JP6076717B2 - エゼクタ式真空ポンプ - Google Patents
エゼクタ式真空ポンプ Download PDFInfo
- Publication number
- JP6076717B2 JP6076717B2 JP2012265878A JP2012265878A JP6076717B2 JP 6076717 B2 JP6076717 B2 JP 6076717B2 JP 2012265878 A JP2012265878 A JP 2012265878A JP 2012265878 A JP2012265878 A JP 2012265878A JP 6076717 B2 JP6076717 B2 JP 6076717B2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- ejector
- vacuum pump
- type vacuum
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007788 liquid Substances 0.000 claims description 12
- 238000005086 pumping Methods 0.000 claims description 5
- 239000000498 cooling water Substances 0.000 description 7
- 239000012809 cooling fluid Substances 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Images
Landscapes
- Jet Pumps And Other Pumps (AREA)
Description
2 循環通路
3 液体圧送ポンプ
4 タンク
5 循環通路
9 吸引通路
10 大気接触空間
11 冷却水
12 吸込室
Claims (1)
- エゼクタと、
前記エゼクタの入口側に配置した液体圧送ポンプ手段と、
前記エゼクタの出口側に配置したタンクとを備えたエゼクタ式真空ポンプであって、
前記タンクは、中央部に前記タンクの表面が大気と接する大気接触空間を形成した二重円筒状をなしており、前記大気接触空間に前記タンクの表面と接続する放熱板を有している、エゼクタ式真空ポンプ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012265878A JP6076717B2 (ja) | 2012-12-05 | 2012-12-05 | エゼクタ式真空ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012265878A JP6076717B2 (ja) | 2012-12-05 | 2012-12-05 | エゼクタ式真空ポンプ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014111899A JP2014111899A (ja) | 2014-06-19 |
JP2014111899A5 JP2014111899A5 (ja) | 2016-01-14 |
JP6076717B2 true JP6076717B2 (ja) | 2017-02-08 |
Family
ID=51169177
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012265878A Active JP6076717B2 (ja) | 2012-12-05 | 2012-12-05 | エゼクタ式真空ポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6076717B2 (ja) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR345333A (fr) * | 1904-07-26 | 1904-11-28 | Wilhelm Siepermann | Machine pneumatique à piston hydraulique |
JPS6446099A (en) * | 1987-08-10 | 1989-02-20 | Nippon Steel Corp | Storage container for hydrogen |
JPH0342010A (ja) * | 1989-07-07 | 1991-02-22 | Ulvac Japan Ltd | 真空排気系用微粒子トラップ |
JP5197964B2 (ja) * | 2007-01-15 | 2013-05-15 | 株式会社テイエルブイ | エゼクタ式真空ポンプ |
-
2012
- 2012-12-05 JP JP2012265878A patent/JP6076717B2/ja active Active
Also Published As
Publication number | Publication date |
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JP2014111899A (ja) | 2014-06-19 |
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