JP7435605B2 - 搬送車 - Google Patents
搬送車 Download PDFInfo
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- JP7435605B2 JP7435605B2 JP2021527439A JP2021527439A JP7435605B2 JP 7435605 B2 JP7435605 B2 JP 7435605B2 JP 2021527439 A JP2021527439 A JP 2021527439A JP 2021527439 A JP2021527439 A JP 2021527439A JP 7435605 B2 JP7435605 B2 JP 7435605B2
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- 238000004891 communication Methods 0.000 claims description 69
- 230000007246 mechanism Effects 0.000 claims description 56
- 238000012546 transfer Methods 0.000 claims description 48
- 230000000903 blocking effect Effects 0.000 description 53
- 230000008859 change Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 10
- 238000012545 processing Methods 0.000 description 9
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000003028 elevating effect Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000005856 abnormality Effects 0.000 description 4
- 230000010365 information processing Effects 0.000 description 4
- 210000000078 claw Anatomy 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000003550 marker Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Warehouses Or Storage Devices (AREA)
Description
M・・・物品
R・・・軌道
BC・・・ブロッキングコントローラ(コントローラ)
HC・・・上位コントローラ(コントローラ)
V、V1~V6・・・搬送車
W・・・フレーム部
AP・・・アクセスポイント
AX1・・・鉛直軸
SYS・・・搬送車システム
10・・・本体部
11・・・ラテラル機構
12・・・回動駆動部
13・・・保持部
18・・・移載部
19、19A、19B・・・アンテナ
20・・・走行部
50・・・車載コントローラ
51・・・記憶部
52・・・通信部
53・・・走行制御部
54・・・移載制御部
55・・・進行許可生成部
56・・・判定部
57・・・状態情報処理部
Claims (4)
- 格子状の軌道を走行する走行部と、
前記走行部に取り付けられ、移載先に対して物品を受け渡しする移載部と、
前記移載部の動作に追従して位置及び姿勢の少なくとも一方が変更可能に設けられ、他の機器との間で無線通信を行うアンテナと、
前記移載部を囲むフレーム部と、
前記移載部及び前記フレーム部を鉛直軸まわりに回動させる回動駆動部と、を備え、
前記回動駆動部は、平面視において前記走行部に対する位置が変わるように前記フレーム部を回動させ、
前記アンテナは、前記フレーム部に設けられ、平面視において前記走行部に対する前記フレーム部の位置が変わることにより、前記鉛直軸まわりの位置が変更され、
前記回動駆動部によって前記フレーム部及び前記アンテナが移動する範囲は、平面視において、前記軌道における格子の1つのマス目に収まる、搬送車。 - 前記移載部は、物品を保持する保持部を水平方向に移動させるラテラル機構を備え、
前記回動駆動部は、前記ラテラル機構を前記鉛直軸まわりに回動させ、
前記アンテナは、前記移載部において前記ラテラル機構により前記水平方向に移動する部分以外の部分に設けられる、請求項1に記載の搬送車。 - 前記アンテナは、前記フレーム部の下端から下方に突出した状態で取り付けられる、請求項1又は請求項2に記載の搬送車。
- 前記走行部は、前記アンテナを介して前記他の機器との間で通信を行うことにより前記軌道における格子の各マス目に対応する進行許可が得られた場合には前記マス目に進行し、前記進行許可が得られない場合には前記マス目には進行しない、請求項1から請求項3のいずれか一項に記載の搬送車。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019114535 | 2019-06-20 | ||
JP2019114535 | 2019-06-20 | ||
PCT/JP2020/018612 WO2020255577A1 (ja) | 2019-06-20 | 2020-05-08 | 搬送車 |
Publications (3)
Publication Number | Publication Date |
---|---|
JPWO2020255577A1 JPWO2020255577A1 (ja) | 2020-12-24 |
JPWO2020255577A5 JPWO2020255577A5 (ja) | 2022-03-10 |
JP7435605B2 true JP7435605B2 (ja) | 2024-02-21 |
Family
ID=74037229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021527439A Active JP7435605B2 (ja) | 2019-06-20 | 2020-05-08 | 搬送車 |
Country Status (8)
Country | Link |
---|---|
US (1) | US12119253B2 (ja) |
EP (1) | EP3988474A4 (ja) |
JP (1) | JP7435605B2 (ja) |
KR (1) | KR102686321B1 (ja) |
CN (1) | CN114126988B (ja) |
IL (1) | IL289059A (ja) |
TW (1) | TWI830922B (ja) |
WO (1) | WO2020255577A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20240178395A1 (en) | 2022-01-20 | 2024-05-30 | Lg Energy Solution, Ltd. | Binder composition for positive electrode of lithium secondary battery, and positive electrode of lithium secondary battery manufactured therewith |
CN118248608B (zh) * | 2024-05-28 | 2024-07-23 | 华芯智上半导体设备(上海)有限公司 | 自动化物料搬送系统 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2715130B2 (ja) | 1989-01-12 | 1998-02-18 | 株式会社ダイフク | 荷搬送設備 |
JP2005001804A (ja) | 2003-06-11 | 2005-01-06 | Hitachi Ltd | 自動クレーンシステム及びクレーン制御方法 |
JP2016175506A (ja) | 2015-03-19 | 2016-10-06 | 村田機械株式会社 | 搬送台車と搬送台車システム |
JP2018118809A (ja) | 2017-01-23 | 2018-08-02 | 株式会社ダイフク | 物品搬送車 |
JP6946965B2 (ja) | 2017-11-22 | 2021-10-13 | 村田機械株式会社 | 搬送システム |
Family Cites Families (26)
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JPS6041234B2 (ja) * | 1976-08-20 | 1985-09-14 | 株式会社 山口機械研究所 | 水流利用の発電装置 |
JPS58152235A (ja) * | 1982-03-08 | 1983-09-09 | Fuji Photo Film Co Ltd | ハロゲン化銀写真感光材料 |
JPS6013801A (ja) | 1983-07-01 | 1985-01-24 | Seiko Instr & Electronics Ltd | 高分子物質精製濃縮装置 |
JPH09110398A (ja) | 1995-10-16 | 1997-04-28 | Sumitomo Heavy Ind Ltd | 無人搬送車の誘導ガイド方式 |
JPH09289708A (ja) * | 1996-04-19 | 1997-11-04 | Toyota Autom Loom Works Ltd | 移動体運行システムの通信方法 |
JPH09295707A (ja) | 1996-05-07 | 1997-11-18 | Shinko Electric Co Ltd | 搬送ロボットを用いたクリーンルームの物品搬送管理方法 |
JP2002068481A (ja) * | 2000-08-28 | 2002-03-08 | Ishikawajima Harima Heavy Ind Co Ltd | コンテナの段積貯蔵装置 |
JP4651835B2 (ja) * | 2001-03-08 | 2011-03-16 | 株式会社シンク・ラボラトリー | ロール立体倉庫における被製版ロールの収納・取り出し方法 |
JP2003150247A (ja) * | 2001-11-19 | 2003-05-23 | Murata Mach Ltd | 有軌道台車システム |
JP2004010204A (ja) * | 2002-06-04 | 2004-01-15 | Matsushita Electric Ind Co Ltd | マーカシステム |
JP4131706B2 (ja) * | 2004-02-12 | 2008-08-13 | 日本輸送機株式会社 | 無人搬送車の走行停止制御装置 |
CN101183431A (zh) * | 2006-06-09 | 2008-05-21 | 日本电气株式会社 | 无线通信系统和无线通信方法 |
JP5266683B2 (ja) | 2007-08-03 | 2013-08-21 | 村田機械株式会社 | 搬送システム、及び該搬送システムにおける教示方法 |
US20110241845A1 (en) * | 2010-04-06 | 2011-10-06 | Sullivan Robert P | Automated Material Handling System with Identification Features |
JP5450334B2 (ja) * | 2010-09-28 | 2014-03-26 | 株式会社椿本チエイン | 物品管理システム |
DE202013008718U1 (de) * | 2013-09-30 | 2013-12-19 | Grenzebach Maschinenbau Gmbh | Transportfahrzeug zum störungsfreien Transport von Lastregalen in Werkshallen mit Funkabschattungen und mit teilweise autonomem Fahrbetrieb |
WO2015052972A1 (ja) | 2013-10-07 | 2015-04-16 | 村田機械株式会社 | グリッパを備える搬送装置とグリッパの制振方法 |
DE102013019368A1 (de) * | 2013-11-18 | 2015-05-21 | Grenzebach Maschinenbau Gmbh | Verfahren und Vorrichtung zur weitgehend maschinellen Zusammenstellung von Warenlieferungen in Lagerhallen |
JP6079672B2 (ja) * | 2014-03-10 | 2017-02-15 | 村田機械株式会社 | 搬送車システム |
JP6365136B2 (ja) | 2014-09-02 | 2018-08-01 | 村田機械株式会社 | 走行車システム |
JP2017154840A (ja) * | 2016-02-29 | 2017-09-07 | 株式会社ダイフク | 物品搬送設備 |
JP6520797B2 (ja) * | 2016-04-11 | 2019-05-29 | 株式会社ダイフク | 物品搬送設備 |
US20170086540A1 (en) | 2016-12-12 | 2017-03-30 | Gold Brands Holdings Inc. | Method and adjustable ring for relieving stress |
JP7066160B2 (ja) * | 2017-08-23 | 2022-05-13 | 学校法人千葉工業大学 | 自走型鉄筋作業用ロボット、自走型鉄筋結束ロボット |
JP6906754B2 (ja) | 2017-10-31 | 2021-07-21 | 村田機械株式会社 | 搬送システム |
DE102017222883A1 (de) | 2017-12-15 | 2019-06-19 | Te Connectivity Germany Gmbh | Kontaktierungseinheit zum elektrischen Kontaktieren zumindest eines Elektroniksegments eines Elektronikmoduls und Verfahren |
-
2020
- 2020-05-08 EP EP20827173.4A patent/EP3988474A4/en active Pending
- 2020-05-08 JP JP2021527439A patent/JP7435605B2/ja active Active
- 2020-05-08 WO PCT/JP2020/018612 patent/WO2020255577A1/ja active Application Filing
- 2020-05-08 CN CN202080044041.4A patent/CN114126988B/zh active Active
- 2020-05-08 US US17/620,967 patent/US12119253B2/en active Active
- 2020-05-08 KR KR1020217040980A patent/KR102686321B1/ko active IP Right Grant
- 2020-06-15 TW TW109119988A patent/TWI830922B/zh active
-
2021
- 2021-12-16 IL IL289059A patent/IL289059A/en unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2715130B2 (ja) | 1989-01-12 | 1998-02-18 | 株式会社ダイフク | 荷搬送設備 |
JP2005001804A (ja) | 2003-06-11 | 2005-01-06 | Hitachi Ltd | 自動クレーンシステム及びクレーン制御方法 |
JP2016175506A (ja) | 2015-03-19 | 2016-10-06 | 村田機械株式会社 | 搬送台車と搬送台車システム |
JP2018118809A (ja) | 2017-01-23 | 2018-08-02 | 株式会社ダイフク | 物品搬送車 |
JP6946965B2 (ja) | 2017-11-22 | 2021-10-13 | 村田機械株式会社 | 搬送システム |
Also Published As
Publication number | Publication date |
---|---|
TW202105111A (zh) | 2021-02-01 |
EP3988474A4 (en) | 2023-06-21 |
CN114126988B (zh) | 2023-11-10 |
WO2020255577A1 (ja) | 2020-12-24 |
CN114126988A (zh) | 2022-03-01 |
JPWO2020255577A1 (ja) | 2020-12-24 |
KR20220008331A (ko) | 2022-01-20 |
US12119253B2 (en) | 2024-10-15 |
US20220359251A1 (en) | 2022-11-10 |
EP3988474A1 (en) | 2022-04-27 |
IL289059A (en) | 2022-02-01 |
KR102686321B1 (ko) | 2024-07-19 |
TWI830922B (zh) | 2024-02-01 |
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