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JP3217110B2 - Transfer device - Google Patents

Transfer device

Info

Publication number
JP3217110B2
JP3217110B2 JP5792192A JP5792192A JP3217110B2 JP 3217110 B2 JP3217110 B2 JP 3217110B2 JP 5792192 A JP5792192 A JP 5792192A JP 5792192 A JP5792192 A JP 5792192A JP 3217110 B2 JP3217110 B2 JP 3217110B2
Authority
JP
Japan
Prior art keywords
suction
plate
suction plate
wafer
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP5792192A
Other languages
Japanese (ja)
Other versions
JPH05253879A (en
Inventor
一男 島根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5792192A priority Critical patent/JP3217110B2/en
Publication of JPH05253879A publication Critical patent/JPH05253879A/en
Application granted granted Critical
Publication of JP3217110B2 publication Critical patent/JP3217110B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は搬送装置に関する。
詳しくは、ロボット等で物体を搬送するとき、過負荷な
どの検出機能(又はRCCの逃げ機構)により振動が発
生するのを防止可能とした搬送装置に関する。
The present invention relates to relates to a conveyance apparatus.
More specifically, the present invention relates to a transfer device capable of preventing generation of vibration by a detection function for overload or the like (or an RCC escape mechanism) when transferring an object by a robot or the like.

【0002】近年、半導体装置の製造工程において、ウ
エハ等の物体を移し換える時の搬送装置には、物体にダ
メージを与えない為に、過負荷を検出する機能を持たせ
ている。しかし、その検出機能が搬送中の振動の原因と
なることがあるので、その振動を低減させる必要があ
る。
In recent years, in a semiconductor device manufacturing process, a transfer device for transferring an object such as a wafer has a function of detecting an overload so as not to damage the object. However, since the detection function may cause vibration during conveyance, it is necessary to reduce the vibration.

【0003】[0003]

【従来の技術】図は従来のウエハ搬送用のロボットを
示す図である。この搬送ロボット1は、回転できる垂直
軸2と、該軸に取付けられた伸縮可能なアーム3とを具
備し、該アームの先端にアームと平行な軸Xを中心軸と
する回転、及びアームと直角な軸Zを中心軸とする回転
ができる搬送物吸着用の搬送装置が取付けられて構成
されており、ウエハ5を樹脂カセット6と石英バスケッ
ト7との間を搬送できるようになっている。
2. Description of the Related Art FIG. 6 is a diagram showing a conventional wafer transfer robot. The transfer robot 1 includes a vertical shaft 2 can be rotated, and a telescopic arm 3 attached to the shaft immediately
And Bei, rotation about axis A over arm parallel to the axis X on the tip of the arm, and rotating the transport device 4 for conveying material adsorption can attached to the central axis of the arm and perpendicular to the axis Z The wafer 5 can be transferred between the resin cassette 6 and the quartz basket 7.

【0004】そして、搬送装置4には、ウエハ5をカセ
ット6又はバスケット7に収容させるとき、その溝8に
あたり、ウエハ5を傷つけたり、発塵の原因になるなど
の問題があるため、過負荷を検出できるようになってい
る。そのため、ウエハ吸着ユニット4には図に示すよ
うに、ロボットのアームに取付けられる固定板9とウエ
ハ5を吸着保持する吸着板10との間にばね11を設け
て柔軟性を持たせ、過負荷を逃げると同時に図示なき光
ファイバセンサにより過負荷を検出できるようになって
いる。
When the wafers 5 are stored in the cassette 6 or the basket 7 in the transfer device 4, the wafers 5 may be damaged by the grooves 8 and cause dust generation. Can be detected. For this reason, as shown in FIG. 7 , the wafer suction unit 4 is provided with a spring 11 between the fixed plate 9 attached to the arm of the robot and the suction plate 10 for holding the wafer 5, thereby providing flexibility. The overload can be detected by an optical fiber sensor (not shown) at the same time as the load is released.

【0005】[0005]

【発明が解決しようとする課題】上記従来の搬送装置
は、吸着板10をばね11を介して支持しているため、
急激な搬送を行うと搬送物に振動が発生する。その結果
カセット6やバスケット7にウエハを収容しようとする
とき、溝8に当たったり、あるいはウエハが吸着板10
から離れることがあるため、振動が収まるまで待機せね
ばならないという問題があった。
In the above-mentioned conventional transfer device , the suction plate 10 is supported via the spring 11, so that
If a sudden conveyance is performed, vibrations occur in the conveyed object. As a result, when the wafer is to be stored in the cassette 6 or the basket 7, the wafer hits the groove 8 or the wafer
There is a problem that it is necessary to wait until the vibration stops because it may be away from the vehicle.

【0006】本発明は、搬送中の搬送物の振動を低減さ
た搬送装置を実現しようとする。
[0006] The present invention seeks to realize the conveyance device and the reduced vibration of the conveyed object in the conveying.

【0007】[0007]

【課題を解決するための手段】本発明の搬送装置に於い
ては、被搬送物を吸着支持する吸着板10と、該吸着板
10を吸着する真空通路14を有する固定板9とを具備
し、該固定板9に前記吸着板10を過負荷発生時の逃げ
機構となるばね11を介して支持させてなり、被搬送物
を前記吸着板10に吸着支持させて搬送する搬送装置に
おいて、前記固定板9の真空通路14の開口部に円錐状
の窪み17を設けると共に、該窪み17に対向して前記
吸着板10に円錐状または半球状の突起18を設け、前
記窪み17に突起18を真空吸着したとき前記吸着板1
を位置決めして固定可能としたことを特徴とする。
In the transfer apparatus according to the present invention, a suction plate for sucking and supporting an object to be transferred is provided;
A fixing plate 9 having a vacuum passage 14 for sucking
The fixed plate 9 supports the suction plate 10 via a spring 11 serving as an escape mechanism when an overload occurs .
In a transfer device for transferring adsorbed supported by the suction plate 10, provided with a conical recess 17 in the opening of the vacuum channel 14 of the fixed plate 9, the <br/> suction opposite the depressions viewed 17 A conical or hemispherical projection 18 is provided on the plate 10, and the suction plate 1
Positioning the 0 and wherein the fixable to the thing.

【0008】また、それに加えて、上記逃げ機構11を
固定する固定手段12に位置決め機能を持たせたことを
特徴とする。この構成を採ることにより、搬送中の搬送
物の振動を低減させた搬送装置が得られる。
[0008] In addition, the fixing means 12 for fixing the escape mechanism 11 has a positioning function. By adopting this configuration, conveyance device and the reduced vibration of the conveyed object in the conveying is obtained.

【0009】[0009]

【作用】本発明では、図3に示すように、搬送装置4の
固定板9に吸着板10を固定できる真空吸引による固定
手段12を設けたことにより、搬送物(ウエハ5)を搬
送中は同図(b) に示すように固定手段12を作動させ
て吸着板10を固定できる。これにより搬送中の搬送物
の振動を低減することができる。また、固定手段の真空
通路14の開口部に設けた窪み17と被搬送物を支持す
る吸着板10に設けた突起18との嵌合により吸着板1
0の位置決めができる。
According to the present invention, as shown in FIG. 3, by providing the fixing means 12 by vacuum Aspirate capable of fixing the suction plate 10 to the fixing plate 9 of the conveyor 4, conveys the conveyance object (wafer 5) During this operation, the adsorbing plate 10 can be fixed by operating the fixing means 12 as shown in FIG. As a result, the vibration of the conveyed object during conveyance can be reduced. Also, the vacuum of the fixing means
The dent 17 provided at the opening of the passage 14 and the transferred object are supported.
The suction plate 1 is engaged with the projection 18 provided on the suction plate 10.
Zero positioning is possible.

【0010】[0010]

【実施例】図1及び図2は本発明の搬送装置を示す図で
あり、図1はロボットと共に示す斜視図、図2は正面及
び側面を示す図で、同図(a) は側面図、(b)は
(a)図のZ矢視図(c)は(a)図のc部拡大図であ
る。本実施例の搬送装置は、図1に示すように回転可能
な垂直軸2と、該軸に取り付けられた伸縮可能なアーム
3とを具備するロボットに、アームと平行な軸を中心軸
とする回転、及びアームと直角な軸を中心軸とする回転
ができるように取付けられることは図で説明した従来
例と同様であ
PREFERRED EMBODIMENTS FIG. 1 and FIG. 2 is a diagram showing a conveying device of the present invention, FIG. 1 is a perspective view illustrating with robot, FIG. 2 is a front及
A diagram showing a fine side, FIG. (A) is a side view, (b) is (a) Z arrow view of Figure (c) is c enlarged view of Figure (a). As shown in FIG. 1 , the transfer device of this embodiment is a robot having a rotatable vertical shaft 2 and a telescopic arm 3 attached to the shaft. rotating, and Rukoto mounted so as to be rotated around axis arm perpendicular axes Ru similar der the conventional example described in FIG.

【0011】本実施例搬送装置4は図2に示すよう
に、ロボットのアームに取り付けられる固定板9と、該
固定板9にばね(過負荷発生時の逃げ機構)11を介し
て取り付けられた吸着板10と、該吸着板10を固定板
9に固定するための固定手段12からなり、該固定手段
12は吸着板10に対し僅かな距離(逃げ機構の作用を
阻害しない程度の距離)を隔てて真空吸着面13を対向
させたもので、該吸着面13には真空通路14を開口さ
せている。
As shown in FIG. 2, the transfer device 4 of the present embodiment is attached to a fixed plate 9 attached to an arm of a robot , and to the fixed plate 9 via a spring (a relief mechanism when an overload occurs) 11. Suction plate 10 and fixing means 12 for fixing the suction plate 10 to the fixing plate 9. The fixing means 12 is a small distance from the suction plate 10 (a distance that does not hinder the operation of the escape mechanism). A vacuum passage 14 is opened in the suction surface 13 so as to face the vacuum suction surface 13.

【0012】[0012] また、前記固定手段12は、図2(C)にFurther, the fixing means 12 is shown in FIG.
示すように固定板9の真空通路14の開口部に円錐形のAs shown, a conical opening is formed in the opening of the vacuum passage 14 of the fixing plate 9.
窪み17を設けると共に、吸着板10には前記窪み17A depression 17 is provided, and the depression 17
に嵌合できる円錐形の突起18を設けて位置決め機構をA conical projection 18 that can be fitted to
も兼ねている。Doubles as well.

【0013】このように構成された本実施例の搬送装置
の作用を図3により説明する。先ず、ウエハをカセット
より取り出すときは、図3(a) に示すように吸着板の
真空吸引口15から真空吸引し、ウエハ5を吸着し、カ
セットから引き上げる。次いで搬送に移る前に、図3
(b) に示すように固定手段12の真空吸引口16から
真空吸引して真空吸着面13に吸着板10を吸着し固定
する。次いで図3(b) の状態を維持してウエハ5をバ
スケットまで搬送する。ここで、固定手段12は吸着板
10の吸着を解除し、吸着ユニットは下降してウエハ5
をバスケットに挿入する。また逆方向も同様にして搬送
する。
The transport device of the present embodiment having the above-described structure.
3 will be described with reference to FIG. First, when taking out a wafer from the cassette, as shown in FIG. 3A, vacuum suction is performed through the vacuum suction port 15 of the suction plate, and the wafer 5 is sucked and pulled up from the cassette. Next, before moving on to transport,
As shown in (b), the suction plate 10 is sucked and fixed to the vacuum suction surface 13 by vacuum suction from the vacuum suction port 16 of the fixing means 12. Next, the wafer 5 is transferred to the basket while maintaining the state shown in FIG. Here, the fixing means 12 releases the suction of the suction plate 10, and the suction unit descends to move the wafer 5.
Into the basket. Also, the sheet is conveyed in the reverse direction in the same manner.

【0014】このようにウエハを搬送することにより、
ウエハを吸着保持している吸着板10は固定手段12に
よって固定板9に固定されるため搬送中の振動は低減さ
れる。従ってバスケット又はカセットへのウエハ挿入待
機時間が節減でき高速搬送が可能となる。また、ウエハ
のカセット又はバスケットからの取り出し、又は挿入時
は固定手段12の吸着作用を解除するため、ウエハが溝
に当たるような場合の過負荷発生時の逃げ機構の機能を
阻害することはない。
By transporting the wafer in this manner,
Since the suction plate 10 holding the wafer by suction is fixed to the fixing plate 9 by the fixing means 12, vibration during transfer is reduced. Therefore, the waiting time for inserting a wafer into a basket or a cassette can be reduced, and high-speed transfer can be performed. In addition, since the suction action of the fixing means 12 is released when the wafer is taken out or inserted from the cassette or the basket, the function of the escape mechanism when an overload occurs when the wafer hits the groove is not hindered.

【0015】また、上記の固定手段12は吸着板10を
吸着固定した場合は図4(b) に示すように円錐状の窪
み17と円錐状の突起18とが嵌合し吸着板10の縦・
横方向の位置決めをすることができる。
Further, combined suction plate 10 when the fixing means 1 2 above adsorbed fixing the intake Chakuban 10 and the conical recess 17 and the conical-shaped projection 18 as shown in FIG. 4 (b) fitting Vertical
Lateral positioning is possible.

【0016】ここで位置決めは、1つは搬送中の位置決
めで他の1つはカセットなどに入れる直前までこの位置
決めを行っておくと、搬送中のトラブルを低減すること
ができる。(過負荷逃げ機構にばね性をもたせているた
め不定位置になり易い。)また図4の突起18を図5の
如く半球状としても同様な効果が得られる。
Here, the positioning can be reduced during transporting if one is positioned during transport and the other is positioned until immediately before loading into a cassette or the like. (Since the overload relief mechanism has a spring property, it tends to be in an indefinite position.) The same effect can be obtained by making the projection 18 in FIG. 4 a hemisphere as shown in FIG.

【0017】[0017]

【発明の効果】本発明に依れば、搬送物吸着の吸着板
を固定する固定手段を設けたことにより、搬送中の搬送
物の振動を低減することができ高速搬送が可能となる。
また過負荷などの為に取り付け部に柔軟性を持たせた吸
着板の位置決めが可能となる。
According to the present invention, the provision of the fixing means for fixing the suction plate for adsorbing the conveyed article enables the vibration of the conveyed article being conveyed to be reduced, thereby enabling high-speed conveyance.
In addition, it becomes possible to position the suction plate with the attachment portion having flexibility due to overload or the like.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の搬送装置をロボットと共に示す斜視図
である。
FIG. 1 is a perspective view showing a transfer device of the present invention together with a robot .

【図2】本発明の搬送装置の実施例を示す図で、(a)
は側面図、(b)は(a)図のZ矢視図、(c)は
(a)図のc部拡大図である。
FIG. 2 is a view showing an embodiment of the transport device of the present invention, and (a).
Is a side view, (b) is a view as viewed in the direction of the arrow Z in (a) , and (c) is a view.
(A) It is a c section enlarged view of a figure .

【図3】本発明の搬送装置の実施例の作用を説明するた
めの図である。
FIG. 3 is a diagram for explaining the operation of the embodiment of the transport device of the present invention.

【図4】本発明の搬送装置の実施例における固定手段の
位置決め機構を示す図で、(a)は吸着前の状態、
(b)は吸着状態を示す図である。
FIGS. 4A and 4B are diagrams showing a positioning mechanism of a fixing unit in the embodiment of the transport device of the present invention, wherein FIG.
(B) is a figure which shows an adsorption state.

【図5】本発明の搬送装置の実施例における固定手段の
他の位置決め機構を示す図である。
FIG. 5 is a view showing another positioning mechanism of the fixing means in the embodiment of the transport device of the present invention.

【図6】従来の搬送装置をロボットと共に示す図であ
る。
FIG. 6 is a diagram showing a conventional transfer device together with a robot .

【図7】従来の搬送装置を示す図で、(a)は側面図、
(b)は(a)図のZ矢視図、(c)は(a)図のc−
c線における断面図である。
[7] a diagram showing a conventional conveying equipment, (a) shows the side view,
(B) is a view taken in the direction of the arrow Z in (a), and (c) is a c- view in (a).
It is sectional drawing in the c line.

【符号の説明】[Explanation of symbols]

1…ロボット 2…垂直軸 3…アーム 4…搬送装置 9…固定板 10…吸着板 11…ばね(過負荷逃げ機構) 12…固定手段 13…真空吸着面 14…真空通路 15,16…真空吸引口 17…窪み 18…突起DESCRIPTION OF SYMBOLS 1 ... Robot 2 ... Vertical axis 3 ... Arm 4 ... Transfer device 9 ... Fixing plate 10 ... Suction plate 11 ... Spring (overload relief mechanism) 12 ... Fixing means 13 ... Vacuum suction surface 14 ... Vacuum passage 15, 16 ... Vacuum suction Mouth 17 ... dent 18 ... projection

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) B25J 17/02 B25J 15/00 - 15/08 H01L 21/68 B65G 49/07 B23Q 7/04 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 7 , DB name) B25J 17/02 B25J 15/00-15/08 H01L 21/68 B65G 49/07 B23Q 7/04

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 被搬送物を吸着支持する吸着板(10)
と、該吸着板(10)を吸着する真空通路(14)を有
する固定板(9)とを具備し、該固定板(9)に前記吸
着板(10)を過負荷発生時の逃げ機構となるばね(1
1)を介して支持させてなり、被搬送物を前記吸着板
(10)に吸着支持させて搬送する搬送装置において、前記固定板(9)の 真空通路(14)の開口部に円錐状
の窪み(17)を設けると共に、該窪み(17)に対向
して前記吸着板(10)に円錐状または半球状の突起
(18)を設け、前記窪み(17)に突起(18)を真
空吸着したとき前記吸着板(10)を位置決めして固定
可能としたことを特徴とする搬送装置。
A suction plate (10) for sucking and supporting an object to be conveyed.
And a vacuum passage (14) for sucking the suction plate (10).
And a fixing plate (9) for performing the suction.
A spring (1 ) serving as an escape mechanism when the overload occurs in the mounting plate (10)
1) supporting the object to be conveyed through the suction plate
(10) In the transfer device for transferring by suction and support , a conical depression (17) is provided in the opening of the vacuum passage (14) of the fixing plate (9) , and the concavity (17) faces the depression (17).
The suction plate (10) is provided with a conical or hemispherical projection (18), and the suction plate (10) is positioned and fixed when the projection (18) is vacuum-sucked in the recess (17).
A transport device characterized by being made possible.
JP5792192A 1992-03-16 1992-03-16 Transfer device Expired - Fee Related JP3217110B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5792192A JP3217110B2 (en) 1992-03-16 1992-03-16 Transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5792192A JP3217110B2 (en) 1992-03-16 1992-03-16 Transfer device

Publications (2)

Publication Number Publication Date
JPH05253879A JPH05253879A (en) 1993-10-05
JP3217110B2 true JP3217110B2 (en) 2001-10-09

Family

ID=13069470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5792192A Expired - Fee Related JP3217110B2 (en) 1992-03-16 1992-03-16 Transfer device

Country Status (1)

Country Link
JP (1) JP3217110B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6481951B1 (en) * 1999-09-16 2002-11-19 Applied Materials, Inc. Multiple sided robot blade for semiconductor processing equipment
US8182009B2 (en) * 2008-03-13 2012-05-22 Xyratex Technology, Ltd. End effector
TWI769804B (en) 2020-05-29 2022-07-01 日商歐姆龍股份有限公司 The joint structure of the robot
CN111890383B (en) * 2020-08-11 2021-09-24 江苏昱博自动化设备有限公司 Four-way rotating seat type power-assisted manipulator

Also Published As

Publication number Publication date
JPH05253879A (en) 1993-10-05

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