JP6793465B2 - Standard with signal compensation mark - Google Patents

Description

The present invention relates to the standard device described in the superordinate concept of claim 1.

From European Patent No. 2502030, a standard provided for use in a position measuring system is known. This position measurement system is an absolute position measurement system, and a binary random number sequence is encoded by the mark of the standard device. This standard is inductively read by a scanning device. For this purpose, two types of standards are targeted, that is, a standard composed of a material having high conductivity, for example, copper (vortex current principle) and a standard composed of a ferromagnetic material. Become. The present invention deals with the latter type.

Inductive scanning typically uses differentially connected coil pairs to minimize signal offsets. In European Patent No. 2502030, the coil pairs are arranged side by side with respect to the measurement direction, where two complementary rows of multiple marks are used. The individual coils of the coil pair are wired fixed to each other. The applicant proposes a position measurement including only a plurality of individual coils arranged in a row in the measurement direction in the unpublished German patent application No. 102014216036.7. Since these individual coils are dynamically interconnected in various ways during operation, the plurality of individual coils of the differential coil pair are arranged side by side in the measurement direction. The present invention deals exclusively with the problems that arise in the last type.

When a plurality of receiving coils move on the lateral boundary of one mark, the AC voltage induced in these receiving coils does not change dramatically, but rather a monotonous increase or decrease in signal amplitude occurs.

In known positioning devices, the mark is configured in a penetration or recess in the material tape. The corresponding mark contour is formed into a rectangle. The width of the rectangle and the interval of the internal method are each an integral multiple of the first partition interval. The applicant's experiments have revealed that the AC voltage induced in the individual receiving coils, which are oriented laterally to the measurement direction and are exactly on the center of the outer periphery of the mark contour, is this induction. It has an amplitude greater than 50% of the maximum amplitude of the AC voltage to be generated. This makes signal evaluation extremely difficult.

European Patent No. 2502030 German Patent Application No. 102014216036.67

The advantage of the present invention is that it is particularly easy to evaluate the AC voltage induced in the receiving coil for determining the position. In particular, the amplitude of the AC voltage induced in the receiving coil is substantially 50% of the maximum signal amplitude at a predetermined location relative to the partition grid corresponding to the first partition interval.

It is proposed by the independent claims that the internal spacing of two adjacent virtual rectangles is different from an integral multiple of the first partition spacing. As a result, the signal transmission is shifted with respect to the divided grid. The internal interval is selected so that the AC voltage induced in the receiving coil is substantially 50% of the maximum amplitude at a predetermined location relative to the partition grid corresponding to the first partition interval. The internal interval is the interval between the third side of an adjacent virtual rectangle (hereinafter, the side of this virtual rectangle is referred to as a rectangular side) and the fourth rectangular side.

The material tape preferably has a constant thickness smaller than the first partition interval. This thickness is, for example, 0.3 mm, and the first partitioning interval is, for example, 1 mm. The width of the material tape is advantageously larger than the first partition spacing, for example 5 mm. The material tape is advantageously made of stainless steel. The mark can be filled with a non-ferromagnetic material, which is advantageously emptied or filled with air. The transmit winding device and / or the receive coil is advantageously formed as a flat coil device. The standard is advantageously a component of a guide rail for linear roller bearings, formed according to, for example, EP 1 052 480 B1. When a plurality of straight line portions of the mark contour extending parallel to the measurement direction are associated with the first rectangular side to the second rectangular side, and these straight line portions are arranged in a staggered manner, the above-mentioned case is described. The rectangular side is advantageously overlapped with the straight line portion having the maximum length in total.

Dependent claims indicate favorable developments and improvements of the present invention.

Each mark contour can be made to completely overlap the corresponding virtual rectangle. This embodiment has minimal differences from known standards, but provides the advantages listed above. This standard can be easily manufactured in the same manner as a known standard. Here, a photochemical etching method is advantageously used.

In the present invention, the third rectangular side is associated with the linear third outer peripheral portion of the related mark contour, and the fourth rectangular side is associated with the linear fourth outer peripheral portion of the related mark contour. The third and fourth outer peripheral portions are arranged parallel to each other, and these have an angle different from 90 ° as the measurement direction. In the simplest case, the mark contour is formed in the shape of a parallelogram. However, this mark contour may have a shape different from the parallelogram in the regions of the first and second rectangular sides. Such mark contours extend the motion path of the scanning device to the standard, where this path is extended by the continuous transmission of signals at the mark boundaries. This ensures that at each position in the scanning device, each mark boundary is detected by at least one receiving coil to induce an AC voltage with an amplitude between the minimum and maximum amplitudes of the induced AC voltage. To. As a result, a random number sequence read by the standard device can be easily obtained. Further, the position error of the scanning device with respect to the standard device in the lateral direction with respect to the measurement direction has less influence than the rectangular shape of the mark contour proposed above.

In the present invention, the third rectangular side is associated with the third outer peripheral portion of the mark contour that is bent outward or inward and extends, and the fourth rectangular side is bent outward or inward and extends. It is possible to associate the fourth outer peripheral portion of the mark contour. These third rectangular sides and fourth rectangular sides are advantageously formed symmetrically with each other. It is also conceivable that the third rectangular side and the fourth rectangular side pass in the shape of an unbent curved portion. However, here, "curvature" includes the course of the third rectangular side and the fourth rectangular side having the bent portion.

In the present invention, it is also possible that the third rectangular side and the fourth rectangular side each have two linear lower portions, where these lower portions form an angle larger than 90 °. What is achieved by this is that the signal course is nearly linear in the area of the mark boundary. The third and / or fourth rectangular sides are advantageously formed mirror-symmetrically with respect to the centerline of the standard. The third rectangular side and / or the fourth rectangular side advantageously have exactly two linear lower portions.

In the present invention, the two linear lower portions associated with each other can be brought into contact with each other at a corner or at a predetermined radius. This radius is advantageously constructed to be small.

In the present invention, it is possible to make the outer peripheral portions of the mark contours associated with the first rectangular side and the second rectangular side mirror-symmetrically formed with each other. This makes it possible to avoid signal errors that cannot be compensated for.

In the present invention, at least one fifth outer peripheral portion of the mark contour that is bent and extends in the measurement direction is associated with the first rectangular side, and the second rectangular side is bent in the measurement direction. At least one sixth outer peripheral portion of the mark contour, which is extended and extended, can be associated with each other. It is shown in this embodiment that the amplitude of the AC voltage induced in the receiving coil is theoretically made entirely of ferromagnetic material at some points in the receiving coil in the area of the mark boundary. It is possible to take a value above the maximum that should only occur if it is above. Here, it is possible that the above amplitudes fall below the minimum value that would theoretically occur only if the receiving coil is entirely on air or non-ferromagnetic material. Such an effect can be compensated for by configuring the mark contour as proposed in the present invention. However, "curved" also includes the progress of the fifth outer peripheral component to the sixth outer peripheral component having the bent portion. The fifth outer peripheral component or the sixth outer peripheral portion can be selectively bent inward or outward.

In the present invention, the fifth outer peripheral portion and / or the sixth outer peripheral portion can have at least one linear lower portion.

In the present invention, it is possible for the fifth outer peripheral portion and / or the sixth outer peripheral portion to have at least one linear lower portion that is curved without bending.

In the present invention, the plurality of first outer peripheral portions of all the mark contours are arranged in a row in the measurement direction, and the plurality of second outer peripheral portions of all the mark contours are arranged in a row in the measurement direction. It is possible to do. Tensile stresses are advantageously applied to the standard during the operation of the position measurement system to maintain the preset first partition interval very accurately. By configuring the mark contour as proposed here, it is avoided that the standard has a different course than the shape that is exactly linear. This avoids an error when reading the mark.

In the present invention, the distance between the third rectangular side and the fourth rectangular side is set to be larger than the nearest integer multiple of the first division interval by the amount between 20% and 50% of the first division interval. Is possible. By constructing the mark contour in this way, a signal course described above as advantageous occurs in the area of the mark boundary.

The standard according to the invention is advantageously used in a position measuring system, where a scanning device having at least five receiving coils arranged in a row in the measuring direction is provided, which scanning device is a receiving coil. It has a transmit winding device that does not move relative to, the scanning device is movable in the measurement direction along the standard, and the receiving coil, the transmitting winding device and the standard are scanning devices. It is arranged so that the position of the standard with respect to the inductive coupling between the transmitting winding device and the receiving coil changes. The spacing of all adjacent pairs in the measurement direction is advantageously equal to a constant second split spacing. The second division interval is advantageously equal to or less than the first division interval, and the second division interval is, for example, 0.8 mm.

In the present invention, the transmission winding device surrounds a plurality of unique transmission surfaces arranged in a row in the measurement direction so that a maximum of one corresponding receiving coil is arranged in one transmission surface. It is possible. Compensation according to the present invention is particularly advantageous because such a position measuring device causes the problems underlying the present invention particularly strongly. The receiving coils are advantageously located entirely within their respective transmit planes.

It is clear that the characteristic configurations listed above and the characteristic configurations further described below can be used not only in the combinations shown respectively, but also in other combinations or alone, without departing from the framework of the present invention. Is.

The present invention will be described in detail below with reference to the accompanying drawings.

It is the schematic of the position measuring apparatus according to 1st Embodiment of this invention. It is a schematic diagram which shows a part of the standard apparatus by 1st Embodiment of this invention shown in FIG. It is a schematic diagram of a part of the standard device according to the second embodiment of the present invention. It is a schematic diagram of a part of the standard device according to the third embodiment of the present invention. It is a schematic diagram of a part of the standard device according to the 4th embodiment of the present invention. It is the schematic sectional drawing of the position measuring apparatus shown in FIG. 1 in which a mark is formed as a penetration part. It is a figure corresponding to FIG. 6 in which a mark is formed as a recess.

FIG. 1 shows a schematic view of the position measuring device 10 according to the first embodiment of the present invention. The position measuring device 10 includes a standard device 20 and a scanning device 30. The standard 20 is implemented as a material tape 23, which material tape is made of a ferromagnetic material, for example stainless steel, and has a constant thickness of, for example, 0.3 mm. The standard device 20 has a constant width 27 and extends in the measurement direction 11. A plurality of marks 21 are arranged in a row on the standard device 20 along the measurement direction 11, and the base of these marks is a constant first division interval λ. The mark 21 can be selectively formed as a penetrating portion (22 in FIG. 6) or a recess having a certain depth (22a in FIG. 7). The mark 21 can have two states, with or without the mark. A binary random number sequence is encoded by the mark 21, and the first partition interval λ corresponds to the binary number of this code. The shapes of these marks will be described later with reference to FIGS. 2 to 5. The marks 21 are configured so that the material tape does not require horizontal stripes, and these marks are arranged on the material tape 23 separated by a first partition interval λ. Since the material tape 23 has lateral stripes 24 on both sides of the mark 21 in the lateral direction with respect to the measurement direction 11, a standard device 20 connected to the mark 21 can be obtained. The mark 21 is advantageously formed as an air-filled free space. However, the mark can also be filled with a non-ferromagnetic material, such as brass.

The scanning device 30 is movable in the measurement direction 11 with respect to the standard device 20. The standard 20 is advantageously fixed to the guide rail of the linear roller bearing, and the scanning device 30 is fixed to the corresponding guide carriage. Corresponding linear roller bearings are known from German Patent Application Publication No. 102007042796. The scanning device 30 preferably includes an evaluation unit 34 formed in the form of a dedicated electronic boat. The rest of the scanning device 30, in particular the transmit winding device 41, the receiving coil 40, the switching device 70, and the operational amplifier 80, are located in close spatial proximity to the standard device 20, but unlike this. The evaluation unit 34 may have a larger spatial spacing than the standard device 20.

The transmission winding device 41 and the receiving coil 40 are each formed as a flat winding device. In FIG. 1, only one winding is written for each, but in reality, both the transmission winding device 41 and the reception coil 40 each have a plurality of substantially parallel windings. In FIG. 1, the center line 25 is written on both the transmission winding device 41 and the standard device 20. These two center lines 25 overlap each other, unlike those shown in FIG. 1, and the transmit winding device 41 and the receive coil 40 are arranged at a slight distance from the standard 20 (FIGS. 6 and 6). See FIG. 7). As a result, the standard device 20 changes the inductive coupling between the transmission winding device 41 and the reception coil 40. That is, the AC supplied to the transmission winding device 41 induces an AC voltage having an amplitude depending on the position of the scanning device 30 with respect to the standard device 20 to the receiving coil 40.

The transmission winding device 41 is formed here as a meander structure, and the meander structure surrounds a plurality of unique transmission surfaces 42 arranged in a row in the measurement direction 11. The transmission winding device 41 includes a first group 44 and a second group 45 composed of a plurality of conductor paths 43 formed in a meandering line shape, and these conductor paths are formed a plurality of times along the measurement direction 11. It intersects. At the location indicated by reference numeral 46, the plurality of conductor paths 43 described above are connected to each other so that the transmission winding device 41 is composed of a single passing conductor path. The transmit winding device 41 can also be optionally grouped from a plurality of individual coils, each surrounding a corresponding single transmit surface 42, which are selectively connected in series or in parallel. .. When alternating current is supplied to the transmission winding device 41 by an alternating current source, electromagnetic alternating current fields having substantially the same size are generated on all transmission surfaces 42, and the directions of these fields are 2 adjacent to each other. The directions are opposite on the two transmission surfaces 42. The alternating current source 31 is advantageously a component of the evaluation unit 34.

One receiving coil 40 is arranged on each of the transmitting surfaces 42. An operational amplifier 80 is arranged in the spatial vicinity of the receiving coil 40, and this operational amplifier is advantageously formed in a completely differential type. The two adjacent receiving coils 40 each have a constant second division interval δ in the measurement direction 11, which is, for example, 0.8 mm. The wiring of the op amp 80 is shown in a very simplified manner in FIG. 1 and only the two feedback resistors 85,86 characteristic of the fully differential op amp 80 are shown. The first feedback resistor 85 connects the first input terminal 81 of the operational amplifier 80 and the first output terminal 83 of the operational amplifier 80. The second feedback resistor 86 connects the second input terminal 82 of the operational amplifier 80 and the second output terminal 84 of the operational amplifier 80.

Since the first output terminal 83 and the second output terminal 84 are connected to the input side of the analog-to-digital converter 32, the analog-to-digital converter 32 can measure the corresponding electric measurement voltage M. The corresponding digital value is transferred to the programmable digital calculator 33. The programmable digital calculator 33 and the analog-to-digital converter 32 are advantageously components of the evaluation unit 34, which is most preferably formed in the form of a microcontroller.

The first input terminal 81 and the second input terminal 82 are connected to various different receiving coils 40 via a switching device 70. The switching device 70 includes a first signal line 75 connected to the first input terminal 81 of the operational amplifier 80. Further, the second signal line 76 is connected to the second input terminal 82 of the operational amplifier 80. One terminal of each receiving coil 40 is connected to the third signal line 77, respectively. The other terminal of the receiving coil 40 is connected to either the first signal line 75 or the second signal line 76 via the corresponding switching means 71 and 72, respectively. Each switching means 71, 72, 73, 74 advantageously has a first state in which it has a first electrical resistance, and each switching means has a second state in which it has a second electrical resistance. The second electric resistance is at least 1000 times larger than the first electric resistance, and the first state and the second state can be switched by at least one switching means. .. It is assumed in the present invention that the receiving coil 40 is not connected to the operational amplifier 80 in the second state of the corresponding switching means 71, 72. Advantageously, semiconductor-based switching means 71, 72, 73, 74 are used. Thereby, for example, a first electric resistance of 0.9Ω can be obtained, and a second electric resistance in which a signal attenuation of at least 60 dB occurs can be obtained. The corresponding switching means are described in the data sheet available at the internet address http://www.ti.com/lit/ds/symlink/ts5a623157.pdf as of March 19, 2015.

FIG. 1 illustrates, for example, seven receiving coils 40, and each of these receiving coils has an index n that is counted up along the measurement direction 11. It is clear that the measuring system 10 can have significantly more, eg, 30 receiving coils 40. Each of the receiving coils 40 having indexes n = 1, 3, 5, 7 is connected to the first signal line 75 via the first switching means 71. The receiving coils 40 arranged between them and having indexes n = 2, 4, 6 are connected to the second signal line 76 via the second switching means 72, respectively. By the wiring described here, the two selected receiving coils are differentially and commonly connected, and these receiving coils are connected to the input side of the operational amplifier 80. As a result, the external interference field acting on the two receiving coils 40 in the same manner does not change the measured voltage M. The correct and differential connection of the two receiving coils depends on the winding direction of the plurality of related receiving coils and which terminal is connected to the third signal line 77.

The third signal line 77 and the first input terminal 81 of the operational amplifier 80 are connected by the fourth switching means 74. As a result, only one of the individual receiving coils 40 is connected to the input side of the operational amplifier 80, and this receiving coil is connected to the second signal line 76 via the second switching means 72. Further, when the individual receiving coils 40 connected to the first signal line 75 via the first switching means 71 are used, only the third switching means 73 is connected. The third signal line 77 is connected to the second input terminal 82 of the operational amplifier 80 by the third switching means 73.

The first to fourth switching means 71, 72, 73, 74 are advantageously driven and controlled by a programmable digital computer 33. The corresponding control line is not shown in FIG.

FIG. 2 schematically shows a part of the standard device 20 according to the first embodiment of the present invention shown in FIG. Below the standard 20 is a diagram plotting the voltage ratio k for position x. The position x is the position of each receiving coil (reference numeral 40 in FIG. 1) with respect to the standard device 20. The voltage ratio k indicates the amplitude of the AC voltage induced in the observing receiving coil. A value of 100% occurs when the receiving coil is entirely on a ferromagnetic material. When the receiving coil is completely above the mark 21, this voltage ratio is approximately 0%. This is because the inductive coupling between the transmit winding device and the receive coil is extremely weak due to the lack of ferromagnetic material.

In the first embodiment, since the mark contour 50 is formed in a rectangular shape, the virtual rectangle 60 described in the independent claim perfectly matches the mark contour 50. The virtual rectangle 60 has a first rectangular side 61, a second rectangular side 62, a third rectangular side 63, and a fourth rectangular side 64. The first rectangular side 61 and the second rectangular side 62 extend parallel to the measurement direction 11, and the third rectangular side 63 and the fourth rectangular side 64 extend in the direction perpendicular to the measurement direction 11. Exists. The distance 65 between the first rectangular side 61 and the second rectangular side 62 is equal to the width of the mark 21. Since the spacing 65 is configured to be slightly smaller than the width 27 of the material tape 23, two opposing lateral stripes 24 that integrate the material tape 23 remain. The interval 66 of the fourth rectangular side 64 of the third rectangular side 63 is the length of the mark 21. Here, this is slightly larger than an integral multiple of the first partition interval λ. As can be seen from FIG. 1, the first division interval λ can be obtained, for example, by measuring the intervals of the third rectangular side 63 of all the marks 21, and the shortest interval among these intervals is the th. It is equal to twice the 1 division interval λ.

The distance 66 to the internal distance (reference numeral 67 in FIG. 1) between two adjacent virtual rectangles 60 is such that the distance 13 of the two 50% values 12 of the voltage ratio k is the first division distance as accurately as possible. Selected to be an integral multiple of λ. When the first division interval λ is, for example, 1.0 mm, the interval 66 can be, for example, 1.4 mm, and the above internal interval (reference numeral 67 in FIG. 1) is, for example, 0.6 mm.

FIG. 3 schematically shows a part of the standard device 20 according to the second embodiment of the present invention. Since the mark contour 50 is formed in the shape of a parallelogram, the mark contour no longer completely matches the virtual rectangle 60. The virtual rectangle 60 is drawn by a broken line in FIG. The linear first outer peripheral portion 51 of the mark contour 50 is completely placed on the first rectangular side 61, and the first rectangular side 61 is longer than the first outer peripheral portion 51. The linear second outer peripheral portion 52 of the mark contour 50 is completely placed on the second rectangular side 62, and the second rectangular side 62 is longer than the second outer peripheral portion 52.

A linear third outer peripheral portion 53 of the related mark contour 50 is associated with the third rectangular side 63, and this outer peripheral portion is arranged in a completely virtual rectangle 60. A linear fourth outer peripheral portion 54 of the related mark contour 50 is associated with the fourth rectangular side 64, and this outer peripheral portion is arranged in a completely virtual rectangle 60. The third outer peripheral portion 53 and the fourth outer peripheral portion 54 are arranged in parallel with each other, and these have an angle different from 90 ° as the measurement direction 11.

The point 68 where the third rectangular side 63 and the mark contour 50 intersect is located at a corner between the third outer peripheral portion 53 and the second outer peripheral portion 52. The point 69 where the fourth rectangular side 64 and the mark contour 50 intersect is located at a corner between the fourth outer peripheral portion 54 and the first outer peripheral portion 51.

As can be seen from the comparison between FIGS. 2 and 3, in the second embodiment, the course of the voltage ratio k with respect to the position x in the region of the two 50% values 12 is clearer than in the case of the first embodiment. The inclination is small. The interval 66 to the inner width (reference numeral 67 in FIG. 1) is again set so that the distance 13 of the two 50% values of the voltage ratio k is an integral multiple of the first partition interval λ as accurately as possible. Be selected.

FIG. 4 schematically shows a part of the standard device 20 according to the third embodiment of the present invention. The virtual rectangle 60 is drawn with a broken line in FIG. The linear first outer peripheral portion 51 of the mark contour 50 is completely placed on the first rectangular side 61, and the first rectangular side 61 is longer than the first outer peripheral portion 51. The linear second outer peripheral portion 52 of the mark contour 50 is completely placed on the second rectangular side 62, and the second rectangular side 62 is longer than the second outer peripheral portion 52.

A third outer peripheral portion 53a of the mark contour 50, which is bent outward and extends, is associated with the third rectangular side 63. A fourth outer peripheral portion 54a of the mark contour 50, which is bent outward and extends, is associated with the fourth rectangular side 64. The third outer peripheral portion 53a and the fourth outer peripheral portion 54a are formed symmetrically with each other. The third outer peripheral portion 53a and the fourth outer peripheral portion 54a each have exactly two lower portions 57, and these two lower portions form an angle of 90 ° or more. The two linear lower portions 57 corresponding to each other are in contact with each other at the corners 58. These corners 58 form points 68 and 69 where the third rectangular side 63 to the fourth rectangular side 64 and the mark contour 50 intersect.

In the third embodiment, the course of the voltage ratio k with respect to the position x in the region of the two 50% values 12 is almost the same as in the case of the second embodiment shown in FIG. The interval 66 to the inner width (reference numeral 67 in FIG. 1) is again set so that the distance 13 of the two 50% values of the voltage ratio k is an integral multiple of the first partition interval λ as accurately as possible. Be selected.

The mark contour 50 according to the third embodiment is formed symmetrically with respect to the center line 25 of the standard device 20 as a whole. As a result, an error when scanning the standard device 20 is avoided.

FIG. 5 schematically shows a part of the standard device 20 according to the fourth embodiment of the present invention. This embodiment relates to a plurality of other deviations between the ideal signal shape for signal evaluation and the actual signal shape. The fourth embodiment shown in FIG. 5 is a modified form of the first embodiment shown in FIG. 2, which is the same as the second embodiment shown in FIG. 3 to the third embodiment shown in FIG. It is also possible to combine them.

On the lower side of FIG. 5, the signal shape that can occur when only the first embodiment shown in FIG. 2 is used is written by a broken line. The solid line shows the signal shape that occurs according to the compensating means described below and is particularly suitable for simple signal evaluation. A total of three types of deviations 14a, 14b, 15a, 15b, and 16 occur between these signal shapes, and these will be described in detail below.

The flattening effect 16 may be observed if the individual coils to be observed are completely on the ferromagnetic material of the material tape 23 at large intervals relative to the mark 21. In this case, the signal amplitude will be slightly higher than if the individual coils were present entirely on the ferromagnetic material of the material tape 23 at a small distance to the mark 21. The flattening effect 16 can be addressed by an auxiliary mark 21a formed with an extremely narrow width as compared to the informational mark 21. The auxiliary mark 21a is placed exactly where the flattening effect 16 would be shown without the auxiliary mark 21a. The width of the auxiliary mark 21a is selected so that the flat effect 16 disappears.

Overshoots 14a, 14b may occur if the individual coils to be observed are present on the ferromagnetic material of the material tape 23 shortly before or slightly behind the mark boundaries 53, 54. Overshoots 14a and 14b can be addressed by removing the ferromagnetic material in the corresponding region of the material tape 23. For this purpose, a fifth outer peripheral portion 55 of the mark contour 50 is provided on the first rectangular side 61 of the auxiliary mark 21a, and this outer peripheral portion is bent outward with respect to the measurement direction 11 and extends. The second rectangular side 62 is associated with at least one sixth outer peripheral portion 56 of the mark contour 50 of the auxiliary mark 21a, which is bent outward with respect to the measurement direction 11 and extends.

Undershoots 15a and 15b may be observed when the individual coils to be observed are located slightly behind or slightly before the mark boundaries 53 and 54 without the mark 21. These undershoots 15a, 15b can be addressed by adding a ferromagnetic material to the corresponding region of the material tape 23. For this purpose, a fifth outer peripheral portion 55 of the mark contour 50 is provided on the first rectangular side 61 of the mark 21. The fifth outer peripheral portion is bent inward with respect to the measurement direction 11 and extends. At least one sixth outer peripheral portion 56 of the mark contour 50 is associated with the second rectangular side 62 of the mark 21, and the sixth outer peripheral portion is bent inward with respect to the measurement direction 11 and extends. ing.

The fifth outer peripheral portion 55 and / or the sixth outer peripheral portion 56 can have at least one linear lower portion 57a, as shown in the case of the overshoot 14b and the undershoot 15b in FIG. The fifth outer peripheral portion 55 and / or the sixth outer peripheral portion 56 can have a lower portion 57b that is curved without bending, as shown in the case of the overshoot 14a and the undershoot 15a in FIG.

FIG. 6 shows a schematic cross section of the position measuring device 10 shown in FIG. 1, and the mark 21 is formed as a penetrating portion 22. Correspondingly, the mark 21 penetrates the total thickness 26 of the standard device 20. The mark contour 50 is substantially formed to be constant over the total thickness 26 of the material tape 23. Due to the advantageous production by the photochemical etching method, various deviations can occur due to tolerances. Since the penetrating portion 22 is advantageously etched from the material tape 23 at the same time from two opposite surfaces, the etching time is shortened.

Further, in FIG. 6, the arrangement of the receiving coil 40 and the transmitting winding device 41 with respect to the standard device 20 can be seen. The receiving coil 40 and the transmitting winding device 41 are each formed as a flat winding device, and these are advantageously manufactured by a photochemical etching method. In FIG. 6, only a single layer is provided for each of the receiving coil 40 and the transmitting winding device 41, but a plurality of layers may be provided in order to increase the number of coil turns as much as possible. The individual layers are separated from each other by one insulating layer 47, and these insulating layers can be composed of, for example, polyimide. This plastic is electrically insulating and can withstand high temperatures. If the receiving coil 40 and / or the transmitting winding device 41 each has a plurality of layers, they are advantageously electrically connected to each other via through holes. These through holes penetrate one or more corresponding insulating layers.

The sensor spacing 17 between the standard device 20 and the unit including the receiving coil 40 and the transmitting winding device 41 is advantageously configured to be smaller, and most preferably smaller than the first partitioning interval λ.

FIG. 7 shows a diagram corresponding to FIG. 6, in which the mark 21 is configured as a recess 22a. The recess 22a has a constant depth 22b, which is, for example, half the thickness 26 of the material tape 23. The recess 22a is advantageously formed by a photochemical etching method, which etching is performed from only one side of the material tape 23. Since it is difficult to control the etching depth, and therefore the depth 22b of the recess 22a, the penetration portion of FIG. 6 is advantageous.

For other points, refer to the explanation in FIG. The same reference numerals are given to the same parts to the corresponding parts in FIGS. 6 and 7.

λ 1st division interval δ 2nd division interval M Measurement voltage k Voltage ratio x Position of each receiving coil with respect to the standard 10 Position measurement system 11 Measurement direction 12 50% value of voltage ratio 13 Two 50% values of voltage ratio Distance 14a Overshoot 14b Overshoot 15a Undershoot 15b Undershoot 16 Flattening effect 17 Sensor spacing 20 Standard 21 Mark 21a Auxiliary mark 22 Penetration 22a Recess 22b Recess depth 23 Material tape 24 Side stripe 25 Center line 26 Material tape Thickness 27 Material Tape Width 30 Scanning Device 31 AC Current Source 32 Analog Digital Converter 33 Programmable Digital Calculator 34 Evaluation Unit 40 Receiving Coil 41 Transmission Winding Device 42 Transmission Surface 43 Serpentine Conductor Path 44 First Group 45 Second group 46 Boundary between two groups of meandering linear conductor path 47 Insulation layer 50 Mark contour 51 First outer peripheral part 52 Second outer peripheral part 53 Third outer peripheral part 53a Third outer peripheral part 54 Fourth outer peripheral part 54a 4th outer peripheral part 55 5th outer peripheral part 56 6th outer peripheral part 57 Linear lower part 57a Straight lower part 57b Lower part curved without bending 58 Square part 60 Virtual rectangle 61 1st rectangular side 62 No. 2 Rectangular side 63 3rd rectangular side 64 4th rectangular side 65 Spacing between the 1st rectangular side and the 2nd rectangular side 66 Spacing between the 3rd rectangular side and the 4th rectangular side 67 Between two adjacent rectangles 68 The point where the third rectangular side intersects the mark contour 69 The point where the fourth rectangular side intersects the mark contour 70 Switching device 71 First switching means 72 Second switching means 73 Third switching means 74 Fourth switching means 75 1st signal line 76 2nd signal line 77 3rd signal line 80 Operato 86 Second feedback resistor

Claims (14)

A standard device (20) used in the position measurement system (10).
It is formed by a material tape (23) composed of a ferromagnetic material.
The material tape (23) is formed by being stretched along the measurement direction (11).
A plurality of marks (21, 21a) are arranged in a row on the material tape along the measurement direction (11).
Each of the plurality of marks (21) is composed of a penetrating portion (22) or a recess (22a) having a certain depth.
Each of the plurality of marks (21) has a mark contour (50).
A binary random number sequence is encoded by at least a portion of the plurality of marks (21).
Each mark contour (50) is completely associated within a corresponding virtual rectangle (60), wherein the virtual rectangle (60) is the first, second, third, and fourth rectangular sides. Has (61,62,63,64) and
The first and second rectangular sides (61, 62) extend parallel to the measurement direction (11).
Each of the mark contours (50) has at least one linear first outer peripheral portion (51), and the first outer peripheral portion (51) overlaps with the corresponding first rectangular side (61). ,
Each of the mark contours (50) has at least one linear second outer peripheral portion (52), and the second outer peripheral portion (52) overlaps with the corresponding second rectangular side (62). ,
The third and fourth rectangular sides (63, 64) overlap with the corresponding mark contour (50) at points (68, 69), respectively.
Two adjacent virtual rectangle (60), each interval of the third rectangular sides (63), Ri integral multiple der of the first divided space (lambda), the first split interval (lambda) is that corresponds to one digit of the binary in random sequence of encoded binary, the standard device (20),
The internal spacing (67) of two adjacent virtual rectangles (60) is different from an integral multiple of the first partition spacing (λ).
A standard device (20) characterized by the above. Each of the mark contours (50) completely overlaps with the corresponding virtual rectangle (60).
The standard device (20) according to claim 1. A linear third outer peripheral portion (53) of the related mark contour (50) is associated with the third rectangular side (63).
A linear fourth outer peripheral portion (54) of the related mark contour (50) is associated with the fourth rectangular side (64).
The third and fourth outer peripheral portions (53, 54) are arranged in parallel with each other.
The third and fourth outer peripheral portions (53, 54) have an angle different from 90 ° as the measurement direction (11).
The standard device (20) according to claim 1. A third outer peripheral portion (53a) of the mark contour (50), which is bent outward or inward and extends, is associated with the third rectangular side (63).
A fourth outer peripheral portion (54a) of the mark contour (50), which is bent outward or inward and extends, is associated with the fourth rectangular side (64).
The standard device (20) according to claim 1. The third and fourth outer peripheral portions (53a, 54a) each have two linear lower portions (57), and the lower portions form an angle of 90 ° or more.
The standard device (20) according to claim 4. The two linear lower portions (57) associated with each other touch each other at a corner (58) or at a predetermined radius.
The standard device (20) according to claim 5. The outer peripheral portions of the mark contour (50) associated with the first and second rectangular sides (61, 62) are formed symmetrically with each other.
The standard device (20) according to any one of claims 1 to 6. The first rectangular side (61) is associated with at least one fifth outer peripheral portion (55) of the mark contour (50) that is bent and extends with respect to the measurement direction (11). ,
The second rectangular side (62) is associated with at least one sixth outer peripheral portion (56) of the mark contour (50) that is bent and extends with respect to the measurement direction (11). ,
The standard device (20) according to any one of claims 1 to 7. The fifth and / or sixth outer peripheral portion (55,56) has at least one linear lower portion (57a).
The standard device (20) according to claim 8. The fifth and / or sixth outer peripheral portion (55,56) has at least one lower portion (57b) that is curved without bending.
The standard device (20) according to claim 8 or 9. The one outer peripheral portion (51) of all the mark contours (50) is arranged in a row in the measurement direction (11).
The two outer peripheral portions (52) of all the mark contours (50) are arranged in a row in the measurement direction (11).
The standard device (20) according to any one of claims 1 to 10. The interval (66) between the third rectangular side (63) and the fourth rectangular side (64) is 20 of the first partition interval (λ) rather than the nearest integer multiple of the first partition interval (λ). Larger by the amount between% and 50%,
The standard device (20) according to any one of claims 1 to 11. In the position measurement system (10) having the standard device (20) according to any one of claims 1 to 12.
A scanning device (30) having at least five receiving coils (40) arranged in a row in the measuring direction (11) is provided.
The scanning device (30) has a transmission winding device (41) that does not move relative to the receiving coil (40).
The scanning device (30) can move in the measuring direction (11) along the standard device (20).
The receiving coil (40), the transmitting winding device (41), and the standard device (20) may be connected to the transmitting winding device (41) depending on the position of the standard device (20) with respect to the scanning device (30). , Arranged so that the inductive coupling with the receiving coil (40) changes.
A position measurement system (10). The transmission winding device (41) surrounds a plurality of unique transmission surfaces (42) arranged in a row in the measurement direction (11).
A maximum of one corresponding receiving coil (40) is arranged within one transmitting surface (42).
The position measuring system (10) according to claim 13.

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