgf〜lgfまでの荷重を
加えることができ、0.1mgの荷重精度を得ること
が可能である。また、試料３のくぼみの深さが
0.1〜５μｍのとき、0.01μｍの深さ精度を得る
ことができる。 This hardness meter can apply a load of 1 mgf to lgf to the indenter 1, and can obtain a load accuracy of 0.1 mg. Also, the depth of the depression in sample 3 is
When the depth is 0.1 to 5 μm, a depth accuracy of 0.01 μm can be obtained.
なお、この実施例では、上下一対のレバー４
Ｈ，４Ｌを水平に、かつ互いに平行に配置したも
のについて説明したが、必ずしもレバー４Ｈ，４
Ｌを平行に配置する必要はない。場合によつて
は、一対のレバー４Ｈ，４Ｌを互いに交差するよ
う配置してもよい。そして、一方のレバーの作用
点に圧子１を設け、その力点を電磁式負荷装置７
に連結し、他方のレバーの力点に試料台２を設
け、その作用点を電磁式平衡装置８に連結して
も、負荷装置７の荷重を一方のレバーによつて縮
小し、圧子１に伝達することができる。さらに、
試料台２の試料３が受ける荷重を他方のレバーに
よつて拡大し、電磁式平衡装置８に伝達すること
ができる。したがつて、圧子１に加える荷重の精
度を高くし、小さい荷重に対する試料３の硬度を
求めることができ、同様の作用効果を得ることが
できる。 In addition, in this embodiment, a pair of upper and lower levers 4
Although the explanation has been made regarding the case where the levers 4H and 4L are arranged horizontally and parallel to each other, the levers 4H and 4L are not necessarily arranged in parallel.
It is not necessary to arrange L in parallel. In some cases, the pair of levers 4H and 4L may be arranged to cross each other. Then, an indenter 1 is provided at the point of application of one lever, and the point of force is applied to the electromagnetic load device 7.
Even if the sample stage 2 is connected to the force point of the other lever and the point of action is connected to the electromagnetic balance device 8, the load of the load device 7 can be reduced by one lever and transmitted to the indenter 1. can do. moreover,
The load applied to the sample 3 on the sample stage 2 can be magnified by the other lever and transmitted to the electromagnetic balance device 8. Therefore, the accuracy of the load applied to the indenter 1 can be increased, the hardness of the sample 3 can be determined against a small load, and similar effects can be obtained.
(ヘ) 効果
以上説明したように、この発明は、硬度計の圧
子に加える荷重の精度を高くし、小さい荷重に対
する試料の硬度を求めることができ、所期の目的
を達成することができるものである。(f) Effects As explained above, the present invention can improve the accuracy of the load applied to the indenter of a hardness tester, can determine the hardness of a sample under a small load, and can achieve the intended purpose. It is.
図面はこの発明の一実施例を示す説明図であ
る。
１……圧子、２……試料台、３……試料、４
Ｈ，４Ｌ……レバー、５……レバーの支点、７…
…電磁式負荷装置、８……電磁式平衡装置。
The drawings are explanatory diagrams showing one embodiment of the present invention. 1...Indenter, 2...Sample stand, 3...Sample, 4
H, 4L... Lever, 5... Lever fulcrum, 7...
...Electromagnetic load device, 8...Electromagnetic balance device.
Claims (1)
せ、前記試料の硬度を求めるようにした硬度計に
おいて、一対のレバーをそれぞれ支点のまわりに
揺動可能に支持し、前記一対のレバーのうち、一
方のレバーの作用点に前記圧子を設け、前記一方
のレバーの力点を電磁力によつて荷重を加える電
磁式負荷装置に連結し、他方のレバーの力点に前
記試料台を設け、前記他方のレバーの作用点を電
磁力によつて荷重を平衡させる電磁式平衡装置に
連結し、前記平衡装置を前記負荷装置に接続し、
前記負荷装置の荷重を前記一方のレバーによつて
縮小し、前記圧子に伝達し、これによつて前記圧
子に荷重を加えるとともに、前記試料台の試料が
受ける荷重を前記他方のレバーによつて拡大し、
前記平衡装置に伝達し、前記平衡装置によつて前
記試料の荷重を検出し、前記負荷装置をフイード
バツク制御するようにしたことを特徴とする硬度
計。1. In a hardness meter that measures the hardness of a sample by creating a depression in the sample on a sample stage with an indenter, a pair of levers are each supported swingably around a fulcrum, and one of the pair of levers is , the indenter is provided at the point of action of one lever, the point of force of the one lever is connected to an electromagnetic load device that applies a load by electromagnetic force, the sample stage is provided at the point of force of the other lever, connecting the point of action of the lever to an electromagnetic balance device that balances the load by electromagnetic force, and connecting the balance device to the load device;
The load of the loading device is reduced by the one lever and transmitted to the indenter, thereby applying a load to the indenter, and the load applied to the sample on the sample stage is reduced by the other lever. expand,
A hardness tester characterized in that the load of the sample is transmitted to the balancing device, the load of the sample is detected by the balancing device, and the loading device is controlled by feedback.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22643383A JPS60115830A (en) | 1983-11-29 | 1983-11-29 | Hardness meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22643383A JPS60115830A (en) | 1983-11-29 | 1983-11-29 | Hardness meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60115830A JPS60115830A (en) | 1985-06-22 |
| JPS6251415B2 true JPS6251415B2 (en) | 1987-10-29 |
Family
ID=16845033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22643383A Granted JPS60115830A (en) | 1983-11-29 | 1983-11-29 | Hardness meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60115830A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62173036U (en) * | 1986-03-29 | 1987-11-04 | ||
| JPS6381239U (en) * | 1986-11-15 | 1988-05-28 | ||
| JP2737120B2 (en) * | 1987-03-30 | 1998-04-08 | 株式会社島津製作所 | Indentation hardness tester |
| US10571379B2 (en) * | 2016-04-04 | 2020-02-25 | Kla-Tencor Corporation | Compensated mechanical testing system |
| KR102259736B1 (en) * | 2019-08-28 | 2021-06-02 | (주)제이.케이.에스 | Apparatus for testing seismic isolation devices with specimen protection function |
-
1983
- 1983-11-29 JP JP22643383A patent/JPS60115830A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60115830A (en) | 1985-06-22 |
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