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JPS56138922A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS56138922A
JPS56138922A JP4260480A JP4260480A JPS56138922A JP S56138922 A JPS56138922 A JP S56138922A JP 4260480 A JP4260480 A JP 4260480A JP 4260480 A JP4260480 A JP 4260480A JP S56138922 A JPS56138922 A JP S56138922A
Authority
JP
Japan
Prior art keywords
electrode
photo resist
section
metal
unlevelled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4260480A
Other languages
Japanese (ja)
Inventor
Hirobumi Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4260480A priority Critical patent/JPS56138922A/en
Publication of JPS56138922A publication Critical patent/JPS56138922A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE:To form an electrode in an excellent reproducibility on the substrate having an unlevelled section by a method wherein an electrode is coated on the entire surface of the photo resist covering the nonflat surface excluding the electrode forming section on a semiconductor substrate, and then a selective removal is performed using an ion milling method. CONSTITUTION:After the photo resist 15 has been provided on the surface of a GaAs substrate 11, excluding the section for forming the wiring electrode 16 of the semicondutor device whereon a gate metal, an SiO2 film covering the gate and electrode metals are provided on both sides, a wiring metal 16 is coated on the whole surface and an unnecessary metal is removed by an ion milling method using the photo resist layer 17 as a mask. As a result, the metal adhered again to the end part of the unlevelled section is removed simultaneously when the photo resist 15 is removed and the electrode having a good external appearance can be formed with an excellent reproducibility.
JP4260480A 1980-04-01 1980-04-01 Manufacture of semiconductor device Pending JPS56138922A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4260480A JPS56138922A (en) 1980-04-01 1980-04-01 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4260480A JPS56138922A (en) 1980-04-01 1980-04-01 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS56138922A true JPS56138922A (en) 1981-10-29

Family

ID=12640641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4260480A Pending JPS56138922A (en) 1980-04-01 1980-04-01 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS56138922A (en)

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