JP2011108301A - Head gimbal assembly and method of manufacturing head slider - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To increase reliability in electrical continuity between a connection pad of a head slider and a connection terminal of a suspension in a test of the head slider. <P>SOLUTION: The suspension for slider DET includes a holder for holding the head slider. The holder includes a clamp for holding the head slider and stoppers 59a. 59b for supporting the head slider. The stoppers are arranged separately with the connection terminals 53a to 53f of MEMS. Accordingly, the stoppers do not contribute to the signal transmission of the head slider. Stopper surfaces are covered with gold layers similar to surfaces of the connection terminals. Thus, a change in the pressing amount of the connection terminals at the mounting of the head slider is reducible, and a change in a contact load to the connection pad of the head slider of the connection terminal is reducible. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a head gimbal assembly and a method of manufacturing a head slider, and more particularly to manufacturing of a head slider using a suspension to which the head slider can be attached and detached.

  As a disk drive, there are known apparatuses that use various types of media such as an optical disk, a magneto-optical disk, and a flexible magnetic disk. Among them, a hard disk drive (HDD) is used as a storage device of a computer. It has become widespread and has become one of the storage devices that are indispensable in current computer systems. In addition to the computer, the use of HDDs such as a moving image recording / reproducing apparatus or a car navigation system is increasing more and more due to its excellent characteristics.

  The HDD includes a magnetic disk for storing data and a head slider for accessing the magnetic disk. The head slider has a head element portion that reads and / or writes data from and to the magnetic disk, and a slider on which the head element portion is formed. The head element section includes a recording element that converts an electric signal into a magnetic field according to recording data on the magnetic disk and / or a reproducing element that converts a magnetic field from the magnetic disk into an electric signal.

  The HDD further includes an actuator that moves the head slider to a desired position on the magnetic disk. The actuator is driven by a voice coil motor (VCM), and rotates about the rotation axis to move the head slider in the radial direction on the rotating magnetic disk. As a result, the head element unit can access a desired track formed on the magnetic disk and read / write data.

  The actuator includes an elastic suspension, and the head slider is fixed to the suspension with an adhesive. The pressure due to the viscosity of the air between the air bearing surface of the head slider facing the magnetic disk and the rotating magnetic disk balances with the pressure applied in the direction of the magnetic disk by the suspension. It is possible to ascend with a predetermined gap.

  In manufacturing the HDD, a test called a slider dynamic electric test (slider DET) is performed. In a typical slider DET, a head gimbal assembly (HGA), which is an assembly of a head slider and a suspension, is set in a test apparatus, and an actual read / write process is performed on a rotating magnetic disk. Thus, the flying characteristics and recording / reproducing characteristics of the head slider are evaluated.

  The HGA satisfying the specifications in the slider DET proceeds to the next manufacturing process. On the other hand, the HGA determined to be rejected is discarded. Therefore, when the head slider does not meet the specifications, the suspension to which the head slider is fixed is also discarded, resulting in a loss in manufacturing the HGA.

  In order to eliminate the loss of this suspension in the HGA manufacturing, a slider DET device in which a head slider can be attached and detached has been proposed (see, for example, Patent Document 1 and Patent Document 2). The slider DET device of Patent Document 1 has a suspension for the slider DET, and the suspension has a socket to which the head slider can be attached and detached. The socket is bonded and fixed to the suspension gimbal. The socket is a micro electro mechanical system (MEMS). Patent Document 2 discloses a suspension in which a hold mechanism for attaching and detaching a head slider is directly formed on a gimbal.

  By using the slider DET device with the head slider alone as described above, the head slider can be tested before being mounted on the suspension as a product, and the loss of the suspension due to the head slider failure is eliminated. Can do.

Special table 2004-53014 gazette JP 2007-12170 A

  The suspension disclosed in Patent Document 2 includes a connection terminal that comes into contact with the connection pad of the head slider, and a clamp that presses the head slider toward the connection terminal. The connection terminal has a spring property, and ensures physical contact and conduction between the head slider and the connection terminal. Moreover, it has a stopper on the same side as the connection terminal. The stopper holds and positions the head slider. Specifically, the head slider is held between a stopper and a clamp. The clamp presses the head slider toward the stopper, and the stopper contacts and supports the head slider.

  Compared with the structure in which the head slider is held by the connection terminal and the clamp, the stopper can hold the head slider in a more accurate position and posture. In addition, since all the connection terminals have spring properties, even when the head slider is inclined and inserted into the arrangement position, contact and conduction between all the connection terminals and the connection pads of the head slider are more reliably ensured. be able to.

  However, according to studies by the inventors, it has been found that the conventional hold structure has a problem as a suspension structure used for DET. In DET, many head sliders are attached to and detached from one suspension. In general, the tips of the connection terminals are covered with a gold plating layer to prevent conduction and oxidation with the connection pads of the head slider. The gold plating layer of the connection terminal is worn when the head slider is attached or detached.

  Less wear due to a single attachment / detachment. However, by repeatedly attaching and detaching many head sliders, the amount of wear of the gold plating layer becomes so large that it cannot be ignored. On the other hand, the surface layer of the stopper in the conventional structure is made of stainless steel, which is a gimbal material, or silicon, which is a MEMS material, as in the interior. These materials are harder than gold, and the amount of wear due to the attachment / detachment of the head slider is smaller than that of gold.

  As described above, the contact characteristic between the connection terminal of the suspension and the connection pad of the head slider decreases due to the difference between the wear amount of the connection terminal and the wear amount of the stopper due to repeated mounting and dismounting of the head slider. It becomes impossible to ensure continuity. Replacing the suspension with a new one can provide the proper contact characteristics, but in order to reduce the waste of the suspension, it is desirable to test as many head sliders as possible with a single suspension. .

  Therefore, there is a demand for a technique that can reduce a decrease in contact characteristics (conduction characteristics) between the connection terminals of the suspension and the connection pads of the head slider due to repeated mounting and dismounting of the head slider.

  A head gimbal assembly according to an aspect of the present invention includes a head slider and a suspension that holds the head slider. The suspension is in contact with a plurality of connection pads of the head slider to perform signal transmission, a plurality of connection terminals having spring properties, and a clamp that presses the head slider toward the plurality of connection terminals; And a stopper that is provided separately from the plurality of connection terminals, supports the head slider against the pressing force of the clamp, and holds the head slider between the clamp. The stopper has an inside and a surface layer portion formed on the outside of the inside and more easily worn than the inside. Thereby, in the test of the head slider, it is possible to improve the reliability of conduction between the connection pad of the head slider and the connection terminal of the suspension.

  Preferably, the surface layer portion is formed of the same metal as the contact portions of the plurality of connection terminals. Thereby, formation of a stopper is easy and the difference in the abrasion amount of a connection terminal and a stopper can be reduced effectively. Preferably, all of the plurality of connection terminals have a spring property. Thereby, the reliability of conduction between the connection pad and the connection terminal can be further improved.

  Preferably, there are two stoppers formed at both ends of the plurality of connection terminals, and a surface layer portion of each of the two stoppers is formed of the same metal as a contact portion of the plurality of connection terminals. Accordingly, the head slider can be stably held, the stopper can be easily formed, and the difference in the wear amount between the connection terminal and the stopper can be effectively reduced.

  Preferably, the clamp has two convex portions that come into contact with and press against an end surface of the head slider. Thereby, it is possible to stably press the head slider. Preferably, each of the plurality of connection terminals is formed at a first tip curve portion and a tip of the first tip curve portion, and a second tip curve smaller than the first tip curve portion. Part. Thereby, the reliability of conduction between the connection pad and the connection terminal can be further improved.

  Preferably, it further includes a guide portion that approaches the inside as it proceeds in a direction from the clamp toward the plurality of connection terminals, and a relief portion between the guide portion and the plurality of connection terminals. As a result, the head slider can be held in an appropriate orientation more reliably. Preferably, the head slider further includes a guide portion that approaches the inside as the head slider moves in a direction perpendicular to the flying surface of the head slider. As a result, the head slider can be held in an appropriate orientation more reliably.

  Another aspect of the present invention is a method for manufacturing a head slider. In this manufacturing method, the clamp is moved to widen the space for arranging the head slider. The head slider is disposed in the space. The head slider is moved toward a plurality of connection terminals and stoppers. The head slider is brought into contact with the surface layer of the stopper and stopped. The surface layer portion is formed outside the inside of the stopper and is more easily worn than the inside. The head slider is held in a state where the plurality of connection terminals and the plurality of connection pads of the head slider are in contact with each other between the clamp and the stopper. The head slider is tested with the head slider held on the suspension. Thereby, in the test of the head slider, it is possible to improve the reliability of conduction between the connection pad of the head slider and the connection terminal of the suspension.

  Preferably, the head slider is held in contact with the surface layer portion formed of the same metal as the contact portions of the plurality of connection terminals. Thereby, the difference in the wear amount of the connection terminal and the stopper can be effectively reduced. Preferably, the connection pad of the head slider is brought into contact with the plurality of connection terminals having a spring property. Thereby, the reliability of conduction between the connection pad and the connection terminal can be further improved.

  Preferably, the head slider is held between two stoppers formed at both ends of the plurality of connection terminals and the clamp, and a surface layer portion of the two stoppers is in contact with contact portions of the plurality of connection terminals. It is made of the same metal. Thereby, the difference in the wear amount of the connection terminal and the stopper can be effectively reduced.

  Preferably, the end surface of the head slider is pressed by two convex portions of the clamp. Thereby, it is possible to stably press the head slider. Preferably, each of the plurality of connection terminals is formed at a first tip curve portion and a tip of the first tip curve portion, and a second tip curve smaller than the first tip curve portion. The second end curved portion is worn by repeated contact with the connection pad of the head slider, and the internal metal of the connection terminal is exposed. Thereby, the reliability of conduction between the connection pad and the connection terminal can be further improved.

  Preferably, the head slider is moved along a guide portion that approaches inward as it proceeds in a direction from the clamp toward the plurality of connection terminals, and a relief portion between the guide portion and the plurality of connection terminals. It is inserted toward the plurality of connection terminals. As a result, the head slider can be held in an appropriate orientation more reliably. Preferably, the head slider is inserted and arranged in the space in a direction perpendicular to the air bearing surface, and the insertion is along a guide portion that approaches the inside as it advances in the insertion direction. As a result, the head slider can be held in an appropriate orientation more reliably.

  According to the present invention, in the test of the head slider, the reliability of conduction between the connection pad of the head slider and the connection terminal of the suspension can be improved.

In this embodiment, it is a flowchart which shows the manufacturing process of HGA and HDD containing the slider DET. In this embodiment, it is a figure which shows typically the whole structure of HGA in the slider DET. In this embodiment, it is a top view which shows the structure of MEMS typically. In this embodiment, it is a partially expanded view of the trailing side of MEMS and a head slider. In this embodiment, it is a figure which shows typically the function of a straight escape part. In this embodiment, it is a top view which shows typically the structure which has a concave relief part extended on the outer side of a hole. In this embodiment, it is a figure which shows typically the structure of MEMS which has a guide part in an up-down direction.

  Hereinafter, embodiments of the present invention will be described. In the drawings, the same components are denoted by the same reference numerals, and redundant description is omitted as necessary for the sake of clarity. In this embodiment, a hard disk drive (HDD) which is an example of a disk drive device will be described. This embodiment is characterized by a dynamic electric test (dynamic electric characteristic test: DET) in the manufacture of the head slider.

  A head slider in which a defect is found in the slider DET is discarded. A head slider can be attached to and detached from the suspension of this embodiment. For this reason, when a defect is found in the head slider in the slider DET, it is not necessary to discard the suspension together with the head slider. As a result, it is possible to prevent the suspension from being wasted due to a defect in the head slider, and to improve the yield in manufacturing the head gimbal assembly (HGA). The HGA is an assembly of a suspension and a head slider.

  The head slider that has passed the slider DET is removed from the suspension of the slider DET device, mounted on the suspension of the product, and then mounted on the HDD. In this specification, the HGA includes a suspension and a head slider assembly in the slider DET as well as a device mounted on the HDD.

  In a preferred embodiment of the present invention, the slider DET suspension has a holder for holding the head slider. This holder is composed of a micro electro mechanical system (MEMS). MEMS is a device in which mechanical elements and electronic circuit elements are formed on one silicon substrate, and has a movable structure formed by etching the silicon substrate. The present invention can also be applied to a slider DET that uses a suspension having a structure in which a gimbal holds a head slider.

  The MEMS of this embodiment has a clamp for holding the head slider. The head slider can be attached and detached by moving the clamp having spring characteristics by an external force. The MEMS of this embodiment has a stopper for supporting the head slider in addition to the clamp. The head slider is held between the clamp and the stopper. The clamp presses the head slider toward the stopper due to its springiness, and supports the head slider against which the stopper is pressed. The stopper does not have springiness and is inflexible. Therefore, the mounting position of the head slider is based on the contact position with the stopper.

  The stopper is provided separately from the connection terminal of the MEMS. Therefore, the stopper does not contribute to the signal transmission of the head slider. The connection terminal contacts the connection pad of the head slider. The connection terminals and the connection pads are conducted, and these transmit signals between the elements on the head slider and the amplifier circuit.

  In the MEMS of this embodiment, the connection terminal has a spring property. Since the connection terminal has a spring property, an appropriate contact load between the connection terminal and the connection pad of the head slider is generated, and appropriate connection between them can be ensured. By providing a stopper for holding the head slider separately from the connection terminal, any connection terminal can be provided with a spring property. In a preferred configuration, all connection terminals have a spring property.

  In order to obtain appropriate conduction between the connection terminal and the connection pad, the contact load between the connection terminal and the connection pad needs to be within an appropriate range. The contact load is determined by the displacement amount (push-in amount) of the connection terminal having spring properties. That is, it is determined by the difference between the initial position of the connection terminal tip before mounting the head slider on the MEMS and the position of the connection terminal tip after mounting the head slider (same as the position of the connection pad of the head slider). .

  As described above, in the head slider, the mounting position of the head slider is determined by the stopper. Therefore, the tip position of the connection terminal in contact with the head slider is also determined by the contact position between the stopper and the head slider. The displacement amount of the connection terminal is determined by the distance between the initial position and the contact position of the stopper with the head slider.

  The spring constant of the connection terminal does not change greatly due to repeated attachment / detachment of the head / slider, or slightly decreases due to repeated attachment / detachment of the head / slider. Therefore, in order to maintain the contact load within the desired range, it is necessary that the displacement amount of the connection terminal does not change greatly due to repeated attachment and detachment of the head slider, and is maintained within the desired range. .

  The tip of the connection terminal that contacts the connection pad of the head slider is made of metal in order to ensure electrical continuity. In order to prevent an increase in resistance due to oxidation, the tip of the connection terminal is usually covered with a gold layer. Typically, the gold layer is formed by plating. This gold layer is gradually worn by repeated contact with the connection pads of the head slider. If the head slider is attached and detached several times, the wear of the gold is insignificant. However, as many head sliders are tested, the amount of wear becomes a level that cannot be ignored.

  When the wear amount of the gold layer increases, it can adversely affect the contact load of the connection terminal. This is because the initial position of the connection terminal changes due to wear of the gold layer. When the head-slider contact position (head-slider support position) of the stopper is constant (no change) as in the conventional structure, the displacement amount due to mounting of the head-slider becomes small due to the initial position change of the connection terminal. For this reason, the contact load between the connection terminal and the connection pad of the head slider is reduced, and the conduction characteristics are deteriorated. This hinders proper slider DET testing.

  In the MEMS of this embodiment, the stopper surface is covered with a material that is more easily worn than the internal stopper body. Preferably, the stopper surface is covered with the same material as the surface of the connection terminal, and is typically covered with a gold layer. Similar to the surface of the connection terminal of the MEMS, the stopper surface is worn by repeated attachment and detachment of the head slider. Thereby, the change of the pushing amount of the connection terminal when the head slider is mounted can be reduced, and the change of the contact load of the connection terminal to the connection pad of the head slider can be reduced.

  As described above, the head slider becomes the object of the slider DET in the manufacturing process before being mounted on the HDD. In the slider DET, a head slider is mounted on a suspension for the slider DET to form an HGA, the HGA is set in the slider DET device, and actual read / write processing is performed on the rotating magnetic disk. Thus, the flying characteristics and recording / reproducing characteristics of the head slider are evaluated.

  Specifically, as shown in the flow chart of FIG. 1, first, a head slider is mounted on the prepared slider DET suspension to constitute an HGA (S11). The configured HGA is set in the slider DET device, and the slider DET is executed (S12). If the DET evaluation result in S12 is “error”, the head slider is removed from the suspension, and the head slider is discarded (S13). Thereafter, another new head slider is mounted on the suspension (S14), and the slider DET of the new head slider is performed (S12).

  When the evaluation result of the slider DET in the step S12 is “pass”, the head slider is removed from the suspension, the head slider is fixed to the suspension as a product, and an HGA as a product is manufactured. Mounting (S15). Typically, the head slider is fixed to the suspension by an adhesive.

  The DET suspension will continue to be used for another head slider DET. The product HGA is assembled with an arm and a VCM coil, and together with them constitutes a head stack assembly (HSA). Parts such as an HSA, a magnetic disk, and a spindle motor are mounted on the base, and the top cover is fixed so as to cover the opening of the base. Thereafter, the control circuit board is mounted and the HDD is completed.

  Hereinafter, the suspension used in the slider DET of this embodiment will be described in detail. The upper view in FIG. 2 is a perspective view showing the entire HGA composed of the suspension 1 of the slider DET and the slider 2 mounted on the suspension 1. The lower diagram in FIG. 2 is an enlarged perspective view of a portion surrounded by a circle in the upper diagram. Each figure in FIG. 2 shows a surface facing the magnetic disk of the HGA.

  The suspension 1 includes a transmission wiring 11, a gimbal 12 (also referred to as a flexure), a load beam 13, a base plate 14, and a MEMS 15. The transmission wiring 11 transmits the signal of the element on the head slider 2. The number of lead wires of the transmission wiring 11 varies depending on the configuration of the head slider 2, and the transmission wiring 11 has six lead wires in the illustrated example. One end of each lead wire is connected to an internal circuit such as a head amplifier (not shown), and the other end of each lead wire is connected to a connection pad of the MEMS 15. The lead wire and the connection pad of the MEMS 15 are typically electrically connected by interconnection with solder balls or gold balls.

  The load beam 13 is made of stainless steel or the like and functions as a precise thin plate spring. The shape of the load beam 13 extends long in the direction perpendicular to the rotation direction, is thin and lightweight, and has a necessary rigidity (larger than the gimbal 12). Due to the elasticity of the load beam 13, a load that opposes the flying force of the head slider 2 is generated. The load and the pressure (levitation force) due to the viscosity of the air between the flying surface of the head slider 2 and the rotating magnetic disk are balanced, so that the head slider 2 floats at a desired height. .

  The gimbal 12 is fixed to the magnetic disk surface side of the load beam 13 by laser spot welding or the like. The gimbal 12 is made of, for example, stainless steel. The gimbal 12 has desired elasticity and is deformable. A tongue-like gimbal tongue is formed at the front part of the gimbal 12, and the MEMS 15 is fixed thereon. The MEMS 15 includes a movable part and a non-moving part, and a part of the non-moving part is bonded to the gimbal tongue.

  The gimbal tongue can tilt the MEMS 15 and the head slider 2 held therein in the pitch direction or the roll direction, and exhibits high tracking performance of the magnetic disk. The design of the suspension 1 except for the MEMS 15 can be the same as the suspension mounted on the HDD, or can be designed exclusively for the slider DET.

  In this specification, the direction connecting the head slider 2 and the base plate 14 is the front-rear direction (X in FIG. 2), and the direction parallel to the ABS of the head slider and perpendicular to the front-rear direction is the left-right direction (FIG. 2). Y). The direction perpendicular to the X and Y directions is called Z. When the head slider 2 is flying above the magnetic disk, the circumferential direction is the front-rear direction and the radial direction is the left-right direction.

  Alternatively, the rotation direction of the HGA rotating on the magnetic disk is the left-right direction, and the direction connecting the rotation shaft (P in FIG. 2) and the head slider 2 is the front-rear direction. These are directions perpendicular to each other in a plane parallel to the main surface of the suspension 1 (surface facing the magnetic disk). The head slider 2 is on the front side with respect to the base plate 14, and the base plate 14 is on the rear side of the head slider 2. The direction connecting the head slider 2 and the magnetic disk is the Z direction.

  The head slider 2 is held by the MEMS 15 in the suspension 1. An upper view of FIG. 3 is a plan view showing the structure of the MEMS 15, and a lower view is a plan view showing the MEMS 15 and the head slider 2 held by the MEMS 15. FIG. 3 illustrates the surface facing the magnetic disk. The MEMS 15 includes a clamp 51, clamp springs 52a and 52b, connection terminals 53a to 53f, transmission lines 54a to 54f, connection pads 55a to 55f, limiter bars 56a and 56b, stoppers 59a and 59b, and a fixing main body 58. is doing. As shown in the lower diagram of FIG. 3, the head slider 2 is supported in the hole 57 of the MEMS 15. In the lower diagram of FIG. 3, the clamps 51 in both the initial position and the hold position are shown. The fixed main body 58 is bonded to the gimbal 12.

  In the MEMS 15, a metal layer for signal transmission is formed on a silicon substrate having a shape formed by etching. Typically, this metal is gold and is formed by plating. The MEMS 15 can be manufactured by using a semiconductor manufacturing technique. The head slider 2 is located in the hole 57 and is held between the stoppers 59 a and 59 b and the clamp 51.

  The clamp 51 is on the rear side (leading side) of the head slider 2 (hole 57), and the stoppers 59a and 59b and the connection terminals 53a to 53f are on the front side (trailing side) of the head slider 2. The clamp springs 52 a and 52 b of the present embodiment, which are a part of the movable part, are on the left and right sides of the head slider 2. They extend in the front-rear direction while bending, and are elastic in the front-rear direction. The clamp 51 is coupled to the clamp springs 52a and 52b, and the clamp springs 52a and 52b attract the clamp 51 to the head slider 2 side by its elastic force. Therefore, the direction of the clamping force by the clamp 51 is the front-rear direction.

  The head slider 2 is mounted by moving the clamp 51 rearward (in the direction away from the stoppers 59a and 59b and the connection terminals 53a to 53f, the leading side) by an external force and holding it in the expanded hole 57 with a suction chuck. The head slider 2 is disposed. The clamp 51 is moved in parallel forward (in the direction approaching the stoppers 59a and 59b and the connection terminals 53a to 53f, the trailing side), and the clamp 51 and the stoppers 59a and 59b hold the head slider 2. To remove the head slider 2, the clamp 51 is moved backward in a state where the head slider 2 is attracted to the suction chuck, and the head slider 2 is taken out from the hole 57.

  The mounting method of the head slider 2 will be described more specifically. When the head slider 2 is disposed in the expanded hole 57, the clamp 51 is moved toward the head slider 2 by the contraction force of the clamp springs 52a and 52b. The clamp 51 has two convex portions 511 a and 511 b on the end surface facing the head slider 2 on the surface facing the head slider 2. These convex portions 511 a and 511 b abut against the leading end surface 21 (rear end surface) of the head slider 2 and press the leading end surface 21.

  The head slider 2 moves forward together with the clamp 51, and its trailing end face 22 contacts the connection terminals 53a to 53f. The head slider 2 moves further forward and pushes in the connection terminals 53a to 53f, and the trailing end face 22 contacts the stoppers 59a and 59b. The head slider 2 (shrinkage of the clamp springs 52a and 52b) stops due to contact with the stoppers 59a and 59b, and the head slider 2 is held between the stoppers 59a and 59b and the clamp 51.

  The clamp 51 has two convex portions 511 a and 511 b on the end surface facing the head slider 2, and these convex portions 511 a and 511 b contact and press the leading end surface 21. By pushing the head slider 2 with the two convex portions 511a and 511b, the head slider 2 can be pushed straight forward. Depending on the design, there may be only one protrusion on the clamp.

  A center position in the left-right direction of the leading end surface 21 exists between the positions where the two convex portions 511 a and 511 b come into contact with the leading end surface 21 of the head slider 2. In the MEMS 5 having a left-right symmetric structure, the convex portions 511 a and 511 b are formed at positions symmetrical with respect to the center in the left-right direction of the pressing surface of the clamp 5. In order to make the inclination of the head slider 2 as small as possible, the dimensions of the projections 511a and 511b in the front-rear direction are the same. The surfaces of the convex portions 511a and 511b are preferably convex curved surfaces so that the contact points of the convex portions 511a and 511b with the head slider 2 are kept constant.

  The connection terminals 53a to 53f are arranged so as to be separated from each other in the left-right direction, and obtain electrical connection (conduction) by contacting the connection pads of the head slider 2. Transmission lines 54 a to 54 f connect the connection terminals 53 a to 53 f and the connection pads 55 a to 55 f of the MEMS 5. The connection pads 55 a to 55 f and the transmission lines 54 a to 54 f are formed on the fixed main body 58. As described above, the connection pads 55a to 55f are connected to the lead wires of the transmission wiring, and the signals of the head slider 2 such as the read signal and the write signal are the connection terminals 53a to 53f, the connection pads 55a to 55f, Transmission lines 54a to 54f transmit.

  All of the connection terminals 53a to 53f of this embodiment have a spring property. Thus, it is preferable that all the connection terminals of the MEMS have a spring property. In a suspension in which a part of the connection terminal has a stopper function, when the head slider is moved by the clamp in a tilted posture, it is fixed between the connection terminal and the clamp in the tilted posture, This is because there is an increased possibility that the contact of the head slider with the connection pad will be insufficient.

  The upper part of FIG. 4 is a partially enlarged view of the trailing side of the MEMS 5 and the head slider 2. The head slider 2 is shown in the holding position in the MEMS 5, but the connection terminals 53a to 53f are shown in their initial positions. Accordingly, a part of the connection terminals 53 a to 53 f is drawn so as to overlap the head slider 2. The connection terminals 53 a to 53 f are in contact with connection pads 23 a to 23 f formed on the trailing end face 22 of the head slider 2.

  As described above, the connection terminals 53a to 53f having spring properties in the front-rear direction are pushed in from the initial position by the head slider 2 and contract. For this reason, the connection terminals 53a to 53f press the connection pads 23a to 23f of the head slider 2, and a contact load exists. Due to this contact load, appropriate contact and conduction between the connection terminals 53a to 53f and the connection pads 23a to 23f are obtained. The spring constants of the connection terminals 53a to 53f may be different, but are preferably the same.

  The trailing end face 22 of the head slider 2 is in contact with and pressed against the stoppers 59a and 59b. The stoppers 59a and 59b are not pushed by the head slider 2 (without deformation), and the position of the slider facing surface is the stop position of the head slider 2 (trailing end surface 22). The stoppers 59a and 59b are preferably not deformed, but the deformation is not prohibited at all. For example, the stoppers 59a and 59b may have a spring property, but in the configuration, it is necessary to have a spring constant larger than that of the connection terminals 53a to 53.

  The initial positions of the contact points of the connection terminals 53a to 53f with the head slider 2 are closer to the clamp 51 than the stoppers 59a and 59b. That is, toward the clamp 51 (backward), the connection terminals 53a to 53f at the initial position protrude from the stoppers 59a and 59b. For this reason, the connection terminals 53a to 53f are pushed in and deformed until the moving head slider 2 stops at the stoppers 59a and 59b.

  In this preferred configuration, the stoppers 59a and 59b are formed at both ends of the row of connection terminals 53a to 53f. The stoppers 59a and 59b are preferably formed at these positions so as not to hinder the design and formation of the connection terminals 53a to 53f. In order to stably hold the head slider 2, it is preferable to support the head slider 2 by two stoppers. However, depending on the design, the stopper may be disposed between the connection terminals. Further, the stopper does not have to be formed at a position along with the connection terminal. Although the MEMS preferably has a plurality of stoppers, a MEMS having only one stopper is not excluded from the present invention.

  The lower diagram of FIG. 4 is a diagram showing the structure of the tip of the connection terminal 53a. The other connection terminals 53b to 53f have the same structure. The connection terminal 53a has a silicon layer 531 and a gold layer 532 thereon. An oxide insulating layer is formed between the gold layer 532 and the silicon layer 531 but is not shown. The gold layer 532 protrudes from the silicon layer 531, and the tip of the connection terminal 53 a is composed of the gold layer 532. Therefore, the contact point of the connection terminal 53 a is constituted by the gold layer 532, and the tip of the gold layer 532 comes into contact with the connection pad 23 a of the head slider 2.

  As shown in the upper diagram of FIG. 4, the surface layers of the stoppers 59a and 59b are gold layers 592a and 592b formed on the silicon layers 591a and 591b of the main body. The trailing end face 22 of the head slider 2 is in contact with the gold layers 592a and 592b, and the gold layers 592a and 592b support the head slider 2. In the illustrated configuration example, the gold layers 592a and 592b are in contact with the connection pads 23a and 23f on the trailing end face 22.

  The gold layers 592a and 592b may be in contact with the slider body. Although an oxide insulating layer is formed between the silicon layers 591a and 591b and the gold layers 592a and 592b, it is not shown. Although the stoppers 59a and 59b have the gold layers 592a and 592b, they function only as a reference for holding and positioning the head slider 2 and do not contribute to signal transmission.

  As described above, since the contact points of the stoppers 59a and 59b with the head slider 2 are made of gold, the wear amount of the connection terminals 53a to 53f and the wear amount of the stoppers 59a and 59b can be brought close to each other. For this reason, the change in the contact load of the connection terminals 53a to 53f due to repeated mounting and dismounting of the head slider can be reduced.

  The contact surfaces of the stoppers 59a and 59b are preferably made of the same material as the contact surfaces of the connection terminals 53a to 53f. Thereby, the manufacturing efficiency of MEMS5 can be raised and the amount of wear of stoppers 59a and 59b and connection terminals 53a-53f can be brought close. However, the contact surfaces (surfaces) of the stoppers 59a and 59b may be formed of another material having a larger wear amount than the silicon of the main body. For example, the contact surfaces of the stoppers 59a and 59b may be formed of a metal that is relatively easy to wear.

  As shown in the lower part of FIG. 4, the tip of the connection terminal 53a has a two-stage structure. Specifically, the connection terminal 53a has a first tip bend 533 and a second tip bend 534 at the tip. The second tip curved portion 534 is smaller than the first tip curved portion 533. The first tip curved portion 533 and the second tip curved portion 534 are part of the gold layer 532. The second tip curved portion 534, which is a minute protrusion on the first tip curved portion 533, is worn and disappears by repeatedly attaching and detaching the head slider. Thereby, the surface of the gold layer 532 is removed and the inside thereof is exposed.

  In manufacturing the gold layer 532, a high resistance layer may be formed on the surface thereof. The minute protrusions 534 are worn by contact with the contact pads 23a of the head slider, so that the inside of the gold layer 532 is exposed, and appropriate conduction between the connection terminals 53a and the contact pads 23a can be obtained. After the second tip curved portion 534 is removed, the curved surface of the surface of the first tip curved portion 533 comes into contact with the contact pad 23a, so that good contact and conduction can be obtained.

  It is important that the second tip bend 534 is more easily worn than the first tip bend 533. Therefore, it is preferable that the radius of curvature of the second tip curved portion 534 is smaller than the radius of curvature of the first tip curved portion 533. As a result, the surface pressure is increased and the second tip curved portion 534 is easily worn. Preferably, the radius of curvature of the second tip curved portion 534 is ¼ or less of the radius of curvature of the first tip curved portion 533. As described above, the other connection terminals 53b to 53f have the same structure. Thus, it is preferable that all the connection terminals 53a to 53f have the same two-stage structure.

  As shown in the upper diagram of FIG. 4, the MEMS 5 includes guide portions 571 a and 571 b that define portions of the hole 57 near the stoppers 59 a and 59 b on the left and right side walls of the hole 57, and a straight relief portion that continues to the front side thereof. 572a and 572b. The guide portions 571a and 571b are inclined inward (inside the hole 57) when viewed in a direction (forward direction) from the clamp 51 toward the connection terminals 53a to 53f (stoppers 59a and 59b). Due to the guide portions 571a and 571b, the dimension (width) of the hole 57 in the left-right direction decreases as it approaches the connection terminals 53a to 53f, and the hole 57 (inner wall) is tapered.

  The guide portions 571a and 571b guide the head slider 2 inserted toward the connection terminals 53a to 53f in the left-right direction so that the connection pads 23a to 23f of the head slider 2 are in contact with the connection terminals 53a to 53f. To do. Straight relief portions 572a and 572b between the guide portions 571a and 571b and the connection terminals 53a to 53f prevent the head slider 2 from being fixed in an inclined posture in the left-right direction.

  FIG. 5 is a diagram schematically showing the function of the straight relief portions 572a and 572b. The MEMS shown in the upper part of FIG. 5 does not have the straight relief portions 572a and 572b, that is, the guide portions 571a and 571b continue to the stoppers 59a and 59b. The lower diagram shows the MEMS 5 of the present embodiment shown in FIG. 4 and includes straight relief portions 572a and 572b between the stoppers 59a and 59b and the guide portions 571a and 571b.

  As shown in the lower diagram of FIG. 5, in the configuration without the straight relief portions 572a and 572b, when the head slider 2 is inserted toward the stoppers 59a and 59b in an inclined posture, the head slider 2 There is a possibility that the head slider 2 is fixed with one end contacting one of the guide portions 571a and 571b and the other end contacting one of the stoppers 59a and 59b.

  On the other hand, in the configuration of the present embodiment shown in the upper diagram of FIG. 5, the head slider 2 is inserted up to the two stoppers 59a and 59b by the straight relief portions 572a and 572b without stopping in the middle. . Thereby, the connection pads 23a to 23f of the head slider 2 and the connection terminals 53a to 53f can be appropriately brought into contact with each other regardless of the posture in the plane when the head slider 2 is inserted.

  The shape of the relief portion formed on the stopper side of the guide portion may be a shape different from the linear shape. The escape portion is formed on the same or outer side as the innermost end of the guide portion. FIG. 6 shows a configuration having concave relief portions 573 a and 573 b extending outside the hole 57. The lower view in FIG. 6 is an enlarged view of the guide portion 571b and the escape portion 573b. The guide part 571a and the escape part 573a have the same structure, and are symmetrical with the guide part 571b and the escape part 573b.

  In this configuration, the escape portion 573b is formed on the connection terminal side continuously with the guide portion 571b. On the opposite side of the hole 57, similarly to the escape portion 573b, a concave escape portion 573a is formed which is continuous with the guide portion 571a and spreads outside the hole 57. Thus, the relief portion is formed on the same side as the stopper side end (front end) of the taper portion or on the outer side. Thereby, it is possible to prevent the edge of the head slider 2 from coming into contact with the side wall of the hole 57 and stopping before the stopper.

  The guide portion preferably has a tapered shape that goes toward the inside of the hole 57 as it approaches the stoppers 59a and 59b, like the guide portions 571a and 571b, but may have a different inclined shape. For example, if the guide portion has a structure (inclined structure) in which the gap with the slider 2 gradually decreases toward the terminal, the guide portion has a curved inclined surface instead of the flat surface exposed in the hole 57. Also good. Further, it is preferable to have the guide portion and the relief portion on both the left and right sides, but having the guide portion and the relief portion on only one of them can also contribute to proper positioning of the head slider 2.

  When the head slider 2 is mounted, the head slider 2 is moved in the vertical direction and inserted into the hole 57, and then the head slider 2 is moved in the front-rear direction to come into contact with the stoppers 59a and 59b. The guide portions 571a and 571b are guides for movement in the front-rear direction. In a preferred configuration, the MEMS has a guide portion for moving the head slider 2 in the vertical direction (direction perpendicular to the slider air bearing surface).

  FIG. 7 is a diagram schematically showing the structure of the MEMS having the guide portions 574a and 574b in the vertical direction. 7 is a plan view of the MEMS 5, and the lower view is a cross-sectional view of the hole 57. The guide portions 574a and 574b are inclined, and the width of the hole 57 (the distance between the left and right side walls) is gradually reduced in the insertion direction of the head slider 2. The guide portions 574a and 574b are formed on the left and right inner walls of the hole 57, and are inclined downward when viewed in the insertion direction of the head slider 2.

  This inclination is preferably formed by anisotropic etching. Thereby, an inclined surface can be formed easily and efficiently. Anisotropic etching is an etching method that utilizes the phenomenon that the etching rate by an etchant differs depending on the crystal plane (crystal axis direction) of silicon. For example, a single crystal silicon can be used to form an inclined surface of approximately 55 ° by etching in the <100> orientation.

  The head slider 2 can be guided toward the center of the hole 57 by the guide portions 574a and 574b even if the head slider 2 is inserted at a position shifted in the left-right direction. Further, as shown in the lower diagram of FIG. 7, it is preferable that relief portions 575 a and 575 b are formed on the lower side of the guide portions 574 a and 574 b (back in the head slider insertion direction). The escape portions 575a and 575b are formed continuously below the guide portions 574a and 574b. In this configuration, the escape portions 575a and 575b are formed on the same side as the stopper side ends (front ends) of the guide portions 574a and 574b or on the outer side. Thereby, it is possible to prevent the head slider 2 from stopping on the guide portions 574a and 574b.

  As shown in FIG. 7, the escape portions 575a and 575b may have a shape different from the straight shape. For example, you may incline so that it may spread outside as it goes below. That is, the escape portions 575a and 575b may be inclined so as to be opposite to the guide portions 574a and 574b. The escape portion is formed on the same or outer side as the innermost end of the guide portion.

  The guide portions are preferably formed on the left and right inner walls of the hole 57, but the guide portions formed only on one inner wall can also contribute to the position correction of the head slider 2 in the insertion in the vertical direction. The guide portion preferably has a tapered shape toward the inside of the hole 57 as it goes downward as in the above-described inclinations 574a and 574b, but may have a different shape. For example, if the guide portion has a structure (inclined structure) in which the gap with the slider 2 gradually decreases downward, the guide portion has a curved surface (inclined surface) instead of the flat surface exposed in the hole 57. It may be.

  The MEMS 5 can include guide portions 574a and 574b together with or instead of the guide portions 571a and 571b in the movement of the head slider 2 in the front-rear direction. From the viewpoint of simple reciprocity in the structure, it is preferable to have only one direction guide portion. From the viewpoint of more reliable and accurate positioning of the head slider 2, it is preferable to have a guide portion in two directions.

  As mentioned above, although this invention was demonstrated taking preferable embodiment as an example, this invention is not limited to said embodiment. A person skilled in the art can easily change, add, and convert each element of the above-described embodiment within the scope of the present invention. The present invention is particularly useful for MEMS and HGAs having clamp springs on both the left and right sides of the head slider, but the present invention may be applied to MEMS and HGAs having other clamp spring structures. The shape of the clamp spring is not limited to the above shape.

  In the above preferred example, the head slider is fixed in the hole of the MEMS. However, it is possible to provide a tongue for mounting the head slider on the MEMS. However, in the manufacture of MEMS, it is necessary to process silicon to form a flat tongue. If there is unevenness or foreign matter adhering to the tongue / slider mounting surface during processing, it is difficult to hold the head / slider in the correct posture. Therefore, it is preferable to form a through hole in the MEMS, place the head slider on a gimbal that supports the MEMS through the through hole, and hold it in the through hole.

  A structure similar to the above-described MEMS can be formed on the gimbal. That is, a plurality of connection terminals, clamps and clamp springs are formed on the gimbal, and the head slider is attached to and detached from the gimbal tongue. In particular, the above structure is also effective when a structure for attaching and detaching the head slider to the gimbal is formed.

DESCRIPTION OF SYMBOLS 1 Suspension, 2 Head slider, 11 Transmission wiring, 12 Gimbal 13 Load beam, 14 Base plate 15 Micro electro mechanical system, 21 Leading end surface 22 Trailing end surface, 23a-23f Connection pad, 51 Clamp 52a, 52b Clamp spring, 53a to 55f Connection terminal, 54a to 54f Transmission line 55a to 55f Connection pad, 56a, 56b Limiter bar, 57 Hole 58 Fixed main body, 59a, 59b Stopper, 531 Silicon layer, 532 Gold layer 533 First Curved portion, 534 Second curved portion, 571a, 571b Guide portion 572a, 572b Straight relief portion, 573a Recessed relief portion 574a, 574b Guide portion, 575a, 575b Relief portion 591a, 591b Silicon layer, 592a, 59 b gold layer

Claims (16)

A head slider and a suspension for holding the head slider,
The suspension is
A signal is transmitted in contact with a plurality of connection pads of the head slider, a plurality of connection terminals having spring properties,
A clamp that presses the head slider toward the plurality of connection terminals;
A stopper provided separately from the plurality of connection terminals, supporting the head slider against the pressing force of the clamp, and holding the head slider between the clamp,
Have
The stopper has an inside and a surface layer portion that is formed on the outside of the inside and is more easily worn than the inside.
Head gimbal assembly. The surface layer portion is formed of the same metal as the contact portions of the plurality of connection terminals.
The head gimbal assembly according to claim 1. All of the plurality of connection terminals have a spring property,
The head gimbal assembly according to claim 1. Having two stoppers formed at both ends of the plurality of connection terminals;
The surface layer portion of each of the two stoppers is formed of the same metal as the contact portions of the plurality of connection terminals.
The head gimbal assembly according to claim 1. The clamp has two convex portions that contact and press against the end surface of the head slider.
The head gimbal assembly according to claim 1. Each of the plurality of connection terminals includes a first tip bend and a second tip bend formed at the tip of the first tip bend and smaller than the first tip bend. Have
The head gimbal assembly according to claim 1. 2. The head gimbal according to claim 1, further comprising: a guide portion that approaches an inner side as it proceeds in a direction from the clamp toward the plurality of connection terminals; and a relief portion between the guide portion and the plurality of connection terminals. ·assembly. A guide portion that approaches the inside as the head slider moves in a direction perpendicular to the flying surface of the head slider;
The head gimbal assembly according to claim 1. A method of manufacturing a head slider,
Move the clamp to widen the space to place the head slider,
Placing the head slider in the space;
Moving the head slider toward a plurality of connection terminals and stoppers;
The head slider is stopped by contacting the surface layer portion of the stopper, and the surface layer portion is formed outside the stopper, and is more easily worn than the inside.
In a state where the plurality of connection terminals and the plurality of connection pads of the head slider are in contact with each other between the clamp and the stopper, the head slider is held,
With the head slider held on the suspension, the head slider is tested.
Production method. Holding the head slider in contact with the surface layer portion formed of the same metal as the contact portions of the plurality of connection terminals;
The manufacturing method according to claim 9. Contacting the connection pads of the head slider with the plurality of connection terminals having spring properties;
The manufacturing method according to claim 9. The head slider is held between two stoppers formed at both ends of the plurality of connection terminals and the clamp, and the surface layer portion of the two stoppers is made of the same metal as the contact portions of the plurality of connection terminals. Formed,
The manufacturing method according to claim 9. The manufacturing method according to claim 9, wherein the end surface of the head slider is pressed by two convex portions of the clamp. Each of the plurality of connection terminals includes a first tip bend and a second tip bend formed at the tip of the first tip bend and smaller than the first tip bend. Have
The second tip bend is worn by repeated contact with the connection pad of the head slider and the internal metal of the connection terminal is exposed.
The manufacturing method according to claim 9. The head slider is moved along the guide portion that approaches the inner side as it proceeds in the direction from the clamp toward the plurality of connection terminals, and the relief portion between the guide portion and the plurality of connection terminals. Insert it toward the connection terminal,
The manufacturing method according to claim 9. The head slider is inserted and arranged in the space in a direction perpendicular to the air bearing surface, and the insertion is along a guide portion that approaches inward as it advances in the insertion direction.
The manufacturing method according to claim 9.

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