JPH05253879A - Transfer method and device - Google Patents

Abstract

PURPOSE:To implement a transfer method and device for reducing the vibration of an object being transferred. CONSTITUTION:In a transfer method using a robot which holds and transfers an object via a relief mechanism for overloads, the relief mechanism 11 is fixed by a fixing means which uses vacuum suction or an electromagnet while an object is being transferred, to reduce the vibration of the object during transfer.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carrying method and a carrying device. Specifically, when carrying an object with a robot,
The present invention relates to a method of preventing vibration from being generated by a detection function (or RCC escape mechanism) such as overload.

In recent years, in a semiconductor device manufacturing process, a transfer device for transferring an object such as a wafer has a function of detecting an overload so as not to damage the object. However, since the detection function may cause vibration during transportation, it is necessary to reduce the vibration.

[0003]

2. Description of the Related Art FIG. 7 is a view showing a conventional wafer transfer robot. This transfer robot 1 includes a rotatable vertical shaft 2, a retractable arm 3 attached to the shaft, a rotation attached to the tip of the arm about an axis X parallel to the arm, and an arm. It is configured to be provided with a transported object suction unit 4 which can rotate about a right-angled axis Z as a central axis, and a wafer 5 can be transported between a resin cassette 6 and a quartz basket 7.

Then, when the wafers 5 are accommodated in the cassette 6 or the basket 7 in the conveyed object suction unit 4,
Since there is a problem that the wafer 5 hits the groove 8 or causes dust generation, an overload can be detected. Therefore, as shown in FIG. 8, the wafer suction unit 4 is provided with a spring 11 between the fixed plate 9 attached to the arm of the robot and the suction plate 10 for sucking and holding the wafer 5, thereby providing flexibility. At the same time when the load is released, an overload can be detected by an optical fiber sensor (not shown).

[0005]

In the above-described conventional article adsorbing unit, since the adsorbing plate 10 is supported by the spring 11, the article is vibrated when it is abruptly conveyed. As a result, when the wafer is to be accommodated in the cassette 6 or the basket 7, the wafer may hit the groove 8 or may be separated from the suction plate 10. Therefore, there is a problem that it is necessary to wait until the vibration is stopped.

The present invention is intended to realize a carrying method and a carrying apparatus in which the vibration of a carried object is reduced.

[0007]

According to another aspect of the present invention, there is provided a robot carrying method for supporting and carrying an object to be conveyed through an escape mechanism when an overload occurs. The inside is characterized in that the escape mechanism 11 is fixed by a fixing means 12 using a vacuum adsorption or an electromagnet to reduce the vibration of the conveyed object during conveyance.

Further, in the carrying method of the present invention, in the carrying device having the escape mechanism at the time of occurrence of overload in the object supporting portion, the fixing means for fixing the escape mechanism 11 by vacuum suction or electromagnet. It is characterized in that 12 is provided.

In addition to that, the fixing means 12 for fixing the escape mechanism 11 has a positioning function. By adopting this configuration, it is possible to obtain a carrying method and a carrying apparatus in which the vibration of the carried object is reduced.

[0010]

According to the present invention, as shown in FIG. 3, the fixing means 12 by vacuum suction (or electromagnet) capable of fixing the suction plate 10 to the fixing plate 9 of the conveyance object suction unit 4 is provided, so that the conveyance object (wafer During the transportation of 5), the suction plate 10 can be fixed by operating the fixing means 12 as shown in FIG. As a result, the vibration of the conveyed product can be reduced.

[0011]

1 and 2 are views showing a carrying device of the present invention, FIG. 1 is a perspective view, FIG. 2 is a view showing a carried object suction unit, FIG. 1 (a) is a side view, and FIG. ) Is a Z arrow view of FIG. In this embodiment, a rotatable vertical shaft 2, an extendable arm 3 attached to the shaft, a rotation about an axis parallel to the arm, and a rotation about an axis perpendicular to the arm. It is similar to the conventional example described in FIG. 7 in that it is equipped with the conveyed product adsorption unit 4, and the difference is that the conveyed product adsorption unit 4 is improved.

That is, as shown in FIG. 2, the transported object suction unit 4 in this embodiment has a fixed plate 9 attached to an arm and a spring (an escape mechanism when an overload occurs) on the fixed plate 9.
Adsorption plate 10 attached via 11 and the adsorption plate 1
A fixing means 12 for fixing 0 to the fixing plate 9,
The fixing means 12 has a vacuum suction surface 13 opposed to the suction plate 10 with a small distance (a distance that does not hinder the operation of the escape mechanism), and the suction surface 13 has a vacuum passage 1
4 is opened.

The carrying method of the present invention using the apparatus of the present embodiment thus constructed will be described with reference to FIG. First, when the wafer is taken out from the cassette, vacuum suction is performed from the vacuum suction port 15 of the suction plate as shown in FIG.
Adsorb and pull up from the cassette. Then, before moving to conveyance, vacuum suction is performed from the vacuum suction port 16 of the fixing means 12 to suck and fix the suction plate 10 on the vacuum suction surface 13 as shown in FIG. 3B. Next, the wafer 5 is transferred to the basket while maintaining the state of FIG. Here, the fixing means 1
2 releases the suction of the suction plate 10, and the suction unit descends to insert the wafer 5 into the basket. Further, the reverse direction is similarly conveyed.

By carrying the wafer in this way,
Since the suction plate 10 holding the wafer by suction is fixed to the fixed plate 9 by the fixing means 12, the vibration during transportation is reduced. Therefore, the waiting time for inserting the wafer into the basket or the cassette can be reduced, and high-speed transfer becomes possible. Further, when the wafer is taken out of the cassette or the basket or inserted, the attracting action of the fixing means 12 is released, so that the function of the escape mechanism at the time of occurrence of an overload when the wafer hits the groove is not hindered.

The fixing means 12 can be provided with a positioning function. FIG. 4A shows the fixing means 12
A conical recess 17 is formed in the opening of the vacuum passage 14 of
The suction plate 10 is provided with a protrusion 18 that fits into the recess 17. When the suction plate 10 is fixed by suction, as shown in FIG. 4 (b), the conical recess 17 and the conical projection 18 are fitted to each other, so that the suction plate 10 can be positioned vertically and horizontally. ..

[0016] Here, if one of the positioning is carried out during transportation and the other one is carried out until just before being placed in a cassette or the like, troubles during transportation can be reduced. (Because the overload escape mechanism has a spring property, it tends to be in an indefinite position.) Further, the same effect can be obtained by forming the projection 18 in FIG. 4 into a hemispherical shape as shown in FIG.

FIG. 6 is a view showing a conveyed object adsorption unit in another embodiment of the conveying apparatus of the present invention. In the figure, the same parts as those in FIG. 2 are designated by the same reference numerals. This embodiment is basically the same as the previous embodiment shown in FIG. 2, except that the fixing means 12 is changed. That is, the fixing means 12 used the vacuum suction mechanism in the previous embodiment, but used the electromagnet 19 in the present embodiment. In this embodiment configured as described above, the attraction plate 10 can be attracted and fixed by operating the electromagnet 19. Therefore, the same effect as in the previous embodiment can be obtained in the wafer transfer. It is also possible to provide a positioning mechanism similar to that shown in FIGS.

[0018]

According to the present invention, by providing the fixing means for fixing the suction plate of the transported object suction unit, it is possible to reduce the vibration of the transported object during the transportation, and it becomes possible to perform high speed transportation. Further, it is possible to position the suction plate having a flexible mounting portion due to overload or the like.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a carrying device of the present invention.

2A and 2B are views showing a conveyed object suction unit in an example of the conveying apparatus of the present invention, FIG. 2A is a side view, and FIG.
It is a Z arrow line view of a figure.

FIG. 3 is a diagram for explaining a carrying method of the present invention.

FIG. 4 is a view showing a positioning mechanism of a fixing means in an embodiment of the carrying device of the present invention, (a) is a state before adsorption,
(B) is a figure which shows an adsorption | suction state.

FIG. 5 is a view showing another positioning mechanism of the fixing means in the embodiment of the carrying device of the present invention.

FIG. 6 is a diagram showing a conveyed product adsorption unit in another embodiment of the conveying device of the present invention.

FIG. 7 is a diagram showing a conventional transport device.

8A and 8B are views showing a transported object suction unit in a conventional transport device, in which FIG. 8A is a side view, FIG. 8B is a Z arrow view in FIG. 8A, and FIG. 8C is c- in FIG. It is sectional drawing in the c line.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Robot 2 ... Vertical axis 3 ... Arm 4 ... Conveyance object adsorption unit 9 ... Fixed plate 10 ... Adsorption plate 11 ... Spring (overload escape mechanism) 12 ... Fixing means 13 ... Vacuum adsorption surface 14 ... Vacuum passages 15, 16 ... Vacuum suction port 17 ... Dent 18 ... Protrusion 19 ... Electromagnet

Claims (3)

[Claims] 1. A transfer method by a robot for supporting and transferring an object to be transferred via an escape mechanism when an overload occurs, wherein a vacuum suction or an electromagnet is provided to the escape mechanism (11) during the transfer of the object to be conveyed. Secure with the securing means (12) used,
A conveyance method for reducing vibration of a conveyed object during conveyance. 2. A transfer device having an escape mechanism at the time of occurrence of overload in the object support portion, comprising fixing means (12) for fixing the escape mechanism (11) by vacuum suction or electromagnet. A transport device characterized by. 3. The transfer device according to claim 2, wherein the fixing means (12) for fixing the escape mechanism (11) has a positioning function.