JP2004282053A - Stacked electronic component, its manufacturing method, and spray device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stacked electronic component capable of controlling short-circuiting of internal electrodes even if operated on high voltages, its manufacturing method, and a spray device. <P>SOLUTION: There is provided a stacked piezoelectric actuator 43 wherein it includes a columnar laminate 1a composed of stacked multiple piezoelectric materials 1 and multiple internal electrodes 2, and an electric field is applied to the piezoelectric material 1 with the internal electrodes 2 that pinch the piezoelectric material 1. In the laminated piezoelectric actuator 43, ends of the internal electrodes 2 of two kinds to which different polarity voltages are applied are exposed to the side surfaces 1a2, 1a2 of the columnar laminate 1a, and the residual ion concentration existing on the side surface 1a2 of the columnar laminate 1a, where the two kinds of the internal electrodes 2 are exposed, is no more than 10 μg per square centimeter. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a laminated electronic component, a manufacturing method thereof, and an injection device, for example, a laminated piezoelectric device used for a precision positioning device such as an optical device, a driving element for preventing vibration, or a driving element for fuel injection of an automobile engine. The present invention relates to a laminated electronic component such as an actuator, a method for producing the same, and an injection device.

  2. Description of the Related Art A multilayer piezoelectric actuator, which is a type of multilayer electronic component, utilizes an inverse piezoelectric effect in which a piezoelectric plate expands and contracts when a voltage is applied. In this case, since the amount of expansion and contraction of each piezoelectric plate is very small, a laminated piezoelectric actuator in which a plurality of piezoelectric plates are laminated is conventionally used.

  In this laminated piezoelectric actuator, a voltage is applied to the piezoelectric plate to extend the piezoelectric plate by several to several tens of μm, and the resultant is used as a driving force source of the actuator.

  As such a laminated piezoelectric actuator, there is known a piezoelectric actuator in which a piezoelectric body and an internal electrode are alternately laminated, and the piezoelectric body and the internal electrode are simultaneously fired. The left and right sides are alternately exposed, external electrodes are formed on the exposed side surfaces of the electronic component body, and internal electrodes are alternately connected every other layer.

In such a laminated piezoelectric actuator, conventionally, an internal electrode paste is printed on a ceramic green sheet, a plurality of green sheets coated with the internal electrode paste are laminated to produce a laminated molded body, which is fired and laminated. A main body is manufactured, and the side surface of the laminated main body is ground to finish the shape of the product with high accuracy (for example, see Patent Document 1).
JP-A-2003-17779

  In recent years, multilayer piezoelectric actuators have been driven by applying a high voltage at a high frequency in order to achieve high responsiveness and a large displacement amount. Is short-circuited between the ends of the internal electrodes to which the voltage is applied, and there is a problem that the driving stops.

That is, in the conventional laminated piezoelectric actuator, a laminated body in which internal electrodes and dielectrics are alternately laminated is ground by a surface grinder or the like while supplying a grinding liquid, and the shape is adjusted. The main body of the electronic component is manufactured by washing and removing, and an external electrode is formed on the main body of the electronic component.However, conventionally, an alkali-based grinding fluid containing an alkali metal is used for the purpose of enhancing the grindability and preventing rust. Since pure water was used as the cleaning liquid to merely wash away the grinding liquid and the grinding powder, the grinding powder can be removed, but the alkali metal due to the alkali-based grinding liquid remains on the surface of the electronic component body after cleaning. The ions remained, and the residual ion concentration on the surface of the electronic component body was as high as about 15 μg / cm ² . The grinding fluid often contains alkali ion components, and it has been difficult to remove these ion components in a normal cleaning step.

  Also, the binder used at the time of molding and the adhesive used to fix the sample at the time of grinding often contain an alkali metal component, and it has been difficult to remove these in the ordinary washing step.

  Therefore, as described above, in order to achieve high responsiveness and large displacement, when a high voltage is applied at a high frequency and driven, these ionic components move between the electrodes and voltages of different polarities are applied. There is a problem that a short circuit occurs between the internal electrode ends.

  In particular, when driven in a high-temperature and high-humidity environment, there is a problem that a short circuit easily occurs between internal electrode ends to which voltages having different polarities are applied.

  An object of the present invention is to provide a laminated electronic component capable of suppressing a short circuit between internal electrodes even when operating under a high voltage, a method of manufacturing the same, and an injection device.

In the multilayer electronic component according to the present invention, the multilayer electronic component includes an electronic component main body formed by stacking a plurality of dielectrics and a plurality of internal electrodes, and an electric field is applied to the dielectric by the internal electrodes sandwiching the dielectric. Electronic component, wherein the end of two types of internal electrodes to which voltages of different polarities are applied is exposed on the side surface of the electronic component body, and the two types of internal electrode ends are exposed. The concentration of the residual ion present on the side surface of the main body is not more than 10 μg / cm ² .

  Further, the laminated electronic component of the present invention is characterized in that residual ions present on the side surface of the electronic component main body are mainly Na and / or K. The electronic component body is configured by alternately laminating a dielectric and an internal electrode, and includes a pair of external electrodes on the side surface of the electronic component body, to which ends of the internal electrodes are alternately connected. It functions as a piezoelectric element.

In such a multilayer electronic component, the residual ion concentration present on the side surface of the electronic component body is 10 μg / cm ² or less, so that a short circuit between exposed internal electrode ends is suppressed, and high voltage, high temperature and high It can have high durability performance even under humidity.

  In particular, in a multilayer piezoelectric element to which a high voltage of 100 V or more is applied between internal electrodes, for example, in a multilayer piezoelectric actuator, a short circuit between the internal electrode ends can be suppressed.

Further, the present invention is characterized in that the residual ions are derived from a grinding liquid and a cleaning liquid used in processing the columnar laminate. It is desirable that the ion concentration on the entire peripheral surface be 10 μg / cm ² or less.

  Further, in the method of manufacturing a laminated electronic component of the present invention, a laminated body formed by laminating a plurality of dielectrics and a plurality of internal electrodes is ground while supplying a grinding fluid, and then washed with an organic solvent-based cleaning fluid. And manufacturing an electronic component body. Furthermore, after fabricating the electronic component main body, a pair of external electrodes to which the ends of the internal electrodes are alternately connected are formed on the side surfaces of the electronic component main body, and thereafter, cleaning with an organic solvent-based cleaning liquid is performed. Features. Further, the organic solvent of the cleaning liquid is mainly composed of glycol ether.

In such a method of manufacturing a laminated electronic component, a grinding fluid containing an alkali metal is used, and even if the alkali metal ion remains on the side surface of the electronic component body, the alkali metal ion is washed with an organic solvent-based cleaning solution. It can be effectively removed from the side surface of the electronic component main body, and the residual ion concentration present on the side surface of the electronic component main body can be reduced to 10 μg / cm ² or less.

  Further, after forming the electronic component main body, the external electrodes are formed, and before coating with the exterior resin, the residual ion concentration existing on the side surface of the electronic component main body can be further reduced by washing with an organic solvent-based cleaning liquid. . In particular, by using a cleaning liquid containing glycol ether as a main component, the concentration of residual ions present on the side surface of the electronic component body can be effectively removed.

  Further, the method of manufacturing a multilayer electronic component of the present invention is characterized in that the grinding liquid is a grinding liquid containing no alkali metal. The grinding fluid is an amine-based grinding fluid.

  In such a method for producing a laminated electronic component, since the grinding fluid is a non-alkali grinding fluid that does not contain an alkali metal, the concentration of alkali metal ions that occupy most of the residual ions can be reduced. In addition, the amine-based grinding fluid enhances grindability, has an effect of preventing rust, and further contains no alkali metal, so that the ion concentration after grinding can be reduced.

  An ejection device according to the present invention includes a valve for opening and closing a fluid ejection hole, and a laminated electronic component for driving the valve. For example, a storage container having an injection hole, the multilayer electronic component according to claim 3 housed in the storage container, and a valve for ejecting liquid from the injection hole by driving the multilayer electronic component. It becomes. As described above, since the multilayer electronic component has high durability, an injection device with high long-term reliability can be obtained.

In the multilayer electronic component of the present invention, since the concentration of residual ions existing on the side surface of the electronic component body is 10 μg / cm ² or less, a short circuit between the internal electrodes exposed on the side surface of the electronic component body is suppressed, and the high voltage It can have high durability even under high temperature and high humidity. In particular, in a laminated piezoelectric element to which a high voltage is applied, for example, a laminated piezoelectric actuator, a short circuit between internal electrodes to which voltages of different polarities are applied can be suppressed.

  FIG. 1 shows an embodiment of a multilayer electronic component comprising a multilayer piezoelectric actuator of the present invention. The multilayer piezoelectric actuator of FIG. 1 includes a plurality of piezoelectric bodies (a kind of dielectric) 1 and a plurality of internal electrodes 2. Are alternately laminated, on the side surfaces 1a1 and 1a1 of a square columnar laminated body (laminated electronic component) 1a, the ends of the internal electrodes 2 are covered with the insulator 3 every other layer and covered with the insulator 3 The end of the internal electrode 2 not connected is connected to each of the external electrodes 4, and a lead wire 6 is connected and fixed to each external electrode 4. On the other side surfaces 1a2, 1a2 of the columnar laminate 1a, the ends of the internal electrodes 2 to which voltages of different polarities are applied are alternately exposed.

The piezoelectric body 1 is formed of, for example, a piezoelectric ceramic material mainly composed of lead zirconate titanate Pb (Zr, Ti) O ₃ (hereinafter abbreviated as PZT) or barium titanate BaTiO ₃ . The piezoelectric ceramics are those piezoelectric strain constant d ₃₃ indicating the piezoelectric characteristic is high is preferable.

  The thickness of the piezoelectric body 1, that is, the distance between the internal electrodes 2 is desirably 50 to 250 μm. This is because, in order to obtain a larger displacement amount by applying a voltage, a method of increasing the number of layers is adopted for the laminated piezoelectric actuator, but within this range, the actuator can be reduced in size and height, This is because it is possible to prevent dielectric breakdown due to the thickness of the piezoelectric body 1 being too thin.

  An internal electrode 2 is disposed between the piezoelectric bodies 1. The internal electrode 2 is formed of a metal material such as silver-palladium, and applies a predetermined voltage to each of the piezoelectric bodies 1. The effect of causing a displacement due to the inverse piezoelectric effect is produced.

  Further, after firing, the internal electrodes 2 are exposed on all the side surfaces 1a1 and 1a2 of the columnar laminate 1a, and thereafter, the ends of the internal electrodes 2 are attached to the opposing side surfaces 1a1 and 1a1 of the columnar laminate 1a. A groove having a depth of 50 to 500 μm and a width of 30 to 200 μm in the laminating direction is formed at every other end surface of the piezoelectric body 1 including glass, epoxy resin, polyimide resin, polyamide imide resin, silicone rubber, and the like. Is filled to form the insulator 3.

  The insulator 3 alternately insulates the ends of the internal electrodes 2 alternately on the opposing side surfaces 1a1 and 1a1 of the columnar laminated body 1a, and connects the other end of the internal electrode 2 that is not insulated to the external electrode. 4 is connected.

  The insulator 3 is preferably made of a material having a low elastic modulus that follows the displacement of the columnar laminate 1a, specifically, silicone rubber or the like, in order to strengthen the bonding with the columnar laminate 1a. It is. Further, as long as electrical insulation between the external electrode 4 and one of the internal electrodes 2 is ensured, it is not always necessary to provide the insulator 3. For example, the end of the internal electrode 2 may be buried so as not to be exposed on the surface, that is, in the columnar laminate 1a.

  The external electrode 4 has a plate shape and is made of a conductive and elastic metal material such as Ag, Ni, Cu, Al, W, Mo, stainless steel, and Fe—Ni—Co alloy. It is desirable to be made of Ag, Ni, and stainless steel from the viewpoint of good conductivity and good conductivity. Further, the two external electrodes 4 can be pressed and sandwiched between the side surfaces 1a1 and 1a1 of the columnar laminated body 1a. However, the two external electrodes 4 are rich in elasticity so as to follow the displacement of the columnar laminated body 1a. Therefore, it is desirable to use a conductive resin plate in which the above metal material is dispersed in a thermosetting resin such as a polyimide resin as the external electrode plate. In this case, it is desirable that a conductive mesh member is buried in a portion connected to the internal electrode 2 and that the thickness of the external electrode is about 50 to 500 μm. It is also possible to form a thin low-resistance portion on the portion where the external electrode 4 is provided by vapor deposition, sputtering, plating, or the like, and to provide the external electrode 4 on this low-resistance portion.

  In FIG. 1, the external electrodes 4 are formed on the side surfaces 1a1 and 1a1 of the opposing columnar laminate 1a. However, the external electrodes may be formed across two adjacent side surfaces 1a1 and 1a2 (that is, the columnar laminates may be formed). External electrodes may be formed at the corners of the body 1a). In this case, the end of the internal electrode 2 to which a voltage of a different polarity is applied is exposed in a portion where the external electrode 4 is not formed. In some cases, external electrodes are formed on the side surfaces 1a1 and 1a1 of the columnar laminate 1a, and the ends of the internal electrodes 2 to which voltages having different polarities are applied may be exposed.

  Further, a lead wire 6 is connected and fixed to the external electrode 4 by soldering or the like. The lead wire 6 serves to connect the external electrode 4 to an external voltage supply.

  Although not shown, the outer peripheral surface of the columnar laminate 1a on which the external electrodes 4 are formed is covered with an electrically insulating exterior resin, for example, silicone, particularly silicone rubber, over the entire periphery.

In the laminated piezoelectric actuator of the present invention, the internal electrode ends to which voltages of different polarities are applied are alternately exposed on the opposing side surfaces 1a2 and 1a2 of the columnar laminated body 1a where the external electrodes 4 are not formed. The residual ion concentration of the side surfaces 1a2 and 1a2 of the columnar laminate 1a where the internal electrode ends to which voltages having different polarities are applied is set to 10 μg / cm ² or less. In particular, it is desirable that mainly Na and / or K ions exist on the side surface of the electronic component body, and that the residual ion concentration be 10 μg / cm ² or less. The residual ion concentration is desirably 5 μg / cm ² or less, and more desirably 3 μg / cm ² or less.

The residual ions in the present invention also include metals and compounds that are ionized by reaction at high temperature or with moisture. Other ions other than Na and / or K include Cl ⁻ , F ⁻ , Ca ²⁺ , Mg ^2+, etc., and all of them may be 1 μg / cm ² or less, preferably 0.1 μg / cm ² or less. desirable.

In the present invention, by setting the residual ion concentration of the portion where the ends of the internal electrodes 2 to which voltages of different polarities are alternately exposed to 10 μg / cm ² or less, the internal electrodes 2 to which voltages of different polarities are applied The flow of ions along the electric field between the electrodes can be suppressed, and a short circuit between the internal electrodes to which voltages having different polarities are applied can be prevented. Note that the ion concentration may also be suppressed to the above range on the side surfaces 1a1 and 1a1 of the columnar laminate 1a on which the external electrodes 4 are formed. In addition, the ion concentration on the entire side surface of the columnar laminate 1a does not need to be in the above range, and the ion concentration may be in the above range in a portion where the end of the internal electrode 2 to which a voltage having a different polarity is applied is exposed. .

  The ion concentration can be calculated by immersing the columnar laminate 1a in ultrapure water (ion concentration of 10 ppb or less) and measuring the ion concentration of the immersed ultrapure water.

  The laminated piezoelectric actuator of the present invention comprises a calcined powder of a piezoelectric ceramic such as PZT, a binder made of an organic polymer such as an acrylic or butyral, a DBP (dityl phthalate), and a DOP (dibutyl phthalate). Is mixed with a plasticizer such as a plasticizer, and the slurry is formed into a ceramic green sheet that becomes the piezoelectric body 1 by a tape forming method such as a well-known doctor blade method or a calendar roll method.

  Next, a conductive paste is prepared by adding and mixing a binder, a plasticizer, and the like to the silver-palladium powder, and this is printed on the upper surface of each green sheet to a thickness of 1 to 40 μm by screen printing or the like.

  Then, a green sheet on which a conductive paste is printed is laminated on the upper surface, a binder is removed from the laminate at a predetermined temperature, and the laminate is baked at 900 to 1200 ° C. to prepare a laminate main body and adjust the shape. For this purpose, use an alkaline grinding fluid containing an alkali metal, grind it with a surface grinder while supplying this grinding fluid, and then wash it with an organic solvent-based cleaning fluid containing glycol ether as a main component. A columnar laminated body 1a formed by alternately laminating the body 1 and the plurality of internal electrodes 2 is produced.

As described above, even if the alkali metal ions are left on the side surfaces 1a2 and 1a2 of the columnar laminate 1a by grinding using the alkaline grinding liquid, the side surfaces of the electronic component main body can be cleaned by the organic solvent cleaning solution. Residual ions can be effectively removed from 1a2, 1a2, and the concentration of residual ions present on the side surfaces 1a2, 1a2 of the columnar laminate 1a can be reduced to 10 μg / cm ² or less.

  As the organic solvent-based cleaning liquid, it is desirable to use a cleaning liquid containing glycol ether as a main component.

  Further, by using a non-alkali-based grinding fluid containing no alkali metal as the grinding fluid, particularly an amine-based grinding fluid, the residual ion concentration of the alkali metal which occupies most of the residual ions can be further reduced. Further, the amine-based grinding fluid enhances the grindability and has an effect of preventing rust, and further, no alkali metal ions remain after grinding.

  In the present invention, as described above, it is necessary to sufficiently clean the surface with an organic solvent-based cleaning liquid. For this reason, for example, it is desirable to put a cleaning container containing a cleaning liquid in water in the container, put the columnar laminate 1a in the cleaning liquid, and perform ultrasonic cleaning.

  Thereafter, an external electrode 4 is formed on the side surface of the columnar laminate 1a, covered with an exterior resin such as silicone rubber, and a DC voltage of 0.1 to 3 kV / mm is applied to the pair of external electrodes 4 via the lead wire 6. By applying the voltage and polarizing the columnar laminate 1a, a laminated piezoelectric actuator as a product is completed.

  When the lead wire 6 is connected to an external voltage supply unit and a voltage is applied to the internal electrode 2 via the lead wire 6 and the external electrode 4, each piezoelectric body 1 is largely displaced by the inverse piezoelectric effect. Thus, for example, it functions as an automobile fuel injection valve that supplies fuel to the engine.

  FIG. 2 shows an injection device of the present invention. In the drawing, reference numeral 31 indicates a storage container. An injection hole 33 is provided at one end of the storage container 31, and a needle valve 35 that can open and close the injection hole 33 is stored in the storage container 31.

  A fuel passage 37 is provided in the injection hole 33 so as to be able to communicate therewith. The fuel passage 37 is connected to an external fuel supply source, and the fuel is constantly supplied to the fuel passage 37 at a constant high pressure. Therefore, when the needle valve 35 opens the injection hole 33, the fuel supplied to the fuel passage 37 is ejected at a constant high pressure into a fuel chamber (not shown) of the internal combustion engine.

  The upper end of the needle valve 35 has a large diameter, and serves as a piston 41 that can slide with a cylinder 39 formed in the storage container 31. The above-mentioned laminated piezoelectric actuator 43 is stored in the storage container 31.

  In such an injection device, when the laminated piezoelectric actuator 43 is extended by applying a voltage, the piston 41 is pressed, the needle valve 35 closes the injection hole 33, and the supply of fuel is stopped. When the application of the voltage is stopped, the laminated piezoelectric actuator 43 contracts, the disc spring 45 pushes back the piston 41, and the injection hole 33 communicates with the fuel passage 37 to perform the fuel injection. .

  It is desirable to wash again with an organic solvent-based washing liquid before coating with the exterior resin. Thereby, residual ions on the side surface of the electronic component body can be further reduced.

  Further, the multilayer electronic component of the present invention can be suitably used when a voltage of 100 V or more is applied between internal electrodes, and further, a multilayer piezoelectric actuator to which an AC electric field is applied at a high frequency of 100 Hz or more. Can be suitably used.

  The multilayer electronic component of the present invention is not limited to a multilayer piezoelectric element such as the above-described multilayer piezoelectric actuator, but can be suitably used for, for example, a multilayer piezoelectric transformer.

  First, a slurry was prepared by mixing a calcined powder of a piezoelectric ceramic containing PZT as a main component, a binder made of an organic polymer, and a plasticizer, and a ceramic green sheet having a thickness of 150 μm was made by a slip casting method.

  On one surface of this green sheet, a conductive paste containing silver-palladium and piezoelectric ceramics is printed to a thickness of 5 μm by a screen printing method, and after drying the conductive paste, the conductive paste is applied. One hundred green sheets were laminated, and further, on both ends in the laminating direction of the laminate, 10 green sheets on which no conductive paste was applied were laminated on the upper side and 20 green sheets on the lower side.

  Next, the laminate was pressed while being heated at 100 ° C., the laminate was integrated, cut into a square column having a size of 8 mm × 8 mm, and then subjected to binder removal at 800 ° C. for 10 hours. , The internal electrode and the piezoelectric body were simultaneously fired at 1130 ° C for 2 hours to obtain a laminated main body. The thickness of the piezoelectric body 1 was 100 μm.

  The four side surfaces of these laminates were polished by a surface grinder using a grinding fluid shown in Table 1 by 0.2 mm each, and then ultrasonically cleaned at 40 ° C. for 10 minutes using a detergent shown in Table 1. (28 KHz). Thereafter, rinsing was performed using ultrapure water at 40 ° C. and isopropyl alcohol to obtain a columnar laminate 1a. In Table 1, for example, Sample No. 1 means that cleaning was performed using pure grinding water using an alkaline grinding liquid mainly containing K. Of the grinding fluids shown in Table 1, the K-containing grinding fluid is 10% by volume of KOH + 90% by volume of water, the Na-containing grinding fluid is 10% by volume of NaOH + 90% by volume of water, and the amine-based grinding fluid is 10% by volume of diethanolamine. % + Water 90% by volume.

  After that, on the two side surfaces 1a1 and 1a1 of the columnar laminated body 1a, the end surface of the piezoelectric body 1 including the end of the internal electrode 2 is alternately formed on the two side surfaces so that the depth is 200 μm every other layer and the width in the laminating direction. Grooves of 75 μm were formed, and these grooves were filled with silicone rubber to form an insulator 3, and the ends of the internal electrodes 2 were exposed on the side surfaces 1a1, 1a1 of the columnar laminate 1a every other layer.

  Thereafter, a conductive adhesive made of silver and a polyimide resin is applied to the side surfaces 1a1 and 1a1 of the columnar laminate 1a, and a mesh member is buried in the conductive adhesive. By doing so, the external electrode 4 was formed.

  Thereafter, ultrasonic cleaning was further performed at 40 ° C. for 10 minutes using the cleaning agents shown in Table 1. Thereafter, rinsing was performed using ultrapure water at 40 ° C. and isopropyl alcohol. Thereafter, the sample was placed in a quartz beaker and boiled with ultrapure water for 1 hour.

Thereafter, the sintered body was taken out from the quartz beaker, and an appropriate amount of ultrapure water was added to the quartz beaker to make the solution in the quartz beaker 50 ml. The ions in this solution are quantitatively analyzed by an ICP mass spectrometer, the area other than the external electrode forming surface of the columnar laminate is calculated, and a value obtained by dividing the total amount of Na and K ions by the area is obtained. Table 1 shows the ion concentration at the side surfaces 1a2 and 1a2 where the ends of the internal electrodes to which the voltage of (1) was applied were exposed. In addition, Cl ⁻ , F ⁻ , Ca ²⁺ , and Mg ²⁺ were present as ions other than Na and K ions, but the total amount was 1 μg / cm ² or less.

  Thereafter, the lead wire 6 is connected to the pair of external electrodes 4 by solder, and the outer peripheral surface of the actuator is coated with silicone rubber by a method such as dipping, and then a polarization voltage of 1 kV / mm is applied to polarize the entire actuator. By processing, a laminated piezoelectric actuator of the present invention as shown in FIG. 1 was obtained.

  When a DC voltage of 200 V was applied to the obtained laminated piezoelectric actuator, a displacement of 10 μm was obtained for each actuator.

Further, an AC electric field of 0 to +200 V was applied to these laminated piezoelectric actuators at 150 ° C. at a frequency of 200 Hz, and a driving test was performed on ten samples each. In this driving test, the ratio of the driving of the laminated piezoelectric actuator up to 1 × 10 ⁹ cycles was obtained.

The displacement was measured by fixing the sample on a vibration isolator, attaching an aluminum foil to the top of the sample, and measuring the average value of the values measured at three points at the center and periphery of the element by a laser displacement meter. evaluated.

From Table 1, Sample No. In Nos. 1 and 2, the residual ion concentration was 14 μg / cm ² or more, the non-defective rate after driving 1 × 10 ⁹ cycles was as low as 40% or less, and a short circuit occurred between the internal electrodes in most cases. On the other hand, in the sample of the present invention, the residual ion concentration was 7 μg / cm ² or less, and 90% or more was a good product. This indicates that the sample of the present invention hardly causes a short circuit between the internal electrodes.

It is a perspective view showing the lamination type piezoelectric actuator of the present invention. FIG. 2 is an explanatory sectional view showing an injection device of the present invention.

Explanation of reference numerals

Description of Reference Numerals 1: Piezoelectric body 1a: Columnar laminate (laminated electronic component)
2 ... internal electrode 4 ... external electrode 31 ... storage container 33 ... injection hole 35 ... valve 43 ... laminated piezoelectric actuator

Claims (12)

A multilayer electronic component, comprising: an electronic component body formed by laminating a plurality of dielectrics and a plurality of internal electrodes, wherein an electric field is applied to the dielectric by an internal electrode sandwiching the dielectric. The ends of the two types of internal electrodes to which voltages of different polarities are applied are exposed on the side surface of the component body, and the residual ion concentration present on the side surface of the electronic component body where the two types of internal electrode ends are exposed Is not more than 10 μg / cm ² . 2. The multilayer electronic component according to claim 1, wherein the residual ions present on the side surface of the electronic component body are mainly Na and / or K. The electronic component body is configured by alternately laminating a dielectric and an internal electrode, and includes a pair of external electrodes on the side surface of the electronic component body, to which ends of the internal electrodes are alternately connected. The multilayer electronic component according to claim 1, wherein the multilayer electronic component functions as a piezoelectric element. 4. The multilayer electronic component according to claim 1, wherein the residual ions are derived from a grinding fluid and a cleaning fluid used in processing the columnar laminate. 5. The multilayer electronic component according to any one of claims 1 to 4, wherein a voltage of 100 V or more is applied between the internal electrodes. The multilayer electronic component according to any one of claims 1 to 5, wherein the ion concentration of the entire peripheral surface is 10 µg / cm ² or less. After laminating a laminated body formed by laminating a plurality of dielectrics and a plurality of internal electrodes while supplying a grinding liquid, the laminated body is manufactured by washing with an organic solvent-based cleaning liquid to produce an electronic component body. Manufacturing method for electronic components. After producing the electronic component body, on the side surface of the electronic component body, a pair of external electrodes to which the ends of the internal electrodes are alternately connected are formed, and thereafter, washing with an organic solvent-based cleaning liquid is performed. The method for producing a multilayer electronic component according to claim 7. 9. The method for producing a laminated electronic component according to claim 7, wherein the organic solvent of the cleaning liquid contains glycol ether as a main component. The method according to any one of claims 7 to 9, wherein the grinding fluid is a grinding fluid containing no alkali metal. The method according to claim 10, wherein the grinding fluid is an amine-based grinding fluid. An injection device comprising: a valve for opening and closing a fluid injection hole; and the multilayer electronic component according to claim 3 for driving the valve.

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