JP4916258B2 - Substrate storage container - Google Patents

Description

  The present invention relates to a substrate storage container for storing a semiconductor wafer and the like, and more particularly to a sealing structure thereof.

  Although the conventional substrate storage container is not shown, a container main body that stores a plurality of precision substrates made of semiconductor wafers, a lid that is detachably fitted to an opening front portion of the container main body, and the container main body, A deformable elastic seal gasket is interposed between and sealed with the lid (see Patent Documents 1, 2, and 3).

The seal gasket is formed on the base body to be fitted into the fitting holding groove formed on the peripheral edge portion of the lid, the fitting protrusion formed on the base body and being pressed against the inner surface of the fitting holding groove, and formed on the base body. A bent seal piece protruding from the joint holding groove and contacting the seal forming surface of the container main body is provided, and these are integrally molded using a predetermined molding material. In such a seal gasket, the base is tightly fitted into the fitting holding groove of the lid using a predetermined jig so as not to fall off from the lid when the substrate storage container is used.
JP 2005-353898 A JP 2002-68364 A JP 2004-140395 A

  Although the conventional substrate storage container is configured as described above and can obtain excellent effects, the base of the seal gasket is tightly inserted into the fitting holding groove of the lid using a predetermined jig. If the force applied when inserting the seal gasket is mistaken, the end portion of the base body may be deformed to impair the sealing performance and cause the contamination of the precision substrate. That is, the fitting holding groove of the lid body and the end portion of the base of the seal gasket are often inconsistent in shape and dimensions, so if the force applied when inserting the seal gasket is mistaken, the horizontality of the base will be reduced. There is a possibility that the tip of the bent seal piece is deformed to be deteriorated, the height of the bent seal piece is displaced in a wavy state, the sealing performance is impaired, and the precision substrate is contaminated.

  In order to eliminate this harmful effect, conventionally, a seal gasket is inserted into the fitting holding groove of the lid, and then the height of the tip of the bent seal piece is measured with a jig to determine whether the sealing performance is acceptable or not. However, this causes a new problem that the workability becomes complicated or worsens.

  Conventionally, in order to keep the sealing performance constant, a method of absorbing a dimensional variation by strongly pressing a bent seal piece to the seal forming surface of the container main body has been adopted. However, in this case, when removing the lid from the opening front portion of the container body due to the material of the bent seal piece or strong pressure contact, the bent seal piece of the seal gasket sticks to the container body or the lid body, There is a possibility that the removal of the lid may be hindered and the processing and processing of the precision substrate may be interrupted.

The present invention has been made in view of the above , and it is possible to eliminate the possibility that the sealing gasket is deformed due to dimensional variation or the like to deteriorate the sealing performance or cause the substrate to be contaminated. It is an object of the present invention to provide a substrate storage container that can prevent the lid from being hindered due to the sticking of the piece .

In order to solve the above-mentioned problems in the present invention, a container main body for storing a substrate, a lid body detachably fitted to the opening of the container main body, and a seal interposed between the container main body and the lid body A deformable elastic sealing gasket, and a fitting holding groove for the sealing gasket is formed on one of the inner peripheral edge of the opening of the container body and the peripheral edge of the lid, and two corners of the innermost surface thereof. Each part is rounded, and the other is formed with a seal forming surface that contacts and deforms the seal gasket,
The seal gasket is formed on the base body to be fitted into the fitting holding groove, first and second fitting protrusions formed on the base body and in contact with the inner surface of the fitting holding groove in a pressure acting state. And a bent seal piece protruding from the opening side of the fitting holding groove, and a contact surface that contacts the innermost surface of the fitting holding groove of the base is formed in substantially the same shape as the innermost surface, and the contact surface is the innermost surface The bent seal piece is formed by integrating a curved portion that extends while bending in the seal forming surface direction at the tip of the bent seal piece.
The length (L1) of the straight portion or arc portion excluding the two corners of the innermost surface of the fitting holding groove, and the length (L2) of the straight portion or arc portion excluding the two corner portions of the contact surface in the base of the seal gasket ) And L1> L2, and the ratio of L1 and L2 (L1 / L2) is 1.1 to 1.8,
When the surface roughness (Rz) of the seal forming surface is measured according to JIS B 0601-2001, the range is 0.7 μm to 0.9 μm.
When the lid is fitted to the opening of the container body, the bent seal piece of the seal gasket is brought into contact with the seal forming surface, and the bent seal piece is bent and sealed .

In addition, an inflatable part that presses against the seal forming surface is formed at the end of the curved part of the bent seal piece of the seal gasket, and at least a part of this seal gasket is subjected to graining, diamond-like coating, PEEK coating, and fluorine coating Can do.
Further , one of the two corners of the contact surface of the base of the seal gasket can be cut out to form a stepped portion.

  In addition, the first and second fitting protrusions of the seal gasket are each tapered so that the first fitting protrusion is positioned on the innermost surface side of the fitting holding groove and the second fitting protrusion is fitted. It is also possible to place the second fitting projection longer than the first fitting projection and to form at least the base portion thicker than the first fitting projection.

  Further, the relationship between the corner radius (R1) of the innermost surface of the fitting holding groove and the corner radius (R2) of the contact surface of the base of the seal gasket that contacts the innermost surface of the fitting holding groove is R1 ≦ R2. It is also possible.

  In addition, a locking mechanism for locking the lid fitted to the opening of the container body is provided, and the locking mechanism is supported by the lid and rotated by an external operation, and in conjunction with the rotation of the rotating plate. A plurality of power transmission plates that slide inward and outward of the lid, and rotatably attached to the tip of each power transmission plate.When the lid is locked, it protrudes from the peripheral edge of the lid and It is also possible to configure it with a lockable claw that can be retracted and caught in the lock hole.

  Further, a bent seal piece of the seal gasket is formed on the base body and protrudes from the fitting holding groove, a curved portion provided at the distal end of the projected portion, and a seal forming surface formed at the distal end of the curved portion. It can also form from the expansion | swelling part which contacts.

  Here, the substrate in the claims is not particularly limited to a precision substrate made of a 200 mm, 300 mm, or 450 mm type semiconductor wafer, quartz glass, a liquid crystal cell, or the like. The container body and the lid do not ask whether they are transparent, opaque or translucent. The peripheral edge of the lid includes both the peripheral wall of the lid and the peripheral edge of the back surface of the lid.

  The seal gasket may be an endless frame shape, but may be a single or a plurality of filaments having flexibility. Each of the first and second fitting protrusions of the seal gasket may be a single or plural. Further, the substrate storage container may be any of a front open box type, a top open box type, and a bottom open box type.

According to the present invention, there is an effect that it is possible to eliminate the possibility that the sealing gasket is deformed due to dimensional variation or the like and carelessly deteriorates the sealing performance, or the substrate is contaminated. In particular, the length (L1) of the straight portion or arc portion excluding the two corners of the innermost surface of the fitting holding groove, and the length of the straight portion or arc portion excluding the two corner portions of the contact surface in the base of the seal gasket. Since the relationship with (L2) is L1> L2 and the ratio (L1 / L2) between these L1 and L2 is 1.1 to 1.8, the resistance when the base is fitted into the fitting holding groove is increased. As a result, it is possible to prevent workability from deteriorating, obstructing deformation of the base body as resistance increases, and variation in the seal position.

Further, it is possible to appropriately secure a clearance between the fitting holding groove and the base body to prevent the base body from being excessively deformed. Further, when the surface roughness (Rz) of the seal forming surface is measured according to JIS B 0601-2001, it is in the range of 0.7 μm to 0.9 μm, so that sticking of the seal gasket can be effectively prevented. It becomes possible to prevent the sealing performance of the sealing gasket from being lowered. Therefore, it is possible to prevent the bent seal piece of the seal gasket from sticking to the container body or the lid body, so that it is possible to eliminate the possibility that the removal of the lid body will be hindered and the processing and processing of the substrate will be interrupted. become.

Further, if one of the two corners of the contact surface of the seal gasket base is cut out to form a stepped portion, the operation of inserting the seal gasket into the fitting holding groove becomes easy.
In addition, the first and second fitting protrusions of the seal gasket are each tapered so that the first fitting protrusion is positioned on the innermost surface side of the fitting holding groove and the second fitting protrusion is fitted. The first and second fittings having different heights can be formed by positioning the second fitting projection longer than the first fitting projection and forming the base portion thicker than the first fitting projection. Since the protrusion falls to the opening side of the fitting holding groove, the base can be easily deformed, and the resistance of the base at the time of insertion can be reduced, which can be expected to improve workability in the installation work of the seal gasket. .

  Furthermore, since the first and second fitting protrusions that have fallen become resistances, it is possible to position the seal gasket to maintain stable sealing performance and to prevent the seal gasket from easily falling off the lid. There is an effect that can be done.

  Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 6, a substrate storage container in the present embodiment includes a container main body 1 for storing a plurality of precision substrates, The container body 1 includes a lid body 10 fitted to the opening front portion of the container body 1, and a deformable elastic seal gasket 20 interposed and sealed between the container body 1 and the lid body 10. A seal forming surface 4 is formed on the inner peripheral edge of the front face of the opening to contact and deform the seal gasket 20, and a fitting holding groove 14 for the seal gasket 20 is formed on the peripheral edge of the lid 10. I am doing so.

  The precision substrate is made of, for example, a 300 mm diameter thin and round semiconductor wafer (Si wafer or reclaimed wafer), and a positioning notch is selectively cut out at the peripheral edge. Alternatively, the sheets are stored in an order of 1 to 26 sheets.

  As shown in FIG. 1, the container body 1 is molded into a front open box type having a front opening using a predetermined molding material, and a pair of left and right sides horizontally supporting the peripheral edge of the precision substrate is provided on both sides of the container body 1. The teeth 2 are formed so as to protrude, and the pair of teeth 2 facing each other are arranged in parallel in the vertical direction at a predetermined interval. Examples of the molding material of the container main body 1 include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyether sulfone, and polyether ether ketone. The thermoplastic resin includes conductive carbon, conductive carbon, and the like. Conductive agents composed of fibers, metal fibers, conductive polymers and the like, various antistatic agents, ultraviolet absorbers, and the like are appropriately added.

  A bottom plate having a substantially Y-shape, polygonal shape, or triangle shape is detachably mounted on the bottom surface of the container body 1, and a positioning tool having a substantially V-shaped cross section with respect to a processing apparatus (not shown) is arranged on the bottom plate. As shown in FIG. 1, a flange 3 held by the transport robot is detachably attached to the center of the ceiling of the container body 1.

  As shown in FIGS. 1, 5, and 6, the opening front portion of the container body 1 is bent with a step so as to project outward, and the step surface of the step is formed as a flat seal forming surface 4. Function. This seal forming surface 4 is subjected to texturing 5 from the viewpoint of preventing sticking of the seal gasket 20, and the surface roughness (ten-point average roughness) (Rz) of JIS 0601-1976 is JIS B 0601. When measured according to 2001, the range is 0.7 μm to 0.9 μm.

  This is because sticking of the seal gasket 20 can be effectively prevented when the surface roughness (Rz) of the seal forming surface 4 is 0.7 μm or more. Further, when the surface roughness (Rz) of the seal forming surface 4 is 0.9 μm or less, it is possible to prevent the sealing performance of the seal gasket 20 from being lowered. The crease on the seal forming surface 4 is processed by sandblasting, electric discharge machining or the like at the seal forming surface forming position of the mold for molding the container body 1.

  A pair of left and right engaging holes 6 are formed in a recessed manner at predetermined intervals on the upper and lower inner peripheral edges of the opening front portion of the container body 1. In addition, a pair of left and right rear retainers that horizontally fit and hold the rear peripheral edge of the precision substrate are protruded and formed on the inner rear surface of the container body 1, and the pair of rear retainers are juxtaposed in a vertical direction at a predetermined interval. .

  As shown in FIG. 1, side rails 7 for transportation are detachably attached to the lower part of the outer surface of both sides of the container body 1, and are gripped by the operator at the center of the outer surface of both sides of the container body 1. Each of the manual handles 8 is detachably attached.

  As shown in FIG. 1, the lid 10 includes a housing 11 that is fitted to the opening front portion of the container body 1, a pair of locking mechanisms 16 that are installed and locked in the housing 11, and each locking mechanism 16. And a pair of plates 17 that detachably cover the container body 1, and are detachably fitted to the front opening of the container body 1. The casing 11, the pair of locking mechanisms 16, and the pair of plates 17 of the lid body 10 are molded using the same molding material as the container body 1.

  The casing 11 is basically formed in a horizontally long rectangle having a substantially dish-shaped cross section, and the central portion 12 is raised so that the left and right sides are relatively recessed, and the inside of the left and right sides is recessed. The locking mechanism 16 is respectively installed, and through holes for the locking mechanism 16 are drilled in the upper and lower sides of the peripheral wall. An elastic front retainer 13 that holds the front peripheral edge of the precision substrate horizontally is detachably attached to the recessed central portion 12 of the rear surface of the housing 11. A fitting and holding groove 14 having a substantially U-shaped cross section facing the inner peripheral edge of the opening front portion of the main body 1 from the left and right lateral directions is formed in an endless frame shape.

  Although not shown in the drawings, each locking mechanism 16 is supported by a rotating plate that is pivotally supported by the housing 11 and rotated by an external operation of the processing apparatus, and is connected to a peripheral portion of the rotating plate and interlocked with the rotation thereof, thereby the lid body 10. A pair of power transmission plates that slide in the inner and outer directions (vertical direction in FIG. 1), and pivotally supported at the tip of each power transmission plate, and when the lid body 10 is locked, the peripheral wall of the lid body 10 by the slide of the power transmission plate When the lid 10 is unlocked, the lid 10 is unlocked from the locking hole 6 of the container body 1 by the return of the slidable power transmission plate. And a pair of retractable locking claws that retreat into the 10 through-holes.

  The rotary plate is formed in a substantially convex cross section, and an operation hole for external operation is formed in the projecting central portion, and a pair of arc grooves are formed in the peripheral portion at intervals of 180 °. . Each power transmission plate is basically formed in a rectangular flat plate and is supported by the housing 11 via a plurality of guides. A cylindrical engagement inserted into the arc groove of the rotating plate is provided at the end portion. A mating pin is formed protruding. Each locking claw is pivotally supported in the vicinity of the through-hole of the lid body 10 so as to be swingable, and is swingably connected to the distal end portion of the power transmission plate.

  Each plate 17 is formed in a vertically long rectangle so as to correspond to each recessed side portion of the housing 11, and a rectangular operation port 18 corresponding to the operation hole of the rotating plate is perforated. When the operation key of the processing apparatus is inserted into the operation hole of the rotary plate and rotated, each locking mechanism 16 is operated from the outside.

  As shown in FIGS. 1 to 6, the seal gasket 20 is formed side by side on the base 21 fitted in the fitting holding groove 14 of the lid 10, and the inner surface (container body) of the fitting holding groove 14. Bendable first and second fitting protrusions 23 and 23A that are in pressure contact with the inner surface of the first side, and are formed on the base body 21 so as to protrude from the fitting holding groove 14 and press against the seal forming surface 4 of the container body 1. The bent seal piece 24 is integrally formed.

  The seal gasket 20 is molded using a molding material such as a thermoplastic elastomer made of, for example, a polyester-based elastomer, a polyolefin-based elastomer, a fluorine-based elastomer, a urethane-based elastomer, a fluorine rubber, EPDM, or a silicone-based rubber. Is done. Carbon fibers, metal fibers, metal oxides, various antistatic agents, and the like are appropriately added to the molding material from the viewpoint of imparting conductivity and antistatic properties. In addition, from the viewpoint of improving the adhesion of the surface, a predetermined amount of filler such as carbon, glass fiber, mica, talc, silica, calcium carbonate, etc., polyethylene, polyamide, polyacetal, fluorine resin, silicone resin, etc. Selectively added.

  As shown in FIGS. 1, 2, 5, and 6, the base body 21 is formed in an endless frame shape like the fitting holding groove 14 of the lid body 10, and the cross section thereof is the cross section of the fitting holding groove 14. It is made into a substantially rectangular shape so as to substantially correspond to the shape, and the substantially straight inner side surface 22 is in close contact with the substantially straight innermost surface 15 of the fitting holding groove 14 as a contact surface, and the outer side surface is fitted. Located on the opening side of the holding groove 14.

  The first and second fitting protrusions 23 and 23A are formed side by side in the inner and outer directions of the surface of the base body 21 (left and right directions in FIGS. 3, 5, and 6), and are respectively formed to be tapered. The first fitting protrusion 23 is located on the innermost surface 15 side of the fitting holding groove 14, and the second fitting protrusion 23 </ b> A is located on the opening side of the fitting holding groove 14. When the base body 21 is press-fitted, the base body 21 is inclined to the side opposite to the insertion direction of the base body 21, in other words, to the opening side of the fitting holding groove 14 (right side in FIGS. 5 and 6).

  The first fitting protrusion 23 is formed in a substantially columnar cross-section with a thin and rounded tip. Further, the second fitting protrusion 23 </ b> A is formed to have a substantially triangular cross section partially bent and displaced toward the opening side of the fitting holding groove 14, and is formed to be longer than the first fitting protrusion 23. At the same time, it is formed thick so that the whole including the root portion has sufficient strength, and flexibility is imparted to the tip portion. The second fitting protrusion 23A has a height (length) of 0.5 to 1.5 mm and a root portion of 0.5 to 1.5 mm.

  The difference between the maximum dimension (H1) of the second fitting projection 23A and the maximum dimension (H2) of the opening of the fitting holding groove 14 is such that the difference (H1-H2) is about 0.05 to 0.5 mm. It is preferable. This is because if the thickness is less than 0.05 mm, sufficient sealability cannot be obtained, and the position of the seal gasket 20 tends to shift. On the other hand, when the thickness exceeds 0.5 mm, it is difficult to attach the seal gasket 20 to the fitting holding groove 14.

  As shown in FIGS. 3 and 6, the bent seal piece 24 is formed on the outer surface of the base 21 and protrudes linearly from the fitting holding groove 14 so as to be substantially parallel to the fitting holding groove 14. A curved portion 26 having a substantially arc-shaped cross section that is provided at the tip of the projecting portion 25 and extends while bending in the direction of the seal forming surface 4 of the container body 1, and a seal forming surface that is inflated and formed at the tip of the curved portion 26. 4 is formed from a spherical protrusion 27 that is in pressure contact with 4.

  Such a seal gasket 20 includes the length (L1) of the straight portion of the innermost surface 15 of the fitting holding groove 14 and the inner portion of the base 21 of the sealing gasket 20 that contacts the innermost surface 15 of the fitting holding groove 14. The relationship with the length (L2) of the straight portion of the side surface 22 is L1> L2, and the ratio (L1 / L2) between these L1 and L2 is 1.1 to 1.8, and the fitting holding groove The relationship between the corner radius (R1) of the innermost surface 15 of the 14 and the corner radius (R2) of the inner side surface 22 of the base 21 that contacts the innermost surface 15 of the fitting holding groove 14 is R1 ≦ R2. .

  The ratio of L1 to L2 (L1 / L2) is in the range of 1.1 to 1.8. When the ratio is less than 1.1, the resistance when the base body 21 is inserted into the fitting holding groove 14 increases. This is based on the reason that the workability is deteriorated, the deformation of the base body 21 is hindered with the increase in resistance, and the seal position varies. On the contrary, when it exceeds 1.8, it is based on the reason that the clearance between the fitting holding groove 14 and the base 21 is increased and the base 21 is easily deformed more than necessary.

  In the above, when the lid body 10 is fitted into the opening front portion of the container main body 1 (see FIG. 5) and the spherical protrusion 27 of the seal gasket 20 contacts the seal forming surface 4 of the container main body 1, the bent seal of the seal gasket 20 is obtained. The piece 24 bends and seals and seals between the container body 1 and the lid body 10 to effectively prevent dust and the like from entering the container body 1 from the outside (see FIG. 6).

  According to the above, since the innermost surface 15 of the fitting holding groove 14 and the inner surface 22 of the base body 21 are in close contact with each other with substantially the same shape, even if the force applied when inserting the seal gasket 20 is mistaken, There is no possibility that the substrate 21 is deformed to deteriorate the horizontality, or that the height of the tip of the bent seal piece 24 is displaced into a wavy state to impair the sealing property and the precision substrate is not contaminated. In addition, since the seal gasket 20 is inserted into the fitting holding groove 14 of the lid 10, it is not necessary to measure the height of the bent seal piece 24 with a jig to determine whether or not the sealing performance is acceptable. It can be significantly improved.

  Further, the length (L1) of the straight portion of the innermost surface 15 of the fitting holding groove 14 and the straight portion of the inner surface 22 of the base 21 of the seal gasket 20 that contacts the innermost surface 15 of the fitting holding groove 14. Since the relationship with the length (L2) is L1> L2, and the ratio (L1 / L2) between these L1 and L2 is 1.1 to 1.8, the inclination of the base 21 is prevented. The seal forming surface 4 and the bent seal piece 24 can be brought into contact with each other with high accuracy, and the stability of the seal can be remarkably improved.

  In addition, since the irregularities are processed on the seal forming surface 4, when the lid 10 is removed from the opening front portion of the container body 1, the bent seal piece 24 of the seal gasket 20 is stuck to the container body 1 or the lid 10. There is no end. Therefore, there is no possibility that the removal of the lid body 10 will be hindered or the processing or processing of the precision substrate will be interrupted.

  Further, when the base 21 of the seal gasket 20 is inserted into the fitting holding groove 14, the first and second fitting protrusions 23 and 23 </ b> A having different heights fall to the opening side of the fitting holding groove 14, and the base 21 Therefore, the base body 21 can be easily deformed, and the resistance of the base body 21 during insertion can be reduced. As a result, the workability of the insertion work can be greatly improved.

  In addition, since the first and second fitting protrusions 23 and 23A that have fallen become resistance and generate a repulsive force in the direction opposite to the fitting direction, the sealing gasket 20 is appropriately positioned to maintain the sealing performance stably. It is possible to prevent the seal gasket 20 from easily falling off from the lid 10. Further, since the second fitting protrusion 23A on the opening side of the fitting holding groove 14 is higher than the first fitting protrusion 23, the sealing property is maintained and the contact area is reduced to prevent generation of particles and the like. It is also possible to do.

  Next, FIG. 7 shows a second embodiment of the present invention. In this case, at least a part of the seal gasket 20, specifically, the curved portion 26 of the bent seal piece 24 exhibiting a sealing function, The surface of the spherical protrusion 27 is subjected to the concave / convex processing 5 to form the low friction layer 28.

The surface of the curved portion 26 and the spherical protrusion 27 of the bent seal piece 24 is 0.7 μm to 0.9 μm when the surface roughness (Rz) of JIS 0601-1976 is measured according to JIS B 0601-2001. Scope. The other parts are the same as those in the above embodiment, and the description thereof is omitted.
In the present embodiment, it is obvious that the same effects as those in the above embodiment can be expected, and that it is significant when the seal formation surface 4 of the container body 1 cannot be machined.

  Next, FIG. 8 shows a third embodiment of the present invention. In this case, the cross section of the rear surface of the housing 11 facing the seal forming surface 4 of the container body 1 from the front-rear direction is omitted. A U-shaped fitting holding groove 14 is formed in an endless frame shape, and a seal gasket 20 is fitted into the fitting holding groove 14 so that the bent seal piece 24 is pressed against the seal forming surface 4. .

The surface roughness of JIS B 0601-1976 is JIS B 0601-2001 on the surface of at least a part of the seal gasket 20, specifically, the curved portion 26 and the spherical protrusion 27 of the bent seal piece 24 exhibiting a sealing function. When measured in accordance with the above, a concavo-convex graining 5 for forming a low friction layer 28 of 0.7 μm to 0.9 μm is performed. The other parts are the same as those in the above embodiment, and the description thereof is omitted.
In the present embodiment, it is possible to expect the same effects as the above embodiment, and it is obvious that the configuration of the fitting holding groove 14 can be diversified and the attachment of the seal gasket 20 can be diversified.

  Next, FIG. 9 shows a fourth embodiment of the present invention. In this case, the corner portion of the base 21 of the seal gasket 20 is cut out to form a stepped portion 29, and the surface of the seal gasket 20 is shown. The low-friction layer 28 is formed on the exposed surface including the graining 5 in the same roughness range as in the third embodiment.

The step portion 29 is formed by cutting out a corner portion of the inner surface 22 of the base 21 adjacent to the first fitting protrusion 23 into a substantially rectangular shape. The other parts are the same as those in the above embodiment, and the description thereof is omitted.
In this embodiment, the same effect as that of the above embodiment can be expected, and the corner portion of the inner side surface 22 of the base 21 is formed in the stepped portion 29. Therefore, the work of fitting the seal gasket 20 into the fitting holding groove 14 is performed. Obviously it will be very easy. Furthermore, since the exposed surface of the seal gasket 20 is covered with the low friction layer 28, the fitting operation becomes extremely smooth, and prevention of outgas release from the seal gasket 20 can be greatly expected.

  Although the container body 1 is simply shown in the above embodiment, a transparent window for observing the precision substrate may be formed on a part of the container body 1. Moreover, although the processus | protrusion was processed into the seal formation surface 4 and the seal gasket 20 of the container main body 1, it is not limited to this at all. For example, the seal forming surface 4 and the seal gasket 20 are subjected to diamond-like coating, PEEK coating, or fluorine coating having an average film thickness of about 0.1 to 50 μm, thereby improving wear resistance and slipperiness to achieve a stable seal. The performance may be maintained for a long period of time, or sticking of the seal gasket 20 may be effectively prevented.

  Further, in the above embodiment, the inner side surface 22 of the base 21 is brought into close contact with the innermost surface 15 of the fitting holding groove 14, and the innermost surface 15 and the inner surface 22 are respectively straight vertical walls. It is not limited to this. For example, the innermost surface 15 and the innermost surface 22 are inclined in parallel, formed into parallel substantially square shapes as shown in FIGS. 10 and 11, or closely fitted, or shown in FIGS. In this way, they may be bent in parallel so that they can be closely fitted so that the position can be corrected.

  Further, a wear prevention roller that fits into the locking hole 6 of the container body 1 may be rotatably supported on the locking claw of the locking mechanism 16. Further, the base 21 of the seal gasket 20 may have a substantially rectangular cross section or a substantially square shape. Furthermore, although the surface 5 of the curved portion 26 and the spherical protrusion 27 of the bent seal piece 24 has been subjected to the wetting process 5, it can also be applied to other portions. For example, it is also possible to apply the dent 5 to the base 21 of the seal gasket 20, the protrusion 25 of the bent seal piece 24, and the like.

It is a whole perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is a front view which shows typically the seal gasket in embodiment of the substrate storage container which concerns on this invention. It is a section explanatory view showing typically the seal gasket in the embodiment of the substrate storage container concerning the present invention. It is a partial section explanatory view showing typically the lid in the embodiment of the substrate storage container concerning the present invention. It is a partial section explanatory view showing typically a container main part, a lid, and a seal gasket in an embodiment of a substrate storage container concerning the present invention. FIG. 6 is a partial cross-sectional explanatory view schematically showing a sealed state of the seal gasket of FIG. 5. It is a section explanatory view showing typically the seal gasket in a 2nd embodiment of the substrate storage container concerning the present invention. It is a fragmentary sectional view showing typically a 3rd embodiment of a substrate storage container concerning the present invention. It is a section explanatory view showing typically the seal gasket in a 4th embodiment of a substrate storage container concerning the present invention. It is a fragmentary sectional view showing typically a container main part, a lid, and a seal gasket in a 5th embodiment of a substrate storage container concerning the present invention. It is principal part cross-sectional explanatory drawing which shows typically the seal gasket of FIG. It is a fragmentary sectional view showing typically a container main part, a lid, and a seal gasket in a 6th embodiment of a substrate storage container concerning the present invention. It is principal part cross-sectional explanatory drawing which shows typically the seal gasket of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container body 4 Seal formation surface 5 Grazing 10 Cover body 11 Case 14 Fitting holding groove 15 Innermost surface 16 Locking mechanism 20 Seal gasket 21 Base body 22 Inner side surface (contact surface)
23 first fitting protrusion 23A second fitting protrusion 24 bent seal piece 25 protruding portion 26 bending portion 27 spherical protrusion 28 low friction layer 29 step portion

Claims (4)

A container main body for storing a substrate, a lid that is detachably fitted to the opening of the container main body, and a deformable elastic seal gasket that is interposed between and sealed between the container main body and the lid. The fitting holding groove for the seal gasket is formed on one of the inner peripheral edge of the opening of the container body and the peripheral edge of the lid, and the two corners of the innermost surface thereof are rounded and formed on the other. , A substrate storage container formed with a seal forming surface to be deformed in contact with the seal gasket,
The seal gasket is formed on the base body to be fitted into the fitting holding groove, first and second fitting protrusions formed on the base body and in contact with the inner surface of the fitting holding groove in a pressure acting state. And a bent seal piece protruding from the opening side of the fitting holding groove, and a contact surface that contacts the innermost surface of the fitting holding groove of the base is formed in substantially the same shape as the innermost surface, and the contact surface is the innermost surface The bent seal piece is formed by integrating a curved portion that extends while bending in the seal forming surface direction at the tip of the bent seal piece.
The length (L1) of the straight portion or arc portion excluding the two corners of the innermost surface of the fitting holding groove, and the length (L2) of the straight portion or arc portion excluding the two corner portions of the contact surface in the base of the seal gasket ) And L1> L2, and the ratio of L1 and L2 (L1 / L2) is 1.1 to 1.8,
When the surface roughness (Rz) of the seal forming surface is measured according to JIS B 0601-2001, the range is 0.7 μm to 0.9 μm.
A substrate storage container characterized in that when a lid is fitted to the opening of the container body, the bent seal piece of the seal gasket is brought into contact with the seal forming surface, and the bent seal piece is bent and sealed. . An inflatable portion that press-contacts the seal forming surface is formed at the tip of the curved portion of the bent seal piece of the seal gasket, and at least a part of the seal gasket is subjected to graining, diamond-like coating, PEEK coating, and fluorine coating. The substrate storage container according to 1 . The substrate storage container according to claim 1 or 2 , wherein one of the two corners of the contact surface of the base of the seal gasket is cut out to form a stepped portion. The first and second fitting protrusions of the seal gasket are each tapered so that the first fitting protrusion is positioned on the innermost surface side of the fitting holding groove and the second fitting protrusion is fitted and held. 4. The substrate storage container according to claim 1, wherein the substrate storage container is positioned on the opening side of the groove, and the second fitting protrusion is made longer than the first fitting protrusion so that at least the root portion thereof is thick.

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