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JP5506511B2 - Film laminating device - Google Patents

Film laminating device Download PDF

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JP5506511B2
JP5506511B2 JP2010086614A JP2010086614A JP5506511B2 JP 5506511 B2 JP5506511 B2 JP 5506511B2 JP 2010086614 A JP2010086614 A JP 2010086614A JP 2010086614 A JP2010086614 A JP 2010086614A JP 5506511 B2 JP5506511 B2 JP 5506511B2
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film
main body
lid
frame
bonding
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JP2011218569A (en
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忠浩 長妻
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Tanken Seal Seiko Co Ltd
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Description

この発明は、真空状態でフィルムとガラス基板を貼(は)り合わせるフィルム貼り合わせ装置に関し、特に貼り合わせ台移動用の駆動源を真空源と共用にし、装置を小型にしたフィルム貼り合わせ装置に関する。   The present invention relates to a film laminating apparatus for laminating a film and a glass substrate in a vacuum state, and particularly to a film laminating apparatus in which a driving source for moving a laminating table is shared with a vacuum source and the apparatus is downsized. .

液晶ディスプレイやプラズマディスプレイは、偏光フィルムや電磁場遮へいフィルムなどの高機能フィルムとガラス基板とが貼り合わされている。   In a liquid crystal display or a plasma display, a high-functional film such as a polarizing film or an electromagnetic field shielding film is bonded to a glass substrate.

フィルム貼り合わせ装置としては、真空容器の内面に吸引力によって偏光板とガラス基板を平行に対向するよう固定し、ガラス基板が固定された貼り合わせ台(特許文献1では、バックアップ板という)を平行姿勢を保って移動させ偏光板に押し付けて、貼り合わせ面に気泡が入らないようにしたものが提案されている(例えば、特許文献1参照)。このフィルム貼り合わせ装置では、貼り合わせ台の上下移動によって貼り合わせるようにして、真空容器の厚みを薄くしている。   As a film laminating apparatus, a polarizing plate and a glass substrate are fixed to the inner surface of a vacuum container by a suction force so as to face each other in parallel, and a laminating table (referred to as a backup plate in Patent Document 1) to which the glass substrate is fixed is parallel. There has been proposed one that keeps the posture and moves it against the polarizing plate so that bubbles do not enter the bonded surface (see, for example, Patent Document 1). In this film laminating apparatus, the thickness of the vacuum container is reduced by laminating by a vertical movement of the laminating table.

別のフィルム貼り合わせ装置としては、貼り合わせ台を金属製薄膜(特許文献2では、貼合ダイヤフラムという)に押し付けて、貼り合わせ面に気泡が入らないようにしたものが提案されている(例えば、特許文献2参照)。このフィルム貼り合わせ装置では、貼り合わせ台を突弧状に膨張変形させた金属製薄膜に押し付け、ワークの中央部分から周辺部に向かって貼り合わせるようにして、貼り合わせ面に残る空気を強制的に取り除いている。   As another film laminating apparatus, an apparatus in which a laminating table is pressed against a metal thin film (referred to as a laminating diaphragm in Patent Document 2) so that air bubbles do not enter the laminating surface has been proposed (for example, , See Patent Document 2). In this film laminating apparatus, the laminating table is pressed against a metal thin film that has been expanded and deformed in a salient arc shape, and the air remaining on the laminating surface is forced by laminating from the central part of the work toward the peripheral part. Removed.

特開2003−131211号公報(段落0014,0047、図3)JP 2003-121111 (paragraphs 0014, 0047, FIG. 3) 特開2009−294551号公報(段落0010,0016、図1)Japanese Patent Laying-Open No. 2009-294551 (paragraphs 0010 and 0016, FIG. 1)

近年では、フィルム貼り合わせ装置をほかの装置に組み付けやすくするために、従来よりも小型なフィルム貼り合わせ装置が望まれている。   In recent years, in order to make it easy to assemble a film laminating apparatus to other apparatuses, a film laminating apparatus that is smaller than the conventional one has been desired.

しかしながら、前記特許文献1に係るフィルム貼り合わせ装置では、貼り合わせ台をアクチュエータによって上下に移動させているために、真空容器と真空ポンプとは別にアクチュエータが必要となる。そのため、特許文献1に係るフィルム貼り合わせ装置は、真空容器の容量を小さくできるものの、アクチュエータを含めると依然として大型である。   However, in the film bonding apparatus according to Patent Document 1, since the bonding table is moved up and down by the actuator, an actuator is required separately from the vacuum container and the vacuum pump. Therefore, although the film bonding apparatus according to Patent Document 1 can reduce the capacity of the vacuum vessel, it is still large when an actuator is included.

前記特許文献2に係るフィルム貼り合わせ装置でも、貼り合わせ台をエアシリンダーによって上下に移動させているために、真空容器と真空ポンプとは別にエアシリンダーが必要となり、大型である。   Even in the film laminating apparatus according to Patent Document 2, since the laminating table is moved up and down by the air cylinder, an air cylinder is required separately from the vacuum container and the vacuum pump, and the film laminating apparatus is large.

特に、特許文献2に係るフィルム貼り合わせ装置では、真空容器内に金属製薄膜を備えているために、真空容器の容量も大きくなる。そのため、特許文献2に係るフィルム貼り合わせ装置では、真空容器の容量が大きくなるのに応じて真空引きに時間がかかり、貼り合わせにかかる時間も長くなる。   In particular, in the film bonding apparatus according to Patent Document 2, since the metal thin film is provided in the vacuum container, the capacity of the vacuum container is increased. Therefore, in the film bonding apparatus according to Patent Document 2, it takes time for vacuuming as the capacity of the vacuum container increases, and the time required for bonding also increases.

そこで、この発明では、前記した課題を解決し、装置を小型にしたフィルム貼り合わせ装置を提供することを目的とする。   Therefore, an object of the present invention is to solve the above-described problems and provide a film laminating apparatus in which the apparatus is miniaturized.

前記課題を解決するため、請求項1に係る発明では、フィルム貼り合わせ装置を蓋(ふた)体と枠体と本体とから構成し、蓋体と本体の各対向面に真空源に通じ膜体や板体を吸引して固定するための吸着部材を設けるとともに、枠体と本体との隙間(すきま)に弾性体を備えるようにした。そして、蓋体と枠体がフィルム貼り合わせ装置(以下、装置という場合もある)内が減圧になるにつれて本体の方へ移動し、対向面同士を当て合わせるような動作によって膜体や板体を貼り合わせるようにした。   In order to solve the above-mentioned problems, in the invention according to claim 1, the film laminating apparatus is composed of a lid (lid) body, a frame body, and a main body, and a film body is connected to each facing surface of the lid body and the main body through a vacuum source. In addition, an adsorption member for sucking and fixing the plate body is provided, and an elastic body is provided in a gap (gap) between the frame body and the main body. Then, the lid body and the frame body move toward the main body as the inside of the film laminating apparatus (hereinafter also referred to as the apparatus) is depressurized, and the film body or plate body is moved by the operation of bringing the opposing surfaces into contact with each other. I made it stick together.

請求項2に係る発明では、吸着部材以外の部位から装置内を排気する排気路を設けるようにした。   In the invention according to claim 2, an exhaust passage for exhausting the inside of the apparatus from a portion other than the adsorbing member is provided.

請求項3に係る発明では、本体の吸着部材を蓋体の吸着部材に向かって起き倒れ可能に保持し、本体の吸着部材の裏面と本体との隙間に弾性体を備えるようにした。   In the invention according to claim 3, the adsorption member of the main body is held so as to fall down toward the adsorption member of the lid, and an elastic body is provided in the gap between the back surface of the adsorption member of the main body and the main body.

請求項1に係る発明によれば、蓋体と本体の各対向面に真空源に通じ膜体や板体を吸引して固定するための吸着部材を設けるようにしたので、吸着部材の所定の位置に膜体や板体を置くだけで簡単に膜体や板体の位置決めができる。そして、請求項1に係る発明によれば、膜体や板体を吸引しながら貼り合わせるため、貼り合わせの過程で膜体や板体が位置ずれすることもない。   According to the first aspect of the present invention, since the suction member for sucking and fixing the membrane body and the plate body through the vacuum source is provided on each facing surface of the lid and the main body, The film body or plate can be easily positioned by simply placing the film body or plate at the position. According to the first aspect of the present invention, since the film body and the plate body are bonded together while being sucked, the film body and the plate body are not displaced in the process of bonding.

また、請求項1に係る発明によれば、枠体と本体との隙間に弾性体を備えるようにしたので、装置内を排気すると蓋体と本体とが引き寄せ合い、弾性体が押しつぶされて枠体と本体との隙間が狭くなる。そして、弾性体が押しつぶされることで、蓋体と枠体が本体の方に引き寄せられるように移動し、蓋体と本体の対向面を当て合わせるような動作となる。その結果として、吸着部材に固定された膜体と板体が当て合わされ、膜体と板体を貼り合わせることができる。   According to the invention of claim 1, since the elastic body is provided in the gap between the frame body and the main body, when the inside of the apparatus is exhausted, the lid body and the main body are attracted, and the elastic body is crushed and the frame is crushed. The gap between the body and the body is narrowed. Then, when the elastic body is crushed, the lid body and the frame body move so as to be drawn toward the main body, and the operation is performed such that the opposing surfaces of the lid body and the main body are brought into contact with each other. As a result, the film body and the plate body fixed to the adsorption member are brought into contact with each other, and the film body and the plate body can be bonded together.

以上のように、当然の効果として、請求項1に係る発明によれば、真空状態で膜体と板体を貼り合わせるため、貼り合わせ面に気泡や埃が入らない。   As described above, as a matter of course, according to the invention of claim 1, since the film body and the plate body are bonded together in a vacuum state, bubbles and dust do not enter the bonded surface.

そして、請求項1に係る発明によれば、貼り合わせ台に相当する蓋体を、装置内を排気することによって本体の方へ移動させられるので、貼り合わせ台移動用の駆動源が不要となる。つまり、請求項1に係る発明によれば、貼り合わせ台移動用の駆動源を真空源と共用にできたので、真空容器と真空ポンプとは別にアクチュエータやエアシリンダーが必要な従来のフィルム貼り合わせ装置と比べて、装置を小型にできる。   According to the first aspect of the invention, the lid corresponding to the bonding table can be moved toward the main body by evacuating the inside of the apparatus, so that a driving source for moving the bonding table becomes unnecessary. . That is, according to the invention according to claim 1, since the driving source for moving the bonding table can be shared with the vacuum source, the conventional film bonding which requires an actuator and an air cylinder separately from the vacuum vessel and the vacuum pump. The device can be made smaller than the device.

また、請求項1に係る発明によれば、蓋体と枠体が装置内が減圧になるにつれて本体の方へ移動し、装置内の容積が小さくなるため、真空引きの時間を短くでき、貼り合わせにかかる時間も短くできる。   In addition, according to the first aspect of the present invention, the lid and the frame move toward the main body as the inside of the apparatus is depressurized, and the volume in the apparatus becomes small. The time required for the alignment can be shortened.

請求項2に係る発明によれば、吸着部材以外の部位から装置内を排気する排気路を設けるようにしたので、吸着部材から装置内を排気する請求項1に係る発明と比べて、真空引きの時間をより短くできる。   According to the second aspect of the present invention, the exhaust passage for exhausting the interior of the apparatus from a portion other than the adsorbing member is provided. Can be shortened.

請求項3に係る発明によれば、本体の吸着部材を蓋体の吸着部材に向かって起き倒れ可能に保持し、本体の吸着部材の裏面と本体との隙間に弾性体を備えるようにしたので、弾性体が備わった一方から本体の吸着部材を蓋体の吸着部材と当て合い、最初に当て合った一方から貼り合わせ面の空気を押し出しながら貼り合わせることができる。そのため、請求項3に係る発明によれば、膜体と板体を平行に当て合う請求項1に係る発明と比べ、より確実に貼り合わせ面に気泡が残ることを防げる。特に、請求項3に係る発明によれば、貼り合わせを複数同時に行う場合に、より確実に貼り合わせ面に気泡が残ることを防げる。   According to the invention of claim 3, the main body adsorption member is held so as to be able to fall down toward the cover adsorption member, and the elastic body is provided in the gap between the back surface of the main body adsorption member and the main body. Then, the main body adsorption member can be brought into contact with the lid adsorption member from one side provided with the elastic body, and the air can be bonded together while pushing out the air on the bonding surface from the first one. Therefore, according to the invention according to claim 3, it is possible to more reliably prevent bubbles from remaining on the bonding surface as compared with the invention according to claim 1 in which the film body and the plate body are applied in parallel. In particular, according to the third aspect of the present invention, when a plurality of bonding processes are performed simultaneously, it is possible to more reliably prevent bubbles from remaining on the bonding surfaces.

実施形態に係るフィルム貼り合わせ装置の分解斜視図である。It is a disassembled perspective view of the film bonding apparatus which concerns on embodiment. 実施形態に係るフィルム貼り合わせ装置の下方から見た分解斜視図である。It is the disassembled perspective view seen from the downward direction of the film bonding apparatus which concerns on embodiment. 実施形態に係るフィルム貼り合わせ装置の斜視図である。It is a perspective view of the film bonding apparatus which concerns on embodiment. (a)は実施形態に係るフィルム貼り合わせ装置の断面図のうち、貼り合わせ前の状態を示す図であり、(b)は実施形態に係るフィルム貼り合わせ装置の断面図のうち、貼り合わせ時の状態を示す図である。(A) is a figure which shows the state before bonding among sectional drawings of the film bonding apparatus which concerns on embodiment, (b) is the time of bonding among sectional drawings of the film bonding apparatus which concerns on embodiment. It is a figure which shows the state of. 他の実施形態に係るフィルム貼り合わせ装置の断面図である。It is sectional drawing of the film bonding apparatus which concerns on other embodiment.

まず、この発明の創作の基礎となる事項について簡単に説明する。発明者は、フィルム貼り合わせ装置をほかの装置に組み付けやすくするために、従来よりも小型なフィルム貼り合わせ装置が望まれていることに着目し、装置の小型化を検討してきた。発明者は、従来の装置のように真空容器内に別途貼り合わせ台を設ける構造では、貼り合わせ台移動用の駆動源が不可欠なために、装置の小型化には限界があると考えた。   First, a basic matter of creation of the present invention will be briefly described. The inventor has focused on downsizing the apparatus, focusing on the desire for a smaller film laminating apparatus than the prior art in order to facilitate the assembly of the film laminating apparatus to other apparatuses. The inventor considered that there is a limit to downsizing the apparatus because a driving source for moving the bonding table is indispensable in the structure in which the bonding table is separately provided in the vacuum vessel as in the conventional device.

そして、発明者は、一般に気密性を配慮して真空容器、特に容器本体を一体に形成するところ、容器本体を枠体と本体とに分け、枠体と本体とがすり動くように構成すると、真空容器内が減圧になるにつれて真空容器の対向面を当て合うように移動させることができることを見いだし、この発明を創作するに至ったものである。   Then, the inventor generally forms a vacuum vessel, particularly a container main body in consideration of airtightness, and divides the container main body into a frame body and a main body, and is configured so that the frame body and the main body slide. As the inside of the vacuum vessel is depressurized, it has been found that the opposing surfaces of the vacuum vessel can be moved to contact each other, and the present invention has been created.

次に、この発明の実施形態について、適宜図面を参照しながら詳細に説明する。図1は、実施形態に係るフィルム貼り合わせ装置の分解斜視図であり、図2は、実施形態に係るフィルム貼り合わせ装置の下方から見た分解斜視図である。   Next, embodiments of the present invention will be described in detail with reference to the drawings as appropriate. FIG. 1 is an exploded perspective view of the film bonding apparatus according to the embodiment, and FIG. 2 is an exploded perspective view of the film bonding apparatus according to the embodiment as viewed from below.

図1に示すように、フィルム貼り合わせ装置1は、蓋体2と枠体3と本体4とから構成されている。このフィルム貼り合わせ装置1では、図示しない真空源によって負圧を与えて、蓋体2と本体4の各対向面に膜体Fや板体Pを吸引して固定するように構成されている。そして、このフィルム貼り合わせ装置1では、フィルム貼り合わせ装置1内が減圧になるにつれて蓋体2と枠体3が本体4の方へ移動し、蓋体2と本体4の対向面同士を当て合わせるような動作によって膜体Fと板体Pとが貼り合わされるように構成されている。   As shown in FIG. 1, the film laminating apparatus 1 includes a lid body 2, a frame body 3, and a main body 4. The film laminating apparatus 1 is configured to apply a negative pressure by a vacuum source (not shown) to suck and fix the film body F and the plate body P to the opposing surfaces of the lid body 2 and the main body 4. And in this film bonding apparatus 1, the cover body 2 and the frame 3 move toward the main body 4 as the inside of the film bonding apparatus 1 is depressurized, and the facing surfaces of the lid body 2 and the main body 4 are brought into contact with each other. By such an operation, the film body F and the plate body P are configured to be bonded together.

蓋体2は、四角形の板体であって、図2に示すように、その裏面、換言すると本体4と対向する面の中央に凸部が形成されている。この凸部には、図示しない真空源に通じる吸着部材2aが取り付けられている。この吸着部材2aは、カーボンやセラミックなどの多孔質材料や、複数の孔(あな)を設けた金属材料から成る四角形のパッドであり、ここではカーボンから成る。蓋体2には、その内部に吸着部材2aからフィルム貼り合わせ装置1内を排気するための図示しない排気路が設けられ、排気路の端路に真空用継ぎ手2bが取り付けられている。   The lid body 2 is a quadrangular plate body, and as shown in FIG. 2, a convex portion is formed on the back surface thereof, in other words, at the center of the surface facing the main body 4. An adsorbing member 2a that leads to a vacuum source (not shown) is attached to the convex portion. The adsorbing member 2a is a quadrangular pad made of a porous material such as carbon or ceramic, or a metal material provided with a plurality of holes, and is made of carbon here. The lid 2 is provided with an exhaust path (not shown) for exhausting the inside of the film laminating apparatus 1 from the adsorbing member 2a, and a vacuum joint 2b is attached to an end of the exhaust path.

枠体3は、図1に示すように、その表面の縁部、換言すると蓋体2と対向する面の縁部に一周に及んで溝3aが形成されている。この溝3aには、パッキン5が嵌(は)め入れられていて、パッキン5によって蓋体2と枠体3とが密封されている。また、枠体3は、図2に示すように、その裏面の縁部、換言すると本体4と対向する面の縁部に一周に及んで所定の間隔を置いて複数の穴3bが形成されている。この穴3bには、弾性体、ここではバネ6が嵌め入れられていて、複数のバネ6によって枠体3と本体4とが弾力が加わった状態で組み付けられる。枠体3には、その内部に枠体3の内周面からフィルム貼り合わせ装置1内を排気するための図示しない排気路が設けられ、排気路の端路に真空用継ぎ手3cが取り付けられている。   As shown in FIG. 1, the frame 3 has a groove 3 a that extends around the edge of the surface, in other words, the edge of the surface facing the lid 2. A packing 5 is fitted into the groove 3 a, and the lid 2 and the frame 3 are sealed by the packing 5. Further, as shown in FIG. 2, the frame 3 has a plurality of holes 3b at predetermined intervals extending around the edge of the back surface, in other words, the edge of the surface facing the main body 4. Yes. An elastic body, here, a spring 6 is fitted into the hole 3 b, and the frame body 3 and the main body 4 are assembled in a state where elasticity is applied by the plurality of springs 6. The frame body 3 is provided with an exhaust path (not shown) for exhausting the film laminating apparatus 1 from the inner peripheral surface of the frame body 3, and a vacuum joint 3 c is attached to an end path of the exhaust path. Yes.

本体4は、四角形の板体であって、図1に示すように、その表面、換言すると蓋体2と対向する面の中央に凸部が形成されている。この凸部には、図示しない真空源に通じる吸着部材4aが取り付けられている。この吸着部材4aは、カーボンやセラミックなどの多孔質材料や、複数の孔を設けた金属材料から成る四角形のパッドであり、ここではカーボンから成る。本体4には、凸部の側面に一周に及んで溝4bが形成されている。この溝4bには、パッキン7が嵌め入れられていて、パッキン7によって枠体3と本体4とが密封されている。また、本体4には、その表面の縁部、換言すると枠体3と対向する面の縁部に一周に及んで所定の間隔を置いて複数の穴4cが形成されている。この穴4cには、弾性体、ここではバネ6が嵌め入れられていて、複数のバネ6によって枠体3と本体4とが弾力が加わった状態で組み付けられる。さらに、本体4には、その内部に吸着部材4aからフィルム貼り合わせ装置1内を排気するための図示しない排気路が設けられ、排気路の端路に真空用継ぎ手4dが取り付けられている。   The main body 4 is a quadrangular plate body, and as shown in FIG. 1, a convex portion is formed on the surface thereof, in other words, the center of the surface facing the lid body 2. An adsorbing member 4a leading to a vacuum source (not shown) is attached to the convex portion. The adsorbing member 4a is a quadrangular pad made of a porous material such as carbon or ceramic, or a metal material provided with a plurality of holes, and is made of carbon here. In the main body 4, a groove 4b is formed on the side surface of the convex portion over the entire circumference. A packing 7 is fitted in the groove 4 b, and the frame 3 and the main body 4 are sealed by the packing 7. The main body 4 is formed with a plurality of holes 4c at predetermined intervals extending around the edge of the surface, in other words, the edge of the surface facing the frame 3. An elastic body, here, a spring 6 is fitted into the hole 4c, and the frame body 3 and the main body 4 are assembled in a state where elasticity is applied by the plurality of springs 6. Further, the main body 4 is provided with an exhaust path (not shown) for exhausting the inside of the film laminating apparatus 1 from the adsorbing member 4a, and a vacuum joint 4d is attached to an end path of the exhaust path.

図3は、実施形態に係るフィルム貼り合わせ装置1の斜視図である。図3に示すように、フィルム貼り合わせ装置1は、蓋体2と枠体3と本体4とが組み付けられて構成されている。このフィルム貼り合わせ装置1は、蓋体2と枠体3とがパッキン5(図1参照)によって密封されるとともに、枠体3と本体4とがパッキン7(図1参照)によって密封されて、フィルム貼り合わせ装置1内が密閉されている。また、フィルム貼り合わせ装置1は、枠体3と本体4とが、より詳細には枠体3の内周面と本体4の凸部外周面とがすり動くように嵌め合わされるとともに、枠体3と本体4とがバネ6によって弾力が加わった状態で組み付けられている。   FIG. 3 is a perspective view of the film bonding apparatus 1 according to the embodiment. As shown in FIG. 3, the film bonding apparatus 1 is configured by assembling a lid body 2, a frame body 3, and a main body 4. In this film laminating apparatus 1, the lid 2 and the frame 3 are sealed by the packing 5 (see FIG. 1), and the frame 3 and the main body 4 are sealed by the packing 7 (see FIG. 1). The inside of the film bonding apparatus 1 is sealed. The film laminating apparatus 1 is fitted with the frame 3 and the main body 4 so that the inner peripheral surface of the frame 3 and the convex outer peripheral surface of the main body 4 slide in more detail. 3 and the main body 4 are assembled in a state where elasticity is applied by a spring 6.

以上のように構成されるフィルム貼り合わせ装置1は、図示しない真空源を作動させてフィルム貼り合わせ装置1内を減圧にすると、蓋体2と本体4に引き寄せ合う力が生じる。そして、フィルム貼り合わせ装置1は、蓋体2と本体4が引き寄せ合うことによってバネ6が押しつぶされ、蓋体2と枠体3が本体4の方へ移動して吸着部材2a,4aが当て合うように動く。   In the film laminating apparatus 1 configured as described above, when a vacuum source (not shown) is operated to reduce the pressure in the film laminating apparatus 1, a force attracting the lid 2 and the main body 4 is generated. Then, in the film laminating apparatus 1, the spring 6 is crushed when the lid 2 and the main body 4 are attracted, and the lid 2 and the frame 3 are moved toward the main body 4 so that the adsorbing members 2a and 4a are brought into contact with each other. Move.

図4は、実施形態に係るフィルム貼り合わせ装置1の断面図である。図4の(a)は、貼り合わせ前の状態を示し、図4の(b)は、貼り合わせ時の状態を示す。   FIG. 4 is a cross-sectional view of the film bonding apparatus 1 according to the embodiment. 4A shows a state before bonding, and FIG. 4B shows a state at the time of bonding.

図4の(a)に示すように、貼り合わせ前の状態では、図示しない真空源を作動させて吸着部材2aに膜体Fを、吸着部材4aに板体Pを吸引して固定している。この吸着部材2a,4aには、膜体Fや板体Pの位置を決めるために、例えば位置決めピンをそれぞれの位置に設けておくと、簡単に膜体Fや板体Pの位置決めができる。また、蓋体2と枠体3とを蝶番(ちょうつがい)でつないでおくと、蓋体2を180度開いて、上向き状態の吸着部材2aに膜体Fを置くこともできる。   As shown in FIG. 4A, in a state before bonding, a vacuum source (not shown) is operated to suck and fix the film body F to the suction member 2a and the plate body P to the suction member 4a. . In order to determine the positions of the film body F and the plate body P on the adsorption members 2a and 4a, for example, if positioning pins are provided at the respective positions, the film body F and the plate body P can be easily positioned. Further, if the lid 2 and the frame 3 are connected by a hinge, the lid 2 can be opened 180 degrees and the film body F can be placed on the adsorption member 2a in the upward state.

図4の(b)に示すように、貼り合わせ時の状態では、吸着部材2a,4aとそれ以外の部位、ここでは枠体3の内周面からフィルム貼り合わせ装置1内を排気することによってフィルム貼り合わせ装置1内が減圧になるにつれて、蓋体2と本体4とが引き寄せ合いバネ6が押しつぶされる。そして、吸着部材2a,4aが当て合うように動いて、膜体Fと板体Pとが貼り合わされる。なお、貼り付け後は、真空源を停止しフィルム貼り合わせ装置1内に空気を入れて常圧に戻してから、蓋体2を開けて膜体Fが貼り合わされた板体Pを取り出す。なお、ここでは、吸着部材2a,4aと枠体3の内周面からフィルム貼り合わせ装置1内を排気しているが、吸着部材2a,4aのみからフィルム貼り合わせ装置1内を排気するようにしても、同様に吸着部材2a,4aが当て合うように動いて、膜体Fと板体Pとが貼り合わされる。   As shown in FIG. 4B, in the state at the time of bonding, the inside of the film bonding apparatus 1 is exhausted from the adsorbing members 2a and 4a and other portions, here the inner peripheral surface of the frame 3. As the inside of the film laminating apparatus 1 is depressurized, the lid 2 and the main body 4 are attracted and the spring 6 is crushed. Then, the adsorbing members 2a and 4a move so as to contact each other, and the film body F and the plate body P are bonded together. After pasting, the vacuum source is stopped, air is introduced into the film laminating apparatus 1 to return to normal pressure, the lid 2 is opened, and the plate body P on which the film body F is pasted is taken out. Here, the inside of the film laminating apparatus 1 is exhausted from the inner peripheral surfaces of the adsorbing members 2a and 4a and the frame 3, but the inside of the film laminating apparatus 1 is exhausted only from the adsorbing members 2a and 4a. However, similarly, the adsorption members 2a and 4a move so as to contact each other, and the film body F and the plate body P are bonded together.

実施形態に係るフィルム貼り合わせ装置1では、膜体Fや板体Pを位置決めしてから貼り合わされるまで、膜体Fや板体Pを吸引し続けるために、貼り合わせの過程で膜体Fや板体Pが位置ずれしないようになっている。また、フィルム貼り合わせ装置1内を排気すると、貼り合わせ台に相当する蓋体2が本体4の方へ移動するために、貼り合わせ台移動用の駆動源を真空源と共用できるとともに、フィルム貼り合わせ装置1内が減圧になるにつれてフィルム貼り合わせ装置1内の容積を小さくできるようになっている。   In the film laminating apparatus 1 according to the embodiment, the film body F or the plate body P is sucked until the film body F or the plate body P is bonded after being positioned. The plate body P is not displaced. Further, when the film bonding apparatus 1 is evacuated, the lid 2 corresponding to the bonding table moves toward the main body 4, so that the driving source for moving the bonding table can be shared with the vacuum source, and the film bonding The volume in the film bonding apparatus 1 can be reduced as the pressure in the bonding apparatus 1 is reduced.

また、実施形態に係るフィルム貼り合わせ装置1では、吸着部材2a,4a以外の部位、ここでは枠体3の内周面からもフィルム貼り合わせ装置1内を排気しているために、吸着部材2a,4aのみからフィルム貼り合わせ装置1内を排気するのと比べてより早く真空引きできるようになっている。   Moreover, in the film bonding apparatus 1 which concerns on embodiment, since the inside of the film bonding apparatus 1 is exhausted also from site | parts other than adsorption member 2a, 4a, and the internal peripheral surface of the frame 3 here, adsorption member 2a. , 4a can be evacuated more quickly than when the inside of the film laminating apparatus 1 is exhausted.

続いて、この発明の他の実施形態について、相違点を中心に説明する。図5は、他の実施形態に係るフィルム貼り合わせ装置の断面図である。図5に示すように、他の実施形態に係るフィルム貼り合わせ装置1’では、吸着部材4a’が吸着部材2aに向かって起き倒れ可能に保持され、吸着部材4a’の裏面と本体4’との隙間、より詳細には吸着部材4a’の裏面と本体4’との隙間であって起き倒れ可能に保持されていない一方にバネ8が備えられている。   Next, another embodiment of the present invention will be described focusing on the differences. FIG. 5 is a cross-sectional view of a film bonding apparatus according to another embodiment. As shown in FIG. 5, in the film laminating apparatus 1 ′ according to another embodiment, the adsorption member 4 a ′ is held so as to be able to rise and fall toward the adsorption member 2 a, and the back surface of the adsorption member 4 a ′ and the main body 4 ′ A spring 8 is provided on one of the gaps, more specifically, the gap between the back surface of the adsorbing member 4a ′ and the main body 4 ′, which is not held so as to fall down.

以上のように構成された他の実施形態に係るフィルム貼り合わせ装置1’では、バネ8が備えられた一方から吸着部材4a’を吸着部材2aに当て合うようになっている。   In the film laminating apparatus 1 ′ according to another embodiment configured as described above, the suction member 4 a ′ is brought into contact with the suction member 2 a from one side provided with the spring 8.

以上、この発明の実施形態について説明したが、この発明は前記実施形態には限定されない。例えば、この発明に係る弾性体は、バネ6,8に限られるものではなく、ゴムやシリンダーでも構わない。バネ6,8も、コイルバネに限られるものではなく、板バネでも構わない。   As mentioned above, although embodiment of this invention was described, this invention is not limited to the said embodiment. For example, the elastic body according to the present invention is not limited to the springs 6 and 8, and may be rubber or cylinder. The springs 6 and 8 are not limited to coil springs, and may be leaf springs.

この発明に係る蓋体2や枠体3や本体4は、四角形に限られるものではなく、膜体Fや板体Pの形状に応じて適宜変えても構わない。   The lid 2, the frame 3, and the main body 4 according to the present invention are not limited to a quadrangle, and may be appropriately changed according to the shape of the film body F or the plate body P.

この発明に係る吸着部材2a,4a以外の部位は、枠体3の内周面に限られるものではなく、蓋体2や本体4の吸着部材2a,4aが取り付けられていない凸部の縁部でも構わない。   The portions other than the adsorbing members 2a and 4a according to the present invention are not limited to the inner peripheral surface of the frame 3, and the edge of the convex portion to which the adsorbing members 2a and 4a of the lid 2 and the main body 4 are not attached. It doesn't matter.

また、前記実施形態では、蓋体2と枠体3とがパッキン5によって密封された状態で組み付けられているが、パッキン5を介さず溶接などによって組み付けても、蓋体2と枠体3とを一体に成型しても構わない。   Moreover, in the said embodiment, although the cover body 2 and the frame 3 are assembled | attached in the state sealed by the packing 5, even if it assembled | attached by welding etc. without the packing 5, the cover 2 and the frame 3 May be molded integrally.

この発明においてフィルム貼り合わせとは、膜体Fと板体Pを貼り合わせることに限られるものではなく、膜体F同士や、板体P同士を貼り合わせる場合も含む。   In the present invention, the film bonding is not limited to bonding the film body F and the plate body P, but also includes the case where the film bodies F or the plate bodies P are bonded together.

この発明において対向面同士を当て合わせるような動作とは、吸着部材2a,4aの間隔が狭まるような動きのことをいう。   In the present invention, the operation of bringing the opposing surfaces into contact with each other means a movement in which the interval between the adsorbing members 2a and 4a is narrowed.

1 フィルム貼り合わせ装置
2 蓋体
2a 吸着部材
3 枠体
4 本体
4a 吸着部材
5 パッキン
6 バネ(弾性体)
7 パッキン
F 膜体
P 板体
DESCRIPTION OF SYMBOLS 1 Film bonding apparatus 2 Lid 2a Adsorption member 3 Frame 4 Main body 4a Adsorption member 5 Packing 6 Spring (elastic body)
7 Packing F Film body P Plate body

Claims (3)

蓋体と枠体と本体とからなるフィルム貼り合わせ装置であって、
前記蓋体及び本体の各対向面に真空源に通じ膜体又は板体を吸引して固定するための吸着部材と、
前記蓋体と枠体と本体との間に互いを密封するためのパッキンと、
前記枠体と本体との隙間に弾性体とを備え、
前記蓋体及び枠体が、前記フィルム貼り合わせ装置内が減圧になるにつれて本体の方へ移動し、対向面同士を当て合わせるような動作によって膜体又は板体を貼り合わせることを特徴とするフィルム貼り合わせ装置。
A film laminating apparatus comprising a lid, a frame and a main body,
An adsorbing member for sucking and fixing a membrane body or a plate body through a vacuum source on each facing surface of the lid body and the main body;
A packing for sealing each other between the lid, the frame and the main body;
An elastic body is provided in the gap between the frame body and the main body,
The film characterized in that the lid and the frame are moved toward the main body as the inside of the film laminating apparatus is depressurized, and the film body or the plate body is bonded together by an operation of bringing the opposing surfaces into contact with each other. Bonding device.
前記フィルム貼り合わせ装置が、前記吸着部材以外の部位からフィルム貼り合わせ装置内を排気する排気路を有していることを特徴とする請求項1に記載のフィルム貼り合わせ装置。   The film bonding apparatus according to claim 1, wherein the film bonding apparatus includes an exhaust path that exhausts the film bonding apparatus from a portion other than the adsorption member. 前記本体の吸着部材が、前記蓋体の吸着部材に向かって起き倒れ可能に保持され、本体の吸着部材の裏面と本体との隙間に弾性体が備えられていることを特徴とする請求項1又は請求項2に記載のフィルム貼り合わせ装置。   2. The suction member of the main body is held so as to fall down toward the suction member of the lid, and an elastic body is provided in a gap between the back surface of the suction member of the main body and the main body. Or the film bonding apparatus of Claim 2.
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