JPS6445133A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS6445133A JPS6445133A JP20215287A JP20215287A JPS6445133A JP S6445133 A JPS6445133 A JP S6445133A JP 20215287 A JP20215287 A JP 20215287A JP 20215287 A JP20215287 A JP 20215287A JP S6445133 A JPS6445133 A JP S6445133A
- Authority
- JP
- Japan
- Prior art keywords
- sinxoy
- layer
- wiring
- film
- si3n4
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE:To obtain excellent moisture resistance and to prevent the occurrence of stress migration of wiring, by constituting final protective films with a double-layer structure of an Si3N4 film and SiNxOy film. CONSTITUTION:An uppermost Al wiring layer 2 is formed on a substrate 1. An SiNxOy layer 3 is formed on the Al wiring 2 by a plasma CVD method and a photo CVD method. An Si3N4 film 4 is formed as an uppermost layer similarly by the plasma and photo CVD methods. Namely the alleviation of internal stress at the interface between the layer 3 and the film 4 can be achieved by controlling the component ratio of the SiNxOy (x 4/3, y 0) in a region in contact with the Si3N4 and the component ratio of the SiNxOy (x, y) in a region in contact with the Al wiring 2. Thus, excellent moisture resistance is obtained, and the occurrence of stress migration is prevented.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20215287A JPS6445133A (en) | 1987-08-13 | 1987-08-13 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20215287A JPS6445133A (en) | 1987-08-13 | 1987-08-13 | Semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445133A true JPS6445133A (en) | 1989-02-17 |
Family
ID=16452824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20215287A Pending JPS6445133A (en) | 1987-08-13 | 1987-08-13 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445133A (en) |
-
1987
- 1987-08-13 JP JP20215287A patent/JPS6445133A/en active Pending
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