JPH1143764A - Evaporating state detector for evaporating material and vacuum coating forming device using it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an evaporating state detector capable of executing the detection of the evaporating state over a long period without being influenced by clouding caused by the sticking of an evaporating material. SOLUTION: A CCD camera 10 is allowed to enable the photographing of the upper face of an evaporating material through a hole 21-1 provided in a vacuum vessel 21. On the space between the vacuum vessel and the CCD camera, a shield board housing part 11 communicated with the vacuum vessel through the hole and shielded from the air is formed. The wall of the shield board housing part corresponding to the hole is provided with vacuum shield glass 11-2, and the inside of the shield board housing part is provided with a transparent shield disk 12 in such a manner that only the region corresponding to the hole is exposed toward the vacuum vessel through the hole. The inside of the vacuum vessel is provided with a shuttering mechanism 13 driving a shutter 13-1 so as to be displaceable between the region corresponding to the hole and the region being off therefrom. The shield disk is composed so as to displace in the case of being clouded by the sticking of evaporating components to the part exposed to the vacuum vessel.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for detecting an evaporation state of an evaporating material which is placed in a container shielded from the atmosphere and emits light by heating to evaporate. TECHNICAL FIELD The present invention relates to a device for detecting an evaporation state of an evaporation material and a vacuum film forming apparatus using the same.

[0002]

2. Description of the Related Art Generally, a vacuum deposition apparatus and an ion plating apparatus are known as vacuum film forming apparatuses. In such a vacuum film forming apparatus, heat is applied to an evaporation material placed on a hearth to evaporate the material, thereby forming a film on a substrate.
As a heating source of the evaporation material, an induction heating device, an electron gun, and a plasma gun are known.

As a heating source of the ion plating apparatus, for example, a pressure gradient plasma source or H
A CD plasma source or electron gun is used. In such an ion plating apparatus having a plasma beam generator (plasma source), a plasma beam is generated between a hearth (anode) placed in a vacuum vessel and the plasma beam generator, and the The evaporating material placed thereon is heated and evaporated. Then, the evaporated metal particles from the evaporated material are ionized by the plasma beam, and the ion particles adhere to the substrate surface of the negative voltage, and a film is formed on the substrate.

In such an ion plating apparatus, when performing ion plating continuously, it is necessary to continuously supply the evaporation material to the hearth. As such a continuous supply type ion plating apparatus, for example, an ion plating apparatus described in JP-A-62-247067 is known. In this ion plating apparatus, it is shown that the evaporation material is continuously supplied to the hollow crucible from below.

[0005] Here, referring to FIG.
The ion plating apparatus disclosed in Japanese Patent No. 0972 will be briefly described. The ion plating apparatus includes an airtight vacuum vessel 21. A plasma beam generator (for example, a pressure gradient plasma gun) 22 is attached to the vacuum vessel 21 via a guide portion 21a. A steering coil 23 for guiding a plasma beam is disposed outside the guide portion 21a. In the plasma beam generator 22, a first intermediate electrode 24 and a second intermediate electrode 25 for converging a plasma beam are arranged concentrically. The first intermediate electrode 24 incorporates a permanent magnet 24 a so that the magnetic pole axis is parallel to the central axis of the plasma beam generator 22, and the second intermediate electrode 25 includes a coil 25 a
Is built-in.

[0006] The plasma beam generator 22 is provided with an insulating tube (eg, a glass tube) 26 connected to a passage defined by the first and second intermediate electrodes 24 and 25. The Mo cylinder 26a is arranged. Then, a Ta pipe 26b is arranged in the Mo cylinder 26a. Space defined by Mo tube 26a and Ta pipe 26b is isolated by the LaB ₆ made of an annular plate 26c. One ends of the insulating tube 26, the Mo cylinder 26a, and the Ta pipe 26b are attached to the conductor plate 26d.
Carrier gas inlet 2 formed in conductor plate portion 26d
A carrier gas is introduced from 6e, and the carrier gas passes through the Ta pipe 26b.

A substrate 27 as an object to be processed is placed in a vacuum vessel 21 and supported by a transfer device 28, and a DC power supply for negative bias is connected to the substrate 27. A hearth (anode) 29 is arranged on the bottom surface of the vacuum vessel 21 so as to face the substrate 27.

Here, referring also to FIG. 8, the hearth 29 has a substantially cylindrical shape, and the upper surface of the hearth 29 is concave. At the center of the hearth 29, a through-hole 29c extending vertically in the figure is formed. The hearth 29 has a flange portion 29a extending in a radial direction at a lower portion thereof. Hearth 2
9, a passage 29b is formed.
Is connected to the cooling water pipe 30.

A magnet case 31 for forming an auxiliary anode is arranged on the outer periphery of the hearth 29, as shown in the figure. The magnet case 31 includes a hollow ring-shaped magnet upper case 31a, a donut-shaped magnet lower case 31b, and an annular permanent magnet 31c arranged between the upper case 31a and the lower case 31b. The permanent magnet 31c is vertically magnetized in the figure. In the example shown, the upper side is the north pole,
The lower side is the S pole. Then, the magnet upper case 31a
A cooling water pipe 32 is connected to the hollow portion of the cooling water pipe 32.

The above-described magnet case 31 is joined to the flange portion 29a of the hearth 29 via an insulating plate 33. At this time, a slight gap is formed between the magnet case 31 and the side surface of the hearth 29. The magnet case 31 is supported on the bottom surface of the vacuum vessel 21 by the support member 34.

Referring again to FIG. 7, the negative end of the variable power supply 40 is connected to the conductor plate portion 26d, and the positive end thereof is connected to the first and second intermediate electrodes 24 via resistors R1 and R2, respectively. And 25.

On the other hand, an ammeter 41 is connected to the hearth 29, and the ammeter 41 is connected to the variable power supply 40 and the resistors R1 and R2. Further, the ammeter 41 has a resistor R3
And R4, and is connected to the vacuum vessel 21. A voltmeter 42 is connected in parallel with the resistor R3 (the resistor R3 is used as a standard resistor for voltage measurement and has a resistance of 1 M ohm or more).

Further, in the vicinity of the substrate 27, the substrate 2
A support plate member 43 is disposed outside the support 7, and a film thickness gauge 44 is disposed on the support plate member 43. In addition, a gas inlet 21b for introducing a carrier gas such as Ar gas is formed on a side wall of the vacuum vessel 21 and an exhaust port 21c for exhausting the inside of the vacuum vessel 21 is formed.

In the above-described ion plating apparatus, when a carrier gas is introduced from the carrier gas inlet 26e, a discharge starts between the first intermediate electrode 24 and the Mo cylinder 26a. As a result, a plasma beam 45 is generated. This plasma beam 45 is applied to the steering coil 23
And guided by the permanent magnet 31c in the magnet case 31,
It reaches the hearth 29 and the magnet case 31 used as an anode.

When a plasma beam is applied to the hearth 29, the evaporating material 39 that has penetrated the hearth 29 and has reached the upper surface of the hearth 29 is heated by Joule and evaporated. The evaporated metal particles are ionized by the plasma beam 45 and adhere to the surface of the substrate 27 to which the negative voltage is applied, and a film is formed on the substrate 27.

The evaporating material 39 is mounted on a push-up bar 35 acting as a support for the push-up bar 3.
5 is driven vertically by a drive mechanism 36 in the figure. The drive mechanism 36 includes an ammeter 41,
It is controlled based on the measurement results of the voltmeter 42 and the film thickness meter 44 and other predetermined film forming conditions so that the distance from the plasma beam generator 22 becomes constant even when the amount of the evaporated material 39 decreases. I have to. As a result, a film is formed on the substrate 27 with a uniform thickness.

[0017]

However, in the above-mentioned apparatus, the distance between the evaporating material 39 and the plasma beam generator 22 is constant because the position of the upper surface of the evaporating material 39 is not directly detected. Is very difficult to control.

Therefore, it is desired to provide an evaporating state detecting device for directly detecting the evaporating state of the evaporating material 39 and using the detected state for driving the push-up bar 35. In consideration of the fact that the upper surface of the evaporation material 39 is a strong light-emitting portion, such an evaporation state detection device captures an image of the evaporation portion of the evaporation material 39 using, for example, a CCD camera, and obtains an image. It is easily conceivable to detect the evaporation state by performing image processing.
To this end, a hole is provided in the wall of the vacuum vessel and closed with a transparent member, an evaporating portion of the evaporating material 39 is imaged by a CCD camera through the transparent member, and the evaporating state of the evaporating material 39 is determined from a shift in the contour of the light emitting portion. Need to detect.

However, in this case, there is a problem that the evaporated metal particles adhere to the inner surface of the vacuum vessel and become cloudy immediately on the transparent member, so that a good image and a normal color light signal cannot be obtained. .

Accordingly, an object of the present invention is to provide an evaporating state detecting device capable of detecting an evaporating state for a long period of time without being affected by fogging due to the adhesion of evaporating material even when a CCD camera is used. To provide.

Another object of the present invention is to provide a vacuum film forming apparatus provided with the above-mentioned evaporation state detecting device.

[0022]

According to the present invention, an evaporating material, which is placed in a container shielded from the atmosphere and evaporates while emitting light by heating, is evaporated by an imaging means provided outside the container. An apparatus for capturing an image from obliquely above a material and processing an image obtained from the imaging unit to detect an evaporation state of the evaporating material, wherein the imaging unit is provided in the container in accordance with the imaging area. The evaporating part of the evaporating material can be imaged through the hole provided, and a chamber is formed between the container and the imaging means, communicates with the container through the hole and is isolated from the atmosphere, A transparent member capable of transmitting light is provided on a wall on the imaging means side of the room corresponding to an imaging area, and a transparent member that is always partially interposed between the transparent member and the hole is provided in the chamber. A movable plate is provided, and the movable plate is Evaporating state detection device of the evaporation material, characterized by being configured to cloudy and displacement due to the adhesion of the volatile components of the evaporation material to the portion which is exposed toward the serial container is obtained.

According to the present invention, there is further provided a heating source, and a hearth disposed in the vacuum vessel and acting as an anode, and the heating source evaporates the columnar evaporation material stored in the hearth, and In a vacuum film forming apparatus for forming a film on the substrate by attaching the material to the surface of the substrate, an image of the evaporating portion of the evaporating material is imaged from obliquely above by an imaging means installed outside the vacuum vessel, A device for processing an image obtained from the imaging means to detect an evaporation state of the evaporation material, wherein the imaging means performs the evaporation through a hole provided in the vacuum vessel corresponding to the imaging area. An upper surface of the material can be imaged, and a chamber is formed between the vacuum container and the imaging means, communicates with the vacuum container through the hole, and is isolated from the atmosphere, and corresponds to the imaging region. A transparent member capable of transmitting light is provided on a wall on the imaging means side of the chamber, and a transparent movable plate is provided in the chamber, a part of which is always interposed between the transparent member and the hole. The movable plate is configured to be displaced when it becomes cloudy due to adhesion of the evaporation component of the evaporation material to a portion exposed toward the vacuum container, thereby obtaining a vacuum film forming apparatus. .

The movable plate is a rotatable disk made of glass, and is rotatably driven so that a portion exposed to the vacuum vessel is located on the same circumference around a rotation axis. It is characterized by that.

The movable plate may be a rectangular plate made of glass, and a portion exposed to the container may be moved linearly.

In the chamber, a portion of the movable plate exposed to the vacuum container and the hole of the vacuum container and a portion exposed to the vacuum container and the transparent member And a cylindrical member for defining the imaging area of the imaging means.

Further, a shutter mechanism for driving a shutter so as to be displaceable between a first area corresponding to the hole and a second area deviating therefrom is provided in the container, The mechanism is drive-controlled so that the shutter is kept in the second area only when the image is taken by the image pickup means.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the present invention is applied to an ion plating apparatus as described in FIG. 7 will be described with reference to FIGS. Therefore, the same parts as those in FIG. FIG.
3 to 3, the evaporating state detecting device according to the present embodiment captures an image of the evaporating portion of the evaporating material 39 from obliquely above by the CCD camera 10 installed outside the vacuum vessel 21,
The image obtained from the CCD camera 10 is processed to detect the evaporation state of the evaporation material 39.

The CCD camera 10 is mounted on the upper side of the vacuum vessel 21 on the side of the plasma generator 22. The reason is that when the evaporating material 39 evaporates, the evaporated material is deposited on the Haas concave portion on the opposite side of the incident direction of the plasma beam 45. Deposits can interfere with imaging. On the incident side of the plasma beam 45, the evaporation material 39
Is dissolved by the plasma beam 45 even if it is to be deposited, so that the deposition amount is small. Therefore, an image of the evaporator can be obtained.

The CCD camera 10 has a hole 2 provided in the vacuum vessel 21 corresponding to the imaging area, that is, the light receiving path.
The upper surface of the evaporation material 39 can be imaged through 1-1. A hole 2 is provided between the vacuum vessel 21 and the CCD camera 10.
1-1, a shield plate storage part 11 is formed which is in communication with the vacuum vessel 21 and is shielded from the atmosphere.
-1 is connected to the vacuum vessel 21. Tubular body 11-1
Is for securing an imaging area of the CCD camera 10, and a vacuum blocking glass 11-2 capable of transmitting light is provided on an outer wall of the shield plate housing portion 11 corresponding to the imaging area. Thus, the CCD camera 10 passes through the vacuum blocking glass 11-2, the space in the shield plate housing 11 and the cylindrical body 11-1 to evaporate the material 39 in the vacuum vessel 21.
Is imaged.

The cylindrical body 11-1 is provided with a hole 21 of the vacuum vessel 21.
It is attached to the shield plate storage part 11 so as to surround the hole 11-3 provided in the shield plate storage part 11 corresponding to -1. A shield disk 12 made of transparent glass is rotatably arranged in the shield plate storage 11. As will be described later, the shield disk 12 is configured such that only an area corresponding to the imaging area is exposed to the vacuum vessel 21 through the hole 21-1. Then, it is configured to be displaced when it becomes cloudy due to the evaporation component of the evaporation material adhering to a portion exposed toward the vacuum container 21.

That is, the shield disk 12 is rotationally driven by the rotary drive mechanism 14 so that the portion exposed toward the vacuum vessel 21 is located on the same circumference around the rotary shaft 12-1. In the shield plate storage portion 11, between the portion of the shield disk 12 exposed toward the vacuum vessel 21 and the hole 11-3 of the shield plate storage portion 11 and toward the vacuum container 21 of the shield disk 12. In order to define the imaging area of the CCD camera 10 between the exposed portion and the vacuum blocking glass 11-2, and to minimize the invasion of the evaporation component of the evaporation material into the shield plate storage portion 11. Cylindrical members 11-5 and 11-6 are provided. In addition, these cylindrical members 11-5 and 11-6 are
Support plate 11- having holes smaller in diameter than these
It is attached to the inner wall of the shield plate storage section 11 via 7, 11-8. The shield disk 12 slides in the space between these cylindrical members 11-5 and 11-6 during its rotation.

In this way, the invasion of the evaporation component of the evaporation material into the shield plate storage portion 11 is limited to only the partial region of the shield disk 12 exposed toward the vacuum vessel 21. Then, when the evaporation component of the evaporation material adheres to this partial area and becomes cloudy, and the level of the image signal obtained from the CCD camera 10 decreases, the shield disk 12 is rotated by a predetermined angle to make the transparent partial area cylindrical. Members 11-5 and 1
1-6. In addition, the rotation of the shield disk 12 may be rotated when S × n is equal to or more than a certain value as the cumulative number n of the open time S of the shutter 13-1. When the number of rotations of the shield disk 12 making one rotation is m, when S × n × m becomes a certain value or more, it is time to replace the shield disk 12.
In addition, it is preferable to provide a dimming glass 15 between the vacuum blocking glass 11-2 and the CCD camera 10 in order to appropriately receive light. In addition, the shield plate storage unit 11
It can be divided into a lower case 11a and an upper case 11b,
The lower case 11a is fixed to the vacuum vessel 21 and the upper case 11b can be removed from the lower case 11a as needed. This is necessary for replacing the shield disk 12.

Further, in order to minimize the invasion of the evaporation component of the evaporation material into the shield plate storage section 11, the first region corresponding to the tip of the cylindrical body 11-1 is provided in the vacuum vessel 21. A shutter mechanism 13 is provided to drive the shutter 13-1 so as to be displaceable between a second area deviating therefrom. The shutter mechanism 13 is a CCD camera 10
Is controlled so that the shutter 13-1 is kept in the second area only at the time of imaging by the camera.

FIG. 4 shows a locus when the shield disk 12 rotates and the light receiving path of the CCD camera 10 on the shield disk 12 is displaced. As described above, if the light receiving path of the CCD camera 10 on the shield disk 12 becomes cloudy, by repeatedly rotating the shield disk 12 as needed, the light receiving path of the CCD camera 10 is secured in a clean state several tens of times. can do. The shield disk 12 is replaced when the entire circumference becomes cloudy. In the example of FIG. 4, the shield disk 12 is intermittently rotated.
It may be rotated continuously.

Next, the operation of the evaporation state detecting device will be described. This evaporating state detecting device is composed of a cylindrical evaporating material 39.
This is based on the fact that the tip of the evaporation material 39 emits strong light when heated by colliding a plasma beam with the tip of the material. The tip of the light-emitting evaporation material 39 is imaged by the CCD camera 10, the light-emitting portion and the non-light-emitting portion (the concave portion of the hearth 29) are identified based on the difference in image signal density, and the outer periphery of the light-emitting portion is evaporated material. 39 can be recognized as the outer periphery of the tip. The reference point of the line of sight of the CCD camera 10 is set at a fixed position with respect to the plasma beam generator 22.
Therefore, one point of the recognized outer periphery of the tip can be detected as a relative position with respect to the plasma beam generator 22. That is, one point of the recognized outer periphery of the tip lowers its position, that is, the level, with the decrease of the evaporation material.
By detecting this and performing feedback control of the drive mechanism 36 (see FIG. 4) of the push-up bar 35, the evaporation material 3
9 can always be maintained at a constant level. The outer periphery of the tip of the evaporation material 39 may be recognized by identifying a light emitting portion and a non-light emitting portion based on a difference in gray level and a difference in color tone of an image signal. Alternatively, a non-light-emitting body fixed relative to the plasma beam generator 22 is installed in the field of view of the CCD camera 10, and the distance between the non-light-emitting body and one point on the outer periphery of the recognized end is measured. The tip position of the material 39 can be detected.

Next, another embodiment of the present invention will be described with reference to FIGS. 1 to 4 are denoted by the same reference numerals, and description thereof is omitted.

The shield plate housing 11 'is provided with the lower case 11
a 'and the upper case 11b' can be divided, and the tubular members 11-5 and 11-6 can be replaced as needed by removing the upper case 11b 'from the lower case 11a'. Side plates 11c are attached to both ends of the shield plate storage portion 11 'so that at least one of them can be removed from the lower case 11a'.
'Can be replaced.

The shield plate 12 'has a rectangular shape.
A rack 12a is attached to one side in the longitudinal direction, and a guide rail 11a 'formed on a side wall of the lower case 11a'.
-1 so as to be slidable in the longitudinal direction of the shield plate storage portion 11 '. Also, the lower case 11a
A motor 14 ′ is provided on the side wall of ′, and a pinion 14 a ′ that engages with the rack 12 a is attached to the motor shaft.

When the evaporation component of the evaporation material adheres to the shield plate 12 'and becomes cloudy, and the level of the image signal obtained from the CCD camera 10 decreases, the shield plate 12'
Is moved by a predetermined distance so that the transparent partial region is located in the space between the tubular members 11-5 and 11-6.

In the above embodiment, the image pickup means is C
Although a CD camera is used, an imaging system capable of image processing, for example, an ITV camera may be used.

In the above embodiment, an ion plating apparatus using a pressure gradient plasma source as a heating source has been described. However, an ion plating apparatus using an HCD plasma source or an electron gun may be used. Further, a vacuum deposition apparatus may be used separately from the ion plating apparatus. In short, the present invention can be applied to a vacuum film forming apparatus that forms a film on a substrate by heating and evaporating the deposited metal while continuously supplying the deposited metal onto the hearth.

[0043]

As described above, according to the present invention, even when the imaging means is used, the level can be detected for a long period of time without being affected by fogging due to the adhesion of the evaporation material. . Therefore, such an apparatus is most suitable for a vacuum film forming apparatus in which the upper end of the evaporating material needs to be constantly maintained at a constant level in a vacuum vessel.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a preferred embodiment of the present invention.

FIG. 2 is a plan sectional view showing a preferred embodiment of the present invention.

FIG. 3 is an enlarged longitudinal sectional view showing a main part in FIG. 1;

FIG. 4 is a side view for explaining the movement of the shield disk in FIG. 3;

FIG. 5 is a longitudinal sectional view showing another embodiment of the present invention.

FIG. 6 is a plan sectional view of FIG. 5;

FIG. 7 is a longitudinal sectional view showing a structure of an ion plating apparatus to which the present invention is applied.

8 is an enlarged sectional view showing a structure around a hearth in FIG. 7;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 CCD camera 11 Shield plate storage part 11-2 Vacuum cutoff glass 11-3 Tubular body 12 Shield disk 13 Shutter mechanism 13-1 Shutter 14 Rotation drive mechanism 15 Darkening glass 29 Hearth 35 Push-up rod 36 Drive mechanism 39 Evaporation material

Claims (10)

[Claims] 1. An evaporating material which is placed in a container which is shielded from the atmosphere and which evaporates while emitting light by heating is imaged from obliquely above the evaporating material by an image pickup means provided outside the container. An apparatus for processing an image obtained from the means to detect an evaporation state of the evaporation material, wherein the imaging means is configured to evaporate the evaporation material through a hole provided in the container in accordance with the imaging area. And a chamber is formed between the container and the imaging means and communicates with the container through the hole and is isolated from the atmosphere. The imaging means of the chamber corresponding to the imaging area A transparent member capable of transmitting light is provided on the side wall, and a transparent movable plate that is always partially interposed between the transparent member and the hole is provided in the chamber. The board is exposed towards the container Evaporating state detection device of the evaporation material, characterized by being configured to cloudy and displacement due to the adhesion of the volatile components of the evaporation material to the portion. 2. The evaporation state detecting device according to claim 1, wherein the movable plate is a rotatable disk made of glass.
An apparatus for detecting an evaporation state of an evaporating material, wherein the apparatus is rotatably driven such that a portion exposed to the container is located on the same circumference around a rotation axis. 3. The evaporating state detecting device according to claim 1, wherein the movable plate is a rectangular plate made of glass, and a portion exposed to the container is moved linearly. Detecting device for evaporating material. 4. The evaporation state detecting device according to claim 1, wherein the chamber is exposed between a portion of the movable plate exposed toward the container and the hole of the container and toward the container. A cylindrical member for defining the imaging area of the imaging means is provided between the portion to be formed and the transparent member. 5. The evaporation state detecting device according to claim 1, wherein a shutter is driven in the container so as to be displaceable between a first region corresponding to the hole and a second region outside the first region. An evaporating state detecting device, wherein the shutter mechanism is controlled to drive the shutter in the second area only at the time of imaging by the imaging means. 6. A heating source, and a hearth disposed in a vacuum vessel and acting as an anode, wherein the heating source evaporates a columnar evaporating material stored in the hearth, and evaporates the evaporated substance to a substrate. In a vacuum film forming apparatus for forming a film on the substrate by adhering to a surface, an image of the evaporating portion of the evaporation material is imaged from obliquely above by an imaging means installed outside the vacuum vessel, and obtained from the imaging means. A device for processing the obtained image to detect an evaporation state of the evaporation material, wherein the imaging means captures an upper surface of the evaporation material through a hole provided in the vacuum container corresponding to the imaging area. A chamber is formed between the vacuum vessel and the imaging means and communicates with the vacuum vessel through the hole and is isolated from the atmosphere, and an imaging device corresponding to the imaging area is provided between the vacuum vessel and the imaging means. A transparent member capable of transmitting light is provided on the side wall, and a transparent movable plate that is always partially interposed between the transparent member and the hole is provided in the chamber. A vacuum film forming apparatus, which is configured to be displaced when it becomes cloudy due to attachment of an evaporation component of the evaporation material to a portion exposed toward the vacuum container. 7. The vacuum film forming apparatus according to claim 6, wherein
The movable plate is a rotatable disk made of glass, and is rotatably driven such that a portion exposed toward the vacuum vessel is located on the same circumference around a rotation axis. Vacuum film forming equipment. 8. The vacuum film forming apparatus according to claim 6, wherein
The movable plate is a rectangular plate made of glass, and a portion exposed to the container is moved linearly. 9. The vacuum film forming apparatus according to claim 6, wherein
In the chamber, between the portion of the movable plate exposed toward the vacuum container and the hole of the vacuum container and between the portion exposed toward the vacuum container and the transparent member, A vacuum film forming apparatus, wherein a cylindrical member for defining the imaging area of the imaging means is provided. 10. The vacuum film forming apparatus according to claim 6, wherein a shutter is driven in the container so as to be displaceable between a first region corresponding to the hole and a second region outside the first region. A vacuum mechanism, wherein the shutter mechanism is driven and controlled so that the shutter is kept in the second area only when the image is taken by the imaging means.