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JP2827512B2 - Bonding wire winding, bonding wire winding method and winding device therefor - Google Patents

Bonding wire winding, bonding wire winding method and winding device therefor

Info

Publication number
JP2827512B2
JP2827512B2 JP2401700A JP40170090A JP2827512B2 JP 2827512 B2 JP2827512 B2 JP 2827512B2 JP 2401700 A JP2401700 A JP 2401700A JP 40170090 A JP40170090 A JP 40170090A JP 2827512 B2 JP2827512 B2 JP 2827512B2
Authority
JP
Japan
Prior art keywords
winding
spool
bonding wire
degrees
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2401700A
Other languages
Japanese (ja)
Other versions
JPH04351222A (en
Inventor
正信 松沢
潔 古川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP2401700A priority Critical patent/JP2827512B2/en
Publication of JPH04351222A publication Critical patent/JPH04351222A/en
Application granted granted Critical
Publication of JP2827512B2 publication Critical patent/JP2827512B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78Apparatus for connecting with wire connectors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00Handled material; Storage means
    • B65H2701/30Handled filamentary material
    • B65H2701/36Wires
    • B65H2701/361Semiconductor bonding wires
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/786Means for supplying the connector to be connected in the bonding apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/851Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector the connector being supplied to the parts to be connected in the bonding apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Filamentary Materials, Packages, And Safety Devices Therefor (AREA)
  • Winding, Rewinding, Material Storage Devices (AREA)
  • Wire Bonding (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、半導体素子のボンディ
ングワイヤ、即ち半導体素子のチップ電極と外部リード
部とを接続するために使用されるワイヤをスプールへ巻
取って得られるボンディングワイヤ巻線、該ボンディン
グワイヤ巻線を製造するために用いられるボンディング
ワイヤの巻取方法、及び該ボンディングワイヤ巻線を製
造するために用いられる巻取装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bonding wire winding obtained by winding a bonding wire of a semiconductor element, that is, a wire used for connecting a chip electrode of the semiconductor element and an external lead portion, to a spool. The present invention relates to a winding method of a bonding wire used for manufacturing the bonding wire winding, and a winding device used for manufacturing the bonding wire winding.

【0002】[0002]

【従来の技術】従来、半導体素子のボンディングワイヤ
(以下、「ワイヤ」と略称する。)をスプールに巻取る場合
には、一層状の整列巻きにしていた。
2. Description of the Related Art Conventionally, bonding wires for semiconductor devices
(Hereinafter, abbreviated as “wire”) is wound on a spool in a single-layer aligned winding.

【0003】ところが、最近、ボンディング速度の増加
に伴い、ボンディング作業の作業性向上のため、スプー
ル巻線の長さを増加する必要が生じた。そのため、最
近、スプールにワイヤを往復して多層状に巻取る、往復
多層状の巻取方法が用いられている。
However, recently, as the bonding speed has increased, it has become necessary to increase the length of the spool winding in order to improve the workability of the bonding operation. For this reason, recently, a reciprocating multilayer winding method has been used in which a wire is reciprocated on a spool and wound up in a multilayer.

【0004】[0004]

【発明が解決しようとする課題】上記のようにスプール
にワイヤを往復多層状に巻取る場合、ワイヤを整列巻
き、即ち隣接するワイヤとワイヤの間隙が0となる巻き
方としたのでは巻線がほぐれにくくなり断線の原因とな
るため、ワイヤは所定のピッチを存して巻取られる。と
ころが、この場合、往側若しくは復側において、n回目
と(n+1)回目の巻線を平行若しくは平行に近い状態と
なるようにすると、(n+1)回目の巻線がn回目の巻線間
にはさみ込まれてしまい、ボンディング作業時にくり出
し不良が生ずるという欠陥が生じた。本発明は、上記欠
陥を除去することを目的とするものである。
As described above, when the wire is wound on the spool in a reciprocating multi-layered form, the wire must be aligned and wound, that is, if the winding method is such that the gap between adjacent wires is zero. However, the wires are not easily unraveled and cause disconnection, so that the wires are wound at a predetermined pitch. However, in this case, if the n-th winding and the (n + 1) -th winding are set to be parallel or nearly parallel on the forward side or the return side, the (n + 1) -th winding is placed between the n-th winding. A defect that the material is sandwiched, and a defective drawing occurs during the bonding operation occurs. An object of the present invention is to eliminate the above defects.

【0005】[0005]

【課題を解決するための手段】請求項1記載の発明は、
スプールにボンディングワイヤを一端から他端へ、さら
に他端から一端へと往復させて、隣接する巻線間で隙間
を開けて巻取り、これを繰り返して多層状にしたボンデ
ィングワイヤ巻線において、往側または復側の同一方向
巻線のn回目と(n+1)回目のボンディングワイヤの
交差角を0.03度以上としたボンディングワイヤ巻線
である。
According to the first aspect of the present invention,
The bonding wire is reciprocated from one end to the other end of the spool, and from the other end to one end, so that there is no gap between adjacent windings.
Opening and winding, repeating this in a multilayer wire bonding wire, in the same direction on the forward side or the backward side
Winding the n-th and of (n + 1) th intersecting angle of the bonding wire of a bonding wire windings and 0.03 degrees.

【0006】請求項2記載の発明は、前記交差角を0.
03度以上の一定値とした請求項1記載のボンディング
ワイヤ巻線である。
According to a second aspect of the present invention, the intersection angle is set to a value equal to 0.1.
2. The bonding wire winding according to claim 1, wherein said bonding wire winding has a constant value of not less than 03 degrees.

【0007】請求項3記載の発明は、前記交差角を0.
03度以上の不定値とした請求項1記載のボンディング
ワイヤ巻線である。
According to a third aspect of the present invention, the intersection angle is set to a value equal to 0.1.
2. The bonding wire winding according to claim 1, wherein the unfixed value is 03 degrees or more.

【0008】請求項4記載の発明は、スプールにボンデ
ィングワイヤを一端から他端へ、さらに他端から一端へ
と往復させて、隣接する巻線間で隙間を開けて巻取り、
これを繰り返して多層状にするボンディングワイヤの巻
取方法において、往側または復側の同一方向巻線のn回
目と(n+1)回目のボンディングワイヤの交差角を
0.03度以上とするボンディングワイヤの巻取方法で
ある。
According to a fourth aspect of the present invention, the bonding wire is reciprocated on the spool from one end to the other end and from the other end to the other end, and wound with a gap between adjacent windings.
In a method of winding a bonding wire into a multilayer structure by repeating this, the crossing angle between the n-th and (n + 1) -th bonding wires of the same direction winding on the forward side or the backward side is set to 0.03 degrees or more. It is a winding method.

【0009】請求項5記載の発明は、前記交差角を0.
03度以上の一定値とする請求項4記載のボンディング
ワイヤの巻取方法である。
According to a fifth aspect of the present invention, the crossing angle is set to be equal to 0.5.
5. The method according to claim 4, wherein the constant value is not less than 03 degrees.

【0010】請求項6記載の発明は、前記交差角を0.
03度以上の不定値とする請求項4記載のボンディング
ワイヤの巻取方法である。
According to a sixth aspect of the present invention, the crossing angle is set to be equal to 0.5.
5. The method according to claim 4, wherein the unfixed value is not less than 03 degrees.

【0011】請求項7記載の発明は、スプールを該スプ
ールの軸回りに回転可能に支持するスプール支持部と、
前記スプールの近傍において、ボンディングワイヤを通
過可能に支持するワイヤ支持部と、前記スプールを回転
駆動する回転駆動部と、前記ワイヤ支持部と前記スプー
ルのうちの少なくとも一方を、スプールの軸方向に沿っ
て相対的に往復作動させるように横送り移動させる横送
り駆動部(巻取装置本体4の往復駆動機構)と、前記回
転駆動部の回転運動及び前記横送り駆動部の横送り運動
を制御する制御部とを備え、前記回転駆動部及び前記横
送り駆動部を駆動制御しつつスプールにワイヤを往復さ
せて、隣接する巻線間で隙間を開けて巻き取るようにし
たボンディングワイヤ巻取装置において、前記制御部
は、前記横送り駆動部の横送り移動速度を調整して、
側または復側の同一方向巻線のn回目と(n+1)回目
のボンディングワイヤの交差角を0.03度以上とする
ボンディングワイヤの巻取装置である。
According to a seventh aspect of the present invention, there is provided a spool supporting portion for rotatably supporting a spool around an axis of the spool,
In the vicinity of the spool, a wire supporting portion that supports the bonding wire so as to be able to pass, a rotation driving portion that rotationally drives the spool, and at least one of the wire supporting portion and the spool along the axial direction of the spool.
Traverse that moves traversing relatively to reciprocate
A drive unit (a reciprocating drive mechanism of the winding device main body 4); and a control unit that controls the rotational motion of the rotary drive unit and the lateral feed motion of the lateral drive unit. In a bonding wire winding device in which a wire is reciprocated on a spool while driving and controlling a driving unit, and a gap is wound between adjacent windings , the control unit includes a traverse feed of the traverse drive unit. adjust the movement speed, the forward
The crossing angle between the n-th and (n + 1) -th bonding wires of the same direction winding on the side or the return side is set to 0.03 degrees or more.
This is a winding device for a bonding wire .

【0012】請求項8記載の発明は、前記制御部は、前
記交差角を0.03度以上の一定値とするように前記横
送り駆動部の横送り移動速度を調整する請求項7記載の
ボンディングワイヤの巻取装置である。
According to a preferred embodiment of the present invention, the control section adjusts the transverse movement speed of the transverse drive section so that the crossing angle is a constant value of 0.03 degrees or more. This is a winding device for a bonding wire.

【0013】請求項9記載の発明は、前記制御部は、前
記交差角を0.03度以上の不定値とするように前記横
送り駆動部の横送り移動速度を調整する請求項7記載の
ボンディングワイヤの巻取装置である。
According to a ninth aspect of the present invention, the control section adjusts the traverse movement speed of the traverse drive section so that the crossing angle is an indefinite value of 0.03 degrees or more. This is a winding device for a bonding wire.

【0014】[0014]

【作用】本発明では、スプールにワイヤを巻き取る際、
同一方向の巻線である往側の巻線または復側の巻線にお
いてn回目と(n+1)回目の巻線の交差角が0.03
度以上となっているため、(n+1)回目の巻線がn回
目の同一方向の巻線間にはさまれることが防止される。
According to the present invention, when the wire is wound on the spool,
Winding in the same direction as the forward winding or the backward winding
And the intersection angle between the n-th winding and the (n + 1) -th winding is 0.03
Degrees or more, the (n + 1) -th winding is prevented from being caught between the n-th winding in the same direction .

【0015】[0015]

【実施例】【Example】

(第1実施例) 以下に本発明の第1実施例を添付図面を
参照して説明する。まず、ワイヤをスプールに巻取る巻
取装置の基本構成について説明する。
First Embodiment Hereinafter, a first embodiment of the present invention will be described with reference to the accompanying drawings. First, the basic configuration of a winding device that winds a wire around a spool will be described.

【0016】図2において、符号2は回転駆動軸であ
り、巻取装置本体4の内部に配設されたサーボモータの
出力軸に連結されている。この回転駆動軸2の端部に
は、スプール6が装着され、前記サーボモータの回転に
より、スプール6が回転駆動されるようになっている。
In FIG. 2, reference numeral 2 denotes a rotary drive shaft, which is connected to an output shaft of a servomotor disposed inside the winding device main body 4. A spool 6 is mounted on an end of the rotary drive shaft 2, and the spool 6 is driven to rotate by rotation of the servomotor.

【0017】前記巻取装着本体4の内部には、往復駆動
機構(サーボ機構)が配設され、該往復駆動機構には、軸
8の基端部が連結されている。また、軸8の先端部に
は、ワイヤ14を通過可能に支持するローラ10が回転
自在に取着されている。そして該軸8は、前記往復駆動
機構により、スプール6の軸方向(図2の矢印a方向及び
矢印b方向)に往復運動を行うように構成されている。
A reciprocating drive mechanism (servo mechanism) is provided inside the winding and mounting main body 4, and a base end of a shaft 8 is connected to the reciprocating drive mechanism. A roller 10 that rotatably supports the wire 14 is attached to the tip of the shaft 8 so as to be rotatable. The shaft 8 is configured to reciprocate in the axial direction (the direction of arrow a and the direction of arrow b in FIG. 2) of the spool 6 by the reciprocating drive mechanism.

【0018】そして、前記巻取装置本体4の内部に配設
された、マイクロコンピュータよりなる制御部12が、
スプール6の回転運動と軸8の往復運動とを連動すべく
制御することにより、スプール6の一端部(フランジ部)
にその巻始部を止着されたワイヤ14は、該スプール6
に往復多層状に巻取られてゆく。
Then, a control unit 12 composed of a microcomputer, which is provided inside the winding device main body 4,
One end (flange portion) of the spool 6 is controlled by controlling the rotational movement of the spool 6 and the reciprocating movement of the shaft 8 in conjunction with each other.
The wire 14 having its winding start portion fixed to the spool 6
It is wound up in a reciprocating multilayer.

【0019】次に、上記巻取装置によるワイヤ14の巻
線形態の一例を図1を参照して説明する。
Next, an example of a winding form of the wire 14 by the winding device will be described with reference to FIG.

【0020】ワイヤ14は、その巻始部をスプール6の
一端部に止着された後、スプール6が等速回転しながら
軸8がスプール6の軸方向に往復運動することにより、
スプール6に巻き込まれる。
After the winding portion of the wire 14 is fixed to one end of the spool 6, the shaft 8 reciprocates in the axial direction of the spool 6 while the spool 6 rotates at a constant speed.
It gets caught in the spool 6.

【0021】ここで、軸8が一方の側(図2の矢印a方
向)に送られるときにスプール6に巻取られたワイヤを
往側巻線とし、逆に、軸8が他方の側(図2の矢印b方
向)に送られるときにスプール6に巻取られたワイヤを
復側巻線とし、また、平面視したときに往側若しくは復
側の巻線がなす直線と、スプール6の軸方向の直線とが
成す鋭角θ(図2参照)を巻角と定義する。
Here, the wire wound on the spool 6 when the shaft 8 is sent to one side (the direction of arrow a in FIG. 2) is used as the forward winding, and conversely, the shaft 8 is connected to the other side ( The wire wound on the spool 6 when fed in the direction of arrow b in FIG. 2 is referred to as a return winding, and a straight line formed by the forward or return winding when viewed in a plan view, The acute angle θ (see FIG. 2) formed by the straight line in the axial direction is defined as the winding angle.

【0022】図1において、二点鎖線20はスプール6
に巻取られたn回目の往側巻線を、破線22は同じくn回
目の復側巻線を、実線24は(n+1)回目の往側巻線
を、それぞれ示すものとする。
In FIG. 1, the two-dot chain line 20
, The broken line 22 indicates the nth backward winding, and the solid line 24 indicates the (n + 1) th forward winding.

【0023】本実施例にかかるワイヤの巻取方法は、初
期ピッチとして、1回目の往側巻線のピッチP1及び1
回目の復側巻線のピッチP2を与えた後、n回目(nは自
然数)の往側巻線と(n+1)回目の往側巻線の交差角(図
1のω)が0.03度以上の一定値(例えば0.1度)とな
り、同様にn回目の復側巻線と(n+1)回目の復側巻線の
交差角も0.03度以上の一定値となるように順次巻取
っていくものである。
In the method of winding a wire according to the present embodiment, the pitches P1 and P1 of the first forward winding are set as initial pitches.
After giving the pitch P2 of the second return winding, the intersection angle (ω in FIG. 1) between the n-th (n is a natural number) forward winding and the (n + 1) -th forward winding is 0.03 degrees. The above-mentioned constant value (for example, 0.1 degree), and similarly, the crossing angle between the n-th return side winding and the (n + 1) th return side winding is sequentially set so as to be a constant value of 0.03 degree or more. It is something to take.

【0024】上記において、交差角を一定にするとは、
往側及び復側の、(n+1)回目の巻線の巻角をn回目の巻
線の巻角より、(イ)交差角度分常に増加させる場合と、
(ロ)交差角度分常に減少させる場合と、(ハ)交差角度分
の増加、減少を交互に繰り返す場合とがあるが、いずれ
であってもよい。
In the above description, to make the intersection angle constant,
On the forward and return sides, the winding angle of the (n + 1) th winding is more than the winding angle of the nth winding, and
(B) There is a case where the angle is constantly decreased by the intersection angle, and (c) a case where the increase and the decrease of the intersection angle are alternately repeated.

【0025】上記の如くワイヤを巻取ることにより、往
側若しくは復側において、(n+1)回目の巻線がn回目の
巻線間にはさみ込まれることを防止することができ、ワ
イヤの送りを円滑にして、従来以上のスプール巻線の長
さの増長が可能となる。
By winding the wire as described above, it is possible to prevent the (n + 1) -th winding from being caught between the n-th winding on the forward side or the backward side. This makes it possible to increase the length of the spool winding more than before.

【0026】なお、上記(イ)、(ロ)、(ハ)の各設定にお
いて、交差角を変化させてワイヤを巻取った場合の、巻
きほどき試験の結果を、表1に示す。表1は、直径5
0.8のスプールに各条件において長さ1000 のワイ
ヤを巻き取った後、該スプールを、ボンディング時にお
けるスプールの繰り出し速度とほぼ同一の速度(周速約
0.015m/s)でワイヤがほどける方向に回転させ、こ
れにより巻きほどき性の有無を目視により判定したもの
である。また、目視による判定は、ワイヤが、図3にお
ける状態Xのように垂下した状態のときを正常と、同図
における状態Yのようにワイヤの巻きほどき端が回転方
向に引きずられた状態を異常と、それぞれ判定する。
Table 1 shows the results of the unwinding test when the wire was wound while changing the crossing angle in each of the settings (a), (b) and (c). Table 1 shows the diameter 5
After winding a wire having a length of 1000 on a 0.8 spool in each condition, the spool is unwound at a speed substantially equal to the payout speed of the spool during bonding (peripheral speed: about 0.015 m / s). In this manner, the presence or absence of the unwinding property is visually determined. In addition, the determination by visual observation is normal when the wire is in a hanging state as shown in a state X in FIG. 3 and in a state where the unwound end of the wire is dragged in the rotation direction as in a state Y in FIG. Each of them is determined to be abnormal.

【0027】[0027]

【表1】 [Table 1]

【0028】なお、表1において、(イ)の場合の初期ピ
ッチP1、P2は、1回目の往側巻線の巻角(以下、「初
期往側巻角」という。)が3.5度、同復側巻線の巻角(以
下、「初期復側巻角」という。)が3.5度となるように与
えている。同様に、(ロ)の場合の初期往側巻角は3.5
度、初期復側巻角は3.5度であり、(ハ)の場合の初期
往側巻角は3.5度、初期復側巻角は3.5度である。
In Table 1, in the initial pitches P1 and P2 in the case of (a), the winding angle of the first forward winding (hereinafter referred to as "initial forward winding angle") is 3.5 degrees. The winding angle of the return winding (hereinafter referred to as “initial return winding angle”) is set to 3.5 degrees. Similarly, the initial outward winding angle in the case of (b) is 3.5.
In the case (c), the initial forward winding angle is 3.5 degrees, and the initial backward winding angle is 3.5 degrees.

【0029】表1より、上記(イ)、(ロ)、(ハ)の場合共
に交差角を0.03度以上とすることにより、巻きほど
き性が正常となることがわかる。
From Table 1, it can be seen that in all of the cases (a), (b) and (c), the unwinding property becomes normal by setting the crossing angle to 0.03 degrees or more.

【0030】(第2実施例) 以下に本発明の第2実施例
を添付図面を参照して説明する。なお、上述の第1実施
例と同一の構成要素には同一の番号を付したので、その
説明を省略する。
(Second Embodiment) Hereinafter, a second embodiment of the present invention will be described with reference to the accompanying drawings. Note that the same components as those in the first embodiment are given the same numbers, and a description thereof will be omitted.

【0031】図4に示す巻取装置が図2のものと異なる
点は、乱数発生手段として巻取装置本体4の内部に乱数
発生装置16が配設されている点である。この乱数発生
装置16は、制御部12に乱数データを与えるためのも
のであり、これにより制御部12は後述の乱数を用いた
制御が可能となる。
The winding device shown in FIG. 4 is different from that shown in FIG. 2 in that a random number generator 16 is provided inside the winding device main body 4 as random number generating means. The random number generating device 16 is for providing random number data to the control unit 12, so that the control unit 12 can perform control using a random number described later.

【0032】本実施例に係るワイヤの巻取方法も、初期
ピッチとしてP1及びP2を与えて、ワイヤを往復多層
状に巻取っていく点では上記第1実施例と同様である。
但し、本実施例に係る巻取方法では、n回目の往側巻線
と(n+1)回目の往側巻線の交差角を0.03度以上の不
定値(但し、スプールの形状等により、自ずと上限値が
存在する。)とし、同様にn回目の復側巻線と(n+1)回
目の復側巻線の交差角も0.03度以上の不定値にする
ものである。上記0.03度以上の不定値(以下、「不定
値」と略称する。)は、前述の乱数発生装置16より送ら
れる乱数データを基にして制御部12により造られるも
のである。
The method of winding a wire according to the present embodiment is the same as that of the first embodiment in that P1 and P2 are given as initial pitches and the wire is wound in a reciprocating multilayer.
However, in the winding method according to this embodiment, the intersection angle between the n-th forward winding and the (n + 1) -th forward winding is an indefinite value of 0.03 degrees or more (however, depending on the shape of the spool, etc. Similarly, the upper limit value naturally exists.) Similarly, the intersection angle between the n-th return winding and the (n + 1) -th return winding is also set to an undefined value of 0.03 degrees or more. The indefinite value of 0.03 degrees or more (hereinafter abbreviated as “undefined value”) is generated by the control unit 12 based on the random number data sent from the random number generator 16 described above.

【0033】上記において、交差角を不定値にすると
は、往側及び復側の、(n+1)回目の巻線の巻角をn回目
の巻線の巻角より、(ニ)不定値分常に増加させる場合
と、(ホ)不定値分常に減少させる場合と、(ヘ)不定値分
をランダムに増加及び減少させる場合とがあるが、いず
れであってもよい。
In the above description, making the crossing angle an indefinite value means that the winding angle of the (n + 1) th winding on the forward side and the return side is always (d) an indefinite value from the winding angle of the nth winding. There are a case where the value is increased, a case where the value is constantly reduced by (e) an undetermined value, and a case where the value of the undefined value is randomly increased and decreased.

【0034】上記の如くワイヤを巻取ることにより、第
1実施例と同様に、往側若しくは復側において、(n+
1)回目の巻線がn回目の巻線間にはさみ込まれることを
防止することができ、ワイヤの送りを円滑にして、従来
以上のスプール巻線の長さの増長が可能となる。
By winding the wire as described above, as in the first embodiment, (n +
1) It is possible to prevent the n-th winding from being caught between the n-th windings, to make the wire feeding smooth, and to increase the spool winding length more than before.

【0035】[0035]

【表2】 [Table 2]

【0036】なお、上記(ニ)、(ホ)、(へ)の各設定にお
いて、上記表1と同一の条件で巻きほどき試験を行った
場合の結果を表2に示す。表2において、(ニ)の場合の
初期往側巻角は3.5度、初期復側巻角は3.5度、(ホ)
の場合の初期往側巻角は3.5度、初期復側巻角は3.
5度、(ヘ)の場合の初期往側巻角は3.5度、初期復側
巻角は3.5度である。
Table 2 shows the results when the unwinding test was performed under the same conditions as in Table 1 in each of the settings (D), (E), and (F). In Table 2, in the case of (d), the initial forward winding angle is 3.5 degrees, the initial backward winding angle is 3.5 degrees, and (e).
In the case of (1), the initial forward winding angle is 3.5 degrees, and the initial backward winding angle is 3.
In the case of 5 degrees and (f), the initial forward winding angle is 3.5 degrees, and the initial backward winding angle is 3.5 degrees.

【0037】表2より、上記(ニ)、(ホ)、(ヘ)の場合共
に不定値を0.03度以上の不定値とすることにより巻
きほどき性が正常となることがわかる。
From Table 2, it can be seen that in all of the above cases (d), (e) and (f), setting the undefined value to 0.03 degrees or more makes the unwinding property normal.

【0038】なお、上述した図2及び図4の巻取装置に
おいて、軸8を固定し、回転駆動軸2をスプール6の軸
方向に往復移動させてもよく、又、軸8と回転駆動軸2
の双方を往復移動させる構成としてもよい。また、軸8
の往復移動速度を一定とし、回転駆動軸の回転速度を調
整することにより巻き角を調整するような構成としても
よい。
In the above-described winding apparatus shown in FIGS. 2 and 4, the shaft 8 may be fixed and the rotary drive shaft 2 may be reciprocated in the axial direction of the spool 6, or the shaft 8 and the rotary drive shaft may be moved. 2
May be reciprocated. Also, shaft 8
And the winding angle may be adjusted by adjusting the rotational speed of the rotary drive shaft while keeping the reciprocating speed of the rotary shaft constant.

【0039】[0039]

【発明の効果】本発明に係る巻取方法若しくは巻取装置
によれば、往側若しくは復側において、(n+1)回目の
巻線がn回目の巻線間にはさみ込まれることを防止する
ことができ、ワイヤの送りを円滑にして、従来以上のス
プール巻線の長さの増長を図ることが可能となる。従っ
て、本発明に係るスプール巻線を用いることにより、ボ
ンディング速度の高速化に対応することができ、ボンデ
ィング作業の作業性を向上させることができる効果が存
する。
According to the winding method or the winding device according to the present invention, it is possible to prevent the (n + 1) th winding from being caught between the nth winding on the forward side or the backward side. Thus, it is possible to increase the length of the spool winding more than before by smoothing the wire feeding. Therefore, by using the spool winding according to the present invention, it is possible to cope with an increase in the bonding speed, and there is an effect that the workability of the bonding operation can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】スプールの巻線形態に係る説明図である。FIG. 1 is an explanatory diagram related to a winding configuration of a spool.

【図2】本発明の第1実施例に係る巻取装置の平面図で
ある。
FIG. 2 is a plan view of the winding device according to the first embodiment of the present invention.

【図3】巻きほどき試験の説明図である。FIG. 3 is an explanatory diagram of an unwinding test.

【図4】本発明の第2実施例に係る巻取装置の平面図で
ある。
FIG. 4 is a plan view of a winding device according to a second embodiment of the present invention.

【符号の説明】[Explanation of symbols]

2 回転駆動軸 4 巻取装置本体 6 スプール 8 軸 10 ローラ 12 制御部 14 ワイヤ 16 乱数発生装置 Reference Signs List 2 rotation drive shaft 4 take-up device body 6 spool 8 shaft 10 roller 12 control unit 14 wire 16 random number generator

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) B21C 47/02 B65H 54/06,55/04 H01L 21/60──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 6 , DB name) B21C 47/02 B65H 54 / 06,55 / 04 H01L 21/60

Claims (9)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】スプールにボンディングワイヤを一端から
多端へ、さらに他端から一端へと往復させて、隣接する
巻線間で隙間を開けて巻取り、これを繰り返して多層状
にしたボンディングワイヤ巻線において、往側または復側の同一方向巻線の n回目と(n+1)回
目のボンディングワイヤの交差角を0.03度以上とし
たことを特徴とするボンディングワイヤ巻線。
1. A bonding wire is reciprocated from one end to a multi-end and further from the other end to one end on a spool to be adjacent to the spool.
In a bonding wire winding in which a gap is provided between the windings and this is repeated to form a multilayer, the crossing angle of the nth and (n + 1) th bonding wires of the same direction winding on the forward side or the backward side is determined. A bonding wire winding characterized by being at least 0.03 degrees.
【請求項2】 前記交差角を0.03度以上の一定値と
した請求項1記載のボンディングワイヤ巻線。
2. The bonding wire winding according to claim 1, wherein the crossing angle is a constant value of 0.03 degrees or more.
【請求項3】 前記交差角を0.03度以上の不定値と
した請求項1記載のボンディングワイヤ巻線。
3. The bonding wire winding according to claim 1, wherein the crossing angle is an indefinite value of 0.03 degrees or more.
【請求項4】スプールにボンディングワイヤを一端から
多端へ、さらに他端から一端へと往復させて、隣接する
巻線間で隙間を開けて巻取り、これを繰り返して多層状
にするボンディングワイヤの巻取方法において、往側または復側の同一方向巻線の n回目と(n+1)回
目のボンディングワイヤの交差角を0.03度以上とす
ることを特徴とするボンディングワイヤの巻取方法。
4. The bonding wire is reciprocated from one end to the other end and from the other end to one end of the spool, and is adjacent to the spool.
In a method of winding a bonding wire in which a gap is provided between the windings and this is repeated to form a multilayer structure, the intersection of the nth and (n + 1) th bonding wires of the same direction winding on the forward side or the backward side is performed. A method for winding a bonding wire, wherein the angle is 0.03 degrees or more.
【請求項5】 前記交差角を0.03度以上の一定値と
する請求項4記載のボンディングワイヤの巻取方法。
5. The method according to claim 4, wherein the crossing angle is a constant value of 0.03 degrees or more.
【請求項6】 前記交差角を0.03度以上の不定値と
する請求項4記載のボンディングワイヤの巻取方法。
6. The method according to claim 4, wherein the crossing angle is an indefinite value of 0.03 degrees or more.
【請求項7】 スプールを該スプールの軸回りに回転可
能に支持するスプール支持部と、 前記スプールの近傍において、ボンディングワイヤを通
過可能に支持するワイヤ支持部と、 前記スプールを回転駆動する回転駆動部と、 前記ワイヤ支持部と前記スプールのうちの少なくとも一
方を、スプールの軸方向に沿って相対的に往復作動させ
るように横送り移動させる横送り駆動部と、 前記回転駆動部の回転運動及び前記横送り駆動部の横送
り運動を制御する制御部とを備え、 前記回転駆動部及び前記横送り駆動部を駆動制御しつつ
スプールにワイヤを往復させて、隣接する巻線間で隙間
を開けて巻き取るようにしたボンディングワイヤ巻取装
置において、 前記制御部は、前記横送り駆動部の横送り移動速度を調
整して、往側または復側の同一方向巻線のn回目と(n
+1)回目のボンディングワイヤの交差角を0.03度
以上とすることを特徴とするボンディングワイヤの巻取
装置
7. A spool support for rotatably supporting a spool about the axis of the spool, a wire support for supporting a bonding wire near the spool so as to allow a bonding wire to pass therethrough, and a rotary drive for rotating the spool. Part, at least one of the wire support part and the spool is relatively reciprocated along the axial direction of the spool.
And a control unit for controlling the rotational movement of the rotary drive unit and the lateral feed movement of the lateral drive unit, wherein the rotary drive unit and the lateral drive unit are controlled. The wire is reciprocated on the spool while controlling the drive , and the gap between adjacent windings
In the bonding wire take-up device, the control unit adjusts the traverse movement speed of the traverse drive unit to determine the n-th time of the forward or backward same-direction winding. n
+1) Winding of a bonding wire, wherein the crossing angle of the first bonding wire is 0.03 degrees or more.
Equipment .
【請求項8】 前記制御部は、前記交差角を0.03度
以上の一定値とするように前記横送り駆動部の横送り移
動速度を調整する請求項7記載のボンディングワイヤの
巻取装置。
8. The bonding wire winding device according to claim 7, wherein the control unit adjusts the traverse movement speed of the traverse drive unit so that the crossing angle has a constant value of 0.03 degrees or more. .
【請求項9】 前記制御部は、前記交差角を0.03度
以上の不定値とするように前記横送り駆動部の横送り移
動速度を調整する請求項7記載のボンディングワイヤの
巻取装置。
9. The winding device for a bonding wire according to claim 7, wherein the control unit adjusts the traverse movement speed of the traverse drive unit so that the crossing angle is an indefinite value of 0.03 degrees or more. .
JP2401700A 1990-12-12 1990-12-12 Bonding wire winding, bonding wire winding method and winding device therefor Expired - Fee Related JP2827512B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2401700A JP2827512B2 (en) 1990-12-12 1990-12-12 Bonding wire winding, bonding wire winding method and winding device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2401700A JP2827512B2 (en) 1990-12-12 1990-12-12 Bonding wire winding, bonding wire winding method and winding device therefor

Publications (2)

Publication Number Publication Date
JPH04351222A JPH04351222A (en) 1992-12-07
JP2827512B2 true JP2827512B2 (en) 1998-11-25

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ID=18511537

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Country Status (1)

Country Link
JP (1) JP2827512B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2806839B2 (en) * 1995-10-04 1998-09-30 日特エンジニアリング株式会社 Wire member winding device
JP4540212B2 (en) * 2000-10-24 2010-09-08 田中電子工業株式会社 Rewinding guide for bonding wire and rewinding method using the same
JP4411062B2 (en) 2003-12-25 2010-02-10 株式会社アライドマテリアル Super abrasive wire saw winding structure, super abrasive wire saw cutting device, and super abrasive wire saw winding method

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JPS57116218U (en) * 1981-01-12 1982-07-19
JPS57190496U (en) * 1981-05-28 1982-12-02
JPS58133836U (en) * 1982-03-03 1983-09-09 日本電気株式会社 Fixing mechanism for input/output equipment
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Also Published As

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