JPS5762567A - Manufacture of mos type semiconductor device - Google Patents
Manufacture of mos type semiconductor deviceInfo
- Publication number
- JPS5762567A JPS5762567A JP55138468A JP13846880A JPS5762567A JP S5762567 A JPS5762567 A JP S5762567A JP 55138468 A JP55138468 A JP 55138468A JP 13846880 A JP13846880 A JP 13846880A JP S5762567 A JPS5762567 A JP S5762567A
- Authority
- JP
- Japan
- Prior art keywords
- gate electrode
- film
- semiconductor device
- substrate
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 230000002093 peripheral effect Effects 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 239000011574 phosphorus Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55138468A JPS5762567A (en) | 1980-10-03 | 1980-10-03 | Manufacture of mos type semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55138468A JPS5762567A (en) | 1980-10-03 | 1980-10-03 | Manufacture of mos type semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5762567A true JPS5762567A (en) | 1982-04-15 |
Family
ID=15222743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55138468A Pending JPS5762567A (en) | 1980-10-03 | 1980-10-03 | Manufacture of mos type semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5762567A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5337507A (en) * | 1992-06-20 | 1994-08-16 | Daiwa Seiko, Inc. | Handle for fishing rod |
| JP2008118927A (ja) * | 2006-11-13 | 2008-05-29 | Shimano Inc | 釣り竿のグリップ |
-
1980
- 1980-10-03 JP JP55138468A patent/JPS5762567A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5337507A (en) * | 1992-06-20 | 1994-08-16 | Daiwa Seiko, Inc. | Handle for fishing rod |
| JP2008118927A (ja) * | 2006-11-13 | 2008-05-29 | Shimano Inc | 釣り竿のグリップ |
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