JP6235391B2 - Inspection jig, cutting device, and cutting method - Google Patents

Description

  The present invention relates to an inspection jig, a cutting apparatus, and a cutting method used when a plurality of unit members are manufactured by cutting an object to be cut.

  It is widely practiced to singulate a plurality of unit members by cutting a molded product produced by performing resin molding at once using a cutting device. Hereinafter, an example will be described in which a sealed substrate, which is an object to be cut, is cut into pieces by using a cutting device having a rotary blade to separate into a plurality of electronic components (for example, Patent Document 1, (See Patent Document 2).

  In recent years, there is a case where a user requests to store a cut electronic component as it is in a storage box. In this case, a plurality of electronic components obtained from the sealed substrate are separately and collectively dropped toward the storage box and stored in the storage box. Such accommodation is called “rose accommodation”, “bulk accommodation”, or the like (see Patent Document 1). Appearance inspection of electronic components is performed for each electronic component taken out from the storage box. According to this method, even if a defective product is found from among the electronic components, it is impossible to know where the defective product is located on the sealed substrate. Therefore, there arises a problem that it is difficult to feed back information for preventing the occurrence of defective products to the previous process.

JP 2013-0665603 A (pages 12 to 13, FIGS. 1 and 5) JP 2008-135467 A (pages 3 to 4, FIG. 4)

  In view of the above-described problems, an object of the present invention is to provide an inspection jig, a cutting device, and a cutting method that make it possible to perform an appearance inspection of an electronic component when performing bulk accommodation.

  In order to solve the above-described problems, an inspection jig according to the present invention is to be cut along a first boundary line that partitions an object to be cut and a second boundary line that intersects the first boundary line. An inspection jig used together with a cutting device when producing a plurality of unit members respectively corresponding to a plurality of regions partitioned by a first boundary line and a second boundary line by cutting an object In the first embodiment, the cutting device may be disposed between the first suction means and the second suction means, each of which is provided on the cutting device and sucks the plurality of unit members, and can be placed on the first suction means. 3 suction means and the third suction means, and in a state where the third suction means is placed on the first suction means, the first suction means has a plurality of first suction paths. A plurality of third suction paths, each of which can be connected, and a third A cover unit that is placed on the attachment unit and can be attached to and detached from the third suction unit; and a fixing unit that fixes the third suction unit and the cover unit. In the state where the suction means is placed on the first suction means, a plurality of unit members received from the first suction means via the second suction means are sucked on the upper surface of the third suction means. The plurality of unit members adsorbed on the upper surface of the third suction means are pressed by the cover means in a state where the cover means is mounted on the third suction means, and the cover means is the third suction means. After the third suction means and the cover means move together in a state where the cover means is fixed to the third suction means, the third suction means and the cover means move integrally. In a state where the covering means is removed from the third adsorption means, Wherein the optical inspection is performed on a unit member.

  The inspection jig according to the present invention is characterized in that in the above-described inspection jig, the optical inspection is visual inspection by an operator.

  The inspection jig according to the present invention is characterized in that, in the above-described inspection jig, the optical inspection is performed using an imaging unit, an image processing unit, and a determination unit included in the cutting device.

  The inspection jig according to the present invention is the above-described inspection jig, on the upper surface of the third suction means in a state where the cover means is mounted on the third suction means among the surfaces of the cover means. It is characterized by comprising a soft member provided on the inner bottom surface that holds the plurality of adsorbed unit members.

  In order to solve the above-described problem, a cutting apparatus according to the present invention is configured to cut a workpiece along a first boundary line that divides the workpiece and a second boundary line that intersects the first boundary line. A cutting apparatus for use in producing a plurality of unit members respectively corresponding to a plurality of regions partitioned by a first boundary line and a second boundary line by cutting, wherein the first boundary line A cutting means for cutting the workpiece along the line and the second boundary line, a first suction means for sucking each of the plurality of unit members, and a plurality of unit members provided in the first suction means. A plurality of first suction paths for adsorbing, a suction means connected to the plurality of first suction paths, a drying means for drying the plurality of unit members adsorbed by the first suction means, a first A second unit for receiving and adsorbing a plurality of unit members from the adsorbing means; An adsorbing means, a plurality of second suction paths provided in the second adsorbing means for adsorbing the plurality of unit members, respectively, and a third adsorbing means that can be placed on the first adsorbing means; A plurality of third suction paths provided in the third suction means, each of which can lead to a plurality of first suction paths in a state where the third suction means is placed on the first suction means; A cover unit that is placed on the third suction unit and can be attached to and detached from the third suction unit; a fixing unit that fixes the third suction unit and the cover unit; and a top of the third suction unit. And a plurality of unit members placed in the same state, and the image acquisition means for acquiring images of the plurality of unit members in a state where the covering means is removed from the third suction means, and the plurality of unit members are in a separated state And a first suction hand. A plurality of unit members are transferred from the second suction means to the upper surface of the third suction means placed on the upper surface, and the plurality of unit members transferred to the upper surface of the third suction means are pressed by the covering means. And the cover means is fixed to the third suction means, and the cover means and the third suction means fixed to the cover means are integrally moved from above the first suction means to the image acquisition means. The plurality of unit members are optically inspected based on the images of the plurality of unit members obtained by the image acquisition unit in a state where the covering unit is removed from the third suction unit later.

  The cutting device according to the present invention is characterized in that, in the above-described cutting device, the image acquisition means is visual observation by an operator.

  In the cutting apparatus according to the present invention, in the above-described cutting apparatus, the image acquisition unit includes an image capturing unit, and the image processing unit performs image processing on images of a plurality of unit members obtained by the image capturing unit; And determining means for determining the quality of the plurality of unit members based on the result of the processing.

  A cutting apparatus for manufacturing an electronic component according to the present invention is the above-described cutting apparatus, wherein the covering means and the third suction means fixed to the covering means are arranged at least on the first suction means and the imaging means. A second suction unit that includes a transport unit that moves integrally between the second suction unit and a fixing unit that releases the cover unit from the third suction unit by releasing the fixed state of the third suction unit and the cover unit. The means transfers a plurality of unit members on the upper surface of the first suction means, the second suction means moves the plurality of unit members above the housing means, and the second suction means moves the plurality of unit members respectively. A plurality of unit members are separated and accommodated in the accommodating means by stopping the adsorption.

  A cutting apparatus for manufacturing an electronic component according to the present invention is characterized in that in the above-described cutting apparatus, a marking means for marking a defective product among a plurality of optically inspected unit members is provided.

  In order to solve the above-described problem, a cutting method according to the present invention is configured to cut a workpiece along a first boundary line that partitions the workpiece and a second boundary line that intersects the first boundary line. A cutting method used when producing a plurality of unit members respectively corresponding to a plurality of regions partitioned by a first boundary line and a second boundary line by cutting, wherein the first boundary A step of cutting the workpiece along the line and the second boundary line, a step of conveying the plurality of unit members to above the first suction means, and a plurality of first suction paths A step of adsorbing a plurality of unit members to the first adsorbing means, a step of drying the adsorbed unit members, and a step of stopping adsorbing the plurality of unit members to the first adsorbing means, respectively. A plurality of units each via a plurality of second suction paths A step of adsorbing the material to the second adsorption means, a step of retracting the second adsorption means adsorbing the plurality of unit members from above the first adsorption means, and a third on the first adsorption means A step of placing the suction means, a step of transferring a plurality of unit members from the second suction means onto the third suction means, a plurality of first suction paths and a plurality of first suction means of the third suction means. A step of adsorbing a plurality of unit members to the third adsorbing means through the three suction paths sequentially, a covering means fixed to the third adsorbing means, and a third means by the inner bottom surface of the covering means. A step of pressing the plurality of unit members against the upper surface of the suction means, a step of stopping the suction of the plurality of unit members to the third suction means, and a third means for fixing the cover means and the cover means. A step of integrally moving the suction means to the image acquisition means, and a third suction Removing the covering means from the means, optically inspecting the plurality of unit members placed on the upper surface of the third suction means, and accommodating the plurality of unit members in the accommodating means in a separated state. It is characterized by providing.

  The cutting method for manufacturing an electronic component according to the present invention is characterized in that, in the above-described cutting method, an operator inspects a plurality of unit members by visual inspection in the optical inspection step.

  In the cutting method for manufacturing an electronic component according to the present invention, in the above-described cutting method, in the optical inspection step, an image of a plurality of unit members is acquired using an imaging unit, and image processing is performed on the image. And optically inspecting based on the result of image processing.

  In the cutting method for manufacturing an electronic component according to the present invention, in the above-described cutting method, in the step of moving integrally, the covering unit and the third suction unit are moved integrally using the transport unit, and the optical method is performed. And a step of moving the plurality of unit members above the storage means using the second suction means after the step of performing the inspection, and in the step of receiving the plurality of unit members in the storage means, By stopping adsorbing to the adsorbing means, the plurality of unit members are separated and accommodated in the accommodating means.

  A cutting method for manufacturing an electronic component according to the present invention is characterized in that, in the cutting method described above, a step of marking a defective product among a plurality of optically inspected unit members is provided.

  According to the present invention, an image of a plurality of unit members is acquired in a state where a plurality of unit members are placed on the third suction unit and the covering unit is removed from the third suction unit in the cutting device. Image acquisition means for storing the image data, and storage means for storing the plurality of unit members in a lump in a separated state. The plurality of unit members adsorbed on the upper surface of the third adsorbing means are pressed by the covering means, and the covering means is fixed to the third adsorbing means. A plurality of images obtained by the image acquisition means in a state where the cover means and the third suction means fixed to the cover means are integrally moved to the image acquisition means and then the cover means is removed from the third suction means. A plurality of unit members are optically inspected based on the image of the unit members. Accordingly, when the plurality of unit members are accommodated together in a separated state, the plurality of unit members are optically inspected.

  According to the present invention, a plurality of unit members are optically inspected by visual observation performed by an operator.

  According to the present invention, the imaging means, the image processing means for performing image processing on the images of the plurality of unit members obtained by the imaging means, and the inspection for optical inspection based on the result of the image processing The plurality of unit members are optically inspected using the means.

It is a schematic plan view which shows Example 1 of the cutting device which concerns on this invention. 2 (1) is a front view showing the entire configuration of the inspection jig according to the present invention, and FIG. 2 (2) shows a state in which a plurality of electronic components after cutting are conveyed using the inspection jig. FIG. 2 (3) is a front view showing a state in which a plurality of electronic components are inspected using a plate in the inspection jig. 3A is a front view showing a state in which a plurality of electronic components are dried, and FIG. 3B is a test jig in the space above the drying table in a state in which the plurality of electronic components are retracted by the temporary holding mechanism. It is a front view which shows the state by which the plate was arrange | positioned among these. FIG. 4A is a front view showing a state in which a plate of the inspection jig is placed on the drying table in a state where a plurality of electronic components are retracted by the temporary holding mechanism, and FIG. It is a front view which shows the state by which the cover was arrange | positioned in the space above the plate in which the electronic component was adsorbed. FIG. 5 (1) is a front view showing a state in which a plurality of electronic components are pressed by a lid fixed on a plate on which a plurality of electronic components are placed, and FIG. 5 (2) is a diagram in which the plate and the lid are fixed. It is a front view showing the state where the integrated inspection jig was lifted from the drying table. It is a schematic plan view which shows Example 2 of the cutting device which concerns on this invention.

  The cutting device according to the present invention is provided on the rotary blade 6 that cuts the sealed substrate 2 into a plurality of electronic components 9, the drying table 13 that adsorbs the plurality of electronic components 9, and the drying table 13. A plurality of suction paths 33, a suction pump 18 connected to the plurality of suction paths 33, an injection mechanism 12 that is a drying means for drying the plurality of electronic components 9 adsorbed to the drying table 13, and a plurality of the drying tables 13. A temporary holding mechanism 37 for receiving and adsorbing the electronic component 9, a plate 19 placed on the drying table 13, and a plurality of plates 19 provided on the plate 19 and placed on the drying table 13. A plurality of suction paths 23 connected to the suction path 33, a lid 20 placed on the plate 19 and attached to and detached from the plate 19, and the plate 19 and the lid 20 are fixed. Flip includes a 28, and a plurality of accommodating box 16 on which electronic components 9 are accommodated collectively in a state in which fell apart. A plurality of electronic components 9 are placed on the plate 19 and the lid 20 and the plate 19 are integrated to the lower side of the microscope 15 in a state where the plurality of electronic components 9 are pressed by the lid 20 attached to the plate 19. Move on. The appearance of the plurality of electronic components 9 is visually inspected by the operator OP in a state where the lid 20 is removed from the plate 19, and the plurality of electronic components 9 are collectively stored in the storage box 16 after the inspection.

[Example 1]
With reference to FIG. 1, the cutting apparatus based on Example 1 of this invention is demonstrated. Any figure in this application document is schematically drawn with omission or exaggeration as appropriate for the sake of clarity. The same components are denoted by the same reference numerals, and description thereof will be omitted as appropriate.

  FIG. 1 shows a cutting apparatus M1 for manufacturing an electronic component as a first embodiment of the present invention. The cutting device M1 has a cutting module A and a payout module B. The cutting module A has a receiving part C, a cutting part D, and a cleaning part E. The cutting module A and the payout module B are mounted side by side along the X direction. The receiving part C, the cutting part D, and the cleaning part E are mounted side by side along the X direction. In the present application document, when “+, −” is not added to the sign indicating the direction, it does not matter whether the direction is the + direction or the − direction.

  The receiving part C has a prestage 1. The pre-stage 1 is supplied with a sealed substrate (object to be cut) 2 from the outside of the cutting device M1.

  The cutting part D includes a cutting transport mechanism 3 and a cutting stage 4 provided on the cutting transport mechanism 3. One surface of the sealed substrate 2 received from the prestage 1 is fixed to the cutting stage 4 by a known technique such as suction or adhesion. The cutting part D has a spindle 5. A rotary blade 6 is fixed to a rotary shaft (not shown) of the spindle 5. The rotary blade 6 can rotate at a high speed (for example, 15000 to 30000 rpm).

  The cleaning unit E has a cleaning mechanism 7 and an unloader 8. The unloader 8 conveys an assembly 10 composed of a plurality of electronic components 9 formed by cutting the sealed substrate 2. The cleaning mechanism 7 includes a water tank (not shown) and a cleaning brush 11 that rotates while the lower part is accommodated in the water tank. The cleaning brush 11 rotates in a state containing water by immersing the lower part in the water in the water tank.

  The payout module B is a module for paying out a plurality of electronic components 9 to the outside of the cutting device M1. The payout module B has a payout part F. The payout unit F includes an injection mechanism 12 that injects dry gas toward the plurality of electronic components 9, a drying table 13, an inspection jig 14, and an inspection microscope 15. In addition, the dispensing module B includes a storage box 16, a scraping member 17, and a suction pump (vacuum pump) 18. The operator OP is a person in charge of performing an operation of inspecting the plurality of electronic components 9 using the inspection jig 14 and the microscope 15, an operation of storing the inspected electronic components 9 in the storage box 16, and the like. It is.

  The suction pump 18 is provided in the lower part of the dispensing module B. The suction pump 18 is a suction means provided for the purpose of sucking the sealed substrate 2 to the cutting stage 4, sucking the aggregate 9 to the unloader 8 and the drying table 13, and the like. The suction pump 18 is connected to the cutting stage 4, the unloader 8, the drying table 13, and the like via piping and valves (both not shown). The suction pump 18 in FIG. 1 includes an electric motor, an intake port, an exhaust port and the like in addition to the suction pump body. In addition, the cutting device M1 is provided with a control unit CTL that controls each component and each operation described so far.

  With reference to FIG. 1, the to-be-cut | disconnected object containing the sealed substrate 2 is demonstrated. The workpiece has a plurality of regions partitioned by a first boundary line L1 and a second boundary line L2 that intersect each other. By cutting the workpiece along the first boundary line and the second boundary line, it is possible to produce a plurality of electronic components 9 respectively corresponding to a plurality of regions as a plurality of unit members. In FIG. 1, eight electronic components 9 are shown. Not limited to this, the number of the plurality of electronic components 9 may be more or less than eight.

  First, examples of the object to be cut include semiconductor wafers (silicon wafers, compound semiconductor wafers, etc.) in which a circuit as a functional part that functions electrically is built. Secondly, a substrate (ceramic substrate or the like) in which passive elements (corresponding to functional units) such as a plurality of active elements or resistance elements are formed. Third, the substrate, the chip-like component (corresponding to a functional unit, hereinafter referred to as “chip”) mounted on each of the plurality of regions of the substrate, and the flat plate so that the plurality of regions are covered together. And a sealed substrate 2 having a sealing resin formed in a shape. In the sealed substrate 2, a plurality of chips are collectively sealed with resin.

  The substrate that the sealed substrate 2 has includes a lead frame made of copper, an iron-based alloy or the like, a glass epoxy laminate, a printed board (printed wiring board) based on a laminate of a copper-clad polyimide film, or the like. . Furthermore, the substrates include ceramic substrates based on alumina, silicon carbide, sapphire, etc., metal base substrates based on metals such as copper and aluminum, film base substrates based on polyimide films, etc. It is.

  Chips include chips such as small piece semiconductor integrated circuits (ICs), optical semiconductor elements, transistors, diodes, resistors, capacitors, thermistors and the like. One chip may be mounted on one area of the substrate, or a plurality of chips may be mounted. The plurality of chips mounted on one region may be the same type or different types. As the sealing resin, for example, a cured resin formed by curing a thermosetting resin such as an epoxy resin or a silicone resin is used. The sealing resin may be formed on one side of the substrate or on both sides.

  With reference to FIG. 1 and FIG. 2, the process of cut | disconnecting the sealed board | substrate 2, the process of wash | cleaning, and the process of test | inspection is demonstrated. First, the cutting stage 4 shown in FIG. 1 receives the sealed substrate 2 from the prestage 1. The cutting stage 4 sucks the sealed substrate 2. The sealing resin of the sealed substrate 2 is disposed on the lower side, the substrate is disposed on the upper side, and the sealing resin is adsorbed (may be disposed upside down).

  Next, the cutting transport mechanism 3 sequentially transports the sealed substrate 2 adsorbed by the cutting stage 4 in the + X direction and the + Y direction in the drawing, and stops below the spindle 5. A rotary blade 6 fixed to a rotary shaft (not shown) of the spindle 5 rotates at a high speed (for example, about 15000 to 30000 rpm). For example, the cutting transfer mechanism 3 and the cutting stage 4 are appropriately moved in the Y and θ directions, and the rotary blade 6 is appropriately moved in the X and Z directions. Thus, the rotary blade 6 and the sealed substrate 2 are aligned. In this embodiment, the cutting stage 4 is rotated by + 90 ° or −90 °.

Next, the cutting transfer mechanism 3 and the spindle 5 relatively move in the Y direction, so that the two rotary blades 6 that rotate at high speed cut the sealed substrate 2 along the Y direction. The sealed substrate 2 is cut along two of the second boundary lines L2 from the other surface that is the surface of the substrate toward one surface that is the surface of the sealing resin (full cut). ) Cutting water (not shown) is supplied from the nozzle to the portion where the rotary blade 6 and the sealed substrate 2 are in contact with each other. Then,
The sealed substrate 2 is sequentially cut along another two of the second boundary lines L2.

  Next, the cutting stage 4 is rotated by + 90 ° or −90 °. Subsequently, the sealed substrate 2 is sequentially cut along two of the first boundary lines L1. Finally, the cutting of the sealed substrate 2 along all of the first boundary line L1 ends. Unnecessary portions around the sealed substrate 2 are removed by flowing with cutting water. As a result, the sealed substrate 2 is separated into a plurality of electronic components 9.

  Next, the surface of the substrate is sucked by the unloader 8 with the surface of the sealing resin of the assembly 10 composed of the plurality of electronic components 9 facing downward. The unloader 8 moves in the + X direction past the cleaning mechanism 7 while maintaining the state where the aggregate 10 is adsorbed. As a result, the cleaning brush 11 that rotates while containing water comes into contact with the surfaces of the sealing resin of the plurality of electronic components 9 and cleans those surfaces.

  Next, the assembly 10 is continuously moved in the + X direction while being attracted to the unloader 8. After that, a dry gas such as air is jetted upward from the jet mechanism 12 which is a drying means arranged along the Y direction toward the assembly 10. While injecting dry gas from the injection mechanism 12, the injection mechanism 12 is moved along the X direction with respect to the unloader 8. Thereby, the surface of the sealing resin included in each of the plurality of electronic components 9 is dried. What is necessary is just to move the injection mechanism 12 and the unloader 8 relatively while injecting dry gas from the injection mechanism 12. The injection mechanism 12 arranged along the X direction may be moved along the Y direction.

  Next, the assembly 10 is moved in the + X direction while being attracted to the unloader 8. Thereafter, the aggregate 10 is collectively transferred from the unloader 8 to the drying table 13 and sucked. Thereafter, dry gas is jetted downward from the jet mechanism 12 toward the assembly 10. The ejection mechanism 12 and the drying table 13 are relatively moved while ejecting the drying gas. Thus, the surface of the substrate included in each of the plurality of electronic components 9 is dried.

  Next, the operator OP sequentially executes at least the following operations using the inspection jig 14 (these operations will be described later). First, the plurality of electronic components 9 fixed to the inspection jig 14 are moved to below the microscope 15. Second, the plurality of electronic components 9 are visually inspected using the microscope 15. Depending on the type, characteristics, size, etc. of the electronic component 9, the inspection may be performed without using the microscope 15. Third, it is an operation of moving the plurality of electronic components 9 to above the storage box 16. Fourth, it is an operation of accommodating a plurality of electronic components 9 separately and collectively in the storage box 16. The plurality of electronic components 9 are housed in the housing box 16 through the operations so far.

  With reference to FIG. 2, the inspection jig 14 according to the first embodiment of the present invention will be described. As shown in FIG. 2 (1), the inspection jig 14 has a plate 19 and a lid 20. The plate 19 and the lid 20 can be attached and detached by appropriate fixing means such as screwing (described later) and a clamp.

  The plate 19 includes a base material 21 and a suction member 22 fixed on the base material 21. The plate 19 is provided with a plurality of suction paths 23 penetrating the suction member 22 and the base material 21 corresponding to the plurality of electronic components 9. In the lower part of the base material 21, there are provided recesses 24 communicating with the plurality of suction paths 23. The recess 24 has an opening on the lower surface of the substrate 21. At least two screw holes 25 are provided in the peripheral portion of the suction member 22 on the upper surface of the substrate 21.

  A recess 26 is provided in the lower part of the lid 20. The recess 26 is a space in which the suction member 22 that is the upper half of the plate 19 is accommodated when the plate 19 and the lid 20 are fixed. When the plate 19 and the lid 20 are fixed, the depth of the recess 26 is such that the inner bottom surface of the recess 26 (the surface corresponding to the upper surface of the recess 26 in FIG. 2A) holds down the plurality of electronic components 9. It is formed to an appropriate depth so as to be able to (see FIG. 2 (2)).

  If necessary, a sheet-like soft member 27 made of silicone rubber, fluorine rubber, or the like may be provided on the inner bottom surface of the recess 26 by a method such as adhesion. This prevents the plurality of electronic components 9 from being damaged.

  In the lid 20, a through hole (not shown) is provided at a position corresponding to the screw hole 25 of the base material 21. A screw 28 is inserted into the through hole. The plate 19 and the lid 20 can be mounted and removed (removable) by means of screwing using the screw 28 and the screw hole 25. By screwing, the lid 20 covers the suction member 22 and is fixed to the base material 21.

  The base 20 of the lid 20 and the plate 19 is manufactured by processing a metal material such as aluminum or a resin material made of hard plastic such as acrylic. The adsorbing member 22 is manufactured by drilling a hole in a resin material such as silicone rubber or fluororubber and forming a groove. A fluid resin (liquid resin) such as silicone rubber or fluororubber may be placed in a cavity of a mold, and the substrate 21 may be pressed thereon to cure the fluid resin. Thus, the plate 19 in which the base member 21 and the adsorbing member 22 that is a molded body are integrated can be manufactured.

  As shown in FIG. 2 (2), when the plurality of electronic components 9 after being cut are transported using the inspection jig 14, the plurality of electronic components 9 are placed on the upper surface of the suction member 22 by the lid 20. Pressed. Accordingly, the plurality of electronic components 9 can be transported without the positions of the plurality of electronic components 9 being shifted.

  Depending on the material and surface condition of the plurality of electronic components 9, it is preferable to manufacture the lid 20 using a resin material. In this case, the plurality of electronic components 9 are sandwiched and fixed using the lid 20 and the suction member 22 each made of a resin material. This prevents the plurality of electronic components 9 from being damaged during the festival of conveying the plurality of electronic components 9.

  As shown in FIG. 2 (3), after the plurality of electronic components 9 are transported using the inspection jig 14, the inspection jig 14 is placed on a work table 29 included in the cutting apparatus. Using the suction pump 18, the plurality of electronic components 9 are sucked through the pipe 30, the recess 24, and the plurality of suction paths 23 in order. Thereafter, from the state shown in FIG. 2 (2), the operator (see FIG. 1) loosens the screw 28 and removes the lid 20 from the plate 19. An operator visually inspects the plurality of electronic components 9 using the microscope 15.

  With reference to FIG. 2 and FIGS. 3-6, the structure required in the test | inspection using the jig | tool for an inspection which concerns on this invention, and the cutting method including the test | inspection are demonstrated. In FIG. 3A, the drying table 13 includes a base material 31 and an adsorption member 32. The drying table 13 is provided with a plurality of suction paths 33 penetrating the suction member 32 and the base material 31 corresponding to the plurality of electronic components 9, respectively. In the lower part of the base material 31, there are provided concave portions 34 communicating with the plurality of suction paths 33. The recess 34 has an opening on the lower surface of the substrate 31. The drying table 13 is attached to a mounting base 35 included in the cutting device.

  An injection mechanism 12 (see FIG. 1) is disposed in a space above the drying table 13. The injection mechanism 12 injects the dry gas 36 toward the plurality of electronic components 9 adsorbed on the drying table 13.

  Above the drying table 13, a temporary holding mechanism 37 that sucks the plurality of electronic components 9 is disposed. The temporary holding mechanism 37 is provided with a plurality of suction paths 38 penetrating therethrough corresponding to the plurality of electronic components 9. The temporary holding mechanism 37 can advance and retract between the drying table 13 and the upper side of the drying table 13. In addition, the temporary holding mechanism 37 can be retreated with an empty space above the drying table 13. In FIG. 3 (1), the temporary holding mechanism 37 does not pick up a plurality of electronic components 9 and retreats from the drying table 13 with the space above the drying table 13 being vacant. .

  Hereinafter, of the cutting methods, a process of inspecting a plurality of electronic components 9 that have been cleaned after being cut will be described. First, as shown in FIG. 3 (1), using the transport mechanism 8 (see FIG. 1), a plurality of electrons are placed on the upper surface of the adsorption member 32 of the drying table 13 with the surface of the sealing resin facing down. Place part 9. The plurality of cleaned electronic components 9 are sucked onto the upper surface of the suction member 32 by the plurality of suction paths 33. The plurality of adsorbed electronic components 9 are dried by the dry gas 36 ejected from the ejection mechanism 12. Thus, the surface of the substrate included in each of the plurality of electronic components 9 is dried.

Next, as shown in FIG. 3B, after the plurality of electronic components 9 are sucked by the plurality of suction paths 38 of the temporary holding mechanism 37, the temporary holding mechanism 37 is retracted from the drying table 13 and dried. A space above the table 13 is made empty. The operator OP (see FIG. 1) arranges the plate 19 in the inspection jig 14 shown in FIG. 2 (1) in the vacant space above the drying table 13.

  Next, as shown in FIG. 4A, the operator OP (see FIG. 1) places the plate 19 of the inspection jig 14 on the upper surface of the base material 31 in the drying table 13. Thereafter, the temporary holding mechanism 37 that sucks the plurality of electronic components 9 is lowered to the vicinity of the upper surface of the plate 19.

  Next, as shown in FIG. 4 (2), the suction of the temporary holding mechanism 37 shown in FIG. 4 (1) is released, and a plurality of electronic components 9 are transferred from the temporary holding mechanism 37 to the upper surface of the plate 19. Included. Using the suction pump 18, the plurality of electronic components 9 are adsorbed on the upper surface of the plate 19 through the pipe 30, the recess 34, the plurality of suction paths 33, and the plurality of suction paths 23 in order.

  Next, as shown in FIG. 5 (1), the operator OP (see FIG. 1) moves the lid 20 of the inspection jig 14 shown in FIG. Put on the top of the. As a result, the soft member 27 bonded to the inner bottom surface (the surface corresponding to the top surface of the recess 26 in FIG. 5A) in the recess 26 of the lid 20 holds down the plurality of electronic components 9. The operator OP (see FIG. 1) attaches (fixes) the plate 19 and the lid 20 by rotating and tightening the screw 28. Thereafter, the suction on the plate 19 shown in FIG.

  Next, as shown in FIG. 5 (2), the operator OP (see FIG. 1) lifts the inspection jig 14 to which the plurality of electronic components 9 are fixed from the drying table 13. The operator OP moves the inspection jig 14 to which the plurality of electronic components 9 are fixed to below the microscope 15 (see FIG. 1 (1)).

  Next, from the state shown in FIG. 2 (2), as shown in FIG. 2 (3), the operator OP (see FIG. 1) has an inspection jig 14 to which a plurality of electronic components 9 are fixed. Is placed on the work table 29 of the cutting device. Using the suction pump 18, the plurality of electronic components 9 are adsorbed on the upper surface of the plate 19 through the pipe 30, the recess 24, and the plurality of suction paths 23 in order (see FIG. 2 (3)). The operator OP removes the lid 20 from the plate 19 by rotating and loosening the screw 28. Thereafter, as shown in FIG. 2 (3), the operator OP uses a microscope 15 to visually inspect the plurality of electronic components 9.

  Next, when an appearance defect is found in the plurality of electronic components 9, the operator OP (see FIG. 1) takes necessary measures. For example, the operator OP records information on the electronic component 9 determined to be defective in appearance among the plurality of electronic components 9 (for example, information on the position, the failure mode, etc.), and the process before the inspection process. Report to the process manager (for example, cutting process, resin sealing process, etc.). As another measure, first, the operator OP can mark the electronic component 9 that has a poor appearance among the plurality of electronic components 9. Second, the operator OP can remove, from the plate 19, the electronic component 9 whose appearance is poor among the plurality of electronic components 9 after releasing the suction by the suction pump 18.

  Next, the operator OP (see FIG. 1) lifts the plate 19 from the work table 29. The operator OP carries the plate 19 above the storage box 16 shown in FIG. 1 and turns the plate 19 over. Thus, the plurality of electronic components 9 placed on the upper surface of the plate 19 are accommodated in the accommodation box 16. The electronic component 9 may remain in close contact with the surface of the adsorbing member 22 made of a resin material such as silicone rubber among the components of the plate 19. In this case, the operator OP uses the scraping member 17 shown in FIG. 1 to scrape off the electronic component 9 adhered to the surface of the adsorption member 22 from the surface. Therefore, the plurality of electronic components 9 can be accommodated in the accommodation box 16 in a separated state (accommodated).

  According to the present embodiment, first, when the plurality of electronic components 9 are collectively stored in the storage box 16 in a separated state, the plurality of electronic components 9 (see FIG. 1) are formed by the operator OP. Are optically inspected. The operator OP reports information related to the electronic component 9 having a defective appearance among the plurality of electronic components 9 to the process manager of the process prior to the inspection process. As a result, in the process prior to the inspection process, it is possible to efficiently investigate the cause of the defect and take countermeasures. Secondly, only the electronic components 9 determined to be non-defective among the plurality of electronic components 9 can be stored in the storage box 16.

[Example 2]
With reference to FIG. 6, the cutting apparatus based on Example 1 of this invention is demonstrated. FIG. 6 shows a cutting apparatus M2 for manufacturing an electronic component as a second embodiment of the present invention. A feature of the cutting device M2 is that it automatically performs a process from an inspection process to a process of accommodating a plurality of electronic components 9 in which a cleaning process and a drying process are sequentially performed.

  As shown in FIG. 6, the transport mechanism 39 is an inspection transport mechanism that holds and transports the inspection jig 14. The camera 40 is an imaging unit that is arranged above the plate 19 shown in FIG. 2 (3) and images the plurality of electronic components 9 that are attracted to the upper surface of the plate 19. The image processing unit G is an image processing unit that performs image processing such as binarization based on an image obtained by the camera 40. The determination unit H determines pass / fail (good / bad) for each of the plurality of electronic components 9 by a method such as comparing with predetermined data based on image data obtained as a result of image processing. It is the determination means to do. The marker 41 is a marking unit that marks the electronic component 9 determined to be defective by the determination unit H with ink or the like. The image processing unit G and the determination unit H may be built in the control unit CTL.

  With reference to FIG. 6, the process after cleaning the sealed substrate 2 will be described. In other words, a case will be described in which the process from the process of inspecting a plurality of electronic components 9 to the process of accommodating the bulk is automatically performed.

  3 to 5, the transport mechanism 39 performs the following operation. First, the operation of placing the plate 19 of the inspection jig 14 on the upper surface of the substrate 31 in the drying table 13 on which the plurality of electronic components 9 are not adsorbed is performed (FIGS. 3 (2) and 4 (1)). And). Next, an operation of placing the lid 20 of the inspection jig 14 shown in FIG. 2A on the upper surface of the base 31 of the drying table 13 on which the plurality of electronic components 9 are adsorbed is performed (FIG. 2). 4 (2)). Next, an operation of attaching (fixing) the plate 19 and the lid 20 by rotating and tightening the screw 28 is performed (see FIG. 5A). Next, an operation of lifting the inspection jig 14 to which the plurality of electronic components 9 are fixed from the drying table 13 (see FIG. 5B) and moving the inspection jig 14 to below the microscope 15 is performed. Perform (see FIG. 6).

  Next, the camera 40 images the plurality of electronic components 9 adsorbed on the upper surface of the plate 19 from above the plate 19 shown in FIG. The image processing unit G performs image processing such as binarization based on the image obtained by the camera 40. The determination unit H determines pass / fail (good / bad) for each of the plurality of electronic components 9 by a method such as comparing with predetermined data based on image data obtained as a result of image processing. To do. The marker 41 marks the electronic component 9 determined to be defective by the determination unit H with ink or the like. Information regarding the electronic component 9 determined to be defective by the determination unit H (for example, information regarding position, failure mode, etc.) may be stored in the control unit CTL.

  Next, if necessary, the electronic component 9 determined to be defective is automatically removed by suction means (not shown). The electronic component 9 determined to be defective can be manually removed by the operator.

  Next, the plurality of electronic components 9 are automatically accommodated (accommodated separately) in the accommodation box 16. When the electronic component 9 determined to be defective is removed, only the electronic component 9 determined to be non-defective among the plurality of electronic components 9 is stored in the storage box 16.

  According to the present embodiment, firstly, the process from the process of inspecting a plurality of electronic components 9 to the process of accommodating them in bulk is automatically performed. Thereby, the process from the process of inspecting the plurality of electronic components 9 to the process of accommodating them can be performed efficiently. Secondly, when the plurality of electronic components 9 are collectively stored in the storage box 16 in a separated state, the plurality of electronic components 9 are optically and automatically inspected. Information on the electronic component 9 having a defective appearance among the plurality of electronic components 9 can be automatically reported to the process manager of the process prior to the inspection process. Thereby, in the process before the inspection process, it is possible to investigate the cause of the defect and take countermeasures more efficiently. Thirdly, only the electronic components 9 determined to be non-defective among the plurality of electronic components 9 can be automatically stored in the storage box 16.

  In the present embodiment, a clamp or the like may be used instead of the screw as a fixing means for fixing the plate 19 and the lid 20. In this case, the transport mechanism 39 operates a clamp lever or the like to attach and detach the plate 19 and the lid 20.

  In each of the embodiments described so far, a pipe provided with a slit-like injection port or a plurality of injection ports along the longitudinal direction can be used as the injection mechanism 12 that injects the dry gas. The injection mechanism 12 may be disposed along the X direction shown in FIGS. 1 and 6 and moved along the Y direction.

  As the dry gas 36 injected from the injection mechanism 12, an appropriate dry gas available in a factory such as dry air or nitrogen can be used.

  As the suction means, a vacuum ejector may be used instead of the suction pump (vacuum pump) 18. In addition, a suction means for sucking the sealed substrate 2 to the cutting stage 4 and a suction pump 18 which is a suction means for sucking the assembly 9 to the unloader 8 and the drying table 13, It may be provided separately.

  Depending on the characteristics, surface conditions, and the like of the plurality of electronic components 9, the operator may inspect visually without using the microscope 15 (in other words, without enlarging).

  In the description so far, the description has been given with respect to the sealed substrate 2 as the object to be cut and the plurality of electronic components 9 as the plurality of unit members obtained by cutting the object to be cut. However, the present invention is not limited to this, and the present invention can be applied to a case where optical components such as a lens, an optical module, and a light guide plate are manufactured by resin molding. In addition, the present invention can also be applied when manufacturing a general resin molded product.

  As the cutting means, in addition to the rotary blade 6, a laser beam, a water jet, a wire saw, a band saw, a blast, or a first boundary line L 1 and a second boundary line L 2 in the sealed substrate 2 are formed. At least one of the cleaving using the groove can be used. When cleaving is used as the cutting means, the groove can be formed by cutting (half-cutting) the sealed substrate 2 halfway in the thickness direction using the rotary blade 6 or the like.

  The present invention is not limited to the above-described embodiments, and can be arbitrarily combined, modified, or selected and adopted as necessary without departing from the spirit of the present invention. is there. For example, the operator OP shown in FIG. 1 can perform a part of the operation by the transport mechanism 39 shown in FIG.

1 Prestige 2 Sealed substrate (to-be-cut object)
3 Cutting transfer mechanism 4 Cutting stage 5 Spindle 6 Rotating blade (cutting means)
7 Cleaning mechanism 8 Unloader 9 Electronic component (unit member)
DESCRIPTION OF SYMBOLS 10 Aggregate 11 Cleaning brush 12 Injection mechanism (drying means)
13 Drying table (first suction means)
14 Inspection Jig 15 Microscope (Image Acquisition Unit)
16 Storage box (storage means)
17 Scraping member 18 Suction pump (suction means)
19 Plate (third suction means)
20 Lid (covering means)
21, 31 Base material 22, 32 Adsorption member 23, 33, 38 Multiple suction paths 24, 26, 34 Recess 25 Screw hole (fixing means)
27 Soft member 28 Screw (fixing means)
29 Working table 30 Piping 35 Mounting table 36 Drying gas 37 Temporary holding mechanism (second adsorbing means)
39 Conveying mechanism 40 Camera (imaging means)
41 Marker (marking means)
A cutting module B dispensing module C receiving unit D cutting unit E cleaning unit F dispensing unit G image processing unit H determination unit L1 first boundary line L2 second boundary line M1, M2 cutting device OP worker CTL control unit

Claims (14)

The first boundary line and the second boundary line are cut along the first boundary line that divides the workpiece and the second boundary line that intersects the first boundary line, respectively. An inspection jig used together with a cutting device when producing a plurality of unit members respectively corresponding to a plurality of regions partitioned by boundary lines,
The cutting device includes: a first suction unit that sucks the plurality of unit members; a plurality of first pipes that are provided in the first suction unit and suck the plurality of unit members; Second adsorbing means for adsorbing each of the plurality of unit members,
The inspection jig is
And wherein the first suction means is disposed between the second adsorption unit, a third suction means able placed is that on top of the first adsorption means,
Provided on the third adsorption means, in a state in which the third suction means is placed on the first suction means, each first conduit of said plurality having said first adsorption means A plurality of third conduits that can be connected;
A covering means placed on the third suction means and attachable to and detachable from the third suction means;
A fixing means for fixing the third suction means and the covering means;
The third adsorption means receives the first adsorption means from the first adsorption means via the second adsorption means in a state where the third adsorption means is placed on the first adsorption means. Adsorbing a plurality of unit members on the upper surface of the third adsorbing means;
In a state where the covering means is mounted on the third suction means, the plurality of unit members sucked on the upper surface of the third suction means are pressed by the covering means, and the covering means is Fixed to the third suction means,
In a state where the cover means is fixed to the third suction means, the third suction means and the cover means move integrally,
An optical inspection is performed on the plurality of unit members in a state where the cover unit is removed from the third suction unit after the third suction unit and the cover unit are integrally moved. Characteristic inspection jig. The inspection jig according to claim 1,
The inspection jig characterized in that the optical inspection is visual inspection by an operator. The inspection jig according to claim 1,
The optical inspection is performed using an imaging unit, an image processing unit, and a determination unit included in the cutting apparatus. In the inspection jig according to any one of claims 1 to 3,
Of the surfaces of the covering means, provided on the inner bottom surface for pressing the plurality of unit members adsorbed on the upper surface of the third adsorbing means in a state where the covering means is mounted on the third adsorbing means. An inspection jig comprising the soft member formed. The first boundary line and the second boundary line are cut along the first boundary line that divides the workpiece and the second boundary line that intersects the first boundary line, respectively. A cutting device used when producing a plurality of unit members respectively corresponding to a plurality of regions partitioned by a boundary line,
Cutting means for cutting the workpiece along each of the first boundary line and the second boundary line;
First adsorbing means for adsorbing each of the plurality of unit members;
A plurality of first pipes for adsorbing the plurality of unit members provided in the first adsorption means;
Suction means connected to the plurality of first conduits;
Drying means for drying the plurality of unit members adsorbed by the first adsorption means;
Second adsorbing means for receiving and adsorbing the plurality of unit members from the first adsorbing means;
A plurality of second pipes provided in the second suction means for respectively sucking the plurality of unit members;
A third adsorbing means that can be placed on the first adsorbing means;
A plurality of third suction means provided in the third suction means, each of which can be connected to the plurality of first conduits in a state where the third suction means is placed on the first suction means; A pipeline,
A covering means placed on the third suction means and attachable to and detachable from the third suction means;
Fixing means for fixing the third suction means and the covering means;
Image acquiring means for acquiring images of the plurality of unit members in a state where the plurality of unit members are placed on the third suction means and the covering means is removed from the third suction means; ,
A plurality of unit members that are accommodated together in a separated state,
The plurality of unit members are transferred from the second suction means to the upper surface of the third suction means placed on the first suction means, and transferred to the upper surface of the third suction means. The plurality of unit members are pressed by the covering means, and the covering means is fixed to the third suction means,
After the cover means and the third suction means fixed to the cover means integrally move from the top of the first suction means to the image acquisition means, the cover means is moved from the third suction means. The cutting apparatus, wherein the plurality of unit members are optically inspected based on images of the plurality of unit members obtained by the image acquisition means in the detached state. The cutting device according to claim 5, wherein
The cutting apparatus according to claim 1, wherein the image acquisition means is visual inspection by an operator. The cutting device according to claim 5, wherein
The image acquisition means has imaging means,
Image processing means for performing image processing on images of the plurality of unit members obtained by the imaging means;
A cutting apparatus comprising: a determination unit that determines the quality of the plurality of unit members based on a result of performing the image processing. In the cutting device as described in any one of Claims 5-7,
Conveying means for integrally moving the covering means and the third suction means fixed to the covering means between at least the first suction means and the imaging means;
A fixing release means for releasing the third suction means and the covering means from the fixed state and removing the covering means from the third suction means;
The second suction means transfers the plurality of unit members onto the upper surface of the third suction means;
Moving the plurality of unit members placed on the third suction means above the accommodation means;
The cutting device characterized in that the plurality of unit members placed on the third suction means are separated and accommodated in the accommodation means. In the cutting device as described in any one of Claims 5-8,
A cutting apparatus comprising marking means for marking defective products among the plurality of unit members optically inspected. The first boundary line and the second boundary line are cut along the first boundary line that divides the workpiece and the second boundary line that intersects the first boundary line, respectively. A cutting method used when producing a plurality of unit members respectively corresponding to a plurality of regions partitioned by a boundary line,
Cutting the workpiece along each of the first boundary line and the second boundary line;
Conveying the plurality of unit members to above the first suction means;
Adsorbing the plurality of unit members to the first adsorbing means via a plurality of first conduits,
Drying the adsorbed unit members;
Each of stopping the adsorption of the plurality of unit members to the first adsorption means;
Adsorbing the plurality of unit members to the second adsorbing means via a plurality of second conduits,
Retreating the second adsorbing means adsorbing the plurality of unit members from above the first adsorbing means;
Placing a third suction means on the first suction means;
Transferring the plurality of unit members from the second suction means onto the third suction means;
Adsorbing each of the plurality of unit members to the third adsorbing means through the plurality of first ducts and the plurality of third ducts of the third adsorbing means sequentially,
Fixing the cover means to the third suction means, and pressing the plurality of unit members against the upper surface of the third suction means by the inner bottom surface of the cover means;
Stopping the adsorption of the plurality of unit members to the third adsorption means,
A step of integrally moving the covering means and the third suction means to which the covering means is fixed to the image acquisition means;
Removing the covering means from the third suction means;
Optically inspecting the plurality of unit members placed on the upper surface of the third suction means;
And a step of receiving the plurality of unit members in a state in which the unit members are separated from each other. The cutting method according to claim 10, wherein
In the optically inspecting step, an operator inspects the plurality of unit members by visual inspection. The cutting method according to claim 10, wherein
In the optical inspection step, an image of the plurality of unit members is acquired using an imaging unit, image processing is performed on the image, and optically based on a result of the image processing. A cutting method characterized by inspecting. In the cutting method described in any one of Claims 10-12,
In the integrally moving step, the covering means and the third suction means are integrally moved using a conveying means,
After the step of optically inspecting, the step of moving the plurality of unit members above the accommodating means using the third suction means,
In the step of accommodating in the accommodating means, the cutting method is characterized in that the plurality of unit members placed on the third suction means are separated and accommodated in the accommodating means. In the cutting method as described in any one of Claims 10-13,
A cutting method comprising a step of marking a defective product among the plurality of unit members optically inspected.

Images