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JPS5370678A - Production of sos semiconductor device - Google Patents

Production of sos semiconductor device

Info

Publication number
JPS5370678A
JPS5370678A JP14563876A JP14563876A JPS5370678A JP S5370678 A JPS5370678 A JP S5370678A JP 14563876 A JP14563876 A JP 14563876A JP 14563876 A JP14563876 A JP 14563876A JP S5370678 A JPS5370678 A JP S5370678A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
sos
sos semiconductor
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14563876A
Other languages
Japanese (ja)
Inventor
Kazumichi Omura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP14563876A priority Critical patent/JPS5370678A/en
Publication of JPS5370678A publication Critical patent/JPS5370678A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To obtain a MiS element having high electron mobility on the semiconductor thin-film on an insulation type substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP14563876A 1976-12-06 1976-12-06 Production of sos semiconductor device Pending JPS5370678A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14563876A JPS5370678A (en) 1976-12-06 1976-12-06 Production of sos semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14563876A JPS5370678A (en) 1976-12-06 1976-12-06 Production of sos semiconductor device

Publications (1)

Publication Number Publication Date
JPS5370678A true JPS5370678A (en) 1978-06-23

Family

ID=15389630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14563876A Pending JPS5370678A (en) 1976-12-06 1976-12-06 Production of sos semiconductor device

Country Status (1)

Country Link
JP (1) JPS5370678A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502871A (en) * 1973-05-10 1975-01-13
JPS50115787A (en) * 1974-02-22 1975-09-10

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502871A (en) * 1973-05-10 1975-01-13
JPS50115787A (en) * 1974-02-22 1975-09-10

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