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JPS5512765A - Semiconductor pellet sorting device - Google Patents

Semiconductor pellet sorting device

Info

Publication number
JPS5512765A
JPS5512765A JP8578678A JP8578678A JPS5512765A JP S5512765 A JPS5512765 A JP S5512765A JP 8578678 A JP8578678 A JP 8578678A JP 8578678 A JP8578678 A JP 8578678A JP S5512765 A JPS5512765 A JP S5512765A
Authority
JP
Japan
Prior art keywords
vacuum container
pellet
normal
lifted
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8578678A
Other languages
Japanese (ja)
Inventor
Takaharu Matsui
Hisao Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8578678A priority Critical patent/JPS5512765A/en
Publication of JPS5512765A publication Critical patent/JPS5512765A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To achieve quick and sure sorting operation and improve productivity and economic feasibility by enabling it to make vacuum attraction of all the normal pellets at one time and to sort them out form other chips.
CONSTITUTION: A vacuum container 9 is placed on a semiconductor wafer 1, a contour formed by a normal pellet 2 is made agree with a contour on the bottom surface of the vacuum container 9, and the bottom surface of the vacuum container 9 is tightly attached to the semiconductor wafer 1. Now, when the vacuum container 9 is vacuumized and it is lifted up, if pellet is the normal pellet 2, it can be lifted up by being attracted onto the bottom surface of the vacuum container 9. On the other hand, if the material is a chip 3 for positioning or a waste chip 4, it is not attracted by the vacuum container 9 and it remains on a rubber-like elastic plate 7.
COPYRIGHT: (C)1980,JPO&Japio
JP8578678A 1978-07-13 1978-07-13 Semiconductor pellet sorting device Pending JPS5512765A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8578678A JPS5512765A (en) 1978-07-13 1978-07-13 Semiconductor pellet sorting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8578678A JPS5512765A (en) 1978-07-13 1978-07-13 Semiconductor pellet sorting device

Publications (1)

Publication Number Publication Date
JPS5512765A true JPS5512765A (en) 1980-01-29

Family

ID=13868562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8578678A Pending JPS5512765A (en) 1978-07-13 1978-07-13 Semiconductor pellet sorting device

Country Status (1)

Country Link
JP (1) JPS5512765A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5167141A (en) * 1990-03-06 1992-12-01 Rft S.P.A. Seal withdrawal and testing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5167141A (en) * 1990-03-06 1992-12-01 Rft S.P.A. Seal withdrawal and testing device

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