JP4953690B2 - Storage container - Google Patents

Description

The present invention relates to a storage container in which a gap between a container main body that stores a precision substrate and a lid that is fitted into an opening of the container main body is sealed with a gasket.

  A precision substrate made of a semiconductor wafer is stored in a storage container (not shown) and set in a predetermined processing apparatus, taken out from the processing apparatus, or transported. This type of storage container aligns and stores precision substrates. A container body, a lid body that is detachably fitted into the opening of the container body, and a deformable gasket that seals between the container body and the lid body.

A frame-shaped storage groove for storing a gasket is formed on either the inner periphery of the opening of the container body or the peripheral surface of the lid. The sealing gasket includes a frame-shaped base that fits into the storage groove, and a seal piece that extends from the base and closes between the inner periphery of the opening of the container body and the peripheral surface of the lid. (See Patent Documents 1 and 2).
JP 2002-68364 A Japanese Patent Laid-Open No. 2003-174081

  The conventional storage container is configured as described above, and the gasket base is only stored in the storage groove, so that the position of the gasket is shifted during repeated opening and closing of the cover, and the cover cannot be inserted, or the gasket seal There is a problem in that the tip portion of the piece is damaged to deteriorate the sealing performance, and as a result, the precision substrate is contaminated.

  As a means for solving such a problem, a method of projecting a misalignment prevention protrusion that presses against the inner surface of the storage groove from the base body can be considered, but when this method is simply adopted, the operation of storing the gasket in the storage groove is possible. As a result, there arises a new problem that the performance of the gasket is lowered and the insertion position of the gasket varies. As the insertion position of the gasket varies, the sealing performance is lowered and the precision substrate is contaminated.

The present invention has been made in view of the above, and can suppress the workability of the gasket mounting work, variations in the gasket mounting position, and deterioration of the sealing performance, and can prevent contamination of the precision substrate housed in the container body. The object is to provide a storage container.

In order to solve the above-mentioned problems in the present invention, a container main body for storing a precision substrate, a lid fitted into the opening of the container main body, and a deformable gasket for sealing between the container main body and the lid. A storage recess for a gasket is formed on either the inner periphery of the opening of the container body or the lid,
The gasket includes a base housed in the housing recess, a bent piece formed on the peripheral surface exposed portion of the base body exposed from the opening of the housing recess and extending obliquely while curving between the container body and the lid, and the housing recess A first projection group that protrudes from the peripheral surface facing portion of the base body facing the inner surface of the base and contacts the inner surface of the storage concave portion, and the opposite side surface facing the base surface opposite to the inner surface opposite to the inner surface of the storage concave portion A second projection group that protrudes from the portion and contacts the inner surface on the opposite side of the storage recess,
The first and second projection groups are positioned closer to the exposed portion side protrusion of the base and closer to the back bottom of the housing recess than the exposed portion side protrusion. Each formed from a normal projection,
The exposed portion side protrusion in the first protrusion group and / or the second protrusion group is formed to be thicker than the normal protrusion, and the exposed portion side protrusion in the first and second protrusion groups is formed from the bottom of the peripheral surface of the base body. Each of the first and second projection groups has a base portion of the exposed portion side projection formed at substantially the same position with the base in between. The difference between the maximum dimension in the thickness direction of the exposed portion side protrusion and the maximum opening dimension of the housing recess is set to be larger than 0.0 mm and not larger than 0.5 mm, and the normal protrusion in the first and second protrusion groups is the base. It is characterized by being formed at alternate positions across the wall.

In addition, the storage recessed part for gaskets can be formed in a cover body, and when a cover body is engage | inserted by the opening part of a container main body, the bending piece of a gasket can be made to contact the opening part inner periphery of a container main body.
In addition, a straightening rib that bends the bent piece of the gasket toward the surface of the lid body is formed on the inner periphery of the opening of the container body, and the section bend that divides the space between the bent piece and the exposed portion of the peripheral surface of the gasket base. A piece can be formed, and the section bent piece can be brought into contact with the vicinity of the tip of the bent piece bent by the correction rib.

Further, the base of the gasket can be formed in a predetermined length by extending in the circumferential direction between the container body and the lid.
Also, when measuring the storage force per unit length [N / mm] required when storing the gasket in the storage recess and the extraction force [N / mm] required when removing the gasket from the storage recess It is preferable that the measured value of the storage force is in the range of 20 to 45N and the measured value of the take-out force is in the range of 10 to 45N.

In addition, the first and second protrusion groups can be gradually shortened from the peripheral surface exposed portion of the base toward the bottom of the peripheral surface.
Furthermore, the normal protrusions in the first protrusion group and / or the second protrusion group can be tapered.
Furthermore, the normal protrusions in the first protrusion group and / or the second protrusion group can be bent from the peripheral bottom side of the base toward the peripheral surface exposed portion.

A container body, a lid fitted into the opening of the container body, and a deformable gasket for sealing between the container body and the lid, the inner periphery of the opening of the container body and the lid In either one, a storage recess for the gasket is formed,
The gasket is opposed to the base housed in the housing recess, a bent piece formed on the peripheral surface exposed portion of the base body exposed from the opening of the housing recess and extending between the container body and the lid, and the inner surface of the housing recess. A first projection group that protrudes from the peripheral surface facing portion of the base and contacts the inner surface of the storage recess, and stores from the opposing portion on the opposite side of the peripheral surface of the base opposite the inner surface opposite to the inner surface of the storage recess. A second projection group that contacts the inner surface on the opposite side of the recess.

A container body, a lid fitted into the opening of the container body, and a deformable gasket for sealing between the container body and the lid, the inner periphery of the opening of the container body and the lid In either one, a storage recess for the gasket is formed,
The gasket is opposed to the base housed in the housing recess, a bent piece formed on the peripheral surface exposed portion of the base body exposed from the opening of the housing recess and extending between the container body and the lid, and the inner surface of the housing recess. A first projection group that protrudes from the peripheral surface facing portion of the base and contacts the inner surface of the storage recess, and stores from the opposing portion on the opposite side of the peripheral surface of the base opposite the inner surface opposite to the inner surface of the storage recess. A second projection group that contacts the inner surface on the opposite side of the recess,
The first and second projection groups are positioned closer to the exposed portion side protrusion of the base and closer to the back bottom of the housing recess than the exposed portion side protrusion. It is good also as a characteristic to form from each normal protrusion to do.

In addition, a storage recess for a gasket can be formed on the inner periphery of the opening of the container body, and the bent piece of the gasket can be brought into contact with the peripheral edge of the cover when the cover is fitted into the opening of the container body.
In addition, a straight rib for bending the bent piece of the gasket in the opening direction of the container body is formed on the lid, and a divided bent piece for partitioning the space between the bent pieces is formed on the peripheral surface exposed portion of the base of the gasket. The section bent piece can be brought into contact with the vicinity of the tip of the bent piece bent by the correction rib.

  In addition, a locking mechanism is provided on the lid, and the locking mechanism includes a rotating plate supported by the lid, a reciprocating plate that reciprocates in and out of the lid as the rotating plate rotates, and the reciprocating plate. When the lid is locked, it passes through the periphery of the lid and fits into the locking hole in the inner periphery of the opening of the container body. When the lid is unlocked, the lid body moves backward from the locking hole in the container body. It is good to include the latching claw which can return to and come back to.

Here, the container body in the claims is not particularly limited to a front open box type, a top open box type, a bottom open box type, a transparent type, a semi-transparent type, an opaque type, and the like. 300, 450 mm type, etc.) and a necessary number of precision substrates made of mask glass or the like are stored. The storage recess can be formed on the inner periphery of the opening of the container body, or can be formed on the peripheral edge of the lid.

  A single gasket is preferable from the viewpoint of reducing the number of parts, but a plurality of gaskets may be used. The base of the gasket may be a frame-shaped or ring-shaped endless, or may be a flexible filament when there are a plurality of gaskets. The cross section of the substrate is not particularly limited to a rectangle, trapezoid, polygon, circle, ellipse or the like.

  According to the present invention, when the gasket is inserted into the storage recess, the exposed portion side projection and the normal projection in the first projection group follow the inner surface of the storage recess and bend in the opening direction of the storage recess to be exposed to the inner surface of the storage recess. The part-side projection and the normal projection are sealed tightly. Similarly, the exposed portion side projection and the normal projection in the second projection group follow the inner surface on the opposite side of the storage recess and bend in the opening direction, and the exposed portion side projection and the normal projection are in close contact with the opposite inner surface of the storage recess. Seal. When the lid is fitted into the opening of the container main body after the gasket is stored in the storage recess, the bent piece of the gasket comes into contact between the inner periphery of the opening of the container main body and the lid, and exhibits a sealing function.

According to the present invention, it is possible to suppress the workability of the gasket mounting work, the variation in the gasket mounting position, and the deterioration of the sealing performance, and thereby prevent the contamination of the precision substrate stored in the container body. is there. Specifically, the exposed portion side projections in the first and second projection groups are formed in a flexible claw-shaped cross-sectionally substantially claw-shaped shape that gradually curves from the peripheral surface back bottom side to the peripheral surface exposed portion direction, Since the base portion is located at substantially the same position across the base, the base of the gasket can be held evenly and the inclination thereof can be suppressed. Therefore, it is possible to expect a good seal without incurring the gasket position shift, and the position of the gasket shifts during repeated opening and closing of the cover body, making it impossible to fit the cover body. And is less polluted by contaminated air. In addition, the base and the normal protrusion can be easily deformed to reduce the resistance during storage, and the workability of attaching the gasket can be improved. Further, since the first and second protrusion groups that have fallen in the opening direction of the storage recess are repelled to return to the resistance, the gasket of the storage recess is not easily displaced or dropped off.
In addition, since the difference between the maximum dimension in the thickness direction of the exposed portion side protrusion and the maximum opening dimension of the storage recess is set to be greater than 0.0 mm and 0.5 mm or less, the sealing performance of the storage recess is improved, and the gasket It is possible to prevent misalignment and prevent the gasket storage operation from becoming difficult. Further, since the normal protrusions in the first and second protrusion groups are formed at alternate positions with the base interposed therebetween, the gasket can be stored in a stable posture in the storage recess.
In addition, if the storage recess for the gasket is formed in the lid, and the lid is fitted into the opening of the container body, the bent piece of the gasket is brought into contact with the inner periphery of the opening of the container body, so that the external gas Can be prevented by the bent piece from passing between the opening of the container body and the lid and flowing into the container body.

  In addition, a straightening rib that bends the bent piece of the gasket toward the surface of the lid body is formed on the inner periphery of the opening of the container body, and the section bend that divides the space between the bent piece and the exposed portion of the peripheral surface of the gasket base. If a piece is formed and this section bent piece is brought into contact with the vicinity of the tip of the bent piece bent by the correction rib, the bent piece and the vicinity of the tip of the section bent piece are mutually attached when the lid is fitted. Since they push each other, a sealing effect can be obtained by these repulsive forces.

Also, if the first and second projection groups are gradually shortened from the peripheral surface exposed portion of the base to the bottom of the peripheral surface, the contact of the first and second projection groups when inserting the gasket into the housing recess Since the resistance is reduced, the gasket can be easily inserted and stored in the storage recess .

Further, if the normal protrusions in the first protrusion group and / or the second protrusion group are formed to be tapered, the tip portion of the normal protrusion that is easily bent follows and closely contacts the internal shape of the storage recess.

  Furthermore, if the normal protrusions in the first protrusion group and / or the second protrusion group are bent from the bottom surface side of the peripheral surface of the base toward the peripheral surface exposed portion, the normal protrusions are opened on the side opposite to the gasket insertion direction. Bend in the direction and seal tightly in the storage recess. Furthermore, since the normal protrusion bent in the opening direction of the storage recess is repelled and becomes a resistance, it is possible to prevent the gasket of the storage recess from being easily displaced or dropped.

  Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 6, a storage container in this embodiment includes a container main body 1 for storing a precision substrate, and the container main body 1. A lid body 10 with a locking mechanism 30 that is detachably fitted in the front face 3 of the opening, and a deformable elastic gasket 40 that seals between the container body 1 and the lid body 10. The housing groove 14 for the gasket 40 is formed at the peripheral edge of the gasket 40, and the gasket 40 is integrally formed from the base body 41, the bent piece 46, and the first and second protrusion groups 50 and 50A.

  Although not shown, the precision substrate is made of, for example, a thin and round semiconductor wafer having a diameter of 300 mm, and a plurality of substrates are accommodated in the vertical direction in the container body 1. Such semiconductor wafers are transported to a semiconductor component production factory and repeatedly subjected to various treatments and processes such as oxidation, exposure, etching, photolithography, and formation of metal thin films by sputtering, forming electronic circuits on the surface. Is done.

  The container body 1 and the lid body 10 are molded using a predetermined molding material, for example, a thermoplastic resin such as polycarbonate, cycloolefin polymer, polyetherimide, polyethersulfone, polyetheretherketone. Conductive agents such as conductive carbon, carbon nanotubes, conductive fibers, metal fibers, and conductive polymers, antistatic agents, ultraviolet absorbers, and the like are added to the thermoplastic resin as necessary.

  As shown in FIG. 1, the container body 1 is injection-molded into a box-shaped front open box type having a front opening using a molding material, and a V groove is formed on a bottom portion of a plurality of positioning pins of a processing apparatus (not shown). A positioning tool for fitting each of the two is mounted in a predetermined arrangement pattern, and a robotic flange 2 gripped by a transport robot (not shown) is detachably mounted at the center of the ceiling.

  As shown in FIGS. 1, 3, and 4, the opening front portion 3 of the container body 1 has a substantially frame-shaped flange 4 that projects outward from the peripheral edge of the opening of the container body 1 in the width direction, and the flange 4. A slanted flange 5 that inclines and extends forward from the front end of the slanted flange 5, and a substantially frame-shaped front view that extends frontward from the front end of the slanted flange 5 and faces the peripheral wall 20 that is a part of the peripheral edge of the lid 10. A counter flange 6 is provided, and a plurality of locking holes (not shown) for the locking mechanism 30 of the lid 10 are formed in the inner surfaces of both upper and lower sides of the counter flange 6.

  An observation window (not shown) for a precision substrate housed in the container body 1 is selectively formed on a part of the back wall of the container body 1, and a rear peripheral edge of the precision substrate is formed on the back wall inner surface of the container body 1. A pair of left and right rear retainers (not shown) for horizontally holding the two are arranged in parallel in a vertical direction at a predetermined pitch. Further, as shown in FIG. 1, a pair of left and right teeth 7 for horizontally supporting the peripheral edges of both sides of the precision substrate are juxtaposed on the inner surfaces of the left and right side walls of the container body 1 at a predetermined pitch in the vertical direction. On the outer surfaces of both side walls of 1, operation handles (not shown) for manual operation are detachably attached.

  As shown in FIGS. 1 to 4, the lid body 10 is attached to a case 11 having a substantially rectangular shape when viewed from the front and to both sides of the surface of the case 11. A pair of left and right locking mechanisms 30 that lock the lid body 10 fitted in the container body 1 and a detachable cover plate 36 that covers each locking mechanism 30 are configured. The container body 1 is inserted into or removed from the opening front portion 3.

  The casing 11 is basically formed in a substantially dish-shaped cross-section that has a horizontally long rectangle when viewed from the front, and the center portion 12 of the surface is formed into a generally rectangular shape that is vertically long when viewed from the front (right side in FIGS. 3 and 4). The left and right side portions of the surface are relatively recessed as the surface central portion 12 protrudes. As shown in FIG. 1, a rectangular front retainer 13 that holds the front peripheral edge of the precision substrate housed in the container body 1 horizontally by an elastic bending piece is detachably mounted at the center of the rear surface of the housing 11. The

  The peripheral portion of the housing 11 is formed in a substantially endless frame shape on the back surface of the housing 11 and has a substantially U-shaped storage groove 14 facing the inclined flange 5 of the container body 1, and a part of the storage groove 14. And a back plate 19 that extends to the outside of the housing 11, and extends forward (rightward in FIGS. 3 and 4) from the back plate 19 to face the inner surface of the opposing flange 6 in the opening front portion 3 of the container body 1. The through-hole which opposes the some locking hole of the container main body 1 is each pierced by the upper-lower both sides of this surrounding wall 20.

  As shown in FIG. 1, each locking mechanism 30 reciprocates in the vertical direction of the housing 11 as the rotating plate 31 is pivotally supported at the center of the surface side portion of the housing 11 and the rotation plate 31 rotates. The reciprocating plate 34 is detachably and swingably connected to the tip of the reciprocating plate 34, and when the lid 10 is locked, it passes through the through hole of the housing 11 and is fitted into the locking hole of the container body 1. When the lid 10 is unlocked, it is configured to include a retractable locking claw 35 that retracts from the locking hole of the container body 1 and returns to the through hole of the housing 11.

  The rotary plate 31 is formed in a disk having a substantially convex cross section, and a convex portion at the center of the surface is an operation hole 32 that fits with an external operation key of the processing apparatus, and a pair of arc grooves 33 are formed on the peripheral portion of the surface. Are drilled at a predetermined interval, and a projection protruding from the end of the reciprocating plate 34 is inserted into each arc groove 33. Further, the reciprocating plate 34 is formed in a substantially rectangular flat plate extending in the vertical direction, and a plurality of guide pins guided by guide cams protruding from the surface side portion of the housing 11 are formed on both sides. The

  As shown in FIG. 1, each cover plate 36 is formed in a shape corresponding to the surface side portion of the housing 11, and an operation port 37 facing the operation hole 32 of the rotary plate 31 is formed. An external operation key penetrating 37 is inserted into the operation hole 32 of the rotary plate 31 and rotates the rotary plate 31.

  The gasket 40 is made of a predetermined elastically deformable material such as a polyester-based elastomer, a polyolefin-based elastomer, a fluorine-based elastomer, a urethane-based elastomer or other thermoplastic elastomer, a fluorine-based rubber, EPDM, Molded using silicone rubber.

  As shown in FIGS. 2 to 6, the gasket 40 includes an elastic base body 41 having a substantially rectangular cross section that is fitted and housed in the housing groove 14 of the lid 10, and an outer periphery of the base body 41 exposed from the opening 15 of the housing groove 14. An elastic bent piece 46 that is formed integrally with the surface 42 and extends while curving between the container body 1 and the lid 10, and an inner surface of the storage groove 14 that protrudes from the surface 43 of the base body 41 facing the inner surface 16 of the storage groove 14. The first projection group 50 that is in pressure contact with the inner surface 16, and the rear surface 44 of the base 41 that faces the inner surface 17 (the surface formed by the rear surface plate 19) opposite to the inner surface 16 of the housing groove 14. And a second projection group 50A in pressure contact with the inner surface 17 on the opposite side.

  The base body 41 of the gasket 40 is formed into an endless frame shape and extends in the circumferential direction between the container body 1 and the lid body 10 (the back direction in FIGS. 3 and 4), and is opposite to the outer peripheral surface 42. The flat inner peripheral surface 45 is in pressure contact with the flat bottom 18 of the storage groove 14. Further, as shown in FIGS. 2 to 4, the bent piece 46 is bent and formed into an endless cross-sectional abbreviated shape (also a cross-sectional dash symbol shape) and gradually separates from the back plate 19 of the lid 10. 41, and when the lid 10 is inserted into the opening front portion 3 of the container main body 1, it functions to contact and seal the vicinity of the bent end of the flange 4 inside the opening front portion 3 of the container main body 1. To do.

  The first protrusion group 50 is located near the outer peripheral surface 42 of the base body 41 and closely contacts the inner surface 16 of the storage groove 14 so as to bend, and the first protrusion group 50 is closer to the inner side of the base body 41 than the exposed part side protrusion 51. A plurality of normal protrusions 52 (two in this embodiment) that are positioned closer to the peripheral surface 45 and are in close contact with the inner surface 16 of the storage groove 14 so that they can be bent. Is gradually lowered and shortened from the outer peripheral surface 42 to the inner peripheral surface 45 of the base body 41.

  The second protrusion group 50A is located near the outer peripheral surface 42 of the base body 41 and is closely exposed to the inner surface 17 on the opposite side of the storage groove 14 so that it can be bent, and the base body 41 more than the exposed part side protrusion 51A. Normal projections 52A (one in this embodiment) which are located close to the inner peripheral surface 45 of the housing groove 14 and are in close contact with the inner surface 17 on the opposite side of the storage groove 14 so that they can be bent. Is gradually lowered and shortened from the outer peripheral surface 42 to the inner peripheral surface 45 of the base body 41.

  The exposed portion side protrusions 51 and 51A in the first and second protrusion groups 50 and 50A are formed in a flexible claw-shaped cross-sectionally substantially claw-shaped shape that gradually curves from the inner peripheral surface 45 to the outer peripheral surface 42 of the base body 41, The central axis of the base portion 51a is integrally formed at substantially the same position across the base body 41, and is formed thicker than the normal protrusions 52 and 52A so as to have sufficient strength. The exposed portion side protrusions 51 and 51A in the first and second protrusion groups 50 and 50A have, for example, a base 51a of 0.5 to 1.5 mm and a length in the protruding direction of 0.5 to 1.5 mm. It is formed.

  The relationship between the exposed portion side protrusions 51 and 51A and the storage groove 14 in the first and second protrusion groups 50 and 50A is as shown in FIGS. 5 and 6 in the thickness direction of the exposed portion side protrusions 51 and 51A. The difference (H−h) between the maximum dimension (H) and the maximum opening dimension (h) of the storage groove 14 is greater than 0.0 mm and 0.5 mm or less, preferably about 0.1 to 0.3 mm. The This is because if it is less than 0.0 mm, there is a problem of the sealing performance of the storage groove 14 and the position shift of the gasket 40, which is not preferable. On the other hand, when the thickness is 0.5 mm or more, it is difficult to store the gasket 40.

The range of 0.1 to 0.3 mm is a range in which the sealing performance of the storage groove 14 and the storage operation of the gasket 40 are particularly favorable when there is a dimensional error in the lid 10 or the gasket 40.
Note that the maximum dimension (H) in the thickness direction of the exposed portion side protrusions 51 and 51 </ b> A changes due to compressive deformation before and after the gasket 40 is fitted and housed in the housing groove 14 of the lid 10. Therefore, it is set as the dimension before the gasket 40 is fitted and stored in the storage groove 14.

  The normal protrusions 52 and 52A in the first and second protrusion groups 50 and 50A are arranged in a staggered pattern with the base 41 interposed therebetween from the viewpoint of preventing displacement and rattling, and from the inner peripheral surface 45 of the base 41. It is formed into a generally claw-shaped cross section with a soft taper that gradually curves in the direction of the outer peripheral surface 42. The plurality of normal protrusions 52 in the first protrusion group 50 are juxtaposed at intervals.

  In the above configuration, when the endless gasket 40 is inserted into the storage groove 14 of the lid body 10 and fitted and stored, the exposed portion side protrusion 51 and the plurality of normal protrusions 52 in the first protrusion group 50 are formed on the inner surface 16 of the storage groove 14. Follows and falls in the opening direction opposite to the insertion direction, and the exposed portion side projection 51 and the plurality of normal projections 52 are intimately sealed without gaps to the inner surface 16 of the storage groove 14. Similarly, the exposed portion side protrusion 51A and the normal protrusion 52A in the second protrusion group 50A follow the opposite inner surface 17 of the storage groove 14 and fall in the opening direction, and the exposed portion side protrusion 17 contacts the opposite inner surface 17 of the storage groove 14. 51A and the normal protrusion 52A are closely sealed without a gap.

  When fitting and storing the gasket 40, the first and second protrusion groups 50 and 50A are gradually shorter from the outer peripheral surface 42 to the inner peripheral surface 45 of the base body 41, and are tapered and have a small contact area. The gasket 40 can be smoothly and easily stored in the storage groove 14 of the lid 10. In addition, the amount of generated particles can be greatly reduced.

  Due to the intimate action of the first and second protrusion groups 50 and 50A, the gasket 40 is firmly supported from the left and right directions in FIGS. 3 and 4, and is elastic in a stable posture without being inclined in the storage groove 14. Will be held.

  After the gasket 40 is fitted and housed in the housing groove 14 of the lid body 10, when the lid body 10 is fitted into the container body 1, the bent piece 46 of the gasket 40 is attached to the inner surface of the flange 4 in the opening front portion 3 of the container body 1. The vicinity is pressed with high accuracy to exert a sealing function, and air (see the arrow in FIG. 4) passes from the outside between the front opening 3 of the container body 1 and the lid body 10 and enters the container body 1. Inflow can be prevented very effectively.

  It should be noted that a storage force (pushing force) [N / mm] per unit length (for example, 10 mm) required for inserting and storing the gasket 40 in the storage groove 14 and pulling out the gasket 40 from the storage groove 14. When measuring the removal force [N / mm] required for removal, the measured value of the storage force should be in the range of 20 to 45N, and the measured value of the removal force should be in the range of 10 to 45N. preferable.

  According to the above, the flexible portion of the first and second protrusion groups 50 and 50A having the exposed portion side protrusions 51 and 51A that is gradually curved from the inner peripheral surface 45 to the outer peripheral surface 42 of the base body 41 is substantially claw-shaped. Since the central axis of the base 51a is integrally formed at substantially the same position across the base 41, the base 41 of the gasket 40 is equally held from the left and right directions of FIGS. 3 and 4 to suppress the inclination. Can be prevented. Therefore, since a very good seal can be expected greatly without causing the position shift of the gasket 40, the position of the gasket 40 is shifted at the time of repeated opening / closing of the cover body, and the cover body 10 cannot be fitted or the sealing performance of the gasket 40 is improved. The precision substrate is not contaminated by particles or contaminated air.

  In addition, the normal protrusions 52 and 52A in the first and second protrusion groups 50 and 50A are formed in a flexible claw-shaped cross-sectionally substantially claw shape that gradually curves from the inner peripheral surface 45 to the outer peripheral surface 42 of the base body 41. Therefore, the base 41 and the normal protrusions 52 and 52A can be easily deformed to reduce the resistance during storage, and the workability of attaching the gasket can be remarkably improved. Furthermore, since the first and second projection groups 50 and 50A that have fallen in the direction of the opening 15 of the storage groove 14 repel each other and become resistance, the gasket 40 of the storage groove 14 is easily displaced, There is no dropout.

7 to 9 show a second embodiment of the present invention. In this case, the exposed portion side projections 51 and 51A and the normal projection 52 in the first and second projection groups 50 and 50A are shown. 52A and 52A are each formed in a slightly tapered cross-sectional substantially semi-oval shape, and the tip portion thereof is rounded into a deformable semi-circular cross-section. The other parts are the same as those in the above embodiment, and the description thereof is omitted.
In the present embodiment, it is obvious that the same effects as those of the above embodiment can be expected, and that diversification of the gasket shape can be greatly expected.

  Next, FIGS. 10 and 11 show a third embodiment of the present invention. In this case, the gasket 40 is bent on the inner periphery of the opening front portion of the container body 1, in other words, on the inner surface of the flange 4. The correction rib 8 that protrudes from the tip of the piece 46 in contact with the surface of the lid 10 is formed to protrude, and the outer peripheral surface 42 of the base body 41 is elastically deformable to partition the space 60 between the bent piece 46. The section bending piece 61 is integrally formed so that the distal end portion of the section bending piece 61 is brought into pressure contact with the vicinity of the distal end portion of the bending piece 46 curved by the correction rib 8 when the lid body 10 is fitted.

  The correction rib 8 is formed in a frame shape on the inner surface of the flange 4 of the container body 1 and is bulged and formed in a substantially mountain shape in cross section facing forward. Further, as shown in FIG. 11, the bent piece 46 and the divided bent piece 61 are bifurcated in a substantially calipers shape on the outer peripheral surface 42 of the base body 41, and the cross-section is approximately between each other when the lid body 10 is fitted. It functions to define an oval closed bag-like space 60.

  As shown in FIG. 11, the partition bending piece 61 is bent and formed into an endless cross-sectional abbreviated shape (also a cross-sectional dash symbol shape), and has a slightly shorter taper than the bending piece 46. While extending away from the base 46 a and along the back plate 19 of the lid 10, the curved tip is gradually separated from the back plate 19 and obliquely directed to the tip of the bent piece 46. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  Also in this embodiment, the same effect as the above embodiment can be expected, and the distal end portions of the bending piece 46 and the partition bending piece 61 are pressed against each other when the lid body 10 is inserted. Obviously, a stable sealing effect can be obtained.

  Further, even if the pressure in the container body 1 is lower than the outside, and air is about to enter the container body 1 from the outside, the air flows from between the distal ends of the bent piece 46 and the partition bent piece 61 to the inside. Since the pressure in the space 60 is increased and the bent piece 46 and the divided bent piece 61 are pressed against the container body 1 and the lid body 10 respectively, air enters the container body 1. It does not contaminate precision substrates.

Next, FIG. 12 shows a fourth embodiment of the present invention. In this case, the container body 1 is formed in a top open box type having an upper opening, and the lid body 10 corresponding to the container body 1 is formed. In addition, the gasket 40 of the first embodiment is used. The other parts are the same as those in the above embodiment, and the description thereof is omitted.
In this embodiment, the same effect as the above embodiment can be expected, and the gasket 40 can be used regardless of the type of the substrate storage container. Therefore, it is obvious that the application expansion of the gasket 40 can be greatly expected. is there.

Next, FIG. 13 shows a fifth embodiment of the present invention. In this case, a precision substrate made of a semiconductor wafer having a diameter of 450 mm is formed by forming the container body 1 into a bottom open box type having an opening at the bottom. The gasket 40 of the second embodiment is used for the container body 1 and the corresponding lid body 10. The other parts are the same as those in the above embodiment, and the description thereof is omitted.
In this embodiment, the same effect as that of the above embodiment can be expected. Moreover, since the gasket 40 can be used regardless of the type of the substrate storage container, it is obvious that the application of the gasket 40 can be expected to be expanded. .

Next, FIG. 14 shows a sixth embodiment of the present invention. In this case, a precision substrate made of a semiconductor wafer having a diameter of 450 mm is formed by forming the container body 1 into a bottom open box type having an opening at the bottom. The gasket 40 of the third embodiment is used for the container body 1 and the lid 10 corresponding to the container body 1. The other parts are the same as those in the above embodiment, and the description thereof is omitted.
Also in this embodiment, the same effect as the said embodiment can be expected, and the use expansion of the gasket 40 can be expected.

  In the above embodiment, a plurality of positioning tools are attached to the bottom of the container body 1 in a predetermined arrangement pattern, but the present invention is not limited to this. For example, a plate-shaped bottom plate may be detachably attached to the bottom of the container body 1 together with a plurality of positioning tools, or a plurality of positioning tools may be attached to the bottom plate in a predetermined arrangement pattern.

  In addition, an identification body for grasping the type and number of precision substrates may be provided on the bottom plate so as to be openable and detachable. Alternatively, the bottom plate may be formed to have a substantially L-shaped cross section, and the standing piece may be opposed to the back wall of the container body 1, and the RF tag or barcode of the RFID system may be attached to the standing piece of the bottom plate.

  The container body 1 may be box-shaped, bottomed cylindrical, or the like. Further, the endless gasket 40 is fitted and stored in the storage groove 14 of the lid body 10, but the gasket 40 is formed into a plurality of filaments, and the plurality of gaskets 40 are fitted and stored in the storage groove 14 of the lid body 10. You can also. Further, the first protrusion group 50 may be formed from the exposed portion side protrusion 51 and the normal protrusion 52, and the second protrusion group 50A is formed from the exposed portion side protrusion 51A and the plurality of normal protrusions 52A. You can also Furthermore, the length and thickness of the plurality of normal protrusions 52 in the first protrusion group 50 can be changed to be different from each other.

Examples of the storage container according to the present invention will be described below together with comparative examples.
The gaskets of the first, second, and third embodiments and the conventional gaskets of Comparative Examples 1 and 2 were used to test the storage capacity, take-out force, and sealability of the gaskets, and the test results are shown. Summarized in 1. In Comparative Examples 1 and 2, the conventional gasket described in Patent Document 1 was used.

Gasket storage force (push-in force) test The gasket is divided into lengths of 10 mm each for a total of 8 locations in the center of each side of the base and each corner location, and stored by pushing into the storage groove of the lid. The pushing force at this time was measured with a push-pull gauge.
Gasket removal force (pull-out force) test The gasket pushed into the storage groove of the lid body in the storage force test was removed, and the force at this time was measured with a push-pull gauge. Table 1 shows the average value, maximum value, and minimum value of the storage force and the take-out force from each measured value.

Gasket Sealability Test The container of FIG. 1 is sealed using the gaskets of the first, second, and third embodiments and the gasket of the comparative example, and the internal pressure of the container is −0. The seal retention time when the pressure was changed to 3 Pa was measured.

When the gaskets of the first, second, and third embodiments were used, excellent results could be obtained.
On the other hand, when conventional gaskets were used as Comparative Examples 1 and 2, only insufficient results were obtained in terms of sealing properties.

It is a disassembled perspective explanatory drawing which shows typically embodiment of the storage container which concerns on this invention. It is a perspective explanatory view showing typically the gasket in the embodiment of the storage container concerning the present invention. It is principal part explanatory drawing which shows typically the state which accommodated the gasket in the accommodation groove | channel in embodiment of the storage container which concerns on this invention. It is principal part sectional explanatory drawing which shows typically the fitting state of the container main body and cover body in embodiment of the storage container which concerns on this invention. It is a section explanatory view showing typically the relation between the exposed part side projection and the storage groove in the embodiment of the storage container according to the present invention. It is a section explanatory view showing typically the gasket in the embodiment of the storage container concerning the present invention. It is principal part explanatory drawing which shows typically the state which accommodated the gasket in the accommodation groove | channel in 2nd Embodiment of the storage container which concerns on this invention. It is principal part sectional explanatory drawing which shows typically the fitting state of the container main body and cover body in 2nd Embodiment of the storage container which concerns on this invention. It is sectional explanatory drawing which shows typically the gasket in 2nd Embodiment of the storage container which concerns on this invention. It is principal part cross-sectional explanatory drawing which shows typically the fitting state of the container main body and cover body in 3rd Embodiment of the storage container which concerns on this invention. It is sectional explanatory drawing which shows typically the gasket in 3rd Embodiment of the storage container which concerns on this invention. It is principal part cross-sectional explanatory drawing which shows typically the fitting state of the container main body and cover body in 4th Embodiment of the storage container which concerns on this invention. It is principal part cross-sectional explanatory drawing which shows typically the fitting state of the container main body and cover body in 5th Embodiment of the storage container which concerns on this invention. It is principal part cross-sectional explanatory drawing which shows typically the fitting state of the container main body and cover body in 6th Embodiment of the storage container which concerns on this invention.

Explanation of symbols

1 Container body 3 Opening front (opening)
4 Flange (opening inner circumference)
5 Inclined flange (opening inner circumference)
6 Opposing flange (opening inner circumference)
8 Correction rib 10 Lid 11 Case 14 Storage groove (storage recess)
15 Opening 16 Inner surface 17 Opposite inner surface 18 Deep bottom portion 19 Back plate 20 Peripheral wall 40 Gasket 41 Base body 42 Outer peripheral surface (peripheral surface exposed portion)
43 Surface (Surface facing part)
44 Back side (opposite part on the opposite side of the circumference)
45 Inner peripheral surface (bottom surface of peripheral surface)
46 bent piece 50 first protrusion group 50A second protrusion group 51 exposed portion side protrusion 51A exposed portion side protrusion 51a base 52 normal protrusion 52A normal protrusion 60 space 61 partition bending piece

Claims (7)

A container main body for storing the precision substrate, a lid fitted into the opening of the container main body, and a deformable gasket for sealing between the container main body and the lid, and an inner periphery of the opening of the container main body; A storage container in which a storage recess for a gasket is formed on any one of the lids,
The gasket includes a base housed in the housing recess, a bent piece formed on the peripheral surface exposed portion of the base body exposed from the opening of the housing recess and extending obliquely while curving between the container body and the lid, and the housing recess A first projection group that protrudes from the peripheral surface facing portion of the base body facing the inner surface of the base and contacts the inner surface of the storage concave portion, and the opposite side surface facing the base surface opposite to the inner surface opposite to the inner surface of the storage concave portion A second projection group that protrudes from the portion and contacts the inner surface on the opposite side of the storage recess,
The first and second projection groups are positioned closer to the exposed portion side protrusion of the base and closer to the back bottom of the housing recess than the exposed portion side protrusion. Each formed from a normal projection,
The exposed portion side protrusion in the first protrusion group and / or the second protrusion group is formed to be thicker than the normal protrusion, and the exposed portion side protrusion in the first and second protrusion groups is formed from the bottom of the peripheral surface of the base body. Each of the first and second projection groups has a base portion of the exposed portion side projection formed at substantially the same position with the base in between. The difference between the maximum dimension in the thickness direction of the exposed portion side protrusion and the maximum opening dimension of the housing recess is set to be larger than 0.0 mm and not larger than 0.5 mm, and the normal protrusion in the first and second protrusion groups is the base. A storage container characterized by being formed at alternate positions across the wall.   2. A storage container according to claim 1, wherein a storage recess for the gasket is formed in the lid, and the bent piece of the gasket is brought into contact with the inner periphery of the opening of the container body when the lid is fitted into the opening of the container body. .   A straightening rib that bends the bent piece of the gasket toward the surface of the lid is formed on the inner periphery of the opening of the container main body, and a divided bent piece that divides a space between the bent piece is formed on the peripheral surface exposed portion of the base of the gasket. The storage container according to claim 2, wherein the container is formed and brought into contact with the vicinity of the tip of the bent piece bent by the correction rib.   Storing when measuring storage capacity [N / mm] per unit length required to store gasket in storage recess and extraction force [N / mm] required when removing gasket from storage recess The storage container according to claim 1, 2, or 3, wherein the measured force value is in the range of 20 to 45N and the measured force value is in the range of 10 to 45N.   The storage container according to any one of claims 1 to 4, wherein the first and second projection groups are gradually shortened from the peripheral surface exposed portion of the base toward the bottom of the peripheral surface. The storage container according to any one of claims 1 to 5, wherein the normal protrusions in the first protrusion group and / or the second protrusion group are tapered. The storage container according to any one of claims 1 to 6, wherein the normal protrusions in the first protrusion group and / or the second protrusion group are bent in the direction of the peripheral surface exposed portion from the peripheral bottom side of the base.

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