JPH08167751A - Laser apparatus - Google Patents

Abstract

PURPOSE: To obtain a laser apparatus having a solid-state laser element to be excited by a semiconductor laser beam, capable of cooling the solid-state laser element effectively, strong against vibration, shock, etc., and easy to assemble and adjust. CONSTITUTION: This appaaratus comprises a first cylindrical member 11 having an opening 12 and a second cylindrical member 22 having fins 23. Inside the cylindrical member 11 provided are a semiconductor element (LD) 1, a condensing lens 2, and a reflecting mirror 3. Inside the cylindrical member 22 arranged is a solid-state laser element (YAG) 4, and an output mirror 5 is provided at the end surface of the cylindrical member 22. The cylindrical member 22 is inserted into the cylindrical member 11, by screwing the threaded part 24 of the cylindrical member 22 into the threaded part 12 of the cylindrical member 11 so that the fins 23 of the cylindrical part 22 may be positioned inside the opening 12. The YAG 4 is cooled by cooling the fins 23 exposed in the opening 12 forcedly.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser device used, for example, for laser soldering of electronic parts, and more particularly to a laser device for exciting a solid-state laser element with semiconductor laser light.

[0002]

2. Description of the Related Art In recent years, it has been attempted to solder an IC lead to a mounting board by using a laser beam from a laser device. In such a laser device, a solid-state laser element such as YAG (hereinafter referred to as YA) is irradiated with light from a semiconductor laser element (hereinafter referred to as LD).
(Explained as G), so-called LD excitation Y
There is an AG laser device.

FIG. 7 shows an example of the laser device, which is an LD.
1, the reflection mirror 3, the YAG 4, and the output mirror 5 are arranged inside the tubular member 8. Note that 3a to 5a are holders. Laser light 6 from LD 1 is used for YAG
4 is applied to excite the YAG 4, and the YAG laser light 7 is amplified by the reflection mirror 3 and the output mirror 5. In this type of laser device, since the wavelength of the YAG laser light 7 changes due to the change in the operating temperature of the YAG 4, it is necessary to keep the operating temperature constant. In this example, however, the output is several mW to several tens. Since it is mW, cooling of YAG4 is not usually required.

On the other hand, FIG. 8 shows another example of the above laser device, which can obtain an output of several W even with the same LD excitation as described above. The output of the laser light 6 of the LD 1 that excites the YAG 4 is also high, and the laser light 6 is condensed by the condensing lens 2 and applied to the end surface of the YAG 4. In this case, since the YAG 4 also generates a large amount of heat, the fins 9 are attached to the YAG 4 and the YAG 4 is cooled by forced air cooling or the like.

In the case of this example, since it is necessary to cool the YAG 4, as shown in FIG. 7, each component 1 for laser oscillation,
It is difficult to adopt a configuration in which 3 to 5 are arranged inside the tubular member 8, and the respective component parts 1 to 5 are attached to the support members 1a to 5 as shown in FIG.
It is arranged and fixed on the base 10 via a.

[0006]

As described above, FIG.
The laser device in which the components 1 and 3 to 5 for laser oscillation as described above are arranged in the tubular member 8 has a small output, and
It is not necessary to consider the cooling for the AG4.
On the other hand, the laser device for obtaining a high output of several W class as shown in FIG. 8 requires cooling of the YAG 4.

Therefore, the high-power type laser device is
Since the components for laser oscillation 1 to 5 are placed on the base 10 and are of a stationary type, there is a problem that the entire apparatus is vulnerable to vibrations and shocks, and assembly and adjustment are extremely troublesome.

Therefore, the present invention is capable of effectively cooling the solid-state laser element in the laser device for exciting the solid-state laser element by the semiconductor laser light, and is strong against vibration and shock and easy to assemble and adjust. The purpose is to provide things.

[0009]

In order to achieve the above-mentioned object, the present invention is to excite the solid-state laser element by condensing light from a semiconductor laser element with a condenser lens and irradiating the solid-state laser element. In the laser device configured as described above, a first tubular member having an opening for ventilation in an outer peripheral portion and a second tubular member having a fin portion for cooling in an outer peripheral portion are provided, and the first tubular member is provided. The semiconductor laser element and the condenser lens are provided inside a tubular member, and the solid-state laser element is provided inside the second tubular member, and the fin portion of the second tubular member is provided. The second tubular member is fitted into the inside of the first tubular member so that is positioned inside the opening of the first tubular member.

In the laser device, the second
And a mounting member for mounting the cylindrical member so as to be movable along the axial direction of the first cylindrical member.

Further, in the laser device, the mounting means is a screw engaging portion provided on each of the first tubular member and the second tubular member.

Further, in the laser device, a reflection mirror and an output mirror are provided on each of a light incident side and a light emitting side of the solid-state laser element, and at least the output mirror is disposed on the second tubular member. Is characterized by.

[0013]

In the present invention constructed as described above, the second cylindrical member having the solid-state laser element disposed therein is inside the first cylindrical member having the semiconductor laser element and the condenser lens disposed therein. Since the fin portion of the second tubular member, which is fitted in, is positioned inside the opening portion of the first tubular member, the fin portion exposed at the opening portion can be effectively cooled by, for example, forced cooling. Can be cooled to.

The semiconductor laser device, the condenser lens,
Since all the components for laser oscillation, such as the solid-state laser element, are arranged in the tubular member, the entire device becomes extremely strong against vibration and shock. Moreover, since the fin portion of the second tubular member is located within the opening portion of the first tubular member, it is possible to prevent the rigidity of the first tubular member from being lowered due to the opening portion.

Further, when the second tubular member is movably attached along the axial direction of the first tubular member by the attaching means, the end face of the solid-state laser element is easily moved to the focal position of the condenser lens. be able to. In particular, when the mounting means is a screw engaging portion, the second tubular member can be easily fitted and assembled into the first tubular member, and the solid-state laser element can be finely moved in the optical axis direction with high accuracy. Therefore, the complexity of assembly and adjustment can be reduced.

If at least the output mirror among the reflection mirror and the output mirror for amplifying the laser beam from the excited solid-state laser element is disposed on the second cylindrical member, the first cylindrical member is provided. The resonator length can be accurately kept constant regardless of the movement adjustment of the second tubular member.

[0017]

Embodiments of the present invention will be described below with reference to FIGS.

First, FIGS. 1 to 3 show a first embodiment. The laser device of this embodiment includes a first tubular member 11 and a second tubular member 22.

The first cylindrical member 11 is formed in a cylindrical shape,
A pair of openings 12 for ventilation is provided on the outer peripheral portion thereof. The cylindrical member 11 has a main body base 11a through the opening 12.
2 and 3, the pair of connecting portions 13 remains integrally between the main body base portion 11a and the tip supporting portion 11b as shown in FIGS. A semiconductor laser element (hereinafter, referred to as LD) 1, a condenser lens 2 and a reflection mirror 3 are arranged inside the tubular member 11 on the side of the main body 11a. Note that 1a to 3a are holders, respectively. In addition, the main body base 1 of the tubular member 11
A screw portion 14 is formed on the inner peripheral surface of the la 1 on the side of the opening 12.

The second tubular member 22 is the first tubular member 1
1 has a cylindrical shape that can be fitted inside, and a fitting base portion 22a and a fitting tip portion 22b, and a disc-shaped cooling fin 23 therebetween are integrally formed. Then, the solid-state laser element (hereinafter, referred to as YAG) 4 is arranged inside the tubular member 22 on the side of the fitting base 22a, and the output mirror 5 is screwed to the end face of the fitting tip 22b via the holder 5a. ing. Further, a screw portion 24 is formed on the outer peripheral surface of the fitting base portion 22 a of the tubular member 22. The screw portion 24 and the screw portion 14 are preferably precision screws. In addition to YAG, ruby, glass, or the like can be used as the solid-state laser element.

Then, the second tubular member 22 is inserted into the first tubular member 11 from the tip supporting portion 11b side (in the direction of arrow a), and the tubular member 22 is rotated to move the fitting base portion 22a. The screw portion 24 is engaged with the screw portion 14 of the main body base 11 a of the tubular member 11. In such a fitted state of the second tubular member 22 into the first tubular member 11, the fins 23 are positioned in the opening 12, and the fitting tip 22b is fitted in the tip support 11b. There is.

In the laser device configured as described above, the laser light 6 from the LD 1 is condensed by the condenser lens 2 and is irradiated onto the end surface of the YAG 4 via the reflection mirror 3. The YAG laser light 7 from the YAG 4 excited by the laser light 6 is reflected by the reflection mirror 3 and the output mirror 5.
And YAG laser light 7 of high output is emitted from the output mirror 5.

As described above, in order to collect the laser beam 6 by the condenser lens 2 and irradiate it on the YAG 4 to obtain a high output of several W by continuous oscillation, the YAG 4 needs to be cooled. Here, in the present embodiment, since the fins 23 of the second tubular member 22 are located inside the opening 12 of the first tubular member 11, air or the like is forced into the opening 12 portion. By applying the heat, the YAG 4 can be cooled very effectively by the heat radiation from the fins 23.

Then, each component 1 to 5 for laser oscillation
Is disposed inside the first and second tubular members 11 and 22, so that the vibration resistance and impact resistance of the entire apparatus can be made extremely high. Although the rigidity of the first tubular member 11 is reduced by providing the ventilation opening 12 in the first tubular member 11, the main body base 11 of the tubular member 11 is reduced.
a and the fitting base 22 of the tubular member 22 on the tip support 11b.
a and the fitting tip 22b are fitted together, and the opening 1
Since the fins 23 are located in the inside 2, it is possible to prevent a decrease in rigidity.

Further, like this type of laser device, when the laser beam 6 is condensed by the condenser lens 2 and applied to the end surface of the YAG 4, and the YAG 4 is efficiently excited, the condenser lens 2 is used. It is necessary to adjust the focal position and the end surface position of the YAG 4 with high accuracy. Therefore, the spacer 15 or the like is necessary for adjusting the distance of the condenser lens 2 to the YAG 4 and for positioning the holder 2a. At the time of assembly and adjustment, it is necessary to remove the condenser lens 2, replace the spacer 15, or the like. The work is extremely troublesome.

However, in this embodiment, since the second tubular member 22 is movable in the axial direction of the first tubular member 11, the end face of the YAG 4 is easily moved to the focal position of the condenser lens 2. be able to. This eliminates the need for attaching and detaching the condenser lens 2, replacing the spacer 15, and the like, and the spacer 15 may simply be for positioning the holder 2a. In particular, in this embodiment, the first tubular member 11 and the second tubular member 12 are screw-engaged with each other.
By the rotation of, the fitting and assembling can be performed very easily, and the YAG 4 can be finely moved in the optical axis direction with high accuracy, and the assembling and adjusting complexity can be significantly reduced.

To fix the second tubular member 22, the set screw 16 may be tightened from the outside of the first tubular member 11. In addition, the tip end support portion 11b of the tubular member 11
A threaded portion may be provided between and the fitting tip portion 22b of the tubular member 22, and a set screw may be used in this portion.

The distance from the YAG 4 to the output mirror 5 is a resonator length for amplifying the YAG laser light 7, and strict accuracy is required. However, as in this embodiment, the output mirror 5 is arranged in the second cylinder. When it is attached to the cylindrical member 22, it is not necessary to detach the output mirror 5 when adjusting the movement of the second cylindrical member 22 with respect to the first cylindrical member 11, and the resonator length from the YAG 4 to the output mirror 5 can be accurately adjusted. Well can always be constant.

Next, FIG. 4 shows a second embodiment. In this example, the reflection mirror 3 is screwed to the end surface of the fitting base portion 22a of the second tubular member 22 via the holder 3a. According to this, the position of the reflection mirror 3 can also be made highly accurate. Further, the assembling of the condenser lens 2 to the first tubular member 11 becomes easy, and the spacer 15 is not necessary.

Next, FIGS. 5 and 6 show a third embodiment.
In this example, one opening 12 ′ of the first tubular member 11 is formed to be long, and the second tubular member 22 is provided from the side of the first tubular member 11 via the opening 12 ′. It is configured to be attachable (direction of arrow b). According to this, the second
Since the fins 23 of the tubular member 22 can be made larger than the inner diameter of the first tubular member 11, the cooling efficiency can be further improved. In addition, the first tubular member 11
Since the second tubular member 22 can be attached within the entire length of the, the tubular member 22 can be easily replaced even if there is an irradiation target near the laser emission direction.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various effective modifications and applications are possible based on the technical idea of the present invention. For example, as the mounting means for mounting the second tubular member movably in the optical axis direction of the first tubular member, various slide structures or the like may be used in addition to the screw engaging portion shown in the embodiment. it can.

[0032]

As described above, according to the present invention,
In the laser device that excites the solid-state laser element by the semiconductor laser light, since the solid-state laser element can be cooled extremely effectively on the structure in which each component for laser oscillation is arranged in the cylindrical member, It is possible to promote higher output in stable operation. Moreover, since the entire device can be made extremely strong against vibrations and shocks, it is possible to improve the durability and reliability as well as the portability. Furthermore, since assembly and adjustment can be performed very easily, cost reduction can be achieved with a highly accurate device.

[Brief description of drawings]

FIG. 1 is a sectional view of a laser device according to a first embodiment of the present invention.

FIG. 2 is a view of the laser device according to the first embodiment shown in FIG.
It is sectional drawing in the A line arrow view.

FIG. 3 is an external perspective view of the laser device according to the first embodiment.

FIG. 4 is a sectional view of a laser device according to a second embodiment of the present invention.

FIG. 5 is a sectional view of a laser device according to a third embodiment of the present invention.

FIG. 6 is a B- of FIG. 5 of the laser device according to the third embodiment.
It is sectional drawing in the B line arrow.

FIG. 7 is a schematic cross-sectional view of a conventional laser device.

FIG. 8 is a schematic side view of another conventional laser device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 LD (semiconductor laser element) 2 Condensing lens 3 Reflection mirror 4 YAG (solid-state laser element) 5 Output mirror 6 LD laser light 7 YAG laser light 11 1st cylindrical member 11a Main body base 11b Tip support part 12, 12 ' Opening 13 Connection 14 Threaded part 15 Spacer 16 Set screw 22 Second tubular member 22a Fitting base 22b Fitting tip 23 Fin 24 Threaded part

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Satoshi Yamaguchi 5-10-1 Fuchinobe, Sagamihara-shi Nippon Steel Co., Ltd. Electronics Research Laboratory

Claims (4)

[Claims] 1. A laser device configured to condense light from a semiconductor laser element by a condenser lens and irradiate the solid-state laser element to excite the solid-state laser element. And a second cylindrical member having a cooling fin portion on the outer peripheral portion thereof, wherein the semiconductor laser device and the condenser lens are provided inside the first cylindrical member. The solid-state laser element is disposed inside the second tubular member, and the fin portion of the second tubular member is located inside the opening of the first tubular member. A laser device in which the second tubular member is fitted inside the first tubular member. 2. The laser device according to claim 1, further comprising mounting means for mounting the second tubular member so as to be movable along the axial direction of the first tubular member. 3. The laser device according to claim 2, wherein the attaching means is a screw engaging portion provided on each of the first tubular member and the second tubular member. 4. A reflection mirror and an output mirror are respectively provided on a light incident side and a light outgoing side of the solid-state laser element, and at least the output mirror is disposed on the second tubular member. Item 2. A laser device according to item 1, 2 or 3.