JP2008109538A - Crystal oscillator - Google Patents
Crystal oscillator Download PDFInfo
- Publication number
- JP2008109538A JP2008109538A JP2006292038A JP2006292038A JP2008109538A JP 2008109538 A JP2008109538 A JP 2008109538A JP 2006292038 A JP2006292038 A JP 2006292038A JP 2006292038 A JP2006292038 A JP 2006292038A JP 2008109538 A JP2008109538 A JP 2008109538A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- conductive adhesive
- extraction electrode
- crystal piece
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 82
- 238000000605 extraction Methods 0.000 claims abstract description 37
- 239000000853 adhesive Substances 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 230000001070 adhesive effect Effects 0.000 claims description 30
- 230000002093 peripheral effect Effects 0.000 claims description 18
- 230000005284 excitation Effects 0.000 claims description 14
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000010355 oscillation Effects 0.000 abstract 1
- 239000002184 metal Substances 0.000 description 4
- 238000003466 welding Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
本発明は例えば表面実装用とした水晶振動子(以下、表面実装振動子とする)を技術分野とし、特に小型化に対応して保持強度を高めた水晶片の電極構造に関する。 The present invention relates to, for example, a crystal resonator for surface mounting (hereinafter referred to as a surface mount resonator) in the technical field, and more particularly to an electrode structure of a crystal piece with increased holding strength corresponding to downsizing.
(発明の背景)
表面実装振動子は小型・軽量であることから、特に携帯型の電子機器に周波数や時間の基準源として採用される。近年では、小型化が浸透し、これに伴い、水晶片自体を小さくすることが求められている。例えばディファクトスタンダード(既成規格)での周波数帯が26MHzの2025サイズ(外形寸法が2×2.5mm)では水晶片は概ね0.8×0.6mmとなる。
(Background of the Invention)
Since surface-mounted resonators are small and light, they are used as frequency and time reference sources, especially in portable electronic devices. In recent years, miniaturization has permeated, and accordingly, it has been required to reduce the size of the crystal piece itself. For example, in a 2025 size (outer dimension is 2 × 2.5 mm) with a frequency band of 26 MHz in the de facto standard (an established standard), the crystal piece is approximately 0.8 × 0.6 mm.
(従来技術の一例)
第4図は一従来例を説明する表面実装動子の図で、同図(a)は断面図、同図(b)はカバー3を除く平面図である。
(Example of conventional technology)
FIG. 4 is a view of a surface mount moving element for explaining one conventional example. FIG. 4 (a) is a sectional view and FIG. 4 (b) is a plan view excluding the cover 3. FIG.
表面実装動子は平面外形を矩形状として、実装基板としての容器本体1に水晶片2を収容し、カバー3を被せて密閉封入してなる。容器本体1は凹状とした積層セラミックからなり、内底面の例えば一端部両側に水晶端子4を有する。容器本体1の外底面には外部端子5を有し、積層面及び側面を経て水晶端子4と電気的に接続する。水晶端子4は矩形状として0.1×0.08mmとする。 The surface mounting moving element has a rectangular planar outer shape, a crystal piece 2 is accommodated in a container body 1 as a mounting substrate, and a cover 3 is covered and hermetically sealed. The container body 1 is made of a laminated ceramic having a concave shape, and has crystal terminals 4 on both sides of, for example, one end of the inner bottom surface. The container body 1 has an external terminal 5 on the outer bottom surface, and is electrically connected to the crystal terminal 4 through the laminated surface and the side surface. The crystal terminal 4 has a rectangular shape of 0.1 × 0.08 mm.
水晶片2は例えばATカットとして矩形状とし、両主面に励振電極6を有する。励振電極6からは外周部となる一端部両側に引出電極7を延出する。引出電極7は励振電極6から延出した第1引出部7aと、これに接続した一端部両側の保持部としての第2引出部7bとからなる。第2引出部7bは端面を経て水晶片2の反対面に折り返して形成される第3引出部(折返部)7cを有する。第2及び第3引出部7(bc)は同一形状とする。励振電極6及び引出電極7は例えばCrを下地電極としてAuを主電極とする。 The crystal piece 2 is rectangular, for example, as an AT cut, and has excitation electrodes 6 on both main surfaces. From the excitation electrode 6, the extraction electrode 7 is extended on both sides of one end portion which is an outer peripheral portion. The extraction electrode 7 includes a first extraction portion 7a extending from the excitation electrode 6 and a second extraction portion 7b as a holding portion on both sides of one end connected to the first extraction portion 7a. The 2nd drawer | drawing-out part 7b has the 3rd drawer | drawing-out part (folding part) 7c formed by folding up to the opposite surface of the crystal piece 2 through an end surface. The second and third lead portions 7 (bc) have the same shape. For example, the excitation electrode 6 and the extraction electrode 7 have Cr as a base electrode and Au as a main electrode.
そして、水晶端子4と同程度の大きさとした水晶片1の一主面における一端部両側の第2及び第3引出部7(bc)が導電性接着剤8によって固着される。導電性接着剤8は第2引出部7bから、容器本体1の例えば長さ方向の内底面にまたがって塗布される。これにより、円状に塗布される導電性接着剤の中心は容器本体の内壁よりになる。換言すると第2及び第3引出部7(bc)の中央部よりも内壁よりになる。 And the 2nd and 3rd drawer | drawing-out part 7 (bc) of the one end part in the one main surface of the crystal piece 1 made into the magnitude | size comparable as the crystal terminal 4 is fixed by the conductive adhesive 8. FIG. The conductive adhesive 8 is applied over the inner bottom surface of the container body 1 in the length direction, for example, from the second lead portion 7b. Thereby, the center of the conductive adhesive applied in a circular shape is from the inner wall of the container body. In other words, the inner wall is closer to the center of the second and third lead portions 7 (bc).
カバー3は金属として、例えばシーム溶接によって外周が開口端面上に接合する。なお、水晶端子4とした接続する外部端子5は一組の対角部に、金属カバー3は他組の対角部のアース用の外部端子5に接続する。また、容器本体1の開口端面上には溶接用の厚膜を含む図示しない金属リングを有する。
(従来技術の問題点)
しかしながら、上記構成の表面実装振動子では、さらなる小型化に際し、容器本体1の内積も小さくなる。このことから、例えば導電性接着剤8は水晶片2の外側にははみ出さず、水晶端子4と容器本体1の内底面間のみとし、小型化を計る。逆に言えば、水晶片1を大きくすることが考えられた。しかし、この場合には、導電性接着剤8の量が少なくなって接合強度が低下する問題があった。
(Problems of conventional technology)
However, in the surface-mounted resonator having the above-described configuration, the inner product of the container body 1 is reduced when the size is further reduced. For this reason, for example, the conductive adhesive 8 does not protrude outside the crystal piece 2 but only between the crystal terminal 4 and the inner bottom surface of the container main body 1 to reduce the size. In other words, it was considered to enlarge the crystal piece 1. However, in this case, there is a problem that the amount of the conductive adhesive 8 decreases and the bonding strength decreases.
(発明の目的)
本発明は水晶片の実装基板(容器本体)に対する接合強度を高めた水晶振動子を提供することを目的とする。
(Object of invention)
An object of the present invention is to provide a crystal resonator in which the bonding strength of a crystal piece to a mounting substrate (container body) is increased.
本発明は、特許請求の範囲(請求項1)に示したように、両主面の励振電極から引出電極の延出した外周部を導電性接着剤によって実装基板の水晶端子上に固着してなる水晶振動子において、前記引出電極の延出した水晶片の外周部に平面方向の凹凸を設けた構成とする。 According to the present invention, as shown in the claims (Claim 1), the outer peripheral portion where the extraction electrode extends from the excitation electrode on both main surfaces is fixed to the crystal terminal of the mounting substrate by the conductive adhesive. In the crystal resonator according to the present invention, a planar unevenness is provided on the outer peripheral portion of the crystal piece from which the extraction electrode extends.
このような構成であれば、引出電極の延出した水晶片の外周部に凹凸を設けたので、実質的な表面積を大きくする。したがって、導電性接着剤による接着強度を高められる。 With such a configuration, the surface area of the crystal piece from which the extraction electrode is extended is increased, so that the substantial surface area is increased. Therefore, the adhesive strength by the conductive adhesive can be increased.
(実施態様項)
本発明の請求項2では、請求項1において、前記導電性接着剤は前記水晶片の外周内に塗布される。これにより、実装基板の底面面積を有効活用して、小型化を促進する。
(Embodiment section)
In claim 2 of the present invention, in claim 1, the conductive adhesive is applied to the outer periphery of the crystal piece. This effectively utilizes the bottom surface area of the mounting substrate to promote downsizing.
同請求項3では、請求項1において、前記導電性接着剤は前記引出電極の延出した水晶片の外周部の中央部を中心として円状に塗布される。これにより、円状に塗布される導電性接着剤の水晶片の外周からのはみ出しを少なくして、請求項2の構成を実現する。 In the third aspect of the present invention, in the first aspect, the conductive adhesive is applied in a circular shape around the center of the outer peripheral portion of the crystal piece from which the extraction electrode extends. Thereby, the protrusion of the conductive adhesive applied in a circular shape from the outer periphery of the crystal piece is reduced, and the configuration of claim 2 is realized.
同請求項4では、請求項1おいて、前記導電性接着剤は前記引出電極の延出した水晶片の外周部内に塗布される。これにより、水晶片の幅方向での電気的短絡を防止するとともに、中央領域(振動領域)への影響も少なく振動特性を良好に維持する。 In the fourth aspect of the present invention, in the first aspect, the conductive adhesive is applied to an outer peripheral portion of the crystal piece from which the extraction electrode extends. This prevents an electrical short circuit in the width direction of the crystal piece and maintains good vibration characteristics with little influence on the central region (vibration region).
同請求項5では、請求項1において、前記引出電極の延出した水晶片の外周部と前記水晶端子とは同一形状として平面視で同一位置として、前記導電性接着剤は前記水晶片の外周部と前記水晶端子との面内に塗布される。これにより、請求項1〜5の構成がさらに具体的になる。 In claim 5, the outer peripheral portion of the crystal piece from which the extraction electrode extends and the crystal terminal have the same shape and the same position in plan view, and the conductive adhesive is the outer periphery of the crystal piece. It is applied in the plane of the part and the crystal terminal. Thereby, the structure of Claims 1-5 becomes more concrete.
同請求項6では、請求項1において、前記引出電極は前記励振電極から延出した第1引出部と、前記第1引出部に接続して前記水晶片の外周部に設けられた折返部を有する第2引出部とからなる。これにより、請求項1での引出電極の構成がさらに明確になる。 In claim 6, in claim 1, the extraction electrode includes a first extraction portion extending from the excitation electrode, and a folded portion connected to the first extraction portion and provided on an outer peripheral portion of the crystal piece. And a second drawer portion. Thereby, the structure of the extraction electrode in Claim 1 is further clarified.
第1図は本発明の一実施形態を説明する表面実装動子の図で、同図(a)は断面図、同図(b)はカバーを除く平面図である。なお、前従来例と同一部分には同番号を付与してその説明は簡略又は省略する。 FIG. 1 is a view of a surface-mounted moving element for explaining an embodiment of the present invention. FIG. 1 (a) is a sectional view and FIG. 1 (b) is a plan view excluding a cover. In addition, the same number is attached | subjected to the same part as a prior art example, and the description is simplified or abbreviate | omitted.
表面実装動子は、前述したように、励振電極6から引出電極7の延出した水晶片2の一端部両側を、凹状とした容器本体1の内底面に設けられた水晶端子4に導電性接着剤8によって固着する。そして、容器本体1の開口端面に例えばシーム溶接によって金属カバー3を接合してなる。 As described above, the surface mount slider is electrically conductive to the crystal terminal 4 provided on the inner bottom surface of the container body 1 in which both ends of the crystal piece 2 from which the extraction electrode 7 extends from the excitation electrode 6 are concave. It is fixed by the adhesive 8. And the metal cover 3 is joined to the opening end surface of the container main body 1 by seam welding, for example.
水晶片2の引出電極7はここでも励振電極6から延出した第1引出部7aと一端部両側に設けられた折返し部7cを有する第2引出部7bからなる。そして、第2図に示したように、第2引出部7bが延出した一端部両側の一主面には平面方向例えば二次元方向(縦横)に凹凸を設ける。なお、第2図(a)は一部拡大平面図、同図(b)はA−A断面図である。第2図(a)中の着色部が凸部9aで、無着色部が凹部9bである。 The extraction electrode 7 of the crystal piece 2 is again composed of a first extraction portion 7 a extending from the excitation electrode 6 and a second extraction portion 7 b having folded portions 7 c provided on both sides of one end portion. And as shown in FIG. 2, the one main surface of the one end part side where the 2nd drawer | drawing-out part 7b extended is provided with an unevenness | corrugation in a planar direction, for example, a two-dimensional direction (vertical and horizontal). 2A is a partially enlarged plan view, and FIG. 2B is a cross-sectional view taken along the line AA. The colored part in FIG. 2 (a) is the convex part 9a, and the non-colored part is the concave part 9b.
これらは、例えば図示しない水晶ウェハの状態でフォトリソ技術を用いたエッチングによって、先ず、水晶片2の一端部両側となる一主面に凹凸形成する。次に、励振電極6及び引出電極7を形成する。この場合、第2引出部7bの折返部7cはスルーホールによって反対面に形成される。あるいは、水晶ウェハに凹凸を形成した後、個々の水晶片2に切断分割して、蒸着やスパッタによって励振電極6及び引出電極7を形成する。 These are first formed with concavo-convexities on one main surface on both sides of one end of the crystal piece 2 by etching using a photolithographic technique in a state of a crystal wafer (not shown), for example. Next, the excitation electrode 6 and the extraction electrode 7 are formed. In this case, the folded portion 7c of the second lead portion 7b is formed on the opposite surface by a through hole. Or after forming an unevenness | corrugation in a quartz wafer, it divides | segments and divides | segments into each crystal piece 2, and forms the excitation electrode 6 and the extraction electrode 7 by vapor deposition or sputtering.
そして、先ず、容器本体1の内底面に設けられた水晶端子4上に熱硬化型の導電性接着剤8を塗布する。ここでの水晶端子4は第2引出部7b(折返部7c)と同一形状とする。導電性接着剤8は水晶端子4の中央部を中心として円状とし、さらに水晶端子4の面内に塗布される。 First, a thermosetting conductive adhesive 8 is applied on the crystal terminal 4 provided on the inner bottom surface of the container body 1. Here, the crystal terminal 4 has the same shape as the second lead portion 7b (folded portion 7c). The conductive adhesive 8 has a circular shape centered on the center portion of the crystal terminal 4, and is further applied to the surface of the crystal terminal 4.
次に、水晶片2の一端部両側となる第2引出部及び折返部7(bc)を各水晶端子4に位置決めする。この場合、第2引出部及び折返部7(bc)は各水晶端子4に平面視で同一位置とする。これにより、導電性接着剤8は第2引出部及び折返部7(bc)の中央部を中心として円状に塗布される。さらに、導電性接着剤8は水晶片2の外周からはみ出すことなく、第2引出部及び折返部7(bc)の面内に塗布される。そして、導電性接着剤8を加熱して溶融し、水晶片2の一端部両側となる外周部を固着する。 Next, the second lead portion and the folded portion 7 (bc) on both sides of the one end portion of the crystal piece 2 are positioned on each crystal terminal 4. In this case, the 2nd drawer part and the folding | returning part 7 (bc) are made into the same position on each crystal terminal 4 by planar view. As a result, the conductive adhesive 8 is applied in a circular shape around the center of the second drawn-out portion and the folded portion 7 (bc). Furthermore, the conductive adhesive 8 is applied to the surface of the second drawn portion and the folded portion 7 (bc) without protruding from the outer periphery of the crystal piece 2. Then, the conductive adhesive 8 is heated and melted, and the outer peripheral portions that are both sides of one end of the crystal piece 2 are fixed.
このような構成であれば、引出電極7の延出した水晶片2の外周部である一端部両側は縦横の凹凸を有するので、実質的な表面積が大きくなる。したがって、水晶端子4に対する接着強度を高められる。また、導電性接着剤8は水晶片2の一端部両側の面内とするので、導電性接着剤8のはみ出しを排除して小型化を促進できる。そして、水晶片2の幅方向での導電性接着剤同士による電気的短絡を防止する。また、励振電極6の形成された振動領域とも離間するので、振動特性を良好に維持する。 With such a configuration, both sides of the one end portion, which is the outer peripheral portion of the crystal piece 2 from which the extraction electrode 7 extends, have vertical and horizontal irregularities, so that the substantial surface area increases. Therefore, the adhesive strength with respect to the crystal terminal 4 can be increased. Further, since the conductive adhesive 8 is in the plane on both sides of the one end portion of the crystal piece 2, it is possible to promote miniaturization by eliminating the protrusion of the conductive adhesive 8. And the electrical short by the conductive adhesives in the width direction of the crystal piece 2 is prevented. In addition, since the vibration region where the excitation electrode 6 is formed is also separated, the vibration characteristics are favorably maintained.
(他の事項)
上記実施形態では水晶片2は平板状としたが、例えば第3図(断面図)に示したように、厚みの小さい振動部とこれより厚みの大きい外周部とからなる逆メサ構造にも適用できる。この場合、厚みの大きい脚部の先端面が第2引出部7bとなって凹凸面となる。そして、逆メサ構造の場合は、引出電極7の延出する外周部の厚みが大きいので、凹凸の深さも大きくできる。したがって、外周部の脚幅も狭くして接着強度を維持できる。
(Other matters)
In the above embodiment, the crystal piece 2 has a flat plate shape. However, for example, as shown in FIG. 3 (cross-sectional view), the crystal piece 2 is also applied to an inverted mesa structure including a vibrating portion having a small thickness and an outer peripheral portion having a larger thickness. it can. In this case, the leading end surface of the leg portion having a large thickness becomes the second lead portion 7b and becomes an uneven surface. In the case of the inverted mesa structure, since the thickness of the outer peripheral portion where the extraction electrode 7 extends is large, the depth of the unevenness can be increased. Therefore, the leg width of the outer peripheral portion can be narrowed to maintain the adhesive strength.
また、凸部9aと凹部9bとの凹凸は縦横に配置したが、例えば第2引出電極が円状の場合等は放射状としてもよく、これらは任意に配置できる。また、実装基板としての容器本体1は凹状としたが、実装端子を有する平板状としてもよい。この場合は、凹状カバーを例えばガラス封止等によって接合される。 Moreover, although the unevenness | corrugation of the convex part 9a and the recessed part 9b was arrange | positioned vertically and horizontally, for example, when a 2nd extraction electrode is circular shape etc., it is good also as radial, These can be arrange | positioned arbitrarily. Moreover, although the container main body 1 as a mounting substrate is concave, it may be a flat plate having mounting terminals. In this case, the concave cover is joined by, for example, glass sealing.
1 容器本体、2 水晶片、3 カバー、4 水晶端子、5 外部端子、6 励振電極、7 引出電極、8 導電性接着剤、9a 凸部、9b 凹部。 DESCRIPTION OF SYMBOLS 1 Container body, 2 Crystal piece, 3 Cover, 4 Crystal terminal, 5 External terminal, 6 Excitation electrode, 7 Extraction electrode, 8 Conductive adhesive, 9a Convex part, 9b Concave part.
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006292038A JP2008109538A (en) | 2006-10-27 | 2006-10-27 | Crystal oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006292038A JP2008109538A (en) | 2006-10-27 | 2006-10-27 | Crystal oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2008109538A true JP2008109538A (en) | 2008-05-08 |
Family
ID=39442504
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006292038A Pending JP2008109538A (en) | 2006-10-27 | 2006-10-27 | Crystal oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2008109538A (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012115239A1 (en) * | 2011-02-25 | 2012-08-30 | 株式会社大真空 | Piezoelectric vibrating reed, piezoelectric vibrator, method for manufacturing piezoelectric vibrating reed, and method for manufacturing piezoelectric vibrator |
JP2012195652A (en) * | 2011-03-15 | 2012-10-11 | Seiko Epson Corp | Piezoelectric vibrating piece, piezoelectric vibrator, and electronic device |
US8415858B2 (en) | 2010-02-25 | 2013-04-09 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric vibrating pieces and devices, and methods for manufacturing same |
JP2013085298A (en) * | 2013-01-31 | 2013-05-09 | Nippon Dempa Kogyo Co Ltd | Element for crystal oscillator, crystal oscillator, and electronic component |
EP2621088A1 (en) | 2012-01-27 | 2013-07-31 | Seiko Instruments Inc. | Vibration device and oscillator |
JP2013219542A (en) * | 2012-04-09 | 2013-10-24 | River Eletec Kk | Piezoelectric vibrator |
JP2017130903A (en) * | 2016-01-23 | 2017-07-27 | 京セラ株式会社 | Crystal device |
CN107210724A (en) * | 2015-03-27 | 2017-09-26 | 京瓷株式会社 | Quartz vibrator and quartz oscillation device |
US10097157B2 (en) | 2013-05-01 | 2018-10-09 | Murata Manufacturing Co., Ltd. | Crystal vibrating device and method for producing the same |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004289650A (en) * | 2003-03-24 | 2004-10-14 | Seiko Epson Corp | Manufacturing of piezoelectric device and piezoelectric vibrating piece |
JP2006100899A (en) * | 2004-09-28 | 2006-04-13 | Seiko Epson Corp | Piezoelectric device |
-
2006
- 2006-10-27 JP JP2006292038A patent/JP2008109538A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004289650A (en) * | 2003-03-24 | 2004-10-14 | Seiko Epson Corp | Manufacturing of piezoelectric device and piezoelectric vibrating piece |
JP2006100899A (en) * | 2004-09-28 | 2006-04-13 | Seiko Epson Corp | Piezoelectric device |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8415858B2 (en) | 2010-02-25 | 2013-04-09 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric vibrating pieces and devices, and methods for manufacturing same |
WO2012115239A1 (en) * | 2011-02-25 | 2012-08-30 | 株式会社大真空 | Piezoelectric vibrating reed, piezoelectric vibrator, method for manufacturing piezoelectric vibrating reed, and method for manufacturing piezoelectric vibrator |
US9130148B2 (en) | 2011-02-25 | 2015-09-08 | Daishinku Corporation | Piezoelectric resonator plate, piezoelectric resonator, method for manufacturing piezoelectric resonator plate, and method for manufacturing piezoelectric resonator |
JP5880538B2 (en) * | 2011-02-25 | 2016-03-09 | 株式会社大真空 | Piezoelectric vibrating piece, piezoelectric vibrator, method for manufacturing piezoelectric vibrating piece, and method for manufacturing piezoelectric vibrator |
JP2012195652A (en) * | 2011-03-15 | 2012-10-11 | Seiko Epson Corp | Piezoelectric vibrating piece, piezoelectric vibrator, and electronic device |
EP2621088A1 (en) | 2012-01-27 | 2013-07-31 | Seiko Instruments Inc. | Vibration device and oscillator |
JP2013219542A (en) * | 2012-04-09 | 2013-10-24 | River Eletec Kk | Piezoelectric vibrator |
JP2013085298A (en) * | 2013-01-31 | 2013-05-09 | Nippon Dempa Kogyo Co Ltd | Element for crystal oscillator, crystal oscillator, and electronic component |
US10097157B2 (en) | 2013-05-01 | 2018-10-09 | Murata Manufacturing Co., Ltd. | Crystal vibrating device and method for producing the same |
CN107210724A (en) * | 2015-03-27 | 2017-09-26 | 京瓷株式会社 | Quartz vibrator and quartz oscillation device |
US10693439B2 (en) | 2015-03-27 | 2020-06-23 | Kyocera Corporation | Crystal vibrator and crystal vibration device |
JP2017130903A (en) * | 2016-01-23 | 2017-07-27 | 京セラ株式会社 | Crystal device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2008109538A (en) | Crystal oscillator | |
JP5150177B2 (en) | Crystal oscillator | |
JP2008205938A (en) | Crystal oscillator for surface mounting | |
JP2003318690A (en) | Quartz resonator for surface mounting | |
JP2009065334A (en) | Surface-mount crystal oscillator | |
JP2011166309A (en) | Piezoelectric vibrator and oscillator using the same | |
JP2011166310A (en) | Piezoelectric vibrator and oscillator using the same | |
JP2008311699A (en) | Junction type crystal oscillator for surface mounting | |
JP2010141415A (en) | Surface mount crystal oscillator and method of manufacturing the same | |
JP2011166308A (en) | Piezoelectric vibrator and oscillator using the same | |
JP2009177543A (en) | Mounted piezoelectric oscillator | |
JP3908492B2 (en) | Multi-frequency accommodation type crystal unit | |
JP2010103749A (en) | Crystal oscillator for surface mounting | |
JP2010136340A (en) | Surface mount crystal oscillator | |
JP2008294585A (en) | Crystal oscillator for surface mounting | |
JP2006020020A (en) | Crystal oscillator | |
JP2008252467A (en) | Piezoelectric device for surface mounting | |
JP2009135562A (en) | Crystal oscillator for surface mounting | |
JP2009135599A (en) | Crystal device for surface mounting | |
JP2006303761A (en) | Surface mount piezoelectric oscillator | |
JP2010124165A (en) | Surface mounted crystal oscillator | |
JP2008252451A (en) | Crystal oscillator for surface mounting | |
JP2010220140A (en) | Surface mount crystal oscillator | |
JP2010263409A (en) | Crystal oscillator for surface mounting | |
JP2004146956A (en) | Base for crystal vibrator and surface mount vibrator employing the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20091023 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20091215 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20111017 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111101 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111229 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20120131 |