JP5969334B2 - Processing apparatus and processing method - Google Patents

Description

  The present invention relates to a machining apparatus and a machining method for machining a disk-shaped workpiece.

  A processing apparatus including a holding table that sucks and holds a disk-shaped workpiece causes the holding table to suck and hold the disk-shaped workpiece when the disk-shaped workpiece is machined. When it is necessary to protect the held surface of the disk-shaped workpiece during the processing of the disk-shaped workpiece, a protective tape is attached to the disk-shaped workpiece, and the protective tape side is held on the holding surface of the holding table.

  If warpage occurs in the disk-shaped workpiece, a protective tape is applied to a ring frame having an opening wider than the area of the disk-shaped workpiece, and the disk-shaped workpiece is attached to the protective tape exposed from the opening. The disk-shaped workpiece and the ring frame are formed into a single frame set, and the frame set is held on the holding surface of the holding table to process the disk-shaped workpiece (for example, Patent Document 1 below) reference).

Japanese Patent Application Laid-Open No. 2011-4003

  However, a frame set is manufactured in advance before the disk-shaped workpiece is carried into the processing apparatus. In the processing apparatus, the frame set is conveyed to a holding table, and the disk-shaped workpiece is processed. Therefore, a device for manufacturing the frame set is required separately from the processing device, and the processing device needs to be provided with a transport means for transporting the frame set, and a ring frame is provided around the disc-shaped workpiece. Since they are integrated, there is a problem that the processing apparatus becomes large.

  The present invention has been made in view of the above circumstances, and makes it possible to process a disk-shaped workpiece without transporting a frame set in the processing apparatus, and to save space in the processing apparatus. There are issues to be solved.

  1st invention processes the upper surface of the workpiece | work conveyance means which conveys a disk shaped workpiece | work, the holding table holding the disk shaped workpiece conveyed by this workpiece conveyance means, and the disk shaped workpiece | work hold | maintained by this holding table. A processing device comprising at least a processing means, and a protective tape formed in a circular shape with a pressing area protruding from the outer periphery of the disk-shaped workpiece is attached to the disk-shaped workpiece, and is attached to the holding table. The suction surface that sucks and holds the disk-shaped workpiece and the upper surface of the ring-shaped ring frame that presses the pressing area that protrudes from the disk-shaped workpiece are at a height that does not hinder processing by the processing means. A lower frame mounting surface, and the processing apparatus includes a ring frame that is carried in and out of the holding table on the frame mounting surface. Frame conveying means to be performed, tape cutting means for cutting the protective tape along the outer periphery of the disk-shaped workpiece, and the protective tape including the pressing area cut by the tape cutting means to be clamped and removed from the ring frame And a tape removing means.

  2nd invention is a processing method which processes a disk-shaped workpiece | work using the said processing apparatus, Comprising: The pressing area which protruded from the outer periphery of this disk-shaped workpiece | work was provided in one side of the disk-shaped workpiece | work, and it is formed circularly. A workpiece carrying-in process in which the suction surface of the holding table holds the disk-shaped workpiece by suction with the surface on which the protective tape is stuck as the lower surface, and the frame transport after the workpiece carrying-in step. Means to carry the ring frame into the holding table, press the pressing area of the protective tape with the ring frame and interpose the protective tape, and place the ring frame on the frame installation surface; After the tape pressing step, the processing step of processing the disk-shaped workpiece by the processing means, and after the processing by the processing step, the disk by the tape cutting means A tape cutting step for cutting the protective tape along the outer periphery of the workpiece; and after the tape cutting step, the ring frame is unloaded by the frame conveying means and the protective tape including the pressing area is removed by the tape removing means. It comprises a tape removing step to be removed, and a workpiece unloading step for unloading the disk-shaped workpiece from the holding table by the workpiece conveying means after the tape removing step.

The processing apparatus according to the present invention carries in a workpiece conveying means for conveying a disk-shaped workpiece, a holding table composed of a suction surface for sucking and holding the disk-shaped workpiece and a frame installation surface lower than the suction surface, and a ring-shaped ring frame. And a frame conveying means for carrying out, so that the disk-shaped work to which the protective tape is attached is held on the holding table, and the ring frame is fixed to the frame installation surface, whereby the disk-shaped work is secured via the protective tape. A frame set in which the workpiece and the ring frame are integrated is formed. Therefore, the frame set can be formed in the processing apparatus, and the disk-shaped workpiece can be processed without forming the frame set in advance.
Moreover, since this processing apparatus is provided with the tape cutting means which cut | disconnects a protective tape along the outer periphery of a disk shaped workpiece | work, only the disk shaped workpiece | work after a process can be conveyed in a processing apparatus. For this reason, it is not necessary to provide a conveying means for conveying the frame set in the processing apparatus, and it is possible to prevent the processing apparatus from becoming large.
Furthermore, since this processing apparatus includes a tape removing means for removing the protective tape from the ring frame, the ring frame can be used repeatedly. Therefore, it is not necessary to prepare a plurality of ring frames.

In the processing method according to the present invention, the ring frame is installed on the frame installation surface by pressing the pressing area of the protective tape by performing the tape pressing process after the workpiece carrying-in process. A frame set in which the ring frame and the ring frame are integrated can be formed. Therefore, it is possible to machine a disk-shaped workpiece without forming a frame set in advance.
Further, since the tape cutting step and the workpiece unloading step can be performed after the processing step, only the disk-shaped workpiece after processing can be transferred, so it is necessary to provide a transfer means for transferring the frame set in the processing apparatus. This can prevent the processing apparatus from becoming large.
Furthermore, since the protective tape is removed from the ring frame by performing the tape removing process after the tape cutting process, the ring frame can be used repeatedly, and there is a space for preparing a plurality of ring frames. It becomes unnecessary, and further downsizing of the processing apparatus can be achieved.

It is a perspective view which shows the structure of a processing apparatus. It is sectional drawing which shows the structure of a holding table. It is a perspective view which shows the example of a ring frame. It is sectional drawing which shows the structure of the disk shaped workpiece | work with which the protective tape was stuck. It is sectional drawing which shows a workpiece | work carrying-in process. It is sectional drawing which shows a tape pressing process. It is sectional drawing which shows a tape cutting process. It is sectional drawing which shows the state which lifts a ring frame and the cut | disconnected protection tape in a tape removal process. It is sectional drawing which shows the state which peels a protective tape from a ring frame in a tape removal process. It is sectional drawing which shows a workpiece | work carrying-out process.

1 Device Configuration A processing device 1 shown in FIG. 1 is a processing device that processes a disk-shaped workpiece to which a protective tape is attached. The processing apparatus 1 has a base 2, and a rectangular support base 3 is disposed on the upper surface of the base 2. A column 4 extending in the Z-axis direction is erected on the rear side of the base 2 in the Y-axis direction.

  As shown in FIG. 1, a holding table 10 that holds a workpiece and is capable of rotating is disposed on the upper surface of the support base 3. On the side of the column 4, a processing means 20 for processing the workpiece is disposed via a processing feed means 25. The processing means 20 is fixed to a spindle 21 having an axis in the Z-axis direction, a housing 22 that rotatably supports the spindle 21, a processing wheel 23 attached to the lower end of the spindle 21, and a lower portion of the processing wheel 23. And a grindstone 24. Then, the motor provided inside the housing 22 drives the spindle 21 to rotate, whereby the machining wheel 23 can be rotated at a predetermined rotational speed.

  The processing feed means 25 includes a ball screw 26 extending in the Z-axis direction, a motor 27 connected to one end of the ball screw 26, a pair of guide rails 28 extending parallel to the ball screw 26, and a nut provided in the center portion. An elevating part 29 that is screwed and whose side part is in sliding contact with the pair of guide rails 28 is provided. The motor 27 rotates the ball screw 26 and moves the elevating part 29 in the Z-axis direction along the pair of guide rails 28, so that the processing means 20 connected to the elevating part 29 is raised and lowered and held by the holding table 10. The workpiece can be processed.

  A holding table 10 shown in FIG. 2 includes a holding unit 101 formed of a porous member, and the surface side of the holding unit 101 is a suction surface 102 that sucks and holds a workpiece. A suction hole 103 is formed below the holding unit 101, and the suction hole 103 is connected to the suction source 104. As shown in FIGS. 1 and 2, at the peripheral edge of the holding table 10, a ring-shaped frame installation surface 105 having a height lower than the suction surface 102, and an outside standing from the inner periphery side of the frame installation surface 105 A side surface 106 is formed. The frame installation surface 105 is a surface on which the ring-shaped metal ring frame 8 shown in FIG. 3 is placed, and the frame installation surface 105 is an electromagnet so that the ring frame 8 is magnetically fixed. May be arranged.

  As shown in FIG. 1, a workpiece conveying means 11 that conveys a workpiece is disposed at the front of the base 2 in the Y-axis direction. The workpiece transfer means 11 includes a support unit 110 that can move up and down in the Z-axis direction, a transfer arm 111 connected to the support unit 110, and an adsorption unit that is attached to the tip of the transfer arm 111 and holds a workpiece. A transport pad 112 having a surface 113. When the transfer arm 111 is turned by the rotation of the support unit 110, the transfer pad 112 can be moved above the holding table 10.

  The workpiece transfer means 11 is connected to an up-and-down means 15a that moves the support portion 110 in the vertical direction and a workpiece holding means 16 that supplies a suction force to the suction surface 113 of the transfer pad 112 to suck the workpiece. ing. The work holding means 16 includes, for example, a suction source.

  In the vicinity of the work conveying means 11, the ring-shaped ring frame 8 having an opening at the center shown in FIG. 3 is carried into the frame installation surface 105 of the holding table 10 and is also mounted on the frame installation surface 105. A frame conveying means 12 for unloading is disposed. The frame transfer means 12 includes a support portion 120 extending in the Z-axis direction, a transfer arm 121 connected to the support portion 120, a disc 122 attached to the tip of the transfer arm 121, and a predetermined amount in the circumferential direction of the disc 122. And a plurality of frame holders 123 attached at intervals.

  The frame conveying means 12 is connected to the moving means 18 for moving the disk 122, the vertical means 15b for moving the support section 120 in the vertical direction, and the frame holding means 17 for supplying a suction force to the frame holding section 123. Has been. The frame holding means 17 includes, for example, a suction source. Then, when the transfer arm 121 is turned by the rotation of the support portion 120, the disk 122 can be moved above the holding table 10.

  As shown in FIG. 1, in the vicinity of the column 4, tape cutting means 13 for cutting the protective tape attached to the workpiece is disposed. The tape cutting means 13 is provided with a cutting blade part 130, and an up-and-down means 15c for moving the cutting blade part 130 in the vertical direction is connected.

  A tape removing unit 14 is disposed in the vicinity of the frame conveying unit 12. The tape removing unit 14 includes a clamp part 140 that clamps the protective tape, and the clamp part 140 can clamp one end of the protective tape.

2 Operation Example of Device Hereinafter, an operation example of the processing device 1 will be described. In the disk-shaped workpiece 5 shown in FIG. 4, the upper surface 5a is a surface to be processed, and the surface opposite to the upper surface 5a is the lower surface 5b. At the time of processing, the protective tape 6 cut into a circle is attached to the lower surface 5 b of the disk-shaped workpiece 5. As shown in FIG. 4, the protective tape 6 has a larger diameter than the disk-shaped work 5, and the portion protruding from the outer periphery 5 c of the disk-shaped work 5 is pressed by the ring frame 8 shown in FIG. 3. It is area 7.

(1) Work carrying-in process The carrying pad 112 of the work carrying means 11 shown in FIG. 1 is brought into contact with the upper surface 5a of the disk-like work 5 shown in FIG. 4, and the work holding means 16 applies a suction force to the suction surface 113 of the carrying pad 112. By acting, the upper surface 5a of the disk-shaped workpiece 5 is sucked and held. Then, the support arm 110 shown in FIG. 1 rotates to turn the transport arm 111 and move the transport pad 112 above the holding table 10.

  Next, as shown in FIG. 5, the transport pad 112 holding the disk-shaped workpiece 5 by suction is lowered by the vertical means 15 a, and the protective tape 6 side attached to the lower surface 5 b of the disk-shaped workpiece 5 is held on the holding table 10. Placed on the suction surface 102.

  When the protective tape 6 is placed on the suction surface 102 of the holding table 10, the holding area 7 is positioned above the frame installation surface 105 having a lower height than the suction surface 102, as shown in the partially enlarged view of FIG. 5. To do. Then, the suction source 104 shown in FIG. 5 applies a suction force to the suction surface 102 of the holding table 10, thereby sucking the protective tape 6 placed on the suction surface 102 and sucking and holding the disk-shaped workpiece 5. .

(2) Tape pressing process After carrying out the workpiece carrying-in process, the ring frame 8 shown in FIG. 3 is transferred to the holding table 10 by the frame transfer means 12 shown in FIG. First, the frame holding means 17 shown in FIG. 6 holds the ring frame 8 by the plurality of frame holding portions 123 attached to the disc 122. Next, when the support portion 120 shown in FIG. 1 rotates, the transport arm 121 turns to move the disk 122 above the holding table 10.

  Next, as shown in FIG. 6, the frame holding portion 123 is lowered by the vertical means 15b, and the ring frame 8 is placed on the pressing area 7 and pressed with a predetermined load. Accordingly, as shown in the partially enlarged view of FIG. 6, the pressing area 7 of the protective tape 6 has a frame installation surface 105 having a height lower than the suction surface 102 of the holding table 10 and an outer surface standing up from the frame installation surface 105. It is dropped downward by the ring frame 8 following 106. The protective tape 6 is attached to the lower surface and inner peripheral surface of the ring frame 8, and the ring frame 8 is fixed on the outer peripheral side of the outer surface 106.

  When the ring frame 8 shown in the partially enlarged view of FIG. 6 is stuck and fixed to the protective tape 6 in the holding area 7, the upper surface thereof is at a position lower than the upper surface 5a of the disk-shaped workpiece 5, and FIG. It is positioned at a height that does not hinder the processing operation by the processing means 20 shown. In this way, a frame set 9 in which the disc-like workpiece 5 and the ring frame 8 are integrated with each other through the protective tape 6 is formed. When an electromagnet is provided on the frame installation surface 105, the ring frame 8 can be fixed by a magnetic force and can be easily installed on the frame installation surface 105.

(3) Processing Step After performing the frame pressing step, processing is performed on the disk-shaped workpiece 5 constituting the frame set 9. While the processing wheel 23 shown in FIG. 1 is rotated, for example, in the direction of arrow A, the grindstone 24 fixed to the processing wheel 23 at a predetermined processing feed speed by the processing feed means 25 is an upper surface 5a of the disk-like workpiece 5 shown in FIG. Lower until it touches. And it processes, pressing the upper surface 5a of the disk-shaped workpiece | work 5 hold | maintained at the holding table 10 with the rotating grindstone 24. FIG.

(4) Tape Cutting Process After performing the machining process, the unnecessary protective tape 6 protruding from the outer periphery 5c of the disk-shaped workpiece 5 is cut by the tape cutting means 13 as shown in FIG. The tape cutting means 13 moves above the holding table 10 and moves down until the vertical means 15 c shown in FIG. 7 cuts the cutting blade portion 130 into the protective tape 6 protruding from the outer periphery 5 c of the disk-shaped workpiece 5.

  As shown in the partially enlarged view of FIG. 7, when the cutting blade portion 130 cuts into the protective tape 6, the holding table 10 rotates, for example, in the direction of arrow B shown in FIG. Then, the cutting blade portion 130 cut into the protective tape 6 cuts the protective tape 6 along the outer periphery 5 c of the disk-shaped workpiece 5.

(5) Tape removal process After performing a tape cutting process, the cut | disconnected protection tape 6 is removed. Specifically, as shown in FIG. 8, the frame conveying means 12 moves above the holding table 10, and the frame holding part 123 attached to the disk 122 is lowered by the vertical means 15b shown in FIG. . And if the ring frame 8 is hold | maintained with the flame | frame holding part 123, the frame conveyance means 12 will raise, and the protection tape 6 cut | disconnected with the ring frame 8 will be lifted.

  Next, as shown in FIG. 9, one end of the protective tape 6 attached to the ring frame 8 is clamped by the clamp portion 140 of the tape removing means 14. In this state, the frame conveying means 12 moves obliquely upward, for example, from the moving means 18 and removes the protective tape 6 clamped by the clamp portion 140 from the ring frame 8.

(6) Workpiece unloading step After performing the tape removal step, the processed disk-shaped workpiece 5 held on the holding table 10 is unloaded. In the workpiece transfer means 11 shown in FIG. 1, the transfer arm 111 is turned by the rotation of the support unit 110, and the transfer pad 112 is moved above the holding table 10.

  As shown in FIG. 10, the work transport unit 11 sucks the upper surface 5 a of the disk-shaped work 5 held on the holding table 5 by the transport pad 112. Next, the suction by the suction source 104 is stopped, and the suction holding of the disk-shaped workpiece 5 by the suction surface 102 is released. Then, the workpiece transfer means 11 moves up with the upper surface 5a of the disk-shaped workpiece 5 being sucked by the suction surface 113 of the transfer pad 112, and carries the disk-shaped workpiece 5 out of the holding table 10.

  As described above, in the processing apparatus 1, after the disk-like workpiece 5 is conveyed to the holding table 10 by the workpiece conveying means 11 in the workpiece carrying-in process, the ring-shaped ring conveyed by the frame conveying means 12 in the tape pressing process. The frame 8 presses the pressing area 7 of the protective tape 6 and is installed on the frame installation surface 105 formed on the holding table 10, so that the disc-like workpiece 5 and the ring frame 8 are integrated with each other via the protective tape 6. The formed frame set 9 is formed in the processing apparatus 1. Therefore, the disk-shaped workpiece 5 can be processed without forming the frame set 9 in advance. Moreover, since the protective tape 6 can be cut | disconnected by the tape cutting means 13 after the process of the disk shaped workpiece | work 5, only the disk shaped workpiece | work 5 after a process can be conveyed. For this reason, it is not necessary to provide a transport means for transporting the frame set 9 in the processing apparatus, and it is possible to save space in the processing apparatus. Further, since the protective tape 6 can be removed from the ring frame 8 by the tape removing means 14, the ring frame 8 can be used repeatedly, and a space for preparing a plurality of ring frames becomes unnecessary, and the processing apparatus Further downsizing can be achieved.

  In the present embodiment, the processing unit 20 including the grindstone 24 is described as an example, but the processing unit is not limited to this.

1: Processing device 2: Base 3: Support table 4: Column 5: Disk-shaped work 5a: Upper surface 5b: Lower surface 5c: Outer periphery 6: Protective tape 7: Pressing area 8: Ring frame 9: Frame set 10: Holding table 101 : Holding unit 102: Suction surface 103: Suction hole 104: Suction source 105: Frame installation surface 11: Work transfer means 110: Support part 111: Transfer arm 112: Transfer pad 113: Suction surface 12: Frame transfer means 120: Support part 121: Transfer arm 122: Disk 123: Frame holding unit 13: Tape cutting means 130: Cutting blade part 14: Tape removing means 140: Clamping parts 15a, 15b, 15c: Vertical means 16: Work holding means 17: Frame holding means 18: Moving means 20: Processing means 21: Spindle 22: Housing 23: Processing wheel 24: Grinding wheel 25: Engineering feeding means 26: ball screw 27: motor 28: Guide rail 29: lifting part

Claims (2)

Work transporting means for transporting the disk-shaped work, a holding table for holding the disk-shaped work transported by the work transporting means, and a processing means for processing the upper surface of the disk-shaped work held by the holding table. A processing device comprising:
A protective tape formed in a circular shape with a pressing area protruding from the outer periphery of the disk-shaped work is attached to the disk-shaped work,
The holding table has a suction surface for sucking and holding a disk-shaped workpiece;
A frame installation surface at a position lower than the suction surface so that the upper surface of the ring-shaped ring frame that presses down the pressing area that protrudes from the disk-shaped workpiece is at a height that does not hinder processing by the processing means. And
The processing apparatus includes a frame conveying means for carrying the ring frame into and out of the frame installation surface of the holding table;
A tape cutting means for cutting the protective tape along the outer periphery of the disk-shaped workpiece;
And a tape removing means for clamping the protective tape including the pressing area cut by the tape cutting means to remove it from the ring frame. A machining method for machining a disk-shaped workpiece using the machining apparatus according to claim 1,
The work transport means is provided with a pressing area protruding from the outer periphery of the disk-shaped workpiece and a protective tape formed in a circular shape is adhered to one surface of the disk-shaped workpiece, and the surface on which the protective tape is adhered is the lower surface. A workpiece loading step in which a disk-shaped workpiece is carried into the holding table, and the suction surface of the holding table sucks and holds the disk-shaped workpiece;
After the workpiece carrying-in step, the ring frame is carried into the holding table by the frame conveying means, the pressing area of the protective tape is pressed by the ring frame, and the ring frame is installed through the protective tape. Tape pressing process to be installed on the surface,
After the tape pressing step, a processing step of processing the disk-shaped workpiece by the processing means,
A tape cutting step of cutting the protective tape along the outer periphery of the disc-shaped workpiece by the tape cutting means after the processing by the processing step;
After the tape cutting step, a tape removing step of unloading the ring frame by the frame conveying means and removing the protective tape including the pressing area by the tape removing means;
A work unloading step of unloading the disk-shaped work from the holding table by the work transporting means after the tape removing step.

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