CN106066137B - The dimensional standard device of label with signal compensation - Google Patents
The dimensional standard device of label with signal compensation Download PDFInfo
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- CN106066137B CN106066137B CN201610249680.XA CN201610249680A CN106066137B CN 106066137 B CN106066137 B CN 106066137B CN 201610249680 A CN201610249680 A CN 201610249680A CN 106066137 B CN106066137 B CN 106066137B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B3/00—Measuring instruments characterised by the use of mechanical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24428—Error prevention
- G01D5/24433—Error prevention by mechanical means
- G01D5/24438—Special design of the sensing element or scale
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Geophysics And Detection Of Objects (AREA)
Abstract
The present invention relates to a kind of dimensional standard devices (20), the dimensional standard device is formed by material strips (23), the material strips are made of ferromagnetic material, wherein, material strips (23) extend ground construction along measurement direction (11), wherein, multiple labels (21) are arranged at material strips in ranks along measurement direction (11), wherein, label (21) is accordingly constituted by notch or by the groove with constant thickness, wherein, it is peripheral (50) that label (21) is respectively provided with label, wherein, label (21) encodes binary system random number sequence, wherein, it is each to mark peripheral (50) to be fully disposed in be arranged imaginary to have first, second, third and fourth rectangular side (61;62;63;64) in rectangle (60), wherein the spacing of the third rectangular side (63) of two imaginary rectangles (60) abutted is the integer multiple of the first segmentation spacing respectively.According to the present invention, the spacing of the inner edge measurement of two imaginary rectangles (60) abutted is different from the integer multiple of the first segmentation spacing.
Description
Technical field
The present invention relates to a kind of dimensional standard devices, wherein dimensional standard device is formed by material strips, and the material strips are by iron
The material of magnetic forms, wherein material strips construct with extending along measurement direction, wherein multiple labels exist along measurement direction
It is arranged at material strips in arrangement, wherein label is accordingly constituted by notch or by the groove with constant thickness, wherein label
It is respectively provided with label periphery, wherein at least part of label encodes binary system random number sequence, wherein Mei Gebiao
Note periphery is fully disposed in be arranged imaginary and has the first rectangular side, the second rectangular side, third rectangular side and the 4th rectangle
In the rectangle of side, wherein the first rectangular side and the second rectangular side are parallel to measurement direction trend, wherein label periphery has respectively
There is at least one straight first edge section, which overlaps with the first rectangular side being arranged, wherein label periphery
It is respectively provided at least one straight second edge section, which overlaps with the second rectangular side being arranged, wherein the
Three rectangular sides and the 4th rectangular side respectively at least at overlap with the label periphery being arranged, wherein two imaginations abutted
Rectangle third rectangular side spacing be the first segmentation spacing integer multiple.
Background technique
A kind of dimensional standard device as known to 2 502 030 Bl of EP, dimensional standard device setting is for using in place
It sets in measuring system.Position measuring system is absolute position measuring system, wherein the label of dimensional standard device is by binary system
Random number sequence is encoded.The dimensional standard device is inductively read by scanning means.For this purpose, considering two kinds of ruler
Very little standard set-up, i.e., such: it is made of the material such as copper with high electric conductivity (vortex principle) and such: by
Ferromagnetic material composition.The type mentioned the present invention relates to after.
Typically using the coil pair for differently combining connection in the scanning of induction, to minimize signal offset.
In 2 502 030 Bl of EP, the coil pair is transverse to measurement direction arrangement alongside one another, wherein uses two of label
The arrangement of compensation.Here, the firmly wiring each other of the single coil of coil pair.Applicant registers not yet disclosed with file
It suggested a kind of position measuring system in the German patent application that number is 102014216036.7, the position measuring system is only
Including single coil, which is arranged in arrangement in measurement direction.The single coil is during operation dynamically
Combination connection in different ways, thus the single coil of the coil pair of difference arrangement alongside one another in measurement direction.This hair
It is bright to be related to a kind of problem, in the type which mentions after primarily occur inning.
If the mobile lateral confinement by label of receiver coil, senses the amplitude of the alternating voltage in receiver coil
Not sudden change, but the lasting increase for signal amplitude occur is reduced in other words.
In known position measuring system, notch or groove label is formed in material strips.Corresponding label is outer
Enclosing is rectangular configuration.The spacing of width and the inner edge measurement of rectangle is the integer multiple of the first segmentation spacing respectively.Applicant
Test obtain, (receiver coil is located at the cross of label periphery for the alternating voltage of the induction of single receiver coil
To in the accurate middle part in the edge section that measurement direction orients) have the 50% of the maximum amplitude for being greater than the alternating voltage incuded
Amplitude.Thus signal evaluation is significantly hindered.
Summary of the invention
It is an advantage of the current invention that the assessment of the alternating voltage incuded in receiver coil is for position determines
Particularly simple.In particular, the amplitude of the alternating voltage incuded in receiver coil is relative to corresponding to the first segmentation spacing
Segmentation grid definition position at be calculated as substantially the 50% of maximum signal amplitude value.
According to it is proposed that, the spacing of the inner edge measurement of two imaginary rectangles abutted and the first segmentation spacing
Integer multiple it is different.The movement of the signal transition relative to the segmentation grid referred to is produced as a result,.Preferably so choosing
Select the spacing for the inner edge measurement being previously mentioned, i.e., the amplitude of the alternating voltage incuded in receiver coil phase at the position of definition
For being calculated as substantially the 50% of maximum signal amplitude value corresponding to the segmentation grid of the first segmentation spacing.The inner edge measurement being previously mentioned
Spacing be the imaginary rectangle abutted the third and fourth rectangular side spacing.
Material strips preferably have constant thickness, which is preferably less than the first segmentation spacing.The thickness is for example counted
For 0.3mm, wherein the first segmentation spacing is for example calculated as 1mm.The width of material strips is preferably more than the first segmentation spacing, wherein
The width is for example calculated as 5mm.Material strips are preferably made of stainless steel.The label can be filled using non-ferromagnetic material,
Wherein, the label is preferably empty and is filled in other words with air.Transmitter bobbin winder device and/or receiver coil are preferably
It is configured to smooth bobbin winder device.Dimensional standard device is preferably the component part of the guide rail of linear roller bearing, the size
Standard set-up is for example constructed according to 1 052 480 Bl of EP.If to the first label of second rectangular side arranging in other words periphery
Multiple straight sections (section is parallel to measurement direction trend, wherein the section is offsettingly arranged transverse to this), then
So-called rectangular side preferably there is the straight section of maximum length to overlap with total.
Advantageous modification of the invention and evolutionary approach include: label periphery completely with the imaginary square that is arranged
Shape overlapping;Wherein, unique straight third edge section of related label periphery is arranged to third rectangular side, wherein
Unique the 4th straight edge section of related label periphery is arranged to the 4th rectangular side, wherein third edge section
It is arranged parallel to each other with the 4th edge section, wherein third and fourth edge section is different from measurement direction encirclement
90 ° of angle;Wherein, the third edge section for the label periphery moved towards inwardly or outwardly archedly is arranged to third rectangular side,
In, the 4th edge section of the label periphery moved towards inwardly or outwardly archedly is arranged to the 4th rectangular side;Third edge section
Two straight lower curtates are respectively provided with the 4th edge section, the lower curtate surrounds the angle greater than 90 °;Wherein, two that
The straight lower curtate that this is arranged is adjacent to each other in corner or in radius of circle;Wherein, the first rectangular side and the second rectangle are given
The edge section for the label periphery that side is arranged constructs mirror one anotherly;Wherein, label periphery is arranged to the first rectangular side
At least one the 5th edge section, the edge section are moved towards archedly about measurement direction, wherein to the second rectangular side with bidding
Remember that at least one the 6th edge section of periphery, the edge section are moved towards archedly about measurement direction;Wherein, the 5th marginal zone
Section and/or the 6th edge section have at least one straight lower curtate;Wherein, the 5th edge section and/or the 6th marginal zone
Section has at least one with not having bending arched lower curtate;Wherein, the first edge section of all label peripheries is measuring
Side is upwardly arranged in straight line, wherein the second edge section of all label peripheries is arranged in one in measurement direction
In straight line;Wherein, the spacing of third rectangular side and the 4th rectangular side is greater than the between the 20% and 50% of the first segmentation spacing
The immediate integer multiple of one segmentation spacing.
It can be provided that, mark periphery is corresponding fully to overlap with the imaginary rectangle being arranged.Here, it is referred to
Embodiment with the minimum difference relative to known dimensional standard device, but wherein impart mentioned above excellent
Point.This dimensional standard device equally dimensional standard device can be manufactured simply like that as is known.Herein, it is preferred to use light
The engraving method of chemistry.
It can be provided that, unique straight third marginal zone of related label periphery is arranged to third rectangular side
Section, wherein unique the 4th straight edge section of related label periphery is arranged to the 4th rectangular side, wherein third
It is arranged parallel to each other with the 4th edge section, wherein they and measurement direction surround the angle different from 90 °.Simplest
In situation, label periphery is constructed in the form of parallelogram.But label periphery can be in the area of the first and second rectangular sides
There is the shape different from parallelogram in domain.By this label periphery, the motion path of scanning means is relative to size
Standard set-up is extended, and method is: generating lasting signal transition at label boundary.It thereby guarantees that, is filled in scanning
In each position set, each label boundary is acquired in the following manner by least one receiver coil, i.e. induction alternating voltage,
The amplitude of the alternating voltage is located between the minimum and maximum amplitude of the alternating voltage incuded.It is simplified as a result, by size mark
The random number sequence that standard apparatus is read is sought.In addition, scanning means relative to dimensional standard device transverse to measurement side
To location error compare label periphery it is above proposed by rectangle in the case where do not work by force more.
It can be provided that, the third edge for the label periphery moved towards inwardly or outwardly archedly is arranged to third rectangular side
Section, wherein the 4th edge section of the label periphery moved towards inwardly or outwardly archedly is arranged to the 4th rectangular side.Third and
4th edge section constructs preferably mirror one anotherly.It can be considered that the third and fourth edge section is not to roll over
Curved arched form trend.Here, certainly, concept " arched " should include third in other words the 4th edge section have bending
Trend.
It can be provided that, third or the 4th edge section have each two straight lower curtates, and the lower curtate surrounds
Angle greater than 90 °.It hereby is obtained that, the signal tendency in the region of label boundary is substantially linear.Third and/or
4th edge section constructs with preferably pertaining to the middle line mirror symmetry of dimensional standard device.Preferably, third and/or the 4th side
Edge section accurately has there are two straight lower curtate.
It can be provided that, two straight lower curtates being arranged each other are adjacent to each other in corner or in radius of circle.
Radius of circle is implemented preferably smallly.
It can be provided that, mark peripheral edge section mirror one anotherly to what the first and second rectangular sides were arranged
Construction.Thereby, it is possible to avoid signal errors, the signal errors that can not be compensated is particularly avoided.
It can be provided that, at least one the 5th edge section of label periphery, the marginal zone are arranged to the first rectangular side
Section is moved towards archedly about measurement direction, wherein at least one the 6th edge section of label periphery is arranged to the second rectangular side,
The edge section is moved towards archedly about measurement direction.It is shown that the amplitude of the alternating voltage incuded in receiver coil
It can be had a value that in the region of label boundary in the several positions for the receiver coil being previously mentioned, which is located at most
On big value, which theoretically only just occurs when receiver coil is entirely located on ferromagnetic material.Also can go out
It is existing, the amplitude being previously mentioned under minimum value, the minimum value theoretically only when receiver coil be entirely located at air or
Just occur when person says on non-ferromagnetic material.This effect can be compensated by the proposed moulding of label periphery.Here, working as
So, concept " arched " should include the trend with bending of the 5th the 6th edge section in other words.5th the 6th edge in other words
Section can be outwardly or inwardly arched in optional manner.
It can be provided that, the 5th and/or the 6th edge section has at least one straight lower curtate.
It can be provided that, the 5th and/or the 6th edge section has at least one with not having bending arched lower curtate.
It can be provided that, the first edge section of all label peripheries is arranged in straight line in measurement direction
In, wherein the second edge section of all label peripheries is arranged in straight line in measurement direction.It is measured in position and is
In the operation of system, dimensional standard device is preferably so placed under tensile stress, so that following preset very accurately
One segmentation spacing.It is avoided by the proposed design scheme of label periphery, the dimensional standard device, which has, to be different from
The trend of accurate straight shape.Error has been obtained when reading label as a result,.
It can be provided that, the spacing of the third and fourth rectangular side is greater than the between the 20% and 50% of the first segmentation spacing
The immediate integer multiple of one segmentation spacing.Using this moulding of label periphery, obtain in the region of label boundary
Above preferably illustrated signal trend.
Dimensional standard device according to the present invention is preferably employed in position measuring system, wherein is provided with scanning dress
It sets, which has at least five receiver coils, and the receiver coil is arranged in arrangement in measurement direction,
In, scanning means has the transmitter bobbin winder device that can not be moved relative to receiver coil, wherein scanning means is measuring
It can be moved along dimensional standard device on direction, wherein receiver coil, transmitter bobbin winder device and dimensional standard device are such as
This place arrangement, so that the position relative to scanning means of dimensional standard device is influenced in transmitter bobbin winder device and receiver line
The coupling of induction between circle.The spacing in measurement direction of the adjacent receiver coil of all pairs is preferably equivalent to constant
Second segmentation spacing.Second segmentation spacing is preferably equal to or less than the first segmentation spacing, wherein the segmentation spacing is for example counted
For 0.8mm.
It can be provided that, transmitter bobbin winder device surrounds multiple individual transmitter faces, and the transmitter face is measuring
Side is upwardly arranged in arrangement, wherein an at most receiver coil being arranged is disposed in transmitter face.Such
In position measuring system, the targeted problem of the present invention especially generates by force, so that compensation according to the present invention is especially advantageous
's.Receiver coil is preferably fully disposed in the transmitter face being accordingly arranged.
Obviously, the above-mentioned and following feature also to be illustrated can not only be used in the combination correspondingly illustrated
In, it could be used that in others combination or be used alone, without departing from frame of the invention.
Detailed description of the invention
Hereafter the present invention is illustrated in detail by attached drawing.In attached drawing:
Fig. 1 is the rough explanatory view of position measuring system according to the first embodiment of the present invention;
Fig. 2 is shown according to the rough of a part of the dimensional standard device according to the first embodiment of the present invention of Fig. 1
Meaning property view;
Fig. 3 is the rough explanatory view of a part of dimensional standard device according to the second embodiment of the present invention;
Fig. 4 is the rough explanatory view of a part of dimensional standard device according to the third embodiment of the present invention;
Fig. 5 is the rough explanatory view of a part of dimensional standard device according to the fourth embodiment of the present invention;
Fig. 6 is the cross section illustrated roughly according to the position measuring system of Fig. 1, wherein marker configurations are notch;And
Fig. 7 is the schematic diagram of corresponding diagram 6, wherein marker configurations are groove.
Specific embodiment
Fig. 1 shows the rough explanatory view of position measuring system 10 according to the first embodiment of the present invention.Position
Setting measuring system 10 includes dimensional standard device 20 and scanning means 30.Dimensional standard device 20 is designed as material strips 23, the material
Material strip is for example made of stainless steel ferromagnetic material, wherein it is for example with the constant thickness of 3mm.Dimensional standard device 20
Extended in measurement direction 11 with constant width 27.Multiple marks are arranged on dimensional standard device 20 along measurement direction 11
Note 21, the label is based on the first constant segmentation spacing λ.Label 21 can be configured to notch (in Fig. 6 in optional manner
No. 22) or be configured to have the groove (No. 22a in Fig. 7) of constant depth.Label 21 can have there are two state, i.e. their energy
Enough existence or non-existences.21 coding binary random number sequence of label, wherein the first segmentation spacing λ corresponds to the two of this code
System number.The form of label is illustrated referring to Fig. 2 to 5 further below.The so moulding of label 21, i.e., be not required in material strips
Lateral contact pin is wanted, which is regularly arranged in material strips 23 compartment of terrain with the first segmentation spacing λ.Transverse to measurement side
To 11, for the two sides of label 21, metal tape 23 has each side tabs 24, thus the dimensional standard dress being linked
Set 20.Label 21 is preferably configured to the free space filled with air.Certainly, they can also be filled with material, which is
Non-ferromagnetic, such as filled with brass.
Scanning means 30 can move in measurement direction 11 relative to dimensional standard device 20.Preferably, dimensional standard
Device 20 is fastened at the guide rail of linear roller bearing, wherein scanning means 30 is fastened at guide rail car be arranged.Accordingly
Linear roller bearing is known from 10 2,007 042 796 A1 of DE.Scanning means 30 includes evaluation structure component 34, the assessment
Construction package is preferably configured to the form of the battery plate of individual electronics.The rest part retained the i.e. transmitter of scanning means 30
Bobbin winder device 41, receiver coil 40, switching device 70 and operational amplifier 80 are arranged in closing on for dimensional standard device 20
Spatial neighborhood, and evaluation structure component 34 can have the bigger space spacing with dimensional standard device 20 different from this.
Transmitter bobbin winder device 41 and receiver coil 40 are respectively configured to smooth bobbin winder device.It is depicted in Fig. 1
Corresponding only one is around line loop, wherein transmitter bobbin winder device 41 and receiver coil 40 actually all have a large amount of base
It is parallel around line loop in sheet.In Fig. 1, middle line is depicted in transmitter bobbin winder device 41 and in dimensional standard device 20
25.The two middle lines 25(is different from the displaying in Fig. 1) stackedly it is overlapped, wherein transmitter bobbin winder device 41 and receiver line
Circle 40 is arranged as with the small spacing with dimensional standard device 20 (referring to Fig. 6 and 7).Dimensional standard device 20 influences as a result,
The coupling of induction between transmitter bobbin winder device 41 and receiver coil 40.That is, being supplied to transmitter bobbin winder device 41
In alternating current incuded alternating voltage in receiver coil 40, the amplitude of the alternating voltage depends on 30 phase of scanning means
For the position of dimensional standard device 20.
Transmitter bobbin winder device 41 is zigzag structure in present construction, wherein the transmitter bobbin winder device surrounds multiple
The transmitter face 42 individually arranged in arrangement in measurement direction 11.Transmitter bobbin winder device 41 includes wave linear structure
Conductor line 43 first and second marshalling 44;45, which crosses over many times along measurement direction 11.It is marked with No. 46
At the position of knowledge, the conductor line 43 being previously mentioned so is connected with each other, i.e., transmitter bobbin winder device 41 is led by what is be uniquely connected to
Body route is formed.As an alternative, transmitter bobbin winder device 41 also can be by multiple single coil combinations, the coil packet
Enclose each one transmitter face 42 being uniquely arranged, wherein the transmitter face in optional manner in arrangement be connected or
It is connected in parallel.If transmitter bobbin winder device 41 is supplied by alternate current-changing source 31 with alternating current, in all transmitters
The alternating field of substantially the same electromagnetism in terms of numerical value has been obtained in face 42, wherein field direction in close proximity to transmitter face 42 in
It inverts.Alternate current-changing source 31 is preferably the component part of evaluation structure component 34.
The unique receiver coil 40 of complete arrangement is distinguished in transmitter face 42.It is attached in the space of receiver coil 40
Operational amplifier 80 closely is arranged, is constructed to the preferred total differential of the operational amplifier.Two adjacent receiver coils 40 are being surveyed
With each one constant the second segmentation spacing δ for being for example calculated as 0.8mm on amount direction 11.The wiring of operational amplifier 80 is being schemed
It is simplifiedly shown strongly in 1, wherein show only the feedback resistance 85 that two operational amplifiers 80 for total differential characterize;
86.First feedback resistance 85 is exported the first of the first input end joint area 81 of operational amplifier 80 and operational amplifier 80
End connector position 83 is connected.Second feedback resistance 86 is by the second input terminal joint area 82 and operation amplifier of operational amplifier 80
The second output terminal joint area 84 of device 80 is connected.
First and second output end connector positions 83;84 are connected to analog-digital converter 32 in input side, to simulate
Digital quantizer 32 can measure the measurement voltage M of corresponding electricity.Corresponding digital value continues the number given to that can program
Formula calculator 33.The digital counter 33 and analog-digital converter 32 that can be programmed are preferably evaluation structure component 34
Component part, wherein they preferably are configured to the form of microcontroller.
First and second input terminal joint areas 81;82 are connected by switching device 70 from different receiver coils 40.
Switching device 70 includes the first signal line 75, which is connected to the first input end joint area of operational amplifier 80
81.In addition, second signal route 76 is connected to the second input terminal joint area 82 of operational amplifier 80.Each receiver coil
40 each connector is connected to third signal line 77.Corresponding other connectors of receiver coil 40 pass through switch be arranged
Part 71;72 either with the first signal line otherwise with second signal route 75;76 are connected.Preferably, each switch member 71;72;
73;74 have first state, and in this state, which has first resistor, wherein and the switch member has the second state,
In this state, which has second resistance, wherein second resistance at least 1000 times of ground are greater than first resistor, wherein extremely
A few switch member can transfer between the first state and a second state.It is based on, receives in the frame of the application
Device coil 40 is in the switch member 71 being arranged;Operational amplifier 80 is not attached in 72 the second state.Preferably, switch member
71;72;73;74 are used based on semiconductor.Thereby, it is possible to for example realize the first resistor of 0.9 Ω, wherein can be realized to obtain
The second resistance that the signal of at least 60dB weakens.Corresponding switch member is on March 19th, 2015 in network address http: //
The content for the data page being able to access that under www.ti.com/lit/ds/svmlink/ts5a623157.pdf.
Example illustrates seven receiver coils 40 in Fig. 1, their phase application numbers n mark, the number is along measurement
The increase of direction 11 counts.Obviously, position measuring system 10 can have significantly more such as 30 receiver coils 40.Band
Have number n=1,3,5,7 receiver coil 40 be accordingly connected with the first signal line 75 by first switch part 71.With volume
Receiver coil 40 between number n=2,4,6 be accordingly arranged in is accordingly by second switch part 72 and 76 phase of second signal route
Even.It is that two selected receiver coils differentially combine connection caused by connection above-mentioned, wherein the receiver line
Circle is connected to operational amplifier 80 in input side.Corresponding to this, it is applied to two receiver lines being previously mentioned in an identical manner
The interference field of outside on circle 40 does not work to measurement voltage M.For the difference according to regulation of two receiver coils
For combination connection, it is important to the direction of winding of related receiver coil and which connector and 77 phase of third signal line
Even.
Using the 4th switch member 74 by the first input end joint area 81 of third signal line 77 and operational amplifier 80
It is connected.The single receiver coil 40 of only one is connected to operational amplifier 80 in input side as a result, which passes through
Second switch part 72 is connected with second signal route 76.If single receiver coil 40(receiver coil should be used logical
First switch part 71 is crossed to be connected with the first signal line 75), then third switch member 73 is only closed in remaining situation.Utilize third
Third signal line 77 is connected by switch member 73 with the second input terminal joint area 82 of operational amplifier 80.
First to fourth switch member 71;72;73;74 are preferably triggered by the digital counter 33 that can be programmed, wherein
Corresponding control route is not shown in Fig. 1.
Fig. 2 shows a part of the dimensional standard device 20 according to the first embodiment of the present invention according to Fig. 1
Rough explanatory view.Chart is illustrated below dimensional standard device 20, the voltage based on position x is depicted in the chart
Ratio k.Position x is orientation of the single receiver coil (No. 40 in Fig. 1) relative to dimensional standard device 20.
Voltage ratio k illustrates the amplitude of the alternating voltage incuded in observed receiver coil.Value 100% is at this time
Occur, i.e., receiver coil is completely disposed on ferromagnetic material.If receiver coil is completely on label 21, voltage ratio
Example is almost calculated as 0%, this is because the coupling of the induction between transmitter bobbin winder device and receiving coil is due to lacking ferromagnetic material
Material thus it is very weak.
In the first embodiment, it constructs with marking peripheral 50 rectangles, so that imaginary rectangle 60 is completely peripheral with label
50 overlappings.Imaginary rectangle 60 has the first, second, third and fourth rectangular side 61;62;63;64.First and second rectangular sides
61;62 are parallel to the trend of measurement direction 11, wherein the third and fourth rectangular side 63;64 move towards perpendicular to measurement direction 11.First
With the second rectangular side 61;The width of 62 65 correspondence markings 21 of spacing.The width than material strips 23 width 27 slightly smaller
Design, so that two opposed side tabs 24 keep existing, the combination of material strips 23 is maintained at one piece by the side tabs.Third and
4th rectangular side 63;64 spacing 66 is the length of label 21.The spacing is currently less times greater than the integer of the first segmentation spacing λ
Multiple.As shown in fig. 1, the first segmentation spacing λ can be sought, method is: for example measures the third rectangle of all labels 21
The spacing of side 63, wherein shortest twice for being equal to the first segmentation spacing λ in these spacing.
So spacing (67 in Fig. 1 of the spacing 66 of two imaginary rectangles 60 abutted of selection inner edge measurement in other words
Number), so that the stroke spacing 13 of 50% value 12 of voltage ratio k is accurately the integer multiple of the first segmentation spacing λ as far as possible.Such as
Fruit first is segmented spacing λ and is for example calculated as 1.0mm, then spacing 66 can for example be calculated as 1.4mm, wherein the spacing (figure of inner edge measurement
No. 67 in 1) for example it is calculated as 0.6mm.
Fig. 3 shows the rough schematic of a part of dimensional standard device 20 according to the second embodiment of the present invention
View.The forms that label periphery 50 is configured to parallelogram, thus the label periphery no longer fully with imaginary rectangle 60
Overlapping.Imaginary rectangle 60 is drawn in Fig. 3 with dotted line.Unique straight first edge section 51 of label periphery 50 is complete
Ground is arranged in the first rectangular side 61, wherein the first rectangular side 61 is longer than first edge section 51.Mark the unique of periphery 50
Straight second edge section 52 be completely disposed in the second rectangular side 62, wherein the second rectangular side 62 compares second edge
Section 52 is longer.
Unique straight third edge section 53 of related label periphery 50, the side are arranged to third rectangular side 63
Edge section is fully disposed in imaginary rectangle 60.Unique pen of related label periphery 50 is arranged to the 4th rectangular side 64
The 4th straight edge section 54, the edge section are fully disposed in imaginary rectangle 60.Third and fourth edge section 53;54
It is arranged parallel to each other, wherein they and measurement direction 11 surround the angle different from 90 °.
At this point, third rectangular side 63 and label periphery 50 overlap point 68() it is in third and second edge section 53;
Corner between 52.At this point, the 4th rectangular side 64 overlaps point 69(with label periphery 50) it is in the 4th and first edge area
Section 54;Corner between 51.
As obtained in the comparison of Fig. 2 and 3, trend of the voltage ratio k based on position x is in the region of 50% value 12
It is less steeper than significant in the first embodiment in this second embodiment.Furthermore so inner edge measures selection spacing 66 in other words
Spacing (No. 67 in Fig. 1), so that the stroke spacing 13 of 50% value 12 of voltage ratio k is accurately between the first segmentation as far as possible
Integer multiple away from λ.
Fig. 4 shows the rough schematic of a part of dimensional standard device 20 according to the third embodiment of the present invention
View.Imaginary rectangle 60 is drawn in Fig. 4 with dotted line.Unique straight first edge section 51 of label periphery 50 is complete
Ground is arranged in the first rectangular side 61, wherein the first rectangular side 61 is longer than first edge section 51.Mark the unique of periphery 50
Straight second edge section 52 be completely disposed in the second rectangular side 62, wherein the second rectangular side 62 compares second edge
Section 52 is longer.
The third edge section 53a of the legged trend of digging earth with the snout of label periphery 50 is arranged to third rectangular side 63.To the 4th
The 4th edge section 54a of the legged trend of digging earth with the snout of label periphery 50 is arranged in rectangular side 64.Third and fourth edge section
53a;54a is constructed mirror one anotherly.Third and fourth edge section 53a;54a is respectively provided with accurate two straight lower areas
Section 57, the lower curtate surround the angle greater than 90 °.Two straight lower curtates 57 being arranged each other are adjacent each other in corner 58
It connects.Corner 58 forms point 68;69, at this point, third the 4th rectangular side 63 in other words;64 overlap with label periphery 50.
Trend of the voltage ratio k based on position x in the region of 50% value 12 in the third embodiment substantially with pressing
According to identical in the second embodiment of Fig. 3.Furthermore the spacing (67 in Fig. 1 of so selection spacing 66 inner edge measurement in other words
Number), so that the stroke spacing 13 of 50% value 12 of voltage ratio k is accurately the integer multiple of the first segmentation spacing λ as far as possible.
Label periphery 50 generally relates to middle line 25 mirror symmetry of dimensional standard device 20 according to third embodiment
Construction.The error in scan size standard set-up 20 is avoided as a result,.
Fig. 5 shows the rough schematic of a part of dimensional standard device 20 according to the fourth embodiment of the present invention
View.This embodiment be related to actual signal form with for signal evaluation ideal signal form it is multiple separately
Outer deviation.The 4th embodiment according to Fig. 5 be according to the variant schemes of the first embodiment of Fig. 2, still, the embodiment party
Formula can also be combined with according to second or the third embodiment of Fig. 3 Fig. 4 in other words.
Such signal form is depicted with dotted line in lower part in Fig. 5, when using only the first embodiment according to Fig. 2
When, the signal form can be obtained.Such signal form is depicted using solid line, the signal form is according to following compensation
Measure obtains and the signal form is especially suitable for simple signal evaluation.It is generally obtained between these signal forms
The deviation 14a of three types;14b;15a;15b;16, the deviation is discussed in detail below.
Plateau effect 16 is observed that, when the single coil considered is fully located at the big spacing with label 21
When on the ferromagnetic material of material strips 23.Signal amplitude then can be than working as considered single coil with the small spacing with label 21
It is fully located at somewhat higher when on the ferromagnetic material of material strips 23.This plateau effect 16 can pass through aid mark 21a
It tackles, which narrowly constructs very relative to the label 21 of carrying information.Aid mark 21a is arranged in just not to be had
At the position for showing plateau effect 16 when aid mark 21a.The width of aid mark 21a, i.e. flat-top are selected just as they were
Curve Effect 16 disappears.
It is able to observe that overshoot 14a;14b, when the single coil considered soon arrives label boundary 53;Before 54 or
Mark boundary 53;When on the 54 not far rear ferromagnetic materials for being located at material strips 23.Overshoot 14a can be tackled;14b, method are: in material
Ferromagnetic material is removed in the corresponding region of material strip 23.For this purpose, the setting flag at the first rectangular side 61 of aid mark 21a
5th edge section 55 of periphery 50, the edge section is relative to the legged trend of digging earth with the snout of measurement direction 11, wherein gives the second square
At least one the 6th edge section 56 of the label periphery 50 of aid mark 21a is arranged in shape side 62, and the edge section is relative to survey
Measure the legged trend of digging earth with the snout in direction 11.
It is able to observe that and low rushes 15a;15b, when the single coil considered soon arrives label boundary 53;Before 54 or
Mark boundary 53;When on the 54 not far rear free spaces for being located at label 21.Overshoot 15a can be tackled;15b, method are: in material
Ferromagnetic material is added in corresponding region with 23.For this purpose, the setting flag periphery 50 at the first rectangular side 61 of label 21
The 5th edge section 55, which inwardly moves towards archedly about measurement direction 11, wherein to the second square of label 21
At least one the 6th edge section 56 of label periphery 50 is arranged in shape side 62, and the edge section is inwardly arched about measurement direction 11
Ground trend.
5th and/or the 6th edge section 55;The 56 lower curtate 57a that can have at least one straight, as this is in Fig. 5
In overshoot 14b at and it is low fill 15b shown in as.5th and/or the 6th edge section 55;56 can have and not roll over
Curved arched lower curtate 57b, as this in Fig. 5 overshoot 14a at and it is low rush 15a shown in as.
Fig. 6 shows the cross section of the position measuring system 10 according to Fig. 1 illustrated roughly, wherein label 21 is configured to
Notch 22.Corresponding to this, label 21 runs through the whole thickness 26 of dimensional standard device 20.Here, label periphery 50 is in material strips
It is substantially constantly constructed in 23 whole thickness 26.Here, deviation can be using tolerance as condition by with photochemical
Engraving method it is preferred manufacture and generate.Notch 22 loses from material strips 23 outward simultaneously preferably by two opposed sides
It carves, so that etching period is short.
In addition, in Fig. 6, it is seen that receiver coil 40 and transmitter bobbin winder device 41 are relative to dimensional standard device 20
Arrangement.Receiver coil 40 and 41 relative configurations of transmitter bobbin winder device are smooth bobbin winder device, the bobbin winder device
It is manufactured preferably by photochemical engraving method.In Fig. 6 it is corresponding be only provided with for receiver coil 40 and transmitter around
Unique layer of line apparatus 41, wherein multiple layers can be also set, to implement the quantity around line loop as wide as possible.It is single
A layer accordingly passes through insulating layer 47 and is separated from each other, which can for example be made of polyimides.This plastics are non-conductive,
Wherein it is subjected to high temperature.As long as receiver coil 40 and/or transmitter bobbin winder device 41 accordingly have multiple layers, these
It is preferably connected with each other electricly by straight-through contact portion, wherein straight-through contact portion penetrates one or more insulating layers being arranged.
Between dimensional standard device 20 and construction package comprising receiver coil 40 and transmitter bobbin winder device 41
Sensor spacing 17 is implemented preferably smallly, the most preferably to less than first segmentation spacing λ.
Fig. 7 shows the schematic diagram of corresponding diagram 6, wherein label 21 is configured to groove 22a.Groove 22a has constant depth
22b is spent, the depth is for example equal to the half of the thickness 26 of material strips 23.Groove 22a preferably passes through photochemical engraving method
Manufacture, wherein etching is only carried out from the side of material strips 23.Because of etch depth and that is depth of groove 22a
22b is difficult to control, then is preferred according to the notch of Fig. 6.
Referring to the embodiment to Fig. 6 in remaining situation, wherein in figs. 6 and 7, identical portion corresponding in other words
Part is equipped with identical appended drawing reference.
List of numerals
λ first is segmented spacing
δ second is segmented spacing
Μ measures voltage
K voltage ratio
Position of the x single receiver coil relative to dimensional standard device
10 position measuring systems
11 measurement directions
50% value of 12 voltage ratios
The stroke spacing of 50% value of 13 voltage ratios
14a overshoot
14b overshoot
The low punching of 15a
The low punching of 15b
16 plateau effects
17 sensor spacing
20 dimensional standard devices
21 labels
21a aid mark
22 notches
22a groove
The depth of 22b groove
23 material strips
24 side tabs
25 middle lines
The thickness of 26 size bands
The width of 27 size bands
30 scanning means
31 alternate current-changing sources
32 analog-digital converters
33 digital counters that can be programmed
34 evaluation structure components
40 receiver coils
41 transmitter bobbin winder devices
42 transmitter faces
The conductor line of 43 waves threadiness
44 first marshallings
45 second marshallings
46 boundary between two marshallings of the conductor line of wave threadiness
47 insulating layers
50 label peripheries
51 first edge sections
52 second edge sections
53 third edge sections
53a third edge section
54 the 4th edge sections
The 4th edge section of 54a
55 the 5th edge sections
56 the 6th edge sections
57 straight lower curtates
57a straight lower curtate
57b does not have the arched lower curtate of bending
58 corners
60 imaginary rectangles
61 first rectangular sides
62 second rectangular sides
63 third rectangular sides
64 the 4th rectangular sides
65 spacing between the first and second rectangular sides
66 spacing between the third and fourth rectangular side
The spacing of the 67 inner edge measurement between two adjacent rectangles
68 points, at this point, third rectangular side and label periphery overlapping
69 points, at this point, the 4th rectangular side and label periphery overlapping
70 switching devices
71 first switch parts
72 second switch parts
73 third switch members
74 the 4th switch members
75 first signal lines
76 second signal routes
77 third signal lines
80 operational amplifiers
The first input end joint area of 81 operational amplifiers
Second input terminal joint area of 82 operational amplifiers
First output end connector position of 83 operational amplifiers
The second output terminal joint area of 84 operational amplifiers
85 first feedback resistances
86 second feedback resistances.
Claims (14)
1. dimensional standard device (20) of the one kind for being used in position measuring system (10), wherein dimensional standard device (20)
It is formed by material strips (23), which is made of ferromagnetic material, wherein material strips (23) are extended along measurement direction (11)
Ground construction, wherein be arranged in multiple labels at material strips in arrangement along measurement direction (11), wherein label (21) phase
It should be constituted by notch (22) or by the groove (22a) with constant thickness, wherein label (21) is respectively provided with label periphery
(50), wherein at least part of label (21) encodes binary system random number sequence,
Wherein, each to mark peripheral (50) to be fully disposed in be arranged imaginary to have the first rectangular side (61), the second rectangle
In the rectangle (60) of side (62), third rectangular side (63) and the 4th rectangular side (64), wherein the first rectangular side (61) and the second square
Shape side (62) is parallel to measurement direction (11) trend, wherein peripheral (50) is marked to be respectively provided at least one first straight side
Edge section (51), the edge section are overlapped with the first rectangular side (61) for being arranged, wherein mark peripheral (50) be respectively provided with to
A few straight second edge section (52), the edge section are overlapped with the second rectangular side (62) being arranged, wherein third
Rectangular side (63) and the 4th rectangular side (64) are respectively at least in point (68;69) place is overlapped with the label peripheral (50) being arranged,
In, the spacing of the third rectangular side (63) of two imaginary rectangles (60) abutted is the integral multiple of the first segmentation spacing (λ)
Number,
It is characterized in that, the spacing (67) of the inner edge measurement of two imaginary rectangles (60) abutted is different from the first segmentation spacing
The integer multiple of (λ).
2. dimensional standard device described in accordance with the claim 1,
Wherein, peripheral (50) is marked to overlap completely with the imaginary rectangle (60) being arranged.
3. dimensional standard device described in accordance with the claim 1,
Wherein, the related unique straight third edge section for marking peripheral (50) is arranged to third rectangular side (63)
(53), wherein related unique the 4th straight edge section for marking peripheral (50) is arranged to the 4th rectangular side (64)
(54), wherein third edge section (53) and the 4th edge section (54) are arranged parallel to each other, wherein the third and
Four edge sections and measurement direction (11) surround the angle different from 90 °.
4. dimensional standard device described in accordance with the claim 1,
Wherein, the third marginal zone of the label peripheral (50) moved towards inwardly or outwardly archedly is arranged to third rectangular side (63)
Section, wherein the 4th edge section of the label peripheral (50) moved towards inwardly or outwardly archedly is arranged to the 4th rectangular side (64).
5. dimensional standard device according to claim 4,
Third edge section and the 4th edge section are respectively provided with two straight lower curtates (57), and the lower curtate encirclement is greater than
90 ° of angle.
6. dimensional standard device according to claim 5,
Wherein, two straight lower curtates (57) being arranged each other are adjacent to each other in corner (58) or in radius of circle.
7. according to dimensional standard device described in any one of preceding claims,
Wherein, the edge section mirror images of each other for the label peripheral (50) being arranged to the first rectangular side (61) and the second rectangular side (62)
Symmetrically construct.
8. according to dimensional standard device described in any one of preceding claims 1 to 6,
Wherein, at least one the 5th edge section (55) for marking peripheral (50), the marginal zone are arranged to the first rectangular side (61)
Section is moved towards archedly about measurement direction (11), wherein at least one for marking peripheral (50) is arranged to the second rectangular side (62)
6th edge section (56), the edge section are moved towards archedly about measurement direction (11).
9. dimensional standard device according to claim 8,
Wherein, the 5th edge section (55) and/or the 6th edge section (56) have at least one straight lower curtate.
10. dimensional standard device according to claim 8,
Wherein, the 5th edge section (55) and/or the 6th edge section (56) have at least one it is with thering is no bending not arched under
Section.
11. according to dimensional standard device described in any one of preceding claims 1 to 6,
Wherein, the first edge section (51) of all labels peripheral (50) is arranged in straight line on measurement direction (11)
In, wherein the second edge section (52) of all labels peripheral (50) is arranged in straight line on measurement direction (11).
12. according to dimensional standard device described in any one of preceding claims 1 to 6,
Wherein, the spacing (66) of third rectangular side (63) and the 4th rectangular side (64) is segmented the 20% and 50% of spacing (λ) first
Between be greater than first segmentation spacing (λ) immediate integer multiple.
13. the position measuring system that one kind has dimensional standard device (20) as any one of preceding claims
(10),
Wherein, scanning means (30) are provided with, which has at least five receiver coils (40), the receiver line
Circle is arranged in arrangement on measurement direction (11), wherein scanning means (30) has cannot relative to receiver coil (40)
The transmitter bobbin winder device (41) enough moved, wherein scanning means (30) can be along dimensional standard on measurement direction (11)
Device (20) movement, wherein receiver coil (40), transmitter bobbin winder device (41) and dimensional standard device (20) so cloth
It sets, so that dimensional standard device (20) is influenced in transmitter bobbin winder device (41) and received relative to the position of scanning means (30)
The coupling of induction between device coil (40).
14. dimensional standard device according to claim 13,
Wherein, transmitter bobbin winder device (41) surrounds multiple individual transmitter faces (42), and the transmitter face is in measurement direction
(11) it is arranged in arrangement on, wherein at most one receiver coil (40) being arranged is disposed in transmitter face (42).
Applications Claiming Priority (2)
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DE102015207275.4A DE102015207275B4 (en) | 2015-04-22 | 2015-04-22 | Measuring standard with signal-compensating markings |
DE102015207275.4 | 2015-04-22 |
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CN106066137B true CN106066137B (en) | 2019-11-05 |
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CN (1) | CN106066137B (en) |
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DE102015207275B4 (en) | 2018-06-07 |
DE102015207275A1 (en) | 2016-10-27 |
JP6793465B2 (en) | 2020-12-02 |
CN106066137A (en) | 2016-11-02 |
CH711009A2 (en) | 2016-10-31 |
JP2016206198A (en) | 2016-12-08 |
CH711009B1 (en) | 2020-08-31 |
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