JP2013102472A - Mesa type piezoelectric vibration piece and piezoelectric device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a mesa type piezoelectric vibration piece which suppresses influence of flexural vibration and stably vibrates while suppressing disturbance of vibration of a vibrating portion due to outflow of a fixing member or the like, and further to provide a piezoelectric device provided with the mesa type piezoelectric vibration piece.SOLUTION: A crystal vibrating piece 10 includes: a vibrating portion 12 having excitation electrodes 16 and 18; and thin-walled portions 13 and 14 at both end portions of the vibrating portion 12. When dimensions from end portions 12b of the vibrating portion 12 at one thin-walled portion 13 sides having a fixing portion 11 to end portions 16b and 18b of the excitation electrodes 16 and 18 at the one thin-walled portion 13 sides are represented as T1, dimensions from end portions 12c of the vibrating portion 12 at other thin-walled portion 14 sides to end portions 16c and 18c of the excitation electrodes 16 and 18 at the other thin-walled portion 14 sides are represented as T2 and a wavelength of flexural vibration generated at the crystal vibrating piece 10 is represented as λ, T1, T2, and λ substantially satisfy a relational expression of T1-T2=λ×m, where T2=(2n-1)λ/2 and m and n are natural numbers.

Description

  The present invention relates to a mesa type piezoelectric vibrating piece and a piezoelectric device including the mesa type piezoelectric vibrating piece.

  Conventionally, in a mesa-type piezoelectric vibrating piece, the outer dimensions of the piezoelectric substrate constituting the mesa-type piezoelectric vibrating piece, the size of the vibrating portion of the piezoelectric substrate, the size of the excitation electrode formed on the vibrating portion, and the like are defined in association with each other. Therefore, a configuration is known in which bending vibration, which is unnecessary vibration, is suppressed with respect to thickness shear vibration, which is the original vibration mode of the mesa-type piezoelectric vibrating piece (see, for example, Patent Document 1).

JP 2006-340023 A

In the configuration of Patent Document 1, the distance from the end of the vibrating portion in the direction along the long side of the mesa-type piezoelectric vibrating piece to the end of the excitation electrode is defined as ½ of λ, which is the wavelength of bending vibration. Thus, the end of the vibration part and the end of the excitation electrode are in close proximity.
In the piezoelectric device including the mesa piezoelectric vibrating piece, the fixing portion adjacent to the vibrating portion is fixed by a fixing member such as an adhesive when the mesa piezoelectric vibrating piece is fixed in the package with a cantilever support structure. .
At this time, in the piezoelectric device, since the fixing member is an adhesive, if the fixing member is too close to the excitation electrode close to the vibration part, the vibration of the vibration part is inhibited, and thus the CI value and the like are reduced. There is a problem that characteristics deteriorate.
In addition, in the piezoelectric device, when a conductive member such as a conductive adhesive is used as the fixing member, the outflow of the fixing member causes problems such as short-circuiting between the excitation electrodes on the front and back through the fixing member. There's a problem.
In addition, in order to suppress short-circuit between the excitation electrodes due to the outflow of the fixing member, if the distance from the fixing portion to the end of the excitation electrode is increased, the overall size of the mesa-type piezoelectric vibrating piece is also increased. There is a problem of increasing the size.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

Application Example 1 A mesa-type piezoelectric vibrating piece according to this application example is a mesa-type piezoelectric vibrating piece having a vibrating portion having an excitation electrode and thin portions that are thinner than the vibrating portion at both ends of the vibrating portion. One of the thin portions has a fixing portion fixed to the outside, and the excitation electrode on the one thin portion side from the end of the vibrating portion on the one thin portion side having the fixing portion. The dimension from the end of the vibrating part on the other thin part side to the end of the excitation electrode on the other thin part side is T2, and the mesa-type piezoelectric vibrating piece When the wavelength of the bending vibration generated in λ is λ, the relational expression of T1−T2 = λ × m (where T2 = (2n−1) λ / 2, where m and n are natural numbers) is substantially satisfied. And

  According to this, in the mesa-type piezoelectric vibrating piece, the dimension from the end of the vibration part on the one thin part side having the fixed part to the end of the excitation electrode on the one thin part side is T1, and the other thin part T1-T2 = λ where T2 is the dimension from the end of the vibration portion on the side to the end of the excitation electrode on the other thin portion side, and λ is the wavelength of the bending vibration generated in the mesa-type piezoelectric vibrating piece The relational expression xm (where T2 = (2n-1) λ / 2, m and n are natural numbers) is substantially satisfied.

From this, the mesa-type piezoelectric vibrating piece has an excitation electrode T1-T2 = λ × m (where T2 = (2n−1) λ / 2, where m and n are natural numbers) with respect to the vibrating portion. By forming a bias toward the other thin portion, the distance from the fixed portion to the excitation electrode can be increased compared to the conventional case.
As a result, the mesa-type piezoelectric vibrating piece can increase the distance from the fixing member such as an adhesive to the excitation electrode, for example, so that the CI value due to the inhibition of the vibration of the vibrating part due to the outflow of the fixing member Degradation of characteristics such as can be suppressed.
In addition, in the mesa-type piezoelectric vibrating piece, for example, since a fixing member such as a conductive adhesive is difficult to flow out to the excitation electrode, the excitation electrodes on the front and back sides are short-circuited via the fixing member made of a conductive member. Can be reduced.

At this time, since the mesa-type piezoelectric vibrating piece is T1-T2 = λ × m (where T2 = (2n−1) λ / 2, m and n are natural numbers), the end of the vibrating portion and the excitation electrode In this state, the bending vibration component at the end portion of the plate is difficult to combine with the thickness shear vibration component, which is the original vibration mode of the vibration portion.
Therefore, the mesa-type piezoelectric vibrating piece can stably vibrate while suppressing the influence of the bending vibration even if the excitation electrode is biased without increasing the size as described above.

  Application Example 2 In the mesa-type piezoelectric vibrating piece according to the application example, it is preferable that n in the relational expression is 1.

  According to this, since the mesa-type piezoelectric vibrating piece sets n to 1, T2 = λ / 2, and the position of the end of the other thin portion side of the excitation electrode with respect to the vibrating portion is the original position of the vibrating portion. The thickness-shear vibration component, which is the vibration mode, and the unnecessary bending vibration component are difficult to combine and can be set to an optimal position in terms of frequency characteristics.

  Application Example 3 A piezoelectric device according to this application example includes the mesa piezoelectric vibrating piece according to the application example described above and the mesa piezoelectric vibrating piece housed in an airtight seal, and the mesa piezoelectric vibrating piece. And a package for fixing the fixing portion to the inside.

According to this, the piezoelectric device accommodates the mesa-type piezoelectric vibrating piece described in the above application example and the mesa-type piezoelectric vibrating piece in a hermetically sealed interior, and fixes the fixing portion of the mesa-type piezoelectric vibrating piece inside. Package.
Accordingly, the piezoelectric device can obtain stable frequency characteristics by including the mesa-type piezoelectric vibrating piece having the effect described in the application example above in a package hermetically sealed.

The schematic diagram which shows schematic structure of the crystal oscillator of this embodiment. The schematic diagram which piled up the waveform of the bending vibration on the cross section of the crystal vibrating piece. Explanatory drawing which showed the data of the frequency temperature characteristic with the graph. Explanatory drawing which showed the data of CI value temperature characteristic with the graph.

  Hereinafter, embodiments of a mesa-type piezoelectric vibrating piece and a piezoelectric device will be described with reference to the drawings.

(Embodiment)
FIG. 1 is a schematic diagram showing a schematic configuration of a crystal resonator as an example of the piezoelectric device of the present embodiment. FIG. 1A is a plan view, and FIG. 1B is a cross-sectional view taken along the line AA in FIG. In the plan view, the lid (lid) portion is omitted for easy understanding, and the outer shape of the lid portion is represented by a two-dot chain line.

  As shown in FIG. 1, the crystal resonator 1 according to the present embodiment accommodates a crystal vibrating piece 10 as a mesa-type piezoelectric vibrating piece and the quartz crystal vibrating piece 10 in an airtightly sealed interior, and fixing the crystal vibrating piece 10. It is comprised from the package 20 etc. which fix a part inside.

The package 20 includes a base portion 21, a lid portion 22, a joint portion 23, and the like.
For the base portion 21, a ceramic green sheet is formed, laminated and fired, and an aluminum oxide sintered body or the like is used.
Mount electrodes 21 b and 21 c are formed on the bottom surface 21 a of the base portion 21. The mount electrodes 21b and 21c are made of a metal film obtained by laminating each film such as nickel and gold on a metallized layer such as tungsten by plating.

  External electrodes 21d and 21e made of the metal coating are formed on the outer surface of the base portion 21. The external electrodes 21d and 21e are respectively connected to the mount electrodes 21b and 21c by internal wiring (not shown). The crystal unit 1 is mounted on an external device via external electrodes 21d and 21e.

The lid portion 22 is made of a metal such as Kovar, and is seam welded to a joint portion 23 made of a metal such as Kovar in a state where the crystal vibrating piece 10 is housed and fixed inside the package 20. The joint portion 23 is joined to the base portion 21 by brazing or the like.
Thus, the inside of the package 20 of the crystal unit 1 is hermetically sealed. Note that the inside of the package 20 is sealed in a vacuum state or an inert gas such as nitrogen, helium, or argon.

  The crystal resonator element 10 is mounted on the base portion 21 of the package 20, and the crystal resonator element 10 is fixed to the mount electrodes 21 b and 21 c via a fixing member 30 whose fixing portion 11 is made of a conductive adhesive or the like. . Thereby, the quartz crystal vibrating piece 10 is cantilevered by the base portion 21 via the fixing portion 11.

The quartz crystal vibrating piece 10 is formed from a quartz wafer as a piezoelectric substrate polished to a predetermined thickness according to an oscillation frequency or the like, using a photolithographic technique or the like, to a substantially rectangular vibrating portion 12 and both ends of the vibrating portion 12. A planar shape having one thin portion 13 and the other thin portion 14 thinner than the vibrating portion 12 is formed in a substantially rectangular mesa shape.
In this embodiment, the quartz crystal vibrating piece 10 is an AT-cut quartz crystal vibrating piece that performs thickness shear vibration. Further, the thickness of the quartz crystal vibrating piece 10 is appropriately set in the range of several μm to 100 μm.

In the crystal vibrating piece 10, a substantially rectangular excitation electrode 16 is formed on one main surface (front) 15 of the vibration part 12, and a substantially rectangular excitation electrode 18 is formed on the other main surface (back) 17. In addition, the vibration part 12 is formed so that the outline on the one main surface 15 side and the outline on the other main surface 17 side substantially overlap in a plan view. In addition, the excitation electrode 16 and the excitation electrode 18 are formed so that their outlines substantially overlap in a plan view.
Note that the side (long side) connecting one thin portion 13 and the other thin portion 14 of the crystal vibrating piece 10 is formed along the X axis of the crystal crystal axis. The quartz crystal resonator element 10 is also formed so that the long sides of the vibrating part 12 and the excitation electrodes 16 and 18 are also along the X axis.

A connection electrode 16 a connected to the excitation electrode 16 is formed on the one main surface 15 side of the one thin portion 13 of the crystal vibrating piece 10, and an excitation is formed on the other main surface 17 side of the one thin portion 13. A connection electrode 18 a connected to the electrode 18 is formed.
The connection electrode 16a is formed so as to also wrap around the other main surface 17 side, and the connection electrode 18a is formed so as to also wrap around the one main surface 15 side. Thereby, the crystal vibrating piece 10 has a configuration in which one of the one main surface 15 and the other main surface 17 may be a mounting surface for the base portion 21.
The excitation electrodes 16 and 18 and the connection electrodes 16a and 18a are made of a metal film in which films such as chromium, nickel, gold, and silver are laminated by a method such as sputtering or vapor deposition.

Here, the positional relationship between the vibrating portion 12 of the quartz crystal vibrating piece 10 and the excitation electrodes 16 and 18 will be described with reference to FIG.
FIG. 2 is a schematic view in which the waveform of the bending vibration generated in the quartz crystal vibrating piece 10 is superimposed on the cross section of the quartz crystal vibrating piece 10 taken along the line BB in FIG. In FIG. 2, hatching is omitted so that the drawing can be easily seen.

As shown in FIG. 2, the vibrating portion 12 of the quartz crystal vibrating piece 10 and the excitation electrodes 16 and 18 are in the following positional relationship.
An excitation electrode on the one thin portion 13 side from an end 12b of the vibrating portion 12 on the one thin portion 13 side (the step portion between the one thin portion 13 and the vibrating portion 12) having the fixed portion 11 of the quartz crystal resonator element 10. The dimension of the end portions 16b and 18b of the 16 and 18 is T1. Then, from the end portion 12c of the vibrating portion 12 on the other thin portion 14 side of the crystal vibrating piece 10 (the step portion between the other thin portion 14 and the vibrating portion 12), the excitation electrodes 16 and 18 on the other thin portion 14 side. The dimension up to the end portions 16c and 18c is T2.
Here, when the wavelength of flexural vibration, which is unnecessary vibration generated in the quartz crystal vibrating piece 10, is λ, the quartz crystal vibrating piece 10 has T1−T2 = λ × m (where T2 = (2n−1) λ / 2, m, and n are natural numbers, for example, 1, 2, 3, 4, 5,.
Note that λ is obtained from the following known formula (see Patent Document 1).
λ / 2 = (1.332 / f) −0.0024
Here, f represents the oscillation frequency (unit: MHz) of the crystal vibrating piece 10. For example, when f is 26 MHz, λ is about 0.1 mm.

By substantially satisfying this relational expression, as shown in FIG. 2, in the quartz crystal vibrating piece 10, the positions of the top and bottom vertices of the bending vibration waveform 19 in the X-axis direction are the end portions 12b and 12c of the vibrating portion 12, the excitation. The positions of the end portions 16b, 18b, 16c and 18c of the electrodes 16 and 18 coincide with each other.
Thereby, the quartz crystal resonator element 10 can provide the vibration part 12 and the excitation electrodes 16 and 18 in a positional relationship in which the component of the original thickness-shear vibration and the component of the bending vibration that is an unnecessary vibration are least likely to be coupled. .
In the crystal vibrating piece 10, by setting the value of n to 1, the end portions 16 c and 18 c of the excitation electrodes 16 and 18 can be brought closest to the end portion 12 c of the vibrating portion 12. From this, the quartz crystal resonator element 10 can maximize the size of the excitation electrodes 16 and 18 with respect to the vibration part 12, and can improve the frequency characteristics.
Note that the value of n is not limited to 1, and is appropriately set together with the value of m, which will be described later, according to the oscillation frequency, the size of the vibrating portion 12, the required size of the excitation electrodes 16 and 18, and the like.

Then, the quartz crystal resonator element 10 has a dimension from the end portion 12b on the fixed portion 11 side of the vibrating portion 12 to the end portions 16b and 18b on the fixed portion 11 side of the excitation electrodes 16 and 18 by appropriately selecting the value of m. It can be set appropriately.
According to this, the quartz crystal vibrating piece 10 is appropriately selected from the end portion 12b on the fixed portion 11 side of the vibrating portion 12 to the end portions 16b and 18b on the fixed portion 11 side of the excitation electrodes 16 and 18 by appropriately selecting the value of m. Can be set longer than before.

From this, when the fixed part 11 is fixed to the base part 21, the crystal vibrating piece 10 is prevented from flowing out to the excitation electrodes 16 and 18, thereby inhibiting the vibration of the vibration part 12. Deterioration of characteristics such as CI value can be suppressed. In addition, the quartz crystal resonator element 10 can reduce problems such as short-circuiting between the excitation electrodes 16 and 18 on the front and back sides via the fixing member 30.
In addition, since the crystal vibrating piece 10 has a longer distance from the fixed portion 11 to the excitation electrodes 16 and 18 as m is larger, a remarkable effect can be achieved with respect to the above problem. However, in the crystal vibrating piece 10, the larger m is, the smaller the size of the excitation electrodes 16, 18 with respect to the size of the vibrating portion 12, and thus a characteristic change such as a CI value can be considered.
For these reasons, the value of m is preferably about 3 in consideration of the balance between the degree of effect on the task and desirable characteristics such as the CI value.

In this case, m is not limited to 3, and the value of m is appropriately set according to the oscillation frequency, the size of the vibrating unit 12, the required size of the excitation electrodes 16 and 18, and the like.
As a result, the crystal vibrating piece 10 is formed such that the excitation electrodes 16 and 18 are biased toward the other thin portion 14 with respect to the vibrating portion 12.

  As shown in FIG. 1A, the excitation electrodes 16 and 18 are formed in the Z-axis direction with respect to the vibration part 12 from the end of the vibration part 12 on the upper side and the lower side of the paper. Are formed with substantially the same dimensions.

Here, a sample of a quartz crystal resonator element using the prior art (m in the above relational expression is 0 and n is 1, that is, T1 = T2 = λ / 2) and a sample of the quartz crystal resonator element 10 of the present embodiment (above Data in which m in the relational expression is 3 and n is 1, that is, T1 = 3λ + λ / 2, T2 = λ / 2) will be described with reference to FIGS.
In addition, both differ only in the shape of an excitation electrode as mentioned above, and other specifications, such as an external shape, the shape of a vibration part, an oscillation frequency, (lambda), are all the same. The oscillation frequency is about 33.6 MHz, and λ is about 70 μm.

FIG. 3 is an explanatory diagram showing both frequency temperature characteristic data in a graph. FIG. 3A is data of a plurality of samples of the present embodiment, and FIG. Sample data.
In FIG. 3, the horizontal axis represents temperature, and the vertical axis represents frequency displacement. As shown in FIG. 3, there is no significant difference between the frequency temperature characteristics of the two. From this, the quartz crystal resonator element 10 of the present embodiment is smaller than the conventional one so that the excitation electrodes 16 and 18 are m = 3 and n = 1 with respect to the vibration part 12, and on the other thin part 14 side. Even if it was formed unevenly, it was confirmed that there was no problem in practical use in the frequency temperature characteristics.

FIG. 4 is an explanatory diagram showing data of CI value temperature characteristics of both in a graph. FIG. 4A is data of a plurality of samples of the present embodiment, and FIG. It is data of multiple samples.
In FIG. 4, the horizontal axis represents temperature and the vertical axis represents CI value. As shown in FIG. 4, there is no significant difference between the CI value temperature characteristics of the two. From this, the quartz crystal resonator element 10 of the present embodiment is smaller than the conventional one so that the excitation electrodes 16 and 18 are m = 3 and n = 1 with respect to the vibration part 12, and on the other thin part 14 side. Even if it was formed unevenly, it was confirmed that there was no problem in practical use in the CI value temperature characteristics.

  As described above, the quartz crystal resonator element 10 according to the above embodiment has the ends of the excitation electrodes 16 and 18 on the one thin part 13 side from the end part 12 b of the vibration part 12 on the one thin part 13 side having the fixing part 11. The dimension to the parts 16b and 18b is T1, and the dimension from the end part 12c of the vibration part 12 on the other thin part 14 side to the end parts 16c and 18c of the excitation electrodes 16 and 18 on the other thin part 14 side is T2. And a relational expression of T1−T2 = λ × m (where T2 = (2n−1) λ / 2, where m and n are natural numbers), where λ is the wavelength of the bending vibration generated in the crystal vibrating piece 10. Is substantially satisfied.

From this, the quartz crystal resonator element 10 is compared with the conventional case by forming the excitation electrodes 16 and 18 on the other thin portion 14 side so that T1−T2 = λ × m with respect to the vibration portion 12. Thus, the distance from the fixed portion 11 to the excitation electrodes 16 and 18 can be increased.
Thereby, when the fixed part 11 is fixed to the base part 21, the crystal vibrating piece 10 is less likely to flow out to the excitation electrodes 16, 18 when the fixed part 11 is fixed to the base part 21. By flowing out, the vibration of the vibration unit 12 is inhibited, so that it is possible to suppress deterioration of characteristics such as the CI value.

  In addition, the quartz crystal resonator element 10 is not increased in size as compared with the prior art, and the distance from the fixing portion 11 to the excitation electrodes 16 and 18 can be increased, so that the fixing member that is a conductive adhesive is used. Problems such as a short circuit between the excitation electrodes 16 and 18 on the front and back sides can be reduced.

At this time, the quartz crystal resonator element 10 has T1−T2 = λ × m (where T2 = (2n−1) λ / 2, where m and n are natural numbers), and therefore, the end 12b of the vibrating unit 12 12c and the end portions 16b, 16c, 18b, and 18c of the excitation electrodes 16 and 18 are in a state where the phase of the bending vibration waveform 19 is most difficult to couple the bending vibration component and the thickness shear vibration component.
From this, the quartz crystal vibrating piece 10 can suppress the influence of bending vibration and perform stable thickness-shear vibration even if the excitation electrodes 16 and 18 are biased with respect to the vibration part 12 as described above.
Further, as described above, the quartz crystal resonator element 10 can obtain the above-described effects while maintaining the same characteristics as compared with the conventional case.

Further, the crystal resonator 1 includes a crystal resonator element 10 and a package 20 that houses the crystal resonator element 10 in an airtightly sealed interior and fixes the fixing portion 11 of the crystal resonator element 10 to the base portion 21. Yes.
Therefore, the crystal resonator 1 can obtain a stable frequency characteristic by including the crystal resonator element 10 having the above-described effect in the package 20 in which the inside is hermetically sealed.

  In addition, in the said embodiment, the crystal vibrating piece 10 as a piezoelectric device, and the package 20 which accommodates the crystal vibrating piece 10 in the airtightly sealed inside and fixes the fixing | fixed part 11 of the crystal vibrating piece 10 inside were provided. Although the crystal resonator 1 has been described, the present invention is not limited to this, and the present invention can also be applied to a crystal oscillator provided in the package 20 with an oscillation circuit element that oscillates the crystal resonator element 10.

  DESCRIPTION OF SYMBOLS 1 ... Quartz crystal | crystallization vibrator as a piezoelectric device, 10 ... Quartz vibrating piece as a mesa type piezoelectric vibrating piece, 11 ... Fixed part, 12 ... Vibrating part, 12b ... End part of one thin part side, 12c ... Other thin part Ends on the side, 13 ... One thin part, 14 ... The other thin part, 15 ... One main surface, 16, 18 ... Excitation electrodes, 16b, 18b ... Ends on one thin part side, 16c, 18c ... End part on the other thin part side, 17 ... the other main surface, 20 ... package, 21 ... base part, 21a ... bottom face, 21b, 21c ... mount electrode, 21d, 21e ... external electrode, 22 ... lid part, 23 ... Junction.

Claims (3)

A mesa-type piezoelectric vibrating piece having a vibrating portion having an excitation electrode and a thin portion having a thickness smaller than that of the vibrating portion at both ends of the vibrating portion,
One of the thin portions has a fixed portion fixed to the outside,
The dimension from the end of the vibrating part on the one thin part side having the fixed part to the end of the excitation electrode on the one thin part side is T1,
The dimension from the end of the vibration part on the other thin part side to the end of the excitation electrode on the other thin part side is T2,
When the wavelength of the bending vibration generated in the mesa-type piezoelectric vibrating piece is λ,
A mesa-type piezoelectric vibrating piece substantially satisfying a relational expression of T1-T2 = λ × m (where T2 = (2n−1) λ / 2, where m and n are natural numbers).   2. The mesa piezoelectric vibrating piece according to claim 1, wherein n in the relational expression is 1.   3. A mesa-type piezoelectric vibrating piece according to claim 1 and a package that houses the mesa-type piezoelectric vibrating piece in an airtightly sealed interior, and fixes the fixing portion of the mesa-type piezoelectric vibrating piece inside the inside. A piezoelectric device comprising:

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