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JPS60115830A - Hardness meter - Google Patents

Hardness meter

Info

Publication number
JPS60115830A
JPS60115830A JP22643383A JP22643383A JPS60115830A JP S60115830 A JPS60115830 A JP S60115830A JP 22643383 A JP22643383 A JP 22643383A JP 22643383 A JP22643383 A JP 22643383A JP S60115830 A JPS60115830 A JP S60115830A
Authority
JP
Japan
Prior art keywords
load
sample
indenter
lever
electromagnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22643383A
Other languages
Japanese (ja)
Other versions
JPS6251415B2 (en
Inventor
Yasunori Yamamoto
山本 靖則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP22643383A priority Critical patent/JPS60115830A/en
Publication of JPS60115830A publication Critical patent/JPS60115830A/en
Publication of JPS6251415B2 publication Critical patent/JPS6251415B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40Investigating hardness or rebound hardness
    • G01N3/42Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

PURPOSE:To measure hardness to a small load by supporting a couple of levers so that they are oscillatory around fulcrums respectively, and providing an indenter at the point of application of one of said couple of levers. CONSTITUTION:The indenter 1 contacts a sample 3 on a sample table 2 to form an indentation in the sample 3. Then, the couple of upper and lower levers 4H and 4L are arranged, for example, horizontally in parallel, and support oscillatory around the fulcrums 5H and 5L. Then, the indenter 1 is provided at the point of application of the upper lever 4H and the sample table 2 is provided at the point of force of the lower lever 4L. Then, the load of an electromagnetic loading device 7, i.e. electromagnetic force of a coil 9 is reduced by the lever 4H and transmitted to the indenter 1. Consequently, the precision of the load placed on the indenter is improved to obtain the hardness of the sample to the small load.

Description

【発明の詳細な説明】 (イ)産業上の利用分野 この発明は、圧子によって試料台の試料にくぼみを生じ
させ、試料の硬度をめる硬度計に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application This invention relates to a hardness meter that measures the hardness of a sample by creating a depression in the sample on a sample stage using an indenter.

(ロ)従来技術 試料の硬度をめるには、圧子によって試料台の試料にく
ぼみを生しさせればよい。そして、くぼみの表面積を算
出すると、圧子に加えた荷重とくぼみの表面積によって
試料の硬度をめることができる。この種の硬度計におい
て、小さい荷重に対する試料の硬度をめるには、圧子に
加える荷重の精度を高くする必要がある。従来は、圧子
に加える荷重の精度が低く、小さい荷重に対する試料の
硬度をめることはできなかった。普通の硬度計は、lO
gF程度の荷重に対する試料の硬度をめることができる
だけである。最も精度の高い硬度側でも10mgF程度
の荷重が限界であった。
(b) Prior Art To increase the hardness of a sample, it is sufficient to make a depression in the sample on the sample stage using an indenter. Then, by calculating the surface area of the depression, the hardness of the sample can be determined based on the load applied to the indenter and the surface area of the depression. In this type of hardness meter, in order to measure the hardness of a sample under a small load, it is necessary to increase the accuracy of the load applied to the indenter. Conventionally, the accuracy of the load applied to the indenter was low, and it was not possible to estimate the hardness of the sample under small loads. A normal hardness tester is lO
It is only possible to increase the hardness of the sample against a load of about gF. Even on the hardness side with the highest accuracy, a load of about 10 mgF was the limit.

しかしながら、最近、種々の材料が開発され、10mg
F以下の荷重に対する試料の硬度をめることが要求され
ている。
However, recently, various materials have been developed, and 10mg
It is required to increase the hardness of the sample against loads of F or less.

(ハ)目 的 したがって、この発明は、圧子によって試1台の試料に
くぼみを生しさせる硬度J1に、15いて、ll−子に
加える荷重の精度を高くし、前記従来の要求に応しるこ
とを目的としてなされたものである。
(c) Purpose Therefore, the present invention satisfies the above-mentioned conventional requirements by increasing the hardness J1 of 15 to produce a dent in a sample with an indenter, and increasing the accuracy of the load applied to the indenter. This was done for the purpose of

(ニ)構 成 この発明は、コイルの電磁力によって荷重を加える電磁
式負荷装置と、コイルの電磁力によっで荷重を平衡さゼ
る電磁式平衡装置と、一対のしI・−を組み合わせ、圧
子に加える荷重の精度を高くし、]Omgf以下の小さ
い荷重に刻する試41の硬度をめることに成功したもの
である。この発明は、一対のレバーをそれぞれ支点のま
わりに揺動可能に支持し、一方のレバーの作用点に圧子
を設け、この一方のレバーの力点を電磁式負荷装置に連
結し、負荷装置の荷重を一方のレバーによって縮小し、
圧子に伝達する。これによって圧子に荷重を加える。そ
して、他方のし・1−の力点に試料台を設け、この他方
のレバーの作用慨を電磁式平衡装置に連結し、圧子に加
えられる荷重、すなわち試料台の訳本4か受ける荷重を
他方のレバーによって拡大し、電磁式平衡装置に伝達す
る。さらに、電磁式平衡装置を電磁式負荷装置に接続し
、電磁式平衡装置によって試料の荷重を検出し、電磁式
負荷装置をフィードバック制御するようにしたことを特
徴とするものである。
(D) Configuration This invention combines an electromagnetic load device that applies a load using the electromagnetic force of a coil, an electromagnetic balance device that balances the load using the electromagnetic force of the coil, and a pair of I--. , the accuracy of the load applied to the indenter was increased, and the hardness of Test 41 was successfully reduced to a small load of less than ]Omgf. This invention supports a pair of levers so as to be able to swing around their respective fulcrums, provides an indenter at the point of action of one of the levers, connects the point of force of this one lever to an electromagnetic load device, and loads the load device. is reduced by one lever,
transmitted to the indenter. This applies a load to the indenter. Then, a sample stand is installed at the force point of the other lever 1-, and the action of this other lever is connected to an electromagnetic balance device, so that the load applied to the indenter, that is, the load received by the sample stand 4, is transferred to the other lever. is expanded by the lever and transmitted to the electromagnetic balance device. Furthermore, the present invention is characterized in that the electromagnetic balance device is connected to the electromagnetic load device, the load of the sample is detected by the electromagnetic balance device, and the electromagnetic load device is feedback-controlled.

(ボ)実施例 以下、この発明の実施例を図面について説明する。(B) Example Embodiments of the present invention will be described below with reference to the drawings.

図において、圧子(1)は試料台(2)の試料(3)に
接触し、試料(3)にくぼみを生しさせる。この実施例
では、−1二下一対のレバー(41−1)、 (4L)
が水平に、かつ互いに平行に配置され、それぞれ支点(
51−1)、 (5L>のまわりに揺動可能に支持され
ている。圧子(1)は上方のレバー(4+1>の作用点
に設けられ、試料台(2)は下方のレバー(4L)の力
点に設jJられている。レバー(41−1)、 (4L
)の支点(51−])、 (+5L>は本体(6)に固
定されている。
In the figure, the indenter (1) contacts the sample (3) on the sample stage (2) and creates a depression in the sample (3). In this embodiment, a pair of levers (41-1), (4L)
are arranged horizontally and parallel to each other, each with a fulcrum (
51-1), (5L>).The indenter (1) is provided at the point of action of the upper lever (4+1>), and the sample stage (2) is mounted around the lower lever (4L). Lever (41-1), (4L
)'s fulcrums (51-]) and (+5L>) are fixed to the main body (6).

荷重は電磁式負荷装置(7)によって加えられ、電磁式
平衡装置(8)によって検出される。電磁式負荷装置(
7)はコイル(9)とヨーク(10)からな13、コイ
ル(9)の電磁力によって荷重を加えることができる。
The load is applied by an electromagnetic load device (7) and detected by an electromagnetic balance device (8). Electromagnetic load device (
7) consists of a coil (9) and a yoke (10), and a load can be applied by the electromagnetic force of the coil (9).

上方のレバー(40)の力点は負荷装置6(7)のコイ
ル(9)に連結され、ヨーク(10)は木イ1゜(6)
に固定されている。N磁式平衡装置首(8)は電子天秤
に使用されている平衡装置と同様のものであり、コイル
(11)、ヨーク(12)および零点検出器(13)か
らなり、下方のレバー(、IL)の作用点は平衡装置(
8)のコイル(11)に連結され、ヨー9(12)は本
体(6)に固定されている。零点検出’J羽(13>は
下方のレバー〈4L)の先端に対向するよう配置′6さ
れ、アンプ(14)を介してコイル(11)に接続され
ている。
The force point of the upper lever (40) is connected to the coil (9) of the loading device 6 (7), and the yoke (10) is
Fixed. The N magnetic balance device neck (8) is similar to the balance device used in electronic balances, and consists of a coil (11), a yoke (12), and a zero point detector (13). The point of action of the equilibrium device (IL) is
8), and the yaw 9 (12) is fixed to the main body (6). The zero point detection wing (13) is arranged to face the tip of the lower lever (4L) and is connected to the coil (11) via the amplifier (14).

電磁式負荷装置(7)の荷重は制御装置(15)+:二
上って設定され、制御される。電磁テ((′j荷装置(
7)のコイル(9)は制御装置(15)に接’1Lbc
され、電磁式平衡装置(8)のコイル(II)も制御装
置(+5)に接続されている。
The load of the electromagnetic load device (7) is set and controlled by the control device (15) +:2. Electromagnetic equipment ((′jloading device)
The coil (9) of 7) is in contact with the control device (15).
The coil (II) of the electromagnetic balance device (8) is also connected to the control device (+5).

さらに1、−二の実施例では、ふtll(3)のくぼ7
jの深さを検出するため、変位検出器(16)がレバー
(41−1)、 (4L)の先端間に配置されている。
Furthermore, in the embodiments 1 and 2, the recess 7 of the footll (3)
In order to detect the depth of j, a displacement detector (16) is placed between the tips of the levers (41-1) and (4L).

変位検出器(16)はコイル(17)と鉄心(18)か
らなり、コイル(17)は−1一方のレバー(4+−1
)の先端に連結され、アンプ(19)を介して制御装置
く15)に接続されている。鉄心(18)は下方のレバ
ー(4L)の先端に連結されている。
The displacement detector (16) consists of a coil (17) and an iron core (18), and the coil (17) is connected to one lever (4+-1).
) and is connected to a control device (15) via an amplifier (19). The iron core (18) is connected to the tip of the lower lever (4L).

前記のように構成された硬度計において、電磁式負荷装
置(7)の荷重、すなわちコイル(9)の電磁力は上方
のレバー(41−1)によって縮小され、圧子(1)に
伝達される。これによって圧子(1)に荷重が加えられ
る。したがって、圧子(1)が試料台(2)の試料(3
)に押し伺けられ、試料(3)にくぼみか生じる。圧子
(1)に加えられる荷重、すなわち試料(3)か受ける
荷重は下方のレバー(4L)によって1ガ、太され、電
磁式平衡装置(8)に伝達される。平衡装置(8)の零
改検出器(13)は下方のレバー(4L)のII′IF
iを検出し、その検出信号はアンプ(14)によって拡
大され、コイル(11)に送られる。
In the hardness meter configured as described above, the load of the electromagnetic load device (7), that is, the electromagnetic force of the coil (9), is reduced by the upper lever (41-1) and transmitted to the indenter (1). . This applies a load to the indenter (1). Therefore, the indenter (1) is in contact with the sample (3) on the sample stage (2).
), causing a dent in sample (3). The load applied to the indenter (1), that is, the load applied to the sample (3), is increased by 1 ga by the lower lever (4L) and transmitted to the electromagnetic balance device (8). The zero change detector (13) of the balance device (8) is located at II'IF of the lower lever (4L).
i is detected, and the detection signal is amplified by the amplifier (14) and sent to the coil (11).

これによってコイル(11)の電流か制御される。コイ
ル(11)は試料(3)が受ける荷重を平衡さゼ、レバ
ー(4L)を水平に保つ。したかって、コイル(11)
の電流によって試料(3)の荷重を検出することができ
る。要するに、電子天秤の荷重検出原理によって試料(
3)の荷重を検出することができるものである。
This controls the current in the coil (11). The coil (11) balances the load on the sample (3) and keeps the lever (4L) horizontal. Coil (11)
The load on the sample (3) can be detected by the current. In short, the sample (
3) It is possible to detect the load.

電磁式平衡装置(8)の検出信号は制御装置(15)に
送られ、制御装置(15)はその荷重設定値と電磁式平
衡装置(8)の検出信号を比較し、その差を電磁式負荷
装置(7)のコイル(9)に送る。したがって、電磁式
平衡装置(8)および制御装置(15)によって電磁式
負荷装置(7)がフィードバック制御される。
The detection signal of the electromagnetic balance device (8) is sent to the control device (15), and the control device (15) compares the load setting value with the detection signal of the electromagnetic balance device (8), and calculates the difference between the two. It is sent to the coil (9) of the load device (7). Therefore, the electromagnetic load device (7) is feedback-controlled by the electromagnetic balance device (8) and the control device (15).

さらに、圧子(1)に荷重が加えられ、試;11(3)
にくぼみか生しると、それに追随して上方のしI\−(
41−1>か傾斜する。したかって、変位検出器(16
)のコイル(17)と鉄心(18)が相対的に変位し、
コイル(17)の電流が変化する。これによって試料(
3)のくぼみの深さが検出される。変位検出器(16)
の検出信号はアンプ(19)によって増幅され、制御装
置(15)に送られる。
Furthermore, a load was applied to the indenter (1), and test;
When a depression appears, it will follow and move upward I\-(
41-1> or tilt. Therefore, the displacement detector (16
)'s coil (17) and iron core (18) are relatively displaced,
The current in the coil (17) changes. This allows the sample (
3) The depth of the depression is detected. Displacement detector (16)
The detection signal is amplified by the amplifier (19) and sent to the control device (15).

制御装置(15)は電磁式平衡装置く8〉の検出信号に
よって試料(3)の荷重を読み取る。これと同時に、変
位検出器(16)の検出信号によって試料(3)のくぼ
みの深さを読み取り、試料(3)のくぼみの表面積を演
算する。さらに、試料(3)の荷重とそのくぼみの表面
積から試料(3)の硬度を演算し、これを表示する。
The control device (15) reads the load of the sample (3) based on the detection signal of the electromagnetic balance device (8). At the same time, the depth of the depression in the sample (3) is read based on the detection signal of the displacement detector (16), and the surface area of the depression in the sample (3) is calculated. Furthermore, the hardness of the sample (3) is calculated from the load on the sample (3) and the surface area of the recess, and this is displayed.

この硬度計は、電磁式負荷装置(7〉の荷重かしI\−
(41−1)によって減少され、圧子(1)に伝達され
るため、圧子(1)に小さい荷重を加えることができる
。さらに、その荷重かレバー(4L)によって↑〃二大
され、電磁式平衡装置(8)に伝達され、平衡装置(8
)によって検出され、電磁式負荷装置(7)かフィート
・飄ツク制御されるため、圧子(1)に加えられる荷重
は制御装置(15)の荷重設定値に対応する。したかっ
て、圧子(1)に加えられる荷重の精度は高い。したか
って、小さい荷重に対する試It、(3)の硬度をめる
ことができる。
This hardness tester is equipped with an electromagnetic loading device (7〉).
(41-1) and is transmitted to the indenter (1), so a small load can be applied to the indenter (1). Furthermore, the load is increased by ↑〃2 by the lever (4L), transmitted to the electromagnetic balance device (8), and is transmitted to the balance device (8).
), and the electromagnetic load device (7) is foot-and-lift controlled, so that the load applied to the indenter (1) corresponds to the load setting of the control device (15). Therefore, the accuracy of the load applied to the indenter (1) is high. Therefore, the hardness of test It (3) for small loads can be estimated.

この硬度計は圧子(1)にImgr〜Igfまての荷重
を加えるこきかてき、0 、 ] mgの前:I’j 
i/iI捷4−1jノることか可能である。また、試4
F(3)のくぼツノの深さが0 、 ] −5umのと
き、0 、 Ol ++mぴ)深さ精度を得ることがで
きる。
This hardness tester applies a load from Imgr to Igf to the indenter (1), 0,] Before mg: I'j
It is possible that i/iI 4-1j. Also, test 4
When the depth of the hollow horn of F(3) is 0, ] -5 um, a depth accuracy of 0, Ol ++ mpi) can be obtained.

なお、この実施例ては、上下−に、Iの1.・\−(・
1)1)、(4L)を水平に、か1)1iいに平行に配
置1−2Lものについて説明したが、必ずしもしIC−
(41+>。
In addition, in this embodiment, 1.・\-(・
1) 1) and (4L) are arranged horizontally, or 1) 1i and 1-2L are arranged in parallel, but this is not necessarily the case.
(41+>.

(4L)を平行に配置する必要はない。場合によっては
、一対のレバー(41,1)、 (、I L)をllい
に交差するよう配置してもJ、い。そして、一方のし・
\−の作用+9 Jこ圧子(1)を設(Jlぞの力点を
電磁式り荷装前(7)に連結し、他方のレバーのカー天
に試料台(2)を設け、その作用点を電磁式平衡装置(
8)に連結しても、負荷装置(7)の荷重を一方のし・
八−によって縮小し、圧子(1)に伝達することかでき
る。さらに、試料台(2)の試11(3)か受ける荷重
を他方のレバーによって194大し、電磁式平衡装置(
8)に伝達することかできる。したかって、圧子(1)
に加える荷重の精度を高くし、小さい荷重に対する試1
4(3>の硬度をめることかでき、同様の作用効果を得
ることができる。
(4L) need not be arranged in parallel. In some cases, the pair of levers (41, 1), (, IL) may be arranged so as to cross each other. And on the other hand...
\- action +9 Set up the J indenter (1) (connect the force point of Jl to the electromagnetic loading front (7), set the sample stage (2) on the top of the other lever, The electromagnetic balance device (
8), the load of the load device (7) cannot be transferred to one side.
8- can be reduced and transmitted to the indenter (1). Furthermore, the load on test 11 (3) on the sample stage (2) was increased by 194 using the other lever, and the electromagnetic balance device (
8). Indenter (1)
Increase the accuracy of the load applied to the test 1 for small loads.
The hardness can be lowered to 4 (3>) and the same effects can be obtained.

くべ)効 果 灰「説明したように、この発明は、硬度計の圧子に加え
る荷重の精度を高くし、小さい荷重に対する試料の硬度
をめることができ、所期の目的を達成することがてきる
ものである。
Effects: As explained above, the present invention improves the accuracy of the load applied to the indenter of the hardness tester, allows the hardness of the sample to be measured against small loads, and achieves the intended purpose. It is something that can be done.

【図面の簡単な説明】[Brief explanation of drawings]

図面はこの発明の一実施例を示す説明図である。 (1)・・・・・・・・・・・・・・・・・・・・・・
圧子(2)・・・・・・・・・・・・・・・・・・・・
・試14台(3)・・・・・・・・・・・・・・・・・
・・・・・試料(41−1)、 (4L)・・・・・・
・・レバー(5)・・・・・・・・・・・・・・・・・
・・・・・しI・−の支点(7)・・・・・・・・・・
・・・・・・・・・・・電磁式t′J向)?置(8)・
・・・・・・・・・・・・・・・・・・・・電磁式平衡
装置?i特許出願人 株式会社島律製(’1−11i代
 理 人 新 実 叶 部 (外1名)
The drawings are explanatory diagrams showing one embodiment of the present invention. (1)・・・・・・・・・・・・・・・・・・・・・
Indenter (2)・・・・・・・・・・・・・・・・・・
・Test 14 units (3)・・・・・・・・・・・・・・・・・・
...Sample (41-1), (4L)...
・・Lever (5)・・・・・・・・・・・・・・・・・・
・・・・・・Fully point of I・- (7)・・・・・・・・・
・・・・・・・・・・・・Electromagnetic type t'J direction)? Place (8)・
・・・・・・・・・・・・・・・・・・・Electromagnetic balance device? i Patent Applicant: Shima Ritsu Co., Ltd. ('1-11i Agent: Shinji Kanobu (1 other person)

Claims (1)

【特許請求の範囲】[Claims] 圧子によって試料台の試料にくぼみを生じさせ、前記試
料の硬度をめるようにした硬度計において、一対のしI
く−をそれぞれ支点のまわりに揺動可能に支持し、前記
一対のレバーのうち、一方のレバーの作用点に前記圧子
を設け、前記一方のレバーのツノ点を電磁力によって荷
重蚕加える電磁式負荷装置に連結し、他方のレバーの力
点に前記試料台を設け、前記他方のレバーの作用点を電
磁力によって荷重を平衡させる電磁式平衡装置に連結し
、前記平衡装置を前記負荷装置に接続し、前記負荷装置
の荷重を前記一方のレバーによって縮小し、前記圧子に
伝達し、これによって前記圧子に荷重を加えるとともに
、前記試料台の試料が受ける荷重を前記他方のレバーに
よって拡大し、前記平衡装置に伝達し、前記平衡装置に
よって前記試料の荷重を検出し、前記負荷装置をフィー
ドバック制御するようにしたこ七を特徴上する硬度J1
In a hardness meter that measures the hardness of the sample by creating a depression in the sample on the sample stage with an indenter, a pair of indentations I
An electromagnetic type in which the indenter is provided at the point of action of one of the pair of levers, and a load is applied to the horn point of the one lever by electromagnetic force. Connected to a load device, the sample stage is provided at the force point of the other lever, the point of action of the other lever is connected to an electromagnetic balance device that balances the load by electromagnetic force, and the balance device is connected to the load device. and reducing the load of the loading device by the one lever and transmitting it to the indenter, thereby applying a load to the indenter, and increasing the load applied to the sample on the sample stage by the other lever; The hardness J1 is characterized in that the load of the sample is transmitted to a balance device, the load of the sample is detected by the balance device, and the load device is feedback-controlled.
JP22643383A 1983-11-29 1983-11-29 Hardness meter Granted JPS60115830A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22643383A JPS60115830A (en) 1983-11-29 1983-11-29 Hardness meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22643383A JPS60115830A (en) 1983-11-29 1983-11-29 Hardness meter

Publications (2)

Publication Number Publication Date
JPS60115830A true JPS60115830A (en) 1985-06-22
JPS6251415B2 JPS6251415B2 (en) 1987-10-29

Family

ID=16845033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22643383A Granted JPS60115830A (en) 1983-11-29 1983-11-29 Hardness meter

Country Status (1)

Country Link
JP (1) JPS60115830A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62173036U (en) * 1986-03-29 1987-11-04
JPS6381239U (en) * 1986-11-15 1988-05-28
JPS63241445A (en) * 1987-03-30 1988-10-06 Shimadzu Corp Testing device for indentation hardness
KR20190024875A (en) * 2016-04-04 2019-03-08 나노메카닉스, 인크. Compensatory mechanical test system
KR20210025976A (en) * 2019-08-28 2021-03-10 (주)제이.케이.에스 Apparatus for testing seismic isolation devices with specimen protection function

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62173036U (en) * 1986-03-29 1987-11-04
JPS6381239U (en) * 1986-11-15 1988-05-28
JPS63241445A (en) * 1987-03-30 1988-10-06 Shimadzu Corp Testing device for indentation hardness
KR20190024875A (en) * 2016-04-04 2019-03-08 나노메카닉스, 인크. Compensatory mechanical test system
CN109618559A (en) * 2016-04-04 2019-04-12 科磊股份有限公司 Compensate mechanical test system
EP3440447A4 (en) * 2016-04-04 2019-10-30 Nanomechanics, Inc. Compensated mechanical testing system
US10571379B2 (en) 2016-04-04 2020-02-25 Kla-Tencor Corporation Compensated mechanical testing system
KR20210025976A (en) * 2019-08-28 2021-03-10 (주)제이.케이.에스 Apparatus for testing seismic isolation devices with specimen protection function

Also Published As

Publication number Publication date
JPS6251415B2 (en) 1987-10-29

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