KR20140073081A

KR20140073081A - O-ring for sealing

Info

Publication number: KR20140073081A
Application number: KR1020120140790A
Authority: KR
Inventors: 김동룡
Original assignee: 김동룡
Priority date: 2012-12-06
Filing date: 2012-12-06
Publication date: 2014-06-16

Abstract

A sealing o-ring is provided which has at least one surface formed as a flat surface to maintain a tightly closed state.
The sealing o-ring is provided with a pressing portion having a flat contact surface and a groove formed in the second plate so as to increase the contact area with the first plate to be pressed on one surface, Since the cross section of the pressing section is formed in a rectangular shape with rounded corners, the sealed state between the components can be maintained tightly.

Description

O-ring for sealing (O-RING FOR SEALING)

The present invention relates to a sealing o-ring capable of closely maintaining a sealed state between parts.

In general, most of the pressure equipment including semiconductor equipment use O-ring as sealing means.

The O-ring can keep the air tight by preventing the outside air from entering the chamber of the facility or preventing the air inside the facility from being leaked to the outside. The O-ring prevents pressure loss and ensures stable operation of the equipment.

The O-ring may be made of various materials such as TEFLON, RUBBER, GRAPHITE, METAL and the like, and an O-ring of a suitable material may be selected according to the use of the equipment.

The O-ring is placed in the groove formed in the mechanical part, and a part required for hermetic sealing of the cover or the like is interposed therebetween and the mounting can be completed. However, since the O-ring has a circular section, the contact surface with the component is limited to a very small area and the airtightness may be deteriorated.

One aspect of the present invention provides a sealing o-ring capable of maintaining a tightly closed state by forming at least one surface thereof as a flat surface.

The o-ring for sealing according to an embodiment of the present invention is a sealing o-ring coupled between a first plate and a second plate to seal the member, wherein the o-ring for sealing increases the contact area with the first plate, A pressing portion having a flat contact surface; And a resiliently elastic portion provided on the other surface and seated in a groove provided in the second plate and having a circular shape in cross section, and the cross section of the pressing portion may be formed in a square shape having rounded corners.

The rebound resilient portion may be provided in the form of a circular section and the diameter of the circular portion may be 90% of the length of the cross section of the sealing o-ring.

The width of the pressing portion can limit 60% of the length of the cross-section of the sealing member to a maximum value.

As described above, according to one aspect of the present invention, at least one surface of the sealing o-ring is formed in a flat shape so that the hermetically sealed state with the component can be maintained.

1 is a perspective view of a sealing o-ring according to an embodiment of the present invention;
2,
FIG. 3 is a view showing the state of use of the sealing o-ring according to the embodiment of the present invention
4 is a cross-sectional view of a sealing o-ring according to an embodiment of the present invention
5 is a sectional view of the sealing o-ring according to another embodiment of the present invention
6A is a view showing a sealing o-ring according to still another embodiment of the present invention
6B is a sectional view taken along the line AA in Fig. 6A

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, like reference numerals are used to denote like elements in the drawings, even if they are shown in different drawings.

FIG. 1 is a perspective view of a sealing o-ring according to an embodiment of the present invention, and is a sectional view taken along line A-A of FIG. 2, and FIG. 3 is a state of use of a sealing o-ring according to an embodiment of the present invention.

The sealing o-ring 10 is a kind of mechanism that maintains an airtight environment between two members that are detachably coupled. For example, a sealing o-ring 10 may be used to maintain a vacuum environment between the various components of the vacuum process chamber in which the low-pressure plasma process proceeds.

The sealing o-ring 10 may be provided in an annular shape. The sealing o-ring 10 may include a pressing portion 20 that is in contact with the first plate 40 and a resiliently elastic portion 30 that is seated in the groove 55 of the second plate 50. The pressing portion 20 of the sealing o-ring 10 may be formed as a flat surface to increase the contact area with the first plate 40. The resiliently elastic portion 30 of the sealing o-ring 10 may be formed in a circular shape to facilitate insertion into the groove 55 formed in the second plate 50.

The sealing o-ring 10 can disperse the pressures applied to the sealing o-ring 10 at the upper portion due to the presence of a large number of surfaces contacting the first plate 40 so that the sealing o- 10) can be easily separated. In addition, the flat pressing portion 20 of the sealing o-ring 10 can keep the airtight more closely even if the contact pressure with the first plate 40 is widened to weaken the pressure.

4 is a cross-sectional view of a sealing O-ring according to an embodiment of the present invention.

The cross section of the pressing portion 20 of the sealing O-ring 10 may be a rectangular rounded corner. The square rounded corners are easy to manufacture and allow flexible contact with the first plate 40. The diameter a of the resiliently elastic portion 30 of the sealing o-ring 10 is 90% of the height b of the cross-section of the sealing o-ring 10. That is, the height b of the transverse section of the sealing O-ring 10 is about 1/10 of the diameter a of the resiliently elastic portion 30. For example, when the diameter a of the repulsion elastic portion 30 is 5.33, the length b of the cross section has a length of 5.33 + 0.5 = 5.83. When the length of the transverse section of the sealing o-ring 10 is 10% longer than the diameter of the resiliently elastic portion 30, the pressure exerted on the pressing portion 20 from the first plate 40 is applied to the resiliently resilient portion 30 ) Can be maximized, so that the adhesion can be increased.

The width c of the pressing portion 20 of the sealing o-ring 10 is designed to have a maximum value of 60% of the length a of the cross-section of the sealing o-ring 10.

5 is a cross-sectional view of a sealing o-ring according to another embodiment of the present invention.

The sealing o-ring 10 may be provided in an annular shape. The sealing o-ring 10 may include a pressing portion 20 contacting the first plate 40 and a repulsion elastic portion 30 'seated on the groove 55 of the second plate 50. The pressing portion 20 of the sealing o-ring 10 may be formed in a flat surface shape to increase the contact area with the first plate 40 and the repulsion elastic portion 30 ' And may be formed in a flat surface shape so as to increase the degree of sealing when compressed.

FIG. 6A is a view showing a sealing o-ring according to still another embodiment of the present invention, and FIG. 6B is a sectional view taken along line A-A of FIG. 6A.

The sealing o-ring 10 may be realized by forming a plurality of support protrusions 60 on the inner circumferential surface. The supporting protrusions 60 may be formed of a polymer or an elastomer having excellent restoring force. The supporting protrusions 60 can be formed in the sealing o-ring 10 by using a compression molding method using a mold, a polymer bonding method, or the like. The support protrusions 60 may have a rectangular cross section or a square cross section.

The sealing o-ring 10 having a plurality of the support protrusions 60 completely adheres to one side surface of the groove 55 when the support plate 60 is mounted on the groove 55 of the second plate 50, The other side of the sealing o-ring 10 is brought into close contact with the inner wall surface of the other side of the groove 55. As a result,

The sealing o-ring 10 has a flat surface on at least one surface of the upper or lower portion to increase the contact area and the support protrusion 60 is provided to increase the adhesion with the second plate, .

6A and 6B, the support protrusions 60 are formed on the inner circumferential surface of the sealing o-ring 10, but the support protrusions 60 may be formed on the outer circumferential surface of the sealing o-ring 10 or both the inner circumferential surface and the outer circumferential surface The support protrusions 60 may be formed on the inner circumferential surface.

Although the present invention has been described in connection with the above-mentioned preferred embodiments, it will be appreciated by those skilled in the art that various other modifications and variations can be made without departing from the spirit and scope of the invention, Are all within the scope of the appended claims.

Claims

A sealing o-ring coupled between a first plate and a second plate to seal the member,
A pressing portion having a flat contact surface to increase a contact area with the first plate to be pressed on one surface; And
And a resiliently elastic portion provided on the other surface and seated in a groove provided in the second plate and having a circular shape in cross section,
Wherein the pressing portion has a rectangular cross-section with a rounded corner.

The method according to claim 1,
Wherein the resiliently resilient portion is provided in the form of a circular section and the diameter of the circular portion is 90% of the length of the transverse section of the sealing o-ring.

The method according to claim 1,
Wherein the width of the pressing portion limits 60% of the length of the cross-section of the sealing member to a maximum value.