JP5833355B2 - Surface treatment equipment - Google Patents

Description

  The present invention relates to a surface treatment apparatus such as a continuous plating apparatus.

  2. Description of the Related Art As a surface treatment apparatus, for example, an electroplating treatment apparatus for plating a work surface, a continuous plating treatment apparatus that continuously conveys a work such as a circuit board in a plating tank is known. The work is suspended and held by a conveyance jig conveyed along the power supply rail, and is continuously conveyed in the plating tank while being supplied with power from the power supply rail via the conveyance jig. In the plating tank, anodes are arranged on both sides of the work conveyance path serving as a cathode, and an electric field is formed between the cathode and the anode to electrolyze the plating solution to plate the work surface.

  Here, instead of the structure in which the power supply rail is arranged above the plating tank (Patent Document 1), a structure in which the power supply rail is extended in parallel with the longitudinal direction of the plating tank at a position deviated from above the plating tank. Known (Patent Document 2). This is excellent in that dust generated when the conveying jig slides on the power supply rail can be prevented from falling into the plating tank.

Japanese Patent No. 3025254 Japanese Patent No. 3591721

  When the power supply rail is disposed at a position off the upper side of the plating tank as in Patent Document 2, the configuration is different from that in which the conveyance jig and the work are supported in a stable manner directly below the power supply rail as in Patent Document 1. As a result, the center of gravity of the transport jig and the work is deviated from the vertical line passing through the power supply rail, and an unnecessary moment acts on the transport jig.

  Therefore, the conveyance jig disclosed in Patent Document 2 has a more complicated structure than the jig disclosed in Patent Document 1 in order to suppress adverse effects caused by unnecessary moments. For example, in Patent Document 2, a detachment prevention rail is provided on the side surface of the power supply rail to prevent the conveyance jig from falling off, and the structure of the power supply rail is also complicated.

  When the workpiece held by the transfer jig advances in the liquid, if the workpiece is tilted so that it intersects the transfer direction in plan view, the workpiece will be bent due to the resistance of the liquid and the commercial value will be lost. There is a fear. In addition, when the work held by the transport jig advances in the liquid, if the transport jig moves up and down, the electrical contact between the power supply rail and the transport jig may be poor, and the plating quality may deteriorate. is there. In order to prevent such a situation, the structure for stabilizing the traveling of the conveying jig is complicated.

  Some aspects of the present invention can improve the structure of a transport jig that is transported along a rail disposed at a position off the top of the surface treatment tank, and can support the transport jig extremely stably. Provided is a surface treatment apparatus capable of performing the above.

  Some other inventions of the present invention provide a workpiece holding jig capable of conveying even a very thin workpiece without damaging the workpiece by hydraulic pressure or the like.

  According to still another aspect of the present invention, a power supply rail is provided separately from the guide rail, and the power-supplied portion that is supplied with power to the power supply rail is always supplied with an appropriate contact pressure independently of the transport state of the transport jig. Provided is a surface treatment apparatus that can be brought into contact with a rail.

(1) One aspect of the present invention is
A surface treatment tank containing a treatment liquid and having an upper end opening;
First and second guide rails extending along a first direction parallel to the longitudinal direction of the surface treatment tank at a position deviated from above the upper end opening of the surface treatment tank;
A plurality of transfer jigs supported by the first and second guide rails, each of which holds the workpiece in the treatment liquid of the surface treatment tank;
Have
Each of the plurality of jigs is
A horizontal arm portion extending along a second direction intersecting the first direction;
A first guided portion supported by one end of the horizontal arm portion and guided by the first guide rail;
A second guided portion supported on the other end side of the horizontal arm portion and guided by the second guide rail;
A vertical arm portion that is suspended from the horizontal arm portion at a position between the first guided portion and the second guided portion and holds the workpiece;
The present invention relates to a surface treatment apparatus having

  In this way, each of the plurality of conveying jigs has the first and second guided portions on the both end sides in the second direction B across the vertical arm portion that holds the workpiece as the first and second guide rails. It has a supported doubly supported structure. Therefore, in this embodiment, compared with a cantilever support structure as in Patent Document 2, generation of unnecessary moments can be suppressed, and vertical movement can be suppressed and the workpiece can be stably transported horizontally. In addition, the first and second guide rails and the first and second guided parts that are the sliding parts are located above the upper end opening of the surface treatment tank, so that dust or the like falls into the surface treatment tank. Thus, the plating solution is not contaminated.

(2) Another aspect of the present invention is:
A surface treatment tank containing a treatment liquid and having an upper end opening;
First and second guide rails extending along a first direction parallel to the longitudinal direction of the surface treatment tank at a position deviated from above the upper end opening of the surface treatment tank;
A power supply rail extending along the first direction between the first and second guide rails at a position outside the upper end opening of the surface treatment tank,
A plurality of transfer jigs that are arranged in the treatment liquid of the surface treatment tank, respectively hold workpieces, are supported by the first and second guide rails, and are supplied with power in contact with the power supply rails;
Have
Each of the plurality of jigs is
A horizontal arm portion extending along a second direction intersecting the first direction;
A first guided portion supported by one end of the horizontal arm portion and guided by the first guide rail;
A second guided portion supported on the other end side of the horizontal arm portion and guided by the second guide rail;
A vertical arm portion that is suspended from the horizontal arm portion at a position between the first guided portion and the second guided portion and holds the workpiece;
A power-supplied part that is supported by the horizontal arm at a position between the first guided part and the vertical arm part, and that contacts the power supply rail;
The present invention relates to a surface treatment apparatus having

  In another aspect of the present invention, a power supply rail is provided in addition to the first and second guide rails, and the conveyance jig further includes a power-supplied portion that contacts the power supply rail. The power supply rail is located at a position deviated from above the upper end opening of the surface treatment tank and is disposed between the first and second guide rails. It is provided at a position between the vertical arm portion. Therefore, the distance from the vertical arm part to the first guided part becomes longer from the vertical arm part to the second guided part. If the second guided portion does not exist, the length of the arm from the first guided portion to the vertical arm portion becomes long, and an unnecessary moment acting on the conveying jig becomes large. In the other aspect of the present invention, as in the case of the first aspect of the present invention, since the both-end support structure is supported by the first and second guide rails, an unnecessary moment does not act on the conveying jig.

(3) Still another aspect of the present invention is a jig for holding a thin plate-like rectangular workpiece in a liquid in a processing tank,
A plurality of first chuck members for gripping the first side of the rectangular workpiece;
A plurality of second chuck members for gripping a second side facing the first side of the rectangular workpiece in a first direction;
A frame-shaped member disposed around the rectangular workpiece and supporting the plurality of first chuck members and the plurality of second chuck members;
Have
The frame-shaped member is
A first guide part that moves and guides the plurality of first chuck members movably in the first direction;
A first biasing member that moves and biases the plurality of first chuck members in one direction away from the plurality of second chuck members along the first direction;
The present invention relates to a workpiece holding jig.

  According to the workpiece holding jig of the present invention, at least a plurality of first chuck members are movable in the first direction among the plurality of first and second chuck members that respectively hold the opposite two sides of the rectangular workpiece. Therefore, even when the rectangular workpiece is thin, a tension is always applied to the rectangular workpiece and the plane can be maintained. For this reason, it can surface-treat with a uniform film thickness on both surfaces of a rectangular workpiece. Further, even when the rectangular workpiece is repeatedly put in and out of the processing liquid during the surface treatment, the workpiece is held flat without being bent, so that the hydraulic pressure does not act on the bent portion. Thereby, it can prevent that a workpiece | work falls from a chuck | zipper by a hydraulic pressure, or a workpiece | work is damaged.

(4) Still another aspect of the present invention is as follows:
A surface treatment tank containing a treatment liquid and having an upper end opening;
A guide rail and a power supply rail extending along a first direction parallel to the longitudinal direction of the surface treatment tank at a position deviated from above the upper end opening of the surface treatment tank;
A plurality of transfer jigs that are arranged in the treatment liquid of the surface treatment tank, hold the workpieces, are supported by the guide rails, and are supplied with electric power in contact with the power supply rails;
Have
Each of the plurality of jigs is
A horizontal arm portion extending along a second direction intersecting the first direction;
A guided portion supported by one end of the horizontal arm portion and guided by the guide rail;
A power-supplied part that is supported by the horizontal arm at a position between the guided part and the vertical arm part, and that contacts the power supply rail;
Have
The power-supplied part is
A contact portion that contacts the power supply rail;
A parallel link mechanism connecting the horizontal arm portion and the contact portion;
A biasing member which rotates urging the parallel link mechanism, imparts the contact pressure to the contact portion,
The present invention relates to a surface treatment apparatus having

  According to another aspect of the present invention, the power supply rail is provided separately from the guide rail, and the power-supplied part that is supplied with power to the power supply rail is always kept at an appropriate contact pressure independently of the transport state of the transport jig. Can be brought into contact with the power supply rail.

It is a longitudinal cross-sectional view of the surface treatment apparatus which concerns on embodiment of this invention. It is the elements on larger scale of FIG. It is a perspective view of a conveyance jig. It is a figure which shows two guide rails and a conveyance jig. It is a top view of a conveyance jig. It is a front view of a conveyance jig. It is a figure which shows the electric current control system to an anode. FIGS. 8A and 8B are diagrams showing current gradual reduction control during workpiece unloading and current gradual increase control during workpiece loading. It is the elements on larger scale of the frame-shaped member of a workpiece holding jig. It is a figure which shows the state which pushes down a movable plate and hold | maintains a workpiece | work. It is a figure which shows the state which supported the workpiece | work with the 1st chuck | zipper and applied tension. It is a figure which shows the detail of a to-be-powered part.

  Hereinafter, preferred embodiments of the present invention will be described in detail. The present embodiment described below does not unduly limit the contents of the present invention described in the claims, and all the configurations described in the present embodiment are indispensable as means for solving the present invention. Not necessarily.

1. Outline of Surface Treatment Apparatus FIG. 1 is a longitudinal sectional view of a surface treatment apparatus such as a continuous plating treatment apparatus. In the continuous plating apparatus 10, a plurality of conveying jigs 30 each holding a workpiece 20 such as a circuit board are circulated and conveyed in a direction perpendicular to the paper surface of FIG. In FIG. 1, two straight conveyance paths 110 and 120 in parallel of the circulation conveyance path 100 are shown. The two straight conveyance paths 110 and 120 are connected at both ends to form a loop-shaped circulation conveyance path 100.

  In the circulation conveyance path 100, a plating tank (surface treatment tank in a broad sense) 200 for surface-treating, for example, plating the workpiece 20 held on each of the plurality of conveyance jigs 30, and the circulation conveyance path 100 more than the plating tank 200. An unprocessed workpiece 20 provided upstream and a carry-in portion (not shown) for carrying in a plurality of transfer jigs 30 and a plurality of transferred workpieces 20 provided downstream of the circulation transfer path 100 from the plating tank 200 An unloading part (not shown) for unloading from the jig 30 is provided.

  In the present embodiment, the plating tank 200 is provided along the second straight conveyance path 120, and the carry-in part and the carry-out part are provided in the first straight conveyance path 110. The circulation conveyance path 100 further includes a pretreatment tank group 230 disposed on the upstream side of the plating tank 200 and a posttreatment tank group (not shown) disposed on the downstream side of the plating tank 200.

  The pretreatment tank group 230 is configured by arranging, for example, a degreasing tank, a hot water washing tank, a water washing tank, a shower tank, and a pickling tank in order from the upstream side between the carry-in unit 210 and the plating tank 200. . The post-treatment tank is configured by arranging, for example, a shower tank and a water washing tank in order from the upstream side between the plating tank 200 and the carry-out section. Note that the number and type of the pretreatment tank group 230 and the posttreatment tank group can be changed as appropriate.

2. Conveying jig and two guide rails As shown in FIG. 1, a continuous plating apparatus 10 includes a plating bath (a processing solution in a broad sense) and a plating bath (a surface treatment bath in a broad sense) having an upper end opening 201. 200. The continuous plating apparatus 10 is further parallel to the longitudinal direction of the plating tank 200 at a position off the upper end opening 201 of the plating tank 200, as shown in FIG. It has the 1st guide rail 130 and the 2nd guide rail 140 extended along the 1st direction (direction perpendicular | vertical to a paper surface). The plurality of transport jigs 30 are arranged in the processing solution of the plating tank 200 to hold the workpiece 20 and are supported by the first and second guide rails 130 and 140.

  As shown in FIGS. 3 to 5, each of the plurality of jigs 30 includes a horizontal arm portion 300, a first guided portion 310, a second guided portion 320, and a vertical arm portion 330. As shown in FIGS. 3 and 5, the horizontal arm unit 300 has, for example, two first and second lines extending along a second direction B that is orthogonal (crossed in a broad sense) to the first direction (conveying direction) A. It has horizontal arms 300A and 300B. As shown in FIG. 4, the first guided portion 310 is supported on one end side of the horizontal arm portion 300 and guided to the first guide rail 130. As shown in FIG. 4, the second guided portion 320 is supported on the other end side of the horizontal arm portion 300 and guided to the second guide rail 140. As shown in FIGS. 3 and 6, the vertical arm unit 330 is suspended from a support plate 331 fixed to the horizontal arm unit 300 at a position between the first guided unit 310 and the second guided unit 320. For example, two first and second horizontal arms 300A and 300B for holding the workpiece 20 are provided.

  As described above, each of the plurality of jigs 30 includes the first and second guided portions 310 and 320 on the both end sides in the second direction B across the vertical arm portion 330 that holds the workpiece 20. It has a form of a doubly supported beam supported by the second guide rails 130 and 140. Therefore, in this embodiment, compared with the cantilever form as in Patent Document 2, the workpiece 20 can be stably held and conveyed while suppressing vertical movement during the conveyance of the conveyance jig 30. . In addition, since the first and second guide rails 130 and 140 and the first and second guided portions 310 and 320 serving as the sliding portions are located away from above the upper end opening 201 of the plating tank 200, dust or the like Does not fall into the plating tank 200 and contaminate the plating solution.

3. In the plating processing apparatus 10, the workpiece 20 is a cathode (cathode), and the plating tank 200 has anodes (anodes: for example, copper-based anode balls) on both sides of the workpiece 20 conveyance path. Cylindrical mesh bags (accommodating portions) 202 and 203 for accommodating 410L and 410R are provided, and an electric field is formed between the cathode and the anode to electrolyze the plating solution, and the workpiece 20 is electroplated. Therefore, it is necessary to energize the workpiece 20 being conveyed. In order to supply power to the workpiece 20, for example, at least one of the first and second guide rails 130 and 140 can be used as a power supply rail. In this case, among the members constituting the conveying jig 30, the material of the path for supplying power from the first and second guide rails 130 and 140 to the workpiece 20 may be formed of an electric conductor.

  In the present embodiment, as shown in FIGS. 1 and 2, the plating apparatus 10 is provided with a power supply rail 210 separately from the first and second guide rails 130 and 140. In particular, the power supply rail 210 of the present embodiment includes a plurality of, for example, four divided power supply rails 210A to 210A, which are insulated from each other, as shown in FIG. 2, in order to implement the current control method disclosed in Japanese Patent Application Laid-Open No. 2009-132999. 210D. Each of the plurality of conveying jigs 30 includes a power-supplied portion 340 (FIGS. 2 to 5) that is supplied with power in contact with any one of the four divided power supply rails 210 </ b> A to 210 </ b> D. The power-supplied part 340 is disposed at a position between the first guided part 310 and the vertical arm part 330.

  As described above, each of the plurality of jigs 30 includes the first and second guide rails 130 with the first and second guided portions 310 and 320 on both ends in the second direction B across the power supplied portion 340. , 140 is supported on both ends. Therefore, the vertical movement of the power-supplied part 340 can be suppressed and the contact with the power supply rail 210 can be stably maintained during the conveyance of the conveyance jig 30.

4). Current Control Method Using Divided Feed Rail Hereinafter, the current control method disclosed in Japanese Patent Application Laid-Open No. 2009-132999 will be described with reference to FIGS. 7 and 8A and 8B. Incidentally, the plating bath 200 shown in FIG. 1 has along the vertical transport direction to the paper surface, for example, 10 number m or more in length. A plating tank unit 200A shown in FIG. 7 represents a unit unit, and the plating tank 200 of FIG. 1 is configured by connecting a plurality of plating tank units 200A.

The power supply units 400A to 400D supply power to the workpieces 20 being conveyed via the corresponding divided power supply rails 210A to 210D. The power supply units 400A to 400D can supply power to each workpiece 20 having the one surface Fl and the other surface Fr by constant current control at a set current value (A / dm ² ). Furthermore, the power supply units 400A to 400D control gradually increasing the current when the work 20 is carried into the plating tank unit 200A, and gradually decrease the current when the work 20 is carried out.

  In FIG. 7, in the plating tank unit 200A, N pieces (for example, three pieces) of workpieces 20 (20A to 20C or 20B to 20D) are conveyed in the conveying direction A while being completely immersed in the conveying jig 30 (30A to 30D). Is possible. The whole surface immersion state is a state in which at least all of the surfaces to be plated (one surface Fl and the other surface Fr) of the workpiece 20 are immersed in the plating solution Q of one plating tank unit 200A shown in FIGS. Say. Therefore, in a state where the workpiece 20A is started to be carried out from the outlet 200B side of the plating tank unit 200A and the workpiece 20D is started to be carried into the inlet 200F side, the number of (N + 1), that is, four workpieces is placed in the plating tank unit 200A. 20 (20A-20D) will be immersed.

  In this state, the workpieces 20B to 20C are all immersed, and the workpieces 20A and 20D are partially immersed. In the partially immersed state, at least a part of the workpiece 20A, 20D in the length direction of the plating target surface (one surface Fl + other surface Fr shown in FIG. 10) is immersed in the plating solution Q of one plating tank unit 200A. State. The portion that protrudes from one plating tank unit 200A is arranged in another adjacent plating tank unit 200A or in another processing tank.

  Here, when the number of workpieces 20 that can be conveyed in the plating tank unit 200A in the entire surface immersion state is N (for example, N = 3), the number of the divided power supply rails 210 and the power supply units 400 is (N + 1). ) [= 4].

  In the plating tank unit 200A (in the plating solution Q), as shown in FIG. 7, a pair of left and right anode electrodes (copper-based anode balls) 410L and 410R extending in the first direction A are disposed facing each other. Both anode electrodes 410L and 410R are common to each workpiece 20 (20A to 20D) held by each conveyance jig 30 (30A to 30D), and the distance between each anode electrode 410L and 410R and each workpiece 20 being conveyed. The (distance between poles) is maintained constant (predetermined value).

  Now, each of the power supply units 400A to 400D can change the current value for each workpiece 20 (each power supply unit 400) held by the transfer jig 30, and can perform constant current control at the set current value Is. it can.

  That is, each of the power supply units 400A to 400D performs constant current control while the work 20 is being conveyed in the plating tank unit 200A in a fully immersed state, but the work 20A is carried into the plating tank unit 200A in a partially immersed state. The current gradually increasing control is performed during the period during which the workpiece 20D is being carried out in the partially immersed state, and the current gradually decreasing is controlled during the period when the workpiece 20D is being carried out in the partially immersed state. The workpiece 20 that is partially immersed in each of the two adjacent plating tank units 200A is subjected to current gradual decrease control by the downstream plating tank unit 200A and current gradual increase control by the upstream plating tank unit 200A.

  That is, in FIG. 8A, during the partial immersion loading period T12 (= t1 to t2), the current (Iin) is gradually increased in proportion to the time length (processing area) until the workpiece 20 reaches the set current value Is. Control. When the entire surface is immersed (t2), the control is switched to the constant current control of the set current value Is. During the partial immersion carry-out period T34 (= t3 to t4), as shown in FIG. 8B, the set current value Is is switched from the constant current control to the gradual decrease control. The current (Idg) is gradually reduced in inverse proportion to the time length (processing area).

  According to this embodiment, since a continuous plating process can be performed with a current value set for each workpiece 20, a uniform and high-quality plating film is formed on each workpiece 20 with a film thickness that does not vary according to the workpiece setting current value. Can be formed.

5. Detailed description of transfer jig 5.1. Power-supplied part The power-supplied part 340 provided in each of the some conveyance jig 30 used for this embodiment contacts one of N division | segmentation electric power supply rails 210A-210D. The plurality of conveyance jigs 30 illustrated in FIG. 7 include first to Nth conveyances in which a power-supplied part 340 is attached to each one of N locations whose positions differ in the second direction B with respect to the horizontal arm unit 300. Includes jigs 30A-30D. Each one of the first to Nth conveying jigs 30A to 30D comes into contact with each one of the N divided power supply rails 210A to 210D.

  In the present embodiment, a structure is adopted in which the parts of the conveying jig 30 are made in common and in contact with any one of the plurality of divided power supply rails 210A to 210D. For this purpose, each of the plurality of conveyance jigs 30 (first to Nth conveyance jigs 30A to 30D) includes a support part that supports the power-supplied part 340, for example, a support plate 350, as shown in FIG. . The support plate 350 has N (N = 4) attachment portions (for example, screw holes) 351 to 354 provided at different positions in the second direction B.

  Each of the power-supplied parts 340 of the plurality of conveyance jigs 30 (first to Nth conveyance jigs 30A to 30D shown in FIG. 7) is in contact with the power supply rail 210 (the divided power supply rails 210A to 210D). Respectively. The contact portion 341 is detachably attached to one of the N attachment portions 351 to 354 (the attachment portion 351 in FIG. 3), for example, with a thumbscrew 342. Thus, by attaching the contact portion 341 to one selected from among the N attachment portions 351 to 354, the first to Nth transport jigs 30A to 30D are prepared while sharing the components. be able to.

  FIG. 12 shows details of the power-supplied part 340. The power-supplied part 340 includes a parallel link mechanism 342 of a four-node rotating chain that connects the support plate 350 and the contact part 341 with, for example, two parallel links 342A and 342B. The two links 342A and 342B are constantly urged to move in the clockwise direction by torsion coil springs 343 and 343 which are urging members. As a result, the contact portion 341 can be brought into contact with the power supply rail 210 with an appropriate contact pressure.

  Further, the two parallel links 342A and 342B are inclined so that the upper fulcrum precedes and the lower fulcrum follows. As a result, the contact portion 341 travels while being pulled by the conveyance jig 30, so that travel is stable.

  Note that the configuration of the power-supplied part 340 shown in FIG. 12 can be applied to a surface treatment apparatus having the power supply rail 210 separately from the guide rails 130 and 140, and there may be one guide rail and one power supply rail. When the guide rail and the power supply rail are used together as in the conventional case, excessive pressure acts on the power-supplied part, so that the wear is severe and the product life of the power-supplied part is shortened. In the present embodiment, the power-supplied part 340 can be brought into contact with the power supply rail 210 with an appropriate contact pressure independently of the traveling of the conveyance jig 30. As a result, even if the power-supplied part 340 is formed of brass or the like, the life can be extended.

5.2. 1st, 2nd guided part The 1st guide rail 130 which guides the 1st guided part 310 contains the upper surface, the 1st side, and the 2nd side opposite to the 1st side in a longitudinal section, For example, it is formed in a rectangular shape.

  The first guided portion 310 guided by the first guide rail 130 includes a first roller 311 that makes rolling contact with the upper surface of the first guide rail 130, and a second roller 312 that makes rolling contact with the first side surface of the first guide rail 130. The third roller 313 that is in rolling contact with the second side surface of the first guide rail 130 can be configured. The second guided part 320 may include a fourth roller 321 that is in rolling contact with the upper surface of the second guide rail 140. The first and fourth rollers 311 and 321 are in contact with the upper surfaces of the first and second guide rails 130 and 140 at both ends in the second direction B of the transport jig 30, so that the transport jig 30 is in a horizontal state. And can be driven stably. In addition, since the second and third rollers 312 and 313 sandwich the both side surfaces of the first guide rail 130, it is possible to suppress the displacement of the conveying jig 30 in the second direction B.

5.3 Continuous Transport Drive Unit One continuous transport drive unit 150 shown in FIG. 2 is provided for each section obtained by dividing the first linear transport path 120 (FIG. 1) of the transport jig 30 into a plurality of sections. The continuous conveyance driving unit 150 includes pushers 153A and 153B having linear guides 152A and 152B that move along the fixed guide plate 151. The two pushers 153A and 153B are independently moved by a motor (not shown). By these two pushers 153A and 153B, the conveying jig 30 is continuously driven in one section. The two pushers 153A and 153B each have a unique drive area and a common drive area in one section. First, the pusher 153 pushes the conveyance jig 30 in the unique drive region on the upstream side. Next, when the transport jig 30 is continuously transported in the common drive region, it is inherited from the pusher 153A to the pusher 153B. The pusher 153 </ b> A moves forward by a predetermined stroke over the unique and common drive areas, then moves back to the original position, and is responsible for transporting the next transport jig 30. The pusher 153B operates similarly.

The pushers 153A and 153B have claw members 154A and 154B that push the first pushed portion 360 of the conveying jig 30. The claw members 154A and 154B push the first pushed portion 360 of the transport jig 30 when the pushers 153A and 153B move forward. The claw members 154A and 154B can be displaced so as not to prevent the first pushed portion 360 from moving forward when the pushers 153A and 153B are retracted. The conveying jig 30 has a second pushed portion 362, and the second pushed portion 362 is used at times other than continuous conveyance in the plating tank 20.

5.4. Hook Section As shown in FIGS. 1 to 5, hook sections 370 and 370 for hanging the jig are provided in each of the plurality of conveying jigs 30. As shown in FIG. 1, the continuous plating apparatus 10 further includes an elevating unit 160 that engages with the hook units 370 and 370 to elevate and lower the workpiece 20 held by the conveying jig 30 with respect to the plating tank 200. .

  It is not necessary to use a lifting rail to raise and lower the workpiece other than the plating tank 200. Small driving force is required.

5.5 Vertical Arm Unit and Workpiece Holding Jig The vertical arm unit 330 includes, for example, two vertical arms 330A and 330B as shown in FIGS. A workpiece holding jig 500 is suspended and supported on the two vertical arms 330A and 330B.

  The workpiece holding jig 500 is suitably used for an extremely thin workpiece 20 such that the thickness of the workpiece 20 is 100 μm or less, preferably 60 μm or less. In the present embodiment, the thickness of the workpiece 20 is, for example, 40 μm = 0.04 mm.

Work holding fixture 500, as shown in FIGS. 3 and 6, a first chuck member 510 a plurality of gripping the first side (e.g. upper side) 20a of the rectangular workpiece 20, a first side 20a of the rectangular workpiece 20 A plurality of second chuck members 520 that grip the second side 20b facing each other in the third direction (vertical direction) C, and a plurality of first chuck members 510 and a plurality of second chucks that are disposed surrounding the rectangular workpiece 20. A frame-like member 530 that supports the member 520.

  As shown in FIGS. 9 to 11, the frame-shaped member 530 includes a guide portion 540 that moves and guides the plurality of first chuck members 510 in the third direction C, and the plurality of first chuck members 510. And a coil spring 550 that is an urging member that moves and urges the plurality of second chuck members 520 in one direction C1 moving away from the first direction.

  Specifically, the frame-like member 530 includes a fixed plate 531 and a movable plate 532 arranged so as to overlap the fixed plate 531 as shown in FIGS. 10 and 11. The guide portion 540 is formed in one of the fixed plate 531 and the movable plate 532, for example, the movable plate 532, and has a long hole 533 whose longitudinal direction is the third direction C, and is formed in the other of the fixed plate 531 and the movable plate. A shaft portion inserted through 533, for example, a bolt shaft 534 is included. The coil spring 550 presses and urges the movable plate 532 in one direction C <b> 1 against the fixed plate 531.

  A configuration common to each of the plurality of first chuck members 510 and the plurality of second chuck members 520 will be described with reference to FIGS. 10 and 11 by taking the first chuck member 510 as an example. The first chuck member 510 is disposed so as to be in contact with and away from the second surface Fr of the workpiece 20 at a position facing the fixing member 511 and the fixing member 511 that contacts the first surface Fl of the workpiece 20. And a movable member 512 that is pressed into contact therewith. The movable member 512 includes a driven piece 512A that is driven when the pressure is released, a pressing drive piece 512B that is always pressed against the fixed member by spring pressure via the hinge 513 when the driven piece 512A is not driven, and a pressure driving piece. And a thin plate-like pressing piece 512 </ b> C formed at the free end of 512 </ b> B.

In order to attach the workpiece 20 to the workpiece holding jig 500, first, the second side 20 b of the workpiece 20 is gripped by the plurality of second chuck members 520. Next, in order to grip the first side 20a of the workpiece 20 by the second chuck member 510, the movable plate 532 is first pushed down against the urging force of the coil spring 550 and set to the state of FIG. At this time, the driven piece 512A of the first chuck member 510 is driven, and the pressing drive piece 512B is set in an open state as shown in FIG. Next, by releasing the drive of the driven piece 512 </ b> A, the first side 20 a of the workpiece 20 is gripped by the first chuck member 510. Finally, the pressing force on the movable plate 532 is released. As a result, the movable plate 532 is raised by the urging force of the coil spring 550, and tension can be applied to the workpiece 20 to maintain the planarity of the workpiece 20.

  Note that the tension applied to the workpiece 20 can be performed by at least one of the first chuck member 510 and the second chuck member. That is, the above-described tension applying structure may be employed for the second chuck member 520.

  The workpiece holding jig 500 having the above-described structure can also be used for batch processing in which a plurality of workpiece holding jigs 500 are simultaneously immersed in a processing solution. In this case, the first and second chuck members 510 and 520 are not limited to be arranged vertically, and may be arranged on the left and right sides.

  Although the present embodiment has been described in detail as described above, it will be easily understood by those skilled in the art that many modifications can be made without departing from the novel matters and effects of the present invention. Accordingly, all such modifications are intended to be included in the scope of the present invention. For example, a term described at least once together with a different term having a broader meaning or the same meaning in the specification or the drawings can be replaced with the different term in any part of the specification or the drawings. All combinations of the present embodiment and the modified examples are also included in the scope of the present invention.

  DESCRIPTION OF SYMBOLS 10 Surface treatment apparatus (continuous plating processing apparatus), 20 workpieces, 30 conveyance jig, 100 circulation conveyance path, 110 1st linear conveyance path, 120 2nd linear conveyance path, 130 1st guide rail, 140 2nd guide rail, 141 upper surface, 150 continuous conveyance drive unit, 160 elevating unit, 200 surface treatment tank (plating tank), 200A plating tank unit, 201 upper end opening, 210 power supply rail, 210A to 210D divided power supply rail, 300 horizontal arm part, 300A, 300B 1st, 2nd horizontal arm, 310 1st guided part, 311 1st roller, 312 2nd roller, 313 3rd roller, 320 2nd guided part, 321 4th roller, 330 Vertical arm part, 330A, 330B First and second vertical arms, 331 support section, 332 holding section, 340 powered section, 341 contact portion, 342 parallel link mechanism, 343 urging member, 350 support portion (support plate), 360 driven portion, 370 hook portion, 400A to 400D power supply, 410L, 410R anode, 500 work holding jig, 510 1 chuck member, 520 second chuck member, 530 frame member, 531 fixed plate, 532 movable plate, 533 long hole, 534 shaft portion, 540 guide portion, A first direction (conveying direction), B second direction, C Vertical direction, Q treatment solution (plating solution)

Claims (5)

A surface treatment tank containing a treatment liquid and having an upper end opening;
First and second guide rails and power supply rails extending along a first direction parallel to the longitudinal direction of the surface treatment tank at a position outside the upper end opening of the surface treatment tank,
A plurality of conveying jigs arranged in the treatment liquid of the surface treatment tank to hold the workpieces, supported by the first and second guide rails, and in contact with the power supply rails; Have
Each of the plurality of jigs is
A horizontal arm portion extending along a second direction intersecting the first direction;
A first guided portion supported by one end of the horizontal arm portion and guided by the first guide rail;
A second guided portion supported on the other end side of the horizontal arm portion and guided by the second guide rail;
A vertical arm portion that is suspended from the horizontal arm portion at a position between the first guided portion and the second guided portion and holds the workpiece;
A power-supplied part that is supported by the horizontal arm part at a position between the first guided part and the vertical arm part, and that contacts the power supply rail;
I have a,
The first guide rail includes a top surface, a first side surface, and a second side surface facing the first side surface in a longitudinal section.
The first guided portion of each of the plurality of conveying jigs is
A first roller in rolling contact with the upper surface of the first guide rail;
A second roller in rolling contact with the first side surface of the first guide rail;
A third roller in rolling contact with the second side surface of the first guide rail;
Including
The surface treatment apparatus , wherein the second guided portion of each of the plurality of conveying jigs includes a fourth roller that is in rolling contact with the upper surface of the second guide rail . A surface treatment tank containing a treatment liquid and having an upper end opening;
First and second guide rails and power supply rails extending along a first direction parallel to the longitudinal direction of the surface treatment tank at a position outside the upper end opening of the surface treatment tank,
A plurality of conveying jigs arranged in the treatment liquid of the surface treatment tank to hold the workpieces, supported by the first and second guide rails, and in contact with the power supply rails;
Elevating part ;
Have
Each of the plurality of jigs is
A horizontal arm portion extending along a second direction intersecting the first direction;
A first guided portion supported by one end of the horizontal arm portion and guided by the first guide rail;
A second guided portion supported on the other end side of the horizontal arm portion and guided by the second guide rail;
A vertical arm portion that is suspended from the horizontal arm portion at a position between the first guided portion and the second guided portion and holds the workpiece;
A power-supplied part that is supported by the horizontal arm part at a position between the first guided part and the vertical arm part, and that contacts the power supply rail;
A hook for hanging ,
Have,
The lifting unit is engaged with the hook portion, the work held on the plurality of conveying jig, the surface treatment apparatus characterized by Ru is lifting with respect to the surface treatment tank. A surface treatment tank containing a treatment liquid and having an upper end opening;
First and second guide rails and power supply rails extending along a first direction parallel to the longitudinal direction of the surface treatment tank at a position outside the upper end opening of the surface treatment tank,
A plurality of conveying jigs arranged in the treatment liquid of the surface treatment tank to hold the workpieces, supported by the first and second guide rails, and in contact with the power supply rails; Have
Each of the plurality of jigs is
A horizontal arm portion extending along a second direction intersecting the first direction;
A first guided portion supported by one end of the horizontal arm portion and guided by the first guide rail;
A second guided portion supported on the other end side of the horizontal arm portion and guided by the second guide rail;
A vertical arm portion that is suspended from the horizontal arm portion at a position between the first guided portion and the second guided portion and holds the workpiece;
A power-supplied part that is supported by the horizontal arm part at a position between the first guided part and the vertical arm part, and that contacts the power supply rail;
Have
The power-supplied part is
A contact portion that contacts the power supply rail;
A parallel link mechanism connecting the horizontal arm portion and the contact portion;
A biasing member that biases the parallel link mechanism to rotate and applies a contact pressure to the contact portion;
A surface treatment apparatus comprising: In any one of Claims 1 thru | or 3 ,
The power supply rail includes N (N is an integer of 2 or more) divided power supply rails that are insulated from each other and extend in parallel along the first direction.
The plurality of transfer jigs include first to Nth transfer jigs in which the power-supplied part is attached to each one of N places whose positions differ in the second direction with respect to the horizontal arm part. Each of the first to Nth conveying jigs is in contact with each of the N divided power supply rails. In claim 4 quoting claim 1 or 2 ,
Each of the first to Nth transport jigs includes a support part that supports the power-supplied part,
The support part includes N attachment parts provided at different positions in the second direction,
Each of the power-supplied parts of each of the first to Nth transport jigs includes a contact part that contacts the power supply rail, and the contact part is attached to one of the N attachment parts. A featured surface treatment apparatus.

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