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JPS5325371A - Mos type semiconductor device - Google Patents

Mos type semiconductor device

Info

Publication number
JPS5325371A
JPS5325371A JP9998476A JP9998476A JPS5325371A JP S5325371 A JPS5325371 A JP S5325371A JP 9998476 A JP9998476 A JP 9998476A JP 9998476 A JP9998476 A JP 9998476A JP S5325371 A JPS5325371 A JP S5325371A
Authority
JP
Japan
Prior art keywords
semiconductor device
type semiconductor
mos type
increase
decrease
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9998476A
Other languages
Japanese (ja)
Other versions
JPS6027192B2 (en
Inventor
Kyohiko Kotani
Satoru Kawazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9998476A priority Critical patent/JPS6027192B2/en
Publication of JPS5325371A publication Critical patent/JPS5325371A/en
Publication of JPS6027192B2 publication Critical patent/JPS6027192B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: A semiconductor device which normally operates without causing punch-through state down to a short channel length, does not cause any increase in the threshold voltage, any increase in substrate constant and any decrease in P-N junction breakdown voltage and is suitable for forming high density LSI is obtained.
COPYRIGHT: (C)1978,JPO&Japio
JP9998476A 1976-08-20 1976-08-20 MOS type semiconductor device Expired JPS6027192B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9998476A JPS6027192B2 (en) 1976-08-20 1976-08-20 MOS type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9998476A JPS6027192B2 (en) 1976-08-20 1976-08-20 MOS type semiconductor device

Publications (2)

Publication Number Publication Date
JPS5325371A true JPS5325371A (en) 1978-03-09
JPS6027192B2 JPS6027192B2 (en) 1985-06-27

Family

ID=14261913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9998476A Expired JPS6027192B2 (en) 1976-08-20 1976-08-20 MOS type semiconductor device

Country Status (1)

Country Link
JP (1) JPS6027192B2 (en)

Also Published As

Publication number Publication date
JPS6027192B2 (en) 1985-06-27

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