JP2004101856A - Microlens substrate, counter substrate for liquid crystal panel, liquid crystal panel and projection display apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microlens substrate in which deterioration by condensation of light can be prevented and a high contrast ratio is obtained. <P>SOLUTION: The microlens substrate 1 is obtained by joining a first substrate 2 with recesses for microlenses having a plurality of first recesses 31 formed on a first glass substrate 29 and a second substrate 8 with recesses for microlenses having a plurality of second recesses 32 formed on a second glass substrate 89, with a resin layer 9 interposed by allowing the first recesses 31 to oppose to the second recesses. Microlenses 4 composed of double convex lenses are formed between the first glass substrate 29 and the second glass substrate 89. The resin layer 9 has a first resin layer 91 which is disposed in the first glass substrate 29 side where light enters and which has a higher refractive index than those of the first and second glass substrates 29, 89, and a second resin layer 92 disposed which is disposed in the second substrate 89 side and which has a lower refractive index than those of the first or second glass substrates 29, 89. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a microlens substrate, a counter substrate for a liquid crystal panel, a liquid crystal panel, and a projection display device.
[0002]
[Prior art]
2. Description of the Related Art A projection display device that projects an image on a screen is known. In this projection display device, a liquid crystal panel is mainly used for image formation.
Among such liquid crystal panels, there is known a liquid crystal panel provided with a large number of minute microlenses at positions corresponding to respective pixels of the liquid crystal panel in order to enhance light use efficiency. Such a microlens is usually formed on a microlens substrate provided in a liquid crystal panel.
[0003]
FIG. 11 is a longitudinal sectional view showing a conventional structure of a microlens substrate used for a liquid crystal panel.
As shown in the figure, a microlens substrate 900 is bonded via a resin layer 909 to a glass substrate 902 provided with a large number of hemispherical concave portions 903 and a surface of the glass substrate 902 provided with the concave portions 903. In the resin layer 909, a micro lens 904 is formed by a resin filled in the concave portion 903.
[0004]
Some microlens substrates used for liquid crystal panels have microlenses formed of biconvex lenses (for example, see Patent Document 1).
By using the microlens substrate 900, the light is once focused at one point (focal point) and then diverged (diffused) by the action of the microlens 904.
[0005]
By the way, in order to further improve the image quality of the liquid crystal panel, it is desired to develop a liquid crystal panel capable of obtaining an extremely high contrast ratio. However, in the microlens substrate 900, light is diverged (diffused) after being collected. ), It is not possible to obtain a sufficient contrast ratio.
Further, since the light is once focused on one point (focal point), the liquid crystal panel may be partially deteriorated (deteriorated) due to the concentration of the light energy. As a result, for example, a problem such as a decrease in light transmittance occurs.
[0006]
[Patent Document 1]
JP 2002-14205 A (FIG. 1)
[0007]
[Problems to be solved by the invention]
SUMMARY OF THE INVENTION An object of the present invention is to provide a microlens substrate capable of preventing deterioration due to light focusing and obtaining a high contrast ratio, a counter substrate for a liquid crystal panel including the microlens substrate, a liquid crystal panel, and a projection type. It is to provide a display device.
[0008]
[Means for Solving the Problems]
Such an object is achieved by the present invention described in the following (1) to (18).
[0009]
(1) A first substrate having a plurality of first concave portions provided with a lens curved surface on a surface thereof, and a second substrate having a plurality of second concave portions provided with a lens curved surface on a surface are formed by the first substrate. A microlens substrate joined via a resin layer so that the concave portion and the second concave portion face each other, and a microlens formed of a biconvex lens is formed between the first substrate and the second substrate. And
The resin layer is disposed on the first substrate side on which light is incident, and has a first resin layer having a higher refractive index than the first substrate, and is disposed on the second substrate side and is more refracted than the second substrate. A microlens substrate comprising: a second resin layer having a low ratio.
[0010]
(2) The microlens substrate according to (1), wherein a difference in refractive index between the first substrate and the first resin layer is 0.07 to 0.70.
[0011]
(3) The microlens substrate according to the above (1) or (2), wherein a difference in refractive index between the second substrate and the second resin layer is 0.07 to 0.70.
[0012]
(4) a first substrate having a plurality of first concave portions provided with a lens curved surface on a surface thereof, and a second substrate having a plurality of second concave portions provided with a lens curved surface provided on the surface; A microlens substrate joined via a resin layer so that the concave portion and the second concave portion face each other, and a microlens formed of a biconvex lens is formed between the first substrate and the second substrate. And
The resin layer is disposed on a first substrate side on which light is incident, a first resin layer having a higher refractive index than the first substrate and the second substrate, and a first resin layer disposed on the second substrate side. A microlens substrate comprising: one substrate; and a second resin layer having a lower refractive index than the second substrate.
[0013]
(5) The microlens substrate according to (4), wherein a difference in refractive index between the first substrate and the second substrate and the first resin layer is 0.07 to 0.70, respectively.
[0014]
(6) The micrometer according to the above (4) or (5), wherein a difference in refractive index between the first substrate and the second substrate and the second resin layer is 0.07 to 0.70, respectively. Lens substrate.
[0015]
(7) The microlens substrate according to any one of (1) to (6), wherein the first substrate is a quartz glass substrate.
[0016]
(8) The microlens substrate according to any one of (1) to (7), wherein the second substrate is a quartz glass substrate.
[0017]
(9) The interface between the first resin layer and the second resin layer is made of SiO ₂ The microlens substrate according to any one of the above (1) to (8), on which a film is formed.
[0018]
(10) The SiO ₂ The microlens substrate according to the above (9), wherein the thickness of the film is 0.005 to 50 μm.
[0019]
(11) An opposing substrate for a liquid crystal panel, comprising the microlens substrate according to any one of (1) to (10).
[0020]
(12) A microlens substrate according to any one of the above (1) to (10), a black matrix provided on the microlens substrate, and a conductive film covering the black matrix. Counter substrate for liquid crystal panel.
[0021]
(13) A liquid crystal panel comprising the liquid crystal panel facing substrate according to (11) or (12).
[0022]
(14) A liquid crystal driving substrate provided with a pixel electrode, the liquid crystal panel opposing substrate according to (11) or (12), joined to the liquid crystal driving substrate, the liquid crystal driving substrate and the liquid crystal panel opposing substrate A liquid crystal sealed in a gap between the liquid crystal panel and the liquid crystal panel.
[0023]
(15) The liquid crystal panel according to (14), wherein the liquid crystal driving substrate is a TFT substrate including the pixel electrodes arranged in a matrix and a thin film transistor connected to the pixel electrodes.
[0024]
(16) A projection display device comprising the liquid crystal panel according to any one of (13) to (15).
[0025]
(17) A light valve provided with the liquid crystal panel according to any one of (13) to (15), wherein at least one light valve modulates light to project an image. Projection display device.
[0026]
(18) Three light valves corresponding to red, green, and blue for forming an image, a light source, and light from the light source is separated into red, green, and blue light, and the light valves corresponding to the respective lights are separated. A color separation optical system leading to, a color synthesis optical system for synthesizing the respective images, and a projection display device having a projection optical system for projecting the synthesized image,
The projection type display device, wherein the light valve includes the liquid crystal panel according to any one of the above (13) to (15).
[0027]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.
The microlens substrate of the present invention includes both an individual substrate and a wafer.
Note that a case where a microlens substrate described in the following embodiment is used as a constituent member of a liquid crystal panel will be described as an example.
[0028]
FIG. 1 is a schematic longitudinal sectional view showing an embodiment of the microlens substrate of the present invention.
As shown in FIG. 1, a microlens substrate 1 of the present invention includes a substrate with a concave portion for a first microlens (first substrate) 2, a substrate with a concave portion for a second microlens (second substrate) 8, and a resin layer. 9, a microlens 4, and a spacer 5.
[0029]
The first substrate 2 with concave portions for microlenses has a plurality of (many) first concave portions (recesses for microlenses) 31 having concave curved surfaces (lens curved surfaces) on a first glass substrate (first transparent substrate) 29 and a first concave portion 31. The configuration is such that alignment marks 71 are formed. The second substrate 8 with concave portions for microlenses has a plurality of (many) second concave portions (concave portions for microlenses) 32 having concave curved surfaces (lens curved surfaces) on a second glass substrate (second transparent substrate) 89 and a second glass substrate (second transparent substrate) 89. The configuration is such that alignment marks 72 are formed.
[0030]
The microlens substrate 1 has a resin layer (adhesion) such that the first microlens substrate 2 with concave portions and the second microlens substrate 8 with concave portions face the first concave portions 31 and the second concave portions 32. (Agent layer) 9.
In the microlens substrate 1, a resin filled between the first concave portion 31 and the second concave portion 32 is provided between the first microlens concave portion substrate 2 and the second microlens concave portion substrate 8. A micro lens 4 composed of a convex lens is formed.
[0031]
The microlens substrate 1 has two regions, an effective lens region 99 and a non-effective lens region 100. The effective lens region 99 is a region where the microlens 4 formed of the resin filled in the first concave portion 31 and the second concave portion 32 is effectively used as a microlens during use. On the other hand, the non-effective lens area 100 refers to an area other than the effective lens area 99.
[0032]
Such a microlens substrate 1 is used, for example, by allowing light L to enter from the first microlens recessed substrate 2 side and emitting light L from the second microlens recessed substrate 8 side.
Here, in the microlens substrate 1 of the present invention, as shown in FIGS. 1 and 2, the resin layer 9 is composed of two resin layers having different refractive indexes, that is, a first resin layer having a high refractive index (high refractive index). Resin layer) 91 and a second resin layer (low refractive index resin layer) 92 having a low refractive index.
[0033]
In this case, the first microlens concave substrate 2 side on which the light L is incident is the first microlens concave substrate 2 (first glass substrate 29) and the second microlens concave substrate 8 (second glass substrate). A first resin layer (high-refractive-index resin layer) 91 having a higher refractive index than the substrate 89), and the second microlens recessed substrate 8 side faces the first microlens recessed substrate 2 (first glass substrate 29). ) And a second resin layer (low-refractive-index resin layer) 92 having a lower refractive index than the second microlens concave-portion substrate 8 (second glass substrate 89).
[0034]
The first resin layer 91 covering the first recess 31 is made of a resin (adhesive) having a higher refractive index than the constituent materials of the first glass substrate 29 and the second glass substrate 89. Can be. For example, the first resin layer 91 can be suitably formed of an ultraviolet-curable resin such as an acrylic resin, an epoxy resin, or an acrylic epoxy resin.
Further, the second resin layer 92 covering the second concave portion 32 is made of a resin (adhesive) having a refractive index lower than that of a constituent material of the first glass substrate 29 and the second glass substrate 89. can do. For example, the second resin layer 92 can be suitably formed of an ultraviolet curable resin such as a fluorine-based acrylic resin, an epoxy-based resin, and an acrylic-epoxy resin.
[0035]
By forming the resin layer 9 by the first resin layer 91 and the second resin layer 92, the light L incident from the first microlens recessed substrate 2 side is acted on by the microlens 4 (difference in refractive index). ), Light can be converged (converged) to a predetermined size (diameter) and can be converted into parallel light (parallel light flux).
That is, as shown in FIG. 1, the light L incident from the first microlens recessed substrate 2 side is condensed on the first resin layer 91 side of the microlens 4, and the second resin layer 92 of the microlens 4 is condensed. The light spreads on the side and becomes parallel light, and emerges from the second microlens concave substrate 8 side.
[0036]
Therefore, when the microlens substrate 1 is used for, for example, a liquid crystal panel to be described later, as shown in FIG. 2, the light L incident from the first microlens recessed substrate 2 side is condensed to a predetermined size. Then, the light is emitted from the second microlens recessed substrate 8 side and passes (transmits) through the opening of the black matrix 11 arranged on the second microlens recessed substrate 8. Therefore, the light transmittance is very high.
[0037]
In addition, the light L emitted from the second microlens recessed substrate 8 side is emitted as parallel light, so that a high contrast ratio can be obtained.
In addition, since light is not condensed at one point (focal point) (only light is condensed up to a predetermined size), partial degradation of the microlens substrate 1 and its vicinity (predetermined portion of the liquid crystal panel) due to concentration of light energy is prevented. No alteration, no damage. As a result, the microlens substrate 1 or a liquid crystal panel or the like including the microlens substrate 1 has excellent durability and can maintain excellent characteristics for a long period of time.
[0038]
Here, for example, the difference between the refractive indices of the first microlens concave substrate 2 and the second microlens concave substrate 8 and the first resin layer 91, the first microlens concave substrate 2 and the second microlens Difference in refractive index between substrate 8 with concave portion for lens and second resin layer 92, difference in refractive index between first resin layer 91 and second resin layer 92, thickness of first resin layer 91 and second resin layer 92 The conditions such as are not particularly limited, and can be appropriately selected and combined according to, for example, the size of the opening of the black matrix 11 and the like.
[0039]
In this case, since the effect of the microlens substrate 1 can be further enhanced, the difference in refractive index between the first microlens concave portion substrate 2 and the second microlens concave portion substrate 8 and the first resin layer 91 can be improved. The difference in the refractive index between the substrate 2 with the concave portion for the first microlens and the substrate 8 with the concave portion for the second microlens and the second resin layer 92 and the difference in the refractive index between the first resin layer 91 and the second resin layer 92 are as follows. , Respectively, are preferably set as follows.
That is, the difference in the refractive index between the first microlens recessed substrate 2 and the second microlens recessed substrate 8 and the first resin layer 91 is about 0.07 to 0.70, respectively. More preferably, it is about 0.1 to 0.2.
[0040]
In addition, the difference between the refractive indices of the first microlens recessed substrate 2 and the second microlens recessed substrate 8 and the second resin layer 92 is about 0.07 to 0.70, respectively. More preferably, it is about 0.1 to 0.2.
The difference between the refractive indices of the first resin layer 91 and the second resin layer 92 is preferably about 0.07 to 0.70, and more preferably about 0.1 to 0.2. .
[0041]
Further, in the microlens substrate 1 of the present invention, as shown in FIG. ₂ A film 93 may be formed. Thereby, the adhesion between the first resin layer 91 and the second resin layer 92 is improved.
SiO ₂ The thickness of the film 93 is preferably about 0.005 to 50 μm, and more preferably about 1 to 5 μm.
SiO ₂ If the thickness of the film 93 is smaller than the lower limit, the adhesion between the first resin layer 91 and the second resin layer 92 may be insufficient, and ₂ Even if the thickness of the film 93 is larger than the upper limit, improvement in the adhesiveness cannot be expected, and the thickness of the microlens substrate 1 becomes uselessly large, and the transmittance decreases.
[0042]
In the microlens substrate 1, the thickness T1 of the first substrate 2 with concave portions for microlenses is larger than the thickness T2 of the second substrate 8 with concave portions for microlenses.
In the microlens substrate 1, the radius of curvature R1 of the lens surface on the incident side of the microlens 4 is larger than the radius of curvature R2 of the lens surface on the exit side. That is, in the microlens substrate 1, the radius of curvature of the first concave portion 31 is larger than the radius of curvature of the second concave portion 32.
Further, in the microlens substrate 1, the distance between the opposing end faces of the first microlens concave substrate 2 and the second microlens concave substrate 8 (the resin layer 9 where the microlens 4 is not formed) is formed. Of the microlens 4 substantially corresponds to and corresponds to the edge thickness of the microlens 4.
[0043]
When the microlens 4 is formed of a biconvex lens like the microlens substrate 1, the aberration (particularly, spherical aberration) of the microlens 4 is reduced. Therefore, the incident light L that has entered not only near the center of the microlens 4 but also near the edge of the microlens 4 is suitably collected by the microlens 4. That is, the light use efficiency of the micro lens 4 is high. Therefore, the microlens substrate 1 can emit the emission light L having high luminance.
[0044]
For example, in order to increase the lens power, two hemispherical plano-convex lenses are formed by bonding two substrates provided with convex microlenses and joining the convex portions so that the convex portions face each other. It is conceivable to provide such a lens system on a substrate. However, such a lens system cannot sufficiently reduce the aberration of the microlens. On the other hand, when the micro lens 4 is formed of a biconvex lens like the micro lens substrate 1, the aberration of the micro lens 4 can be suitably reduced.
[0045]
In particular, as in the microlens substrate 1 shown in FIG. 1, when the radius of curvature R1 of the lens surface on the entrance side of the microlens 4 is larger than the radius of curvature R2 of the lens surface on the exit side, the aberration of the microlens 4 (particularly the spherical surface) Aberration) is extremely small. Therefore, in the microlens 4 shown in FIG. 1, it is extremely suitably prevented that the outgoing light is emitted in a direction largely shifted from the optical axis of the microlens 4. Therefore, the light use efficiency of the micro lens 4 is very high. Therefore, the microlens substrate 1 can emit the outgoing light L having extremely high luminance.
[0046]
Moreover, when the aberration of the microlens 4 is reduced, it is possible to preferably prevent the emitted light from being emitted in a direction that is significantly shifted from the optical axis of the microlens 4. For this reason, when the microlens substrate 1 is used for a liquid crystal panel, it is possible to appropriately prevent the outgoing light passing through the microlens 4 from entering the adjacent pixels. That is, crosstalk between pixels is prevented. Therefore, when an image is formed using the liquid crystal panel provided with the microlens substrate 1, the luminance of black becomes extremely low.
In particular, as described above, the resin layer 9 is composed of the first resin layer (high-refractive-index resin layer) 91 and the second resin layer (low-refractive-index resin layer) 92, whereby the first microlens is formed. The light L incident from the side of the substrate with concave portions for use 2 can be emitted from the side of the substrate with concave portions for second microlenses 8 as parallel light.
[0047]
Since the microlens substrate 1 has such advantages, when an image is formed using a liquid crystal panel provided with the microlens substrate 1, black is darker and white is brighter. Therefore, in the liquid crystal panel including the microlens substrate 1, a high contrast ratio can be obtained, and a more beautiful image can be formed. Further, like the microlens substrate 1 shown in FIG. 1, the resin provided between the first microlens concave substrate 2 and the second microlens concave substrate 8 constitutes the microlens 4. That is, the first microlens concave substrate 2 and the second microlens concave substrate 8 are joined via the resin layer 9 so that the first concave portion 31 and the second concave portion 32 face each other. In this case, it is not necessary to reduce the thickness of the incident side substrate, that is, the first substrate 2 with concave portions for microlenses. Therefore, the strength of the microlens substrate 1 is improved.
[0048]
When the resin is filled in the first concave portion 31 and the second concave portion 32 like the microlens substrate 1 shown in FIG. 1, the substrate 2 with the concave portion for the first microlens and the concave portion for the second microlens are provided. The contact area between the substrate 8 and the resin layer 9 increases. For this reason, the bonding strength between the first microlens concave substrate 2 and the second microlens concave substrate 8 is increased (anchor effect).
[0049]
Also, as in the microlens substrate 1 shown in FIG. 1, the distance between the opposing end surfaces of the first microlens concave substrate 2 and the second microlens concave substrate 8 is substantially equal to the edge thickness of the microlens 4. When they match and correspond, it becomes easy to design the microlens substrate 1 so as to obtain desired optical characteristics.
In addition to the effects described above, the microlens substrate 1 having the configuration shown in FIG. 1 has an advantage that it can be manufactured relatively inexpensively.
[0050]
From the viewpoint of more effectively obtaining the above-described effects, the microlens substrate 1 preferably satisfies the following conditions.
The maximum thickness Tm of the microlens 4 is preferably about 10 to 120 μm, and more preferably about 15 to 60 μm. Thereby, the microlens 4 can collect light more appropriately.
[0051]
In the microlens substrate 1, the distance between the mutually facing end surfaces of the second microlens concave substrate 2 and the second microlens concave substrate 8, that is, the edge thickness of the microlens 4 is about 0.1 to 100 μm. Preferably, the thickness is about 1 to 20 μm. Thereby, the microlens substrate 1 can obtain the above-mentioned effects more effectively.
[0052]
When the microlens substrate 1 is used for a liquid crystal panel or the like, the radius of curvature R1 of the lens curved surface on the incident side of the microlens 4, that is, the radius of curvature of the first concave portion 31 is preferably about 5 to 50 μm. Further, it is preferable that the radius of curvature R2 of the lens curved surface on the exit side of the microlens 4, that is, the radius of curvature of the second concave portion 32 is about 3 to 30 μm. Thereby, a higher contrast ratio can be obtained in the liquid crystal panel. Further, the design of the liquid crystal panel becomes easy.
[0053]
In the microlens substrate 1, the relationship between the radius of curvature R1 of the lens surface on the entrance side of the microlens 4 and the radius of curvature R2 of the lens surface on the exit side of the microlens 4 is 1 <R1 / R2 ≦ 3.3. Preferably, the relationship is satisfied, and more preferably, 1.1 ≦ R1 / R2 ≦ 2.2. Thereby, the micro lens 4 can reduce the aberration more suitably.
[0054]
The thickness T1 of the substrate 2 with concave portions for the first microlenses varies depending on various conditions such as the material constituting the substrate 2 with concave portions for the first microlenses, the refractive index, and the like, but is preferably about 0.3 to 5 mm. More preferably, it is more preferably about 0.5 to 2 mm. This makes it easy to achieve both compactness and strength in the microlens substrate 1.
[0055]
When the microlens substrate 1 is used for a liquid crystal panel or the like, the thickness T2 of the substrate 8 with concave portions for second microlenses is preferably about 5 to 1000 μm, more preferably about 10 to 150 μm. The thickness T2 of the substrate 8 with concave portions for second microlenses is preferably about 1/1000 to 1/2 of the thickness T1 of the substrate 2 with concave portions for first microlenses, and It is more preferably about / 5. Thereby, the microlens substrate 1 can secure high strength.
[0056]
When such a microlens substrate 1 is used for a liquid crystal panel and the liquid crystal panel has a glass substrate (for example, a glass substrate 171 described later) in addition to the first glass substrate 29, the thermal expansion of the first glass substrate 29 The coefficient is preferably substantially equal to the coefficient of thermal expansion of the other glass substrate of the liquid crystal panel (for example, the ratio of the coefficient of thermal expansion to about 1/10 to about 10). As a result, in the obtained liquid crystal panel, warpage, bending, peeling, and the like caused by a difference in thermal expansion coefficient between the two when the temperature changes are prevented.
From this viewpoint, it is preferable that the first glass substrate 29 and the other glass substrates included in the liquid crystal panel are formed of the same type of material. As a result, warpage, bending, peeling, and the like due to a difference in the coefficient of thermal expansion when the temperature changes are effectively prevented.
[0057]
In particular, when the microlens substrate 1 is used for a high-temperature polysilicon TFT liquid crystal panel, the first glass substrate 29 is preferably made of quartz glass. The TFT liquid crystal panel has a TFT substrate as a liquid crystal driving substrate. For such a TFT substrate, quartz glass whose characteristics are hardly changed by the environment at the time of manufacturing is preferably used. Accordingly, in response to this, by forming the first glass substrate 29 from quartz glass, it is possible to obtain a TFT liquid crystal panel which is less likely to be warped or bent and has excellent stability.
[0058]
In such a microlens substrate 1, the coefficient of thermal expansion of the second glass substrate 89 is substantially equal to the coefficient of thermal expansion of the first glass substrate 29 (for example, the ratio of the coefficients of thermal expansion of both is about 1/10 to 10). It is preferable that Thus, warpage, bending, peeling, and the like caused by the difference in the thermal expansion coefficient between the first glass substrate 29 and the second glass substrate 89 are prevented. In particular, in the microlens substrate 1, the first glass substrate 29 and the second glass substrate 89 are preferably made of the same type of material. Thereby, such an effect can be obtained more effectively.
[0059]
In such a microlens substrate 1, the spacer 5 that defines the thickness of the second resin layer 92 and the resin layer 9 is provided outside the region where the microlens 4 is provided, that is, in the ineffective lens region 100. ing. The spacer 5 is made of, for example, spherical particles.
By disposing the spacer 5 on the microlens substrate 1, it is easy to set the thickness of the second resin layer 92 and the resin layer 9 to a predetermined thickness. In addition, thickness unevenness of the second resin layer 92 and the resin layer 9 can be suppressed. In particular, as shown in FIG. 1, when the spacer 5 is provided in the non-effective lens area 100, the spacer 5 is less likely to adversely affect the optical characteristics of the microlens 4.
[0060]
On the substrate 2 with the concave portion for the first microlens, the first alignment mark 71 serving as an index of alignment is provided outside the region where the microlens 4 (the first concave portion 31) is provided, that is, in the non-effective lens region 100. Is provided. Furthermore, on the second microlens recessed substrate 8, a second index serving as an index for alignment is provided outside the region where the microlenses 4 (second concave portions 32) are provided, that is, in the non-effective lens region 100. An alignment mark 72 is provided.
Providing the first alignment mark 71 and the second alignment mark 72 on the microlens substrate 1 facilitates the alignment between the first concave portion 31 and the second concave portion 32.
[0061]
In the microlens substrate 1 shown in FIG. 1, the thickness T1 of the first microlens recessed substrate 2 is greater than the thickness T2 of the second microlens recessed substrate 8; It may be the same. In the microlens substrate 1 shown in FIG. 1, the radius of curvature R1 of the lens surface on the entrance side of the microlens 4 is larger than the radius of curvature R2 of the lens surface on the exit side. Good. Further, the radius of curvature R2 may be larger than the radius of curvature R1. Furthermore, the edge thickness of the microlenses 4 does not need to match or correspond to the distance between the mutually facing end surfaces of the first microlens concave substrate 2 and the second microlens concave substrate 8.
In the microlens substrate 1 of the present embodiment, the spacer is provided only on the second resin layer 92. However, the spacer may be provided on the first resin layer 91, or the spacer may not be provided. . Further, the alignment mark need not be provided on the microlens substrate.
[0062]
The microlens substrate 1 described above can be manufactured, for example, as follows. Hereinafter, a method for manufacturing the microlens substrate 1 will be described with reference to FIGS.
When manufacturing the microlens substrate 1, it is necessary to first prepare the first substrate 2 with concave portions for microlenses and the second substrate 8 with concave portions for microlenses. The substrate 2 with concave portions for first microlenses and the substrate 8 with concave portions for second microlenses can be manufactured and prepared, for example, as follows. Since the substrate 8 with concave portions for second microlenses can be manufactured in the same manner as the substrate 2 with concave portions for first microlenses, the method for producing the substrate 2 with concave portions for first microlenses will be representatively described below. explain.
[0063]
In the method for manufacturing the first substrate 2 with concave portions for microlenses described below, the first concave portions 31 are formed on the first glass substrate 29 using the mask layer 6 and a part of the mask layer 6 is used. First alignment marks 71 are formed.
First, for example, an unprocessed first glass substrate 29 is prepared as a base material. As the first glass substrate 29, a substrate having a uniform thickness and having no bending or flaw is preferably used.
[0064]
<1> First, a mask layer 6 is formed on the surface of the first glass substrate 29, as shown in FIG. At the same time, a back surface protection layer 69 is formed on the back surface of the first glass substrate 29 (the surface opposite to the surface on which the mask layer 6 is formed).
It is preferable that the mask layer 6 has resistance in an etching operation in a step <4> described later.
[0065]
From this viewpoint, as a material constituting the mask layer 6, for example, metals such as Au / Cr, Au / Ti, Pt / Cr, and Pt / Ti; silicon such as polycrystalline silicon (polysilicon) and amorphous silicon; Silicon nitride and the like can be given. When silicon is used for the mask layer 6, the adhesion between the mask layer 6 and the first glass substrate 29 is improved. The use of metal for the mask layer 6 improves the visibility of the first alignment mark 71 formed.
[0066]
The thickness of the mask layer 6 is not particularly limited, but is preferably about 0.01 to 10 μm, and more preferably about 0.2 to 1 μm. If the mask layer 6 is too thin, the first glass substrate 29 may not be sufficiently protected, and if the mask layer 6 is too thick, the mask layer 6 may be easily peeled off due to internal stress of the mask layer 6.
The mask layer 6 can be formed by, for example, a chemical vapor deposition method (CVD method), a vapor deposition method such as a sputtering method or a vapor deposition method, plating, or the like.
[0067]
The back surface protection layer 69 formed on the back surface of the first glass substrate 29 is for protecting the back surface of the first glass substrate 29 in the subsequent steps. The back surface protective layer 69 suitably prevents the back surface of the first glass substrate 29 from being eroded and deteriorated. The back surface protective layer 69 is made of, for example, the same material as the mask layer 6. Therefore, the back surface protective layer 69 can be provided at the same time as the formation of the mask layer 6, similarly to the mask layer 6.
[0068]
<2> Next, as shown in FIG. 4B, an opening 61 and a second opening 62 are formed in the mask layer 6.
The opening 61 is provided, for example, at a position where the first concave portion 31 is formed. The shape (planar shape) of the opening 61 preferably corresponds to the shape (planar shape) of the first concave portion 31 to be formed.
The second opening 62 is provided at a position where the first alignment mark 71 is formed. The shape of the second opening 62 corresponds to, for example, a part of the shape of the first alignment mark 71.
[0069]
The opening 61 and the second opening 62 can be formed by, for example, a photolithography method. Specifically, first, a resist layer (not shown) having a pattern corresponding to the openings 61 and the second openings 62 is formed on the mask layer 6. Next, using the resist layer as a mask, a part of the mask layer 6 is removed. Next, the resist layer is removed. Thereby, an opening 61 and a second opening 62 are formed. Partial removal of the mask layer 6 can be performed by, for example, dry etching with CF gas, chlorine-based gas, or the like, or immersion (wet etching) in a stripping solution such as an aqueous solution of hydrofluoric acid and nitric acid or an aqueous alkaline solution.
[0070]
<3> Next, as shown in FIG. 4C, a protective layer 75 is formed on the mask layer 6.
This protective layer 75 is provided at a position where the first alignment mark 71 is formed. The shape of the protective layer 75 corresponds to the shape of the first alignment mark 71. The protective layer 75 preferably has resistance to etching in the step <4> described below and removal of the mask layer 6 in the step <5> described later. Thereby, the shape of the first alignment mark 71 can be accurately formed into a predetermined shape.
From such a viewpoint, the protective layer 75 is made of, for example, a metal such as Au / Cr, Au / Ti, Pt / Cr, Pt / Ti, or SiC; a silicon compound such as polycrystalline silicon or amorphous silicon; It is preferable to use a resist such as a negative resist.
[0071]
The protective layer 75 is preferably made of a material different from the constituent material of the mask layer 6. Therefore, for example, when the mask layer 6 is made of silicon, the protective layer 75 is preferably made of metal or the like. When the mask layer 6 is made of a metal, for example, the protective layer 75 is preferably made of silicon or the like. Thereby, when removing the mask layer 6 in the step <5> described later, it is possible to preferably prevent the protective layer 75 from being etched.
[0072]
The protective layer 75 can be formed, for example, by a vapor deposition method such as vapor deposition (mask vapor deposition) and sputtering (mask sputtering). Further, a photolithography method may be combined with such a method. For example, a constituent material of the protective layer 75 is formed on the entire first glass substrate 29 so as to cover the mask layer 6, and then a resist corresponding to the position and the shape of the first alignment mark 71 is patterned on the film. Then, the first alignment mark 71 can be formed by performing etching or the like.
[0073]
<4> Next, as shown in FIG. 5D, a first concave portion 31 is formed on the first glass substrate 29.
Examples of a method for forming the first concave portion 31 include an etching method such as a dry etching method and a wet etching method. For example, by performing etching, the first glass substrate 29 is isotropically etched from the opening 61 to form the first concave portion 31 having a lens shape.
[0074]
In particular, according to the wet etching method, the first concave portion 31 having a more ideal lens shape can be formed. As an etchant for performing wet etching, for example, a hydrofluoric acid-based etchant or the like is suitably used. At this time, if alcohol such as glycerin (particularly polyhydric alcohol) is added to the etching solution, the surface of the first concave portion 31 becomes extremely smooth.
[0075]
<5> Next, as shown in FIG. 5E, the mask layer 6 is removed. At this time, the back surface protective layer 69 is also removed together with the removal of the mask layer 6.
This includes immersion (wet etching) in a stripping solution (removal solution) such as an alkaline aqueous solution (eg, tetramethyl ammonium hydroxide aqueous solution), hydrochloric acid + nitric acid aqueous solution, hydrofluoric acid + nitric acid aqueous solution, CF gas, chlorine-based gas Can be performed by dry etching or the like.
[0076]
In particular, if the mask layer 6 and the back surface protection layer 69 are removed by immersing the first glass substrate 29 in a removal liquid, the mask layer 6 and the back surface protection layer 69 can be efficiently removed with a simple operation.
At this time, since the protective layer 75 protects the mask layer 6 in the portion where the protective layer 75 is formed, the mask layer 6 is not removed and remains on the glass substrate 5.
[0077]
<6> Next, the protective layer 75 is removed. This can be performed, for example, by wet etching using a mixed solution of hydrochloric acid and nitric acid, an aqueous alkaline solution, or the like as a stripping solution.
Thereby, as shown in FIG. 5F, the portion of the mask layer 6 protected by the protection layer 75 is exposed as the first alignment mark 71.
As described above, as shown in FIG. 5F, a first microlens recessed substrate in which a large number of first recesses 31 and first alignment marks 71 are formed at predetermined positions on a first glass substrate 29. 2 is obtained.
[0078]
As described above, when the first alignment mark 71 is formed by leaving a part of the mask layer 6, the first alignment mark 71 can also be formed when forming the first concave portion 31. Therefore, the number of steps for manufacturing the first substrate with concave portions for microlenses 2 can be simplified.
Note that the first alignment mark 71 may be formed in a separate step not related to the step of forming the first concave portion 31.
[0079]
The substrate 8 with the concave portion for the second microlens in which the second concave portion 32 and the second alignment mark 72 are formed on the surface of the second glass substrate 89 is manufactured and manufactured in the same manner as the substrate 2 with the concave portion for the first microlens. Can be prepared.
When manufacturing the substrate 8 with concave portions for second microlenses, the area of the opening 61 formed in the step <2> or the etching conditions (for example, etching time, etching temperature, composition of the etching liquid, etc.) in the step <4> are determined. It is preferable that at least one of the conditions is different from the conditions when manufacturing the first substrate 2 with concave portions for microlenses. As described above, assuming that the manufacturing conditions of the second microlens recessed substrate 8 are partially different from the manufacturing conditions of the first microlens recessed substrate 2, the radius of curvature of the first recessed portion 31 and the second recessed portion 32 are different. It is easy to make the radius of curvature different.
The microlens substrate 1 can be manufactured using, for example, the following using the first microlens recessed substrate 2 and the second microlens recessed substrate 8 as described below.
[0080]
<7> First, as shown in FIG. 6A, a predetermined refractive index (a refractive index higher than the refractive indexes of the first glass substrate 29 and the second glass substrate 89) is provided on the substrate 2 with the concave portion for the first microlens. Is supplied, and the first concave portion 31 is filled with the resin 94.
[0081]
<8> Next, as shown in FIG. 6B, the transparent substrate mold 28 is bonded to the resin 94 and pressed and adhered. Note that, for example, a mold release agent or the like may be applied to the mold surface that directly contacts the resin 94.
[0082]
<9> Next, the resin 94 is cured. This curing method is appropriately selected depending on the type of the resin, and examples thereof include ultraviolet irradiation, heating, and electron beam irradiation.
Thus, the first resin layer 91 is formed on the first substrate 2 with concave portions for microlenses.
[0083]
<10> Next, as shown in FIG. 6C, the transparent substrate mold 28 is removed from the first resin layer 91. Thereby, the first microlens substrate 2A in which the first resin layer (high-refractive-index resin layer) 91 is formed on the substrate 2 with concave portions for microlenses is obtained.
When the uncured resin is supplied onto the substrate 2 with concave portions for microlenses, a spacer may be included in the resin. Thereby, the thickness of the first resin layer 91 is defined with high accuracy, and the thickness unevenness of the first resin layer 91 and the resin layer 9 is suitably suppressed.
[0084]
<11> Next, as shown in FIG. 7, a predetermined refractive index (the second refractive index (the An uncured resin 95 having a refractive index lower than the refractive indexes of the first glass substrate 29 and the second glass substrate 89 is supplied, and the second concave portion 32 is filled with the resin 95. At this time, the uncured resin 96 including the spacers 5 is supplied onto the second microlens recessed substrate 8. The resin 96 is supplied to, for example, a portion where the spacer 5 is installed.
[0085]
The resin 96 preferably contains the spacer 5 at about 1 to 50% by weight, more preferably about 5 to 40% by weight. When the content of the spacer 5 is within this range, the thickness of the second resin layer 92 and the resin layer 9 can be regulated with high accuracy while suppressing the decrease in the adhesiveness of the resin.
The resin 95 and the resin 96 are preferably made of the same type of material. Thus, in the microlens substrate 1 to be manufactured, warpage, deflection, and the like due to the difference in the thermal expansion coefficient between the resin 95 and the resin 96 are preferably prevented.
[0086]
When the resin 96 is supplied onto the second microlens recessed substrate 8, the spacers 5 are preferably dispersed in the resin 96. When the spacers 5 are dispersed in the resin 96, it is easy to arrange the spacers 5 uniformly. Thereby, the thickness unevenness of the formed second resin layer 92 and the resin layer 9 is more suitably suppressed.
[0087]
When the spacer is in the form of particles, like the spacer 5 of the present embodiment, it is possible to preferably prevent the adhesion between the resin and the substrate from being reduced. In addition, when the spacer is in the form of particles, it is easy to disperse the spacer 5 in the resin 96.
When the spacer is a spherical particle like the spacer 5, the spacer is preferably prevented from overlapping each other. Therefore, the accuracy of defining the thickness of the second resin layer 92 and the resin layer 9 can be further increased. In addition, the thickness unevenness of the second resin layer 92 and the resin layer 9 can be prevented very suitably.
[0088]
The average particle size of the spacer 5 can be, for example, substantially the same as the thickness of the second resin layer 92. The standard deviation of the particle size distribution of the spacer 5 is preferably within 20% of the average particle size of the spacer 5, more preferably within 5%. Thereby, the thickness unevenness of the second resin layer 92 and the resin layer 9 is more suitably suppressed.
[0089]
Further, the density of the spacer 5 is set to ρ1 (g / cm ³ ), The density of the resin constituting the second resin layer 92 (for example, the density after curing) is ρ2 (g / cm ³ ), Ρ1 / ρ2 is preferably about 0.6 to 1.4, more preferably about 0.8 to 1.2. Thereby, the spacers 5 can be more uniformly dispersed in the resin 96. For this reason, thickness unevenness of the second resin layer 92 and the resin layer 9 can be more suitably suppressed.
In the microlens substrate 1 of the present embodiment, the spacers 5 are spherical particles, but the spacers need not be spherical particles. For example, the particle shape of the spacer may be needle-like, rod-like, oval, oval, or the like. Furthermore, the spacer does not have to be particulate. For example, the spacer may be sheet-like, fiber-like, or the like.
[0090]
<12> Next, as shown in FIG. 7, a first microlens substrate body (counterpart) 2A on which the first resin layer 91 is formed is placed on the resin 95 and the resin 96.
At this time, the first microlens substrate 2A is placed on the resin such that the first recess 31 and the second recess 32 face each other. At this time, the first microlens substrate 2A is placed on the resin so that the first microlens substrate 2A comes into contact with the spacer 5.
As a result, the distance between the end faces of the first microlens substrate body 2A and the second microlens recessed substrate 8 facing each other is defined by the spacer 5. Therefore, the edge thickness and the maximum thickness of the microlens 4 are defined with high accuracy.
[0091]
<13> Next, using the first alignment mark 71 and the second alignment mark 72, the first recess 31 and the second recess 32 are aligned.
Thereby, the second recess 32 can be accurately positioned at a position corresponding to the first recess 31. For this reason, the shape and optical characteristics of the formed micro lens 4 become closer to the design values.
[0092]
For example, the first micro mark is set so that the positions of the first alignment mark 71 and the second alignment mark 72 on the plane are overlapped, or the distance between the first alignment mark 71 and the second alignment mark 72 is fixed. Positioning can be performed by moving the lens substrate body 2A relative to the second microlens recessed substrate 8.
[0093]
When the spacer 5 is formed of spherical particles as in the present embodiment, the spacer 5 functions like a roller at the time of positioning. Therefore, it is easy to move the first microlens substrate body 2A in a direction parallel to the second microlens recessed substrate 8 when performing the alignment. That is, when the spacer 5 is formed of spherical particles, the first microlens substrate 2A can be easily moved, and the alignment can be easily performed.
[0094]
<14> Next, the resin 95 and the resin 96 are cured to form a second resin layer (low-refractive-index resin layer) 92. This curing method is appropriately selected depending on the type of the resin, and examples thereof include ultraviolet irradiation, heating, and electron beam irradiation.
As a result, the second microlens recessed substrate 8 is joined to the first microlens substrate 2A via the second resin layer 92. Further, the second resin layer (low-refractive-index resin layer) 92 and the first resin layer (high-refractive-index resin layer) 91 are joined to form the resin layer 9. The micro lens 4 is formed of the resin that forms the resin layer 9 and is filled between the first concave portion 31 and the second concave portion 32.
[0095]
<15> Thereafter, if necessary, as shown in FIG. 8, grinding, polishing, or the like may be performed to adjust the thickness of the second microlens recessed substrate 8.
Thereby, the microlens substrate 1 as shown in FIG. 1 can be obtained.
When the microlens substrate 1 is manufactured as described above, the microlens substrate can be manufactured with a relatively small number of steps.
[0096]
Note that, after the step <10>, as shown in FIG. 6D, SiO 2 is formed on the first resin layer 91 of the first microlens substrate 2A. ₂ A film 93 may be formed. Thereby, in the step <14>, when the first microlens substrate 2A and the second microlens recessed substrate 8 are joined via the second resin layer 92 as shown in FIG. The adhesiveness between the resin layer 91 and the second resin layer 92 is improved.
[0097]
Such SiO ₂ The film 93 can be formed by, for example, a vapor deposition method such as a sputtering method, a CVD method, or an evaporation method. According to the vapor phase film forming method, it is dense, has high adhesion to the resin layer, and has a thin SiO. ₂ A film 93 can be formed. Among the vapor phase film forming methods, the sputtering method uses SiO 2 ₂ The thickness unevenness and variation of the film 93 can be made extremely small. ₂ This is more preferable because the adhesion between the film 93 and the resin layers 91 and 92 can be made extremely high, and composition adjustment and stress adjustment are easy.
[0098]
Needless to say, the microlens substrate 1 of the present invention can be used for, for example, various electro-optical devices such as a CCD and an optical communication device, and other devices, in addition to the liquid crystal panel facing substrate and the liquid crystal panel described below. .
For example, a black matrix 11 having an opening 111 is formed on the second microlens recessed substrate 8 of the microlens substrate 1, and then a transparent conductive film (conductive film) 12 is formed so as to cover the black matrix 11. By doing so, the counter substrate 10 for a liquid crystal panel can be manufactured (see FIG. 9).
The black matrix 11 has a light-shielding function, and is made of, for example, a metal such as Cr, Al, an Al alloy, Ni, Zn, or Ti, or a resin in which carbon, titanium, or the like is dispersed.
The transparent conductive film 12 has conductivity, for example, indium tin oxide (ITO), indium oxide (IO), tin oxide (SnO). ₂ ).
[0099]
The black matrix 11 is formed, for example, by forming a thin film to be the black matrix 11 on the second microlens recessed substrate 8 by a vapor deposition method (for example, vapor deposition, sputtering, or the like), and then forming an opening 111 on the thin film. Is formed by forming a resist film having the following pattern, then performing wet etching to form an opening 111 in the thin film, and then removing the resist film.
[0100]
When forming the opening 111, the alignment between the microlens 4 and the opening 111 may be performed using the first alignment mark 71 or the second alignment mark 72.
Further, the transparent conductive film 12 can be provided by, for example, a vapor deposition method such as vapor deposition or sputtering.
As described above, by forming the black matrix 11 and the transparent conductive film 12 on the microlens substrate 1, the counter substrate 10 for a liquid crystal panel can be obtained.
Note that the black matrix 11 may not be provided.
[0101]
Hereinafter, a liquid crystal panel (electro-optical device) using such a liquid crystal panel counter substrate 10 will be described with reference to FIG.
As shown in FIG. 9, a liquid crystal panel (TFT liquid crystal panel) 16 of the present invention includes a TFT substrate (liquid crystal driving substrate) 17, an opposite substrate 10 for a liquid crystal panel bonded to the TFT substrate 17, a TFT substrate 17, and a liquid crystal. It has a second spacer 19 for defining the distance from the panel opposing substrate 10, and a liquid crystal layer 18 made of liquid crystal sealed in a gap between the TFT substrate 17 and the liquid crystal panel opposing substrate 10.
[0102]
The opposing substrate 10 for a liquid crystal panel includes a microlens substrate 1, a black matrix 11 provided on the second microlens recessed substrate 8 of the microlens substrate 1, and having an opening 111 formed therein, and a second microlens substrate. A transparent conductive film (common electrode) 12 is provided on the substrate 8 with concave portions so as to cover the black matrix 11.
[0103]
The TFT substrate 17 is a substrate for driving the liquid crystal of the liquid crystal layer 18, and includes a glass substrate 171 and a plurality (many) of pixel electrodes 172 provided on the glass substrate 171 and arranged in a matrix (in a matrix). And a plurality (many) of thin film transistors (TFTs) 173 corresponding to the respective pixel electrodes 172. In the drawings, illustration of a seal material, an alignment film, wiring, and the like are omitted.
[0104]
In the liquid crystal panel 16, the TFT substrate 17 and the liquid crystal panel opposing substrate 10 are attached to the second spacer 19 so that the transparent conductive film 12 of the liquid crystal panel opposing substrate 10 faces the pixel electrode 172 of the TFT substrate 17. And are joined at a fixed distance from each other. The opposite surfaces of the TFT substrate 17 and the liquid crystal panel opposing substrate 10 are in contact with the second spacers 19, respectively.
The glass substrate 171 is preferably made of quartz glass for the reasons described above.
[0105]
The pixel electrode 172 drives the liquid crystal of the liquid crystal layer 18 by charging and discharging with the transparent conductive film (common electrode) 12. The pixel electrode 172 is made of, for example, the same material as the transparent conductive film 12 described above.
The thin film transistor 173 is connected to a corresponding pixel electrode 172 in the vicinity. The thin film transistor 173 is connected to a control circuit (not shown), and controls a current supplied to the pixel electrode 172. Thus, charging and discharging of the pixel electrode 172 are controlled.
[0106]
The liquid crystal layer 18 contains liquid crystal molecules (not shown), and the liquid crystal molecules, that is, the orientation of the liquid crystal changes in response to the charging and discharging of the pixel electrode 172.
In such a liquid crystal panel 16, the spacer 5 included in the microlens substrate 1 has physical properties different from those of the second spacer 19 (for example, at least one of elastic modulus, hardness, Poisson's ratio, specific gravity, and the like). Is preferred. The spacer 5 and the second spacer 19 differ from each other in the nature of the substance in contact therewith. The purpose and the function of the spacer 5 are different from those of the second spacer 19. Furthermore, the steps performed during the manufacture of the spacer 5 and the second spacer 19 are also different. Therefore, if the physical properties of the spacer 5 and the physical properties of the second spacer 19 are different, it is possible to install spacers having optimal properties according to the respective purposes, functions, roles, and the like.
[0107]
In particular, the elastic modulus of the spacer 5 (the elastic modulus of the constituent material of the spacer 5) is preferably lower than the elastic modulus of the second spacer 19 (the elastic modulus of the constituent material of the second spacer 19). Thereby, in the liquid crystal panel 16, the uniformity of the thickness of the liquid crystal layer 18 is improved. This is due to the following mechanism. When manufacturing the liquid crystal panel 16, the TFT substrate 17 and the opposing substrate 10 for a liquid crystal panel are joined. At this time, a force is applied to the TFT substrate 17 against the liquid crystal panel opposing substrate 10, and a force is applied to the liquid crystal panel opposing substrate 10 from the TFT substrate 17. In such a case, it is ideal that the force applied to the TFT substrate 17 and the opposing substrate 10 for a liquid crystal panel completely coincides with the normal line of each substrate. However, in practice, the forces applied to these substrates are negligible, but may deviate from the normal. At this time, if the elastic modulus of the spacer 5 is lower than the elastic modulus of the second spacer 19, the spacer 5 contracts, and the contraction of the second spacer 19 is suppressed. As a result, a decrease in the uniformity of the thickness of the liquid crystal layer 18 is prevented. When the uniformity of the thickness of the liquid crystal layer 18 is high, brightness unevenness of an image to be formed is extremely suitably suppressed, and an advantage that visibility is improved is obtained.
From the viewpoint of obtaining such an effect more remarkably, the elastic modulus of the constituent material of the spacer 5 is set to 40 to 800 kgf / mm, although it differs slightly depending on the properties of the second spacer 19 and the like. ² It is preferable to set the degree.
In such a liquid crystal panel 16, usually, one microlens 4, one opening 111 of the black matrix 11 corresponding to the optical axis Q of the microlens 4, one pixel electrode 172, and one pixel One thin film transistor 173 connected to the electrode 172 corresponds to one pixel.
[0108]
The incident light L incident from the liquid crystal panel opposite substrate 10 side passes through the first microlens recessed substrate 2, is collected to a predetermined size when passing through the microlens 4, and is converted into parallel light, The light passes through the resin layer 9, the substrate 8 with the second microlens concave portion, the opening 111 of the black matrix 11, the transparent conductive film 12, the liquid crystal layer 18, the pixel electrode 172, and the glass substrate 171. At this time, since a polarizing plate (not shown) is usually arranged on the incident side of the microlens substrate 1, when the incident light L passes through the liquid crystal layer 18, the incident light L is linearly polarized. . At this time, the polarization direction of the incident light L is controlled according to the alignment state of the liquid crystal molecules in the liquid crystal layer 18. Therefore, by transmitting the incident light L transmitted through the liquid crystal panel 16 through a polarizing plate (not shown), it is possible to control the luminance of the output light.
[0109]
As described above, in the liquid crystal panel 16, the incident light L that has passed through the microlens 4 is condensed to a predetermined size, converted into parallel light, and passes through the opening 111 of the black matrix 11. Therefore, the liquid crystal panel 16 can form a bright and clear image with a relatively small amount of light.
Moreover, since the microlens substrate 1 includes the microlenses 4 having the above-described properties, the liquid crystal panel 16 can form an image having a high contrast ratio.
[0110]
In the liquid crystal panel 16, for example, after a TFT substrate 17 manufactured by a known method and an opposite substrate 10 for a liquid crystal panel are subjected to an alignment treatment, the two are joined via a second spacer 19 and a sealing material (not shown). Then, a liquid crystal can be injected into the gap from a sealing hole (not shown) in the gap formed by this, and then the sealing hole can be closed to produce the liquid crystal. Thereafter, if necessary, a polarizing plate may be attached to the entrance side or the exit side of the liquid crystal panel 16.
[0111]
When the liquid crystal panel opposing substrate 10 and the TFT substrate 17 are joined, the alignment between the liquid crystal panel opposing substrate 10 and the TFT substrate 17 may be performed using the second alignment mark 72 or the like.
In the liquid crystal panel 16, a TFT substrate is used as a liquid crystal driving substrate. However, a liquid crystal driving substrate other than the TFT substrate, such as a TFD substrate or an STN substrate, may be used as the liquid crystal driving substrate.
[0112]
Hereinafter, a projection display device (liquid crystal projector) using the liquid crystal panel 16 will be described.
FIG. 10 is a diagram schematically showing the optical system of the projection display device of the present invention.
As shown in the figure, the projection display device 300 includes a light source 301, an illumination optical system including a plurality of integrator lenses, a color separation optical system (a light guide optical system) including a plurality of dichroic mirrors, and the like. A liquid crystal light valve (liquid crystal light shutter array) 24 corresponding to red (for red), a liquid crystal light valve (liquid crystal light shutter array) 25 corresponding to green (for green), and a liquid crystal light valve (liquid crystal shutter array) 25 corresponding to blue (for blue) A) a liquid crystal light valve (liquid crystal light shutter array) 26, a dichroic prism (color combining optical system) 21 having a dichroic mirror surface 211 that reflects only red light and a dichroic mirror surface 212 that reflects only blue light, and projection. A lens (projection optical system) 22.
[0113]
The illumination optical system has integrator lenses 302 and 303. The color separation optical system includes mirrors 304, 306, and 309, a dichroic mirror 305 that reflects blue light and green light (transmits only red light), a dichroic mirror 307 that reflects only green light, and a dichroic that reflects only blue light. A mirror (or a mirror that reflects blue light) 308 and condensing lenses 310, 311, 312, 313, and 314 are provided.
[0114]
The liquid crystal light valve 25 includes a liquid crystal panel 16 described above and a first polarizing plate (not shown) bonded to the incident surface side of the liquid crystal panel 16 (the surface side on which the microlens substrate is located, that is, the side opposite to the dichroic prism 21). ), And a second polarizing plate (not shown) joined to the exit surface side of the liquid crystal panel 16 (the surface side facing the microlens substrate, that is, the dichroic prism 21 side). The liquid crystal light valves 24 and 26 have the same configuration as the liquid crystal light valve 25. The liquid crystal panel 16 included in each of the liquid crystal light valves 24, 25 and 26 is connected to a drive circuit (not shown).
[0115]
In the projection display device 300, the dichroic prism 21 and the projection lens 22 constitute the optical block 20. A display unit 23 is composed of the optical block 20 and liquid crystal light valves 24, 25 and 26 fixedly mounted on the dichroic prism 21.
Hereinafter, the operation of the projection display device 300 will be described.
[0116]
White light (white light flux) emitted from the light source 301 passes through the integrator lenses 302 and 303. The light intensity (luminance distribution) of this white light is made uniform by the integrator lenses 302 and 303.
The white light transmitted through the integrator lenses 302 and 303 is reflected to the left side in FIG. 10 by the mirror 304, and the blue light (B) and the green light (G) of the reflected light are respectively reflected by the dichroic mirror 305 in FIG. The red light (R), which is reflected downward, passes through the dichroic mirror 305.
[0117]
The red light transmitted through the dichroic mirror 305 is reflected by the mirror 306 to the lower side in FIG. 10, and the reflected light is shaped by the condenser lens 310 and enters the liquid crystal light valve 24 for red.
Of the blue light and the green light reflected by the dichroic mirror 305, the green light is reflected by the dichroic mirror 307 to the left in FIG. 10, and the blue light passes through the dichroic mirror 307.
The green light reflected by the dichroic mirror 307 is shaped by the condenser lens 311 and enters the liquid crystal light valve 25 for green.
[0118]
Further, the blue light transmitted through the dichroic mirror 307 is reflected by the dichroic mirror (or mirror) 308 to the left in FIG. 10, and the reflected light is reflected by the mirror 309 to the upper side in FIG. The blue light is shaped by the condenser lenses 312, 313, and 314, and enters the liquid crystal light valve 26 for blue.
As described above, the white light emitted from the light source 301 is color-separated into three primary colors of red, green, and blue by the color separation optical system, respectively, guided to the corresponding liquid crystal light valves, and entered.
[0119]
At this time, each pixel (the thin film transistor 173 and the pixel electrode 172 connected thereto) of the liquid crystal panel 16 included in the liquid crystal light valve 24 is subjected to switching control by a driving circuit (driving means) operated based on a red image signal. (On / off), ie, modulated.
Similarly, the green light and the blue light enter the liquid crystal light valves 25 and 26, respectively, and are modulated by the respective liquid crystal panels 16, thereby forming a green image and a blue image. At this time, each pixel of the liquid crystal panel 16 included in the liquid crystal light valve 25 is subjected to switching control by a driving circuit that operates based on an image signal for green, and each pixel of the liquid crystal panel 16 included in the liquid crystal light valve 26 is controlled for blue. The switching is controlled by a drive circuit that operates based on the image signal.
Accordingly, the red light, the green light, and the blue light are modulated by the liquid crystal light valves 24, 25, and 26, respectively, to form a red image, a green image, and a blue image, respectively.
[0120]
The image for red color formed by the liquid crystal light valve 24, that is, the red light from the liquid crystal light valve 24 enters the dichroic prism 21 from the surface 213, is reflected on the dichroic mirror surface 211 to the left in FIG. The light passes through the surface 212 and exits from the exit surface 216.
The green image formed by the liquid crystal light valve 25, that is, the green light from the liquid crystal light valve 25 enters the dichroic prism 21 from the surface 214, passes through the dichroic mirror surfaces 211 and 212, and exits. Light exits from surface 216.
Further, the blue image formed by the liquid crystal light valve 26, that is, the blue light from the liquid crystal light valve 26 enters the dichroic prism 21 from the surface 215 and is reflected by the dichroic mirror surface 212 to the left in FIG. The light passes through the dichroic mirror surface 211 and exits from the exit surface 216.
[0121]
In this manner, the light of each color from the liquid crystal light valves 24, 25 and 26, that is, the images formed by the liquid crystal light valves 24, 25 and 26 are synthesized by the dichroic prism 21, thereby forming a color image. Is done. This image is projected (enlarged projection) on the screen 320 installed at a predetermined position by the projection lens 22.
At this time, since the projection display apparatus 300 includes the liquid crystal panel 16 including the above-described microlens substrate 1, an image having a high contrast ratio can be projected.
[0122]
In the above description, the case where the microlens substrate of the present invention is used for an opposing substrate for a liquid crystal panel, a liquid crystal panel, and a projection display device including the liquid crystal light valve has been described as an example. The present invention is not limited to this, and the microlens substrate of the present invention is used for various electro-optical devices such as a CCD and an optical communication device, an organic or inorganic EL (electroluminescence) display device, and other devices. It goes without saying that you can do it.
Further, the display device is not limited to the rear projection type display device. For example, the microlens substrate of the present invention can be used for a front projection type display device.
[0123]
【Example】
(Example 1)
A microlens substrate was manufactured as follows.
First, the first substrate with concave portions for microlenses was manufactured as follows.
First, a rectangular unprocessed quartz glass substrate (first glass substrate) having a thickness (T1) of 1.2 mm was prepared as a base material. The refractive index of this quartz glass substrate was 1.458. Next, the quartz glass substrate was immersed in a cleaning liquid (a mixed liquid of sulfuric acid and hydrogen peroxide solution) at 85 ° C. to perform cleaning, thereby cleaning the surface.
[0124]
-1- A 0.4 μm-thick polycrystalline silicon film (mask layer and back surface protection layer) was formed on the front and back surfaces of the quartz glass substrate by a CVD method.
This is because a quartz glass substrate is placed in a CVD furnace set at 600 ° C. and 80 Pa, and SiH ₄ Was supplied at a rate of 300 mL / min.
[0125]
-2- Next, openings (openings and second openings) were formed in the formed polycrystalline silicon film. At this time, the area of the opening was 9.5 μm. ² And
This was performed as follows. First, a resist layer having a pattern of a concave portion to be formed was formed on a polycrystalline silicon film. Next, the polycrystalline silicon film was dry-etched with CF gas to form an opening. Next, the resist layer was removed.
[0126]
-3- Next, on a portion of the polycrystalline silicon film and the quartz glass substrate where an alignment mark (first alignment mark) is to be formed, a 0.2 μm-thick Au / Cr film having a shape corresponding to the shape of the alignment mark is provided. A thin film (protective layer) was formed.
This was performed as follows. First, an Au / Cr thin film was formed on a polycrystalline silicon film by a sputtering method. This sputtering was performed by setting the sputtering pressure of the sputtering furnace to 5 mTorr and the power to 500 W. Next, a resist layer having a shape corresponding to the shape of the alignment mark was formed on the Au / Cr thin film. Next, the Au / Cr thin film was subjected to wet etching using a mixed solution of nitric acid and hydrochloric acid. Next, the resist layer was removed.
[0127]
-4- Next, the quartz glass substrate was immersed in an etching solution (a mixed aqueous solution of 10% hydrofluoric acid + 10% glycerin) for 148 minutes to perform wet etching, thereby forming a concave portion (first concave portion) on the quartz glass substrate.
[0128]
-5 Next, the quartz glass substrate was immersed in a 15% aqueous solution of tetramethylammonium hydroxide to remove the polycrystalline silicon films formed on the front and back surfaces of the quartz glass substrate.
[0129]
-6 Next, the quartz glass substrate was immersed in a mixed solution of nitric acid and hydrochloric acid to remove the Au / Cr thin film.
Thereby, a substrate with concave portions for microlenses (substrate with concave portions for first microlenses) in which alignment marks (first alignment marks) and a large number of concave portions (first concave portions) are formed on the quartz glass substrate is obtained. Was. The radius of curvature (R1) of the first concave portion was 15 μm.
[0130]
The area of the opening in step-2--9.5 m ² Then, a substrate with a concave portion for a second microlens was manufactured in the same manner as described above except that the etching time in the step-4 was changed to 98 minutes. Note that the radius of curvature (R2) of the second concave portion was 11 μm.
Then, the substrate with the concave portion for the first microlens was set so that the concave portion was opened vertically upward.
[0131]
-7- An uncured ultraviolet-curable epoxy resin (high-refractive-index resin) was applied on the substrate with concave portions for the first microlenses without bubbles using a dispenser. The refractive index of this epoxy resin was 1.592, and the difference from the refractive index (1.458) of the quartz glass substrate was 0.134.
[0132]
-8- Next, a 1.2 mm-thick transparent substrate ("NEOCERAM" manufactured by NEC Corporation) obtained by applying a release agent to the resin was bonded, pressed, and brought into close contact. The gap agent used at this time was 30 μm.
[0133]
Next, the resin was cured by irradiating ultraviolet rays to form a first resin (high-refractive-index resin layer). Finally, the transparent substrate mold was peeled off to obtain a first microlens substrate.
[0134]
-10.1- Next, an uncured UV-curable fluorine-based acrylic resin (low-refractive-index resin) is provided on the surface of the second microlens-contained substrate with concave portions other than where the spacers are to be provided. Was applied without bubbles using a dispenser. The refractive index of this fluorine-based acrylic resin was 1.387, and the difference from the refractive index (1.458) of the quartz glass substrate was 0.071.
[0135]
-10.2- Next, a resin in which spacers were uniformly dispersed was applied to portions of the second microlens substrate with concave portions where no concave portions were formed using a dispenser.
In addition, the same thing as the above-mentioned -10.1- was used for this resin. The content of the spacer in the resin was 10% by weight. Spherical plastic fine particles were used for the spacer. The average particle size of the spherical plastic fine particles is 10 μm, the standard deviation of the particle size distribution is 4.6% of the average particle size, and the density is 1.19 g / cm. ³ And the elastic modulus is 480 kgf / mm ² Met.
[0136]
11- Next, the first microlens substrate obtained in the step-9- was joined to the surface of the second microlens substrate with concave portions on which the resin was applied. At this time, a uniform pressure was applied to the entire first microlens substrate so that the first microlens substrate contacted the spacer.
[0137]
-12- Next, using the first alignment mark and the second alignment mark, alignment between the first concave portion and the second concave portion was performed.
[0138]
-13- Next, the resin was irradiated with ultraviolet rays to cure the resin, thereby forming a second resin layer (low-refractive-index resin layer). Further, a microlens was formed from the resin filled in the concave portion.
The maximum thickness (Tm) of the formed microlens was 30 μm, and the edge thickness (distance between opposing end faces of the first microlens concave substrate and the second microlens concave substrate) was 10 μm. .
[0139]
14- Finally, the substrate with concave portions for second microlenses was ground and polished to a thickness (T2) of 30 µm to obtain a microlens substrate having a structure as shown in Fig. 1.
[0140]
(Example 2)
SiO on the first microlens substrate ₂ A microlens substrate was manufactured in the same manner as in Example 1 except that a film was formed.
That is, after the step -9-, a 1 μm thick SiO 2 layer is formed on the first resin layer (high refractive index resin layer) of the microlens substrate. ₂ The film was formed by sputtering. The sputtering was performed in an Ar gas atmosphere, and the total sputtering pressure was 4 × 10 ^-3 Torr and the RF output was 500 W.
Thereafter, the steps after -10- were performed to obtain a microlens substrate having a structure as shown in FIG.
[0141]
(Comparative example)
A resin layer was formed using a single resin to produce a microlens substrate.
Substrates with concave portions for the first and second microlenses were manufactured in the same manner as in the above method up to the step-6.
[0142]
-7.1A- Next, an uncured ultraviolet curable acrylic resin (refractive index 1.59, Density after curing 1.18 g / cm ³ ) Was applied without bubbles using a dispenser.
[0143]
-7.2A- Next, using a dispenser, a resin in which spacers were uniformly dispersed was applied to portions of the first microlens substrate with concave portions where no concave portions were formed.
The same resin as that of -7.1A- was used for this resin. The content of the spacer in the resin was 10% by weight. Spherical plastic fine particles were used for the spacer. The average particle size of the spherical plastic fine particles is 10 μm, the standard deviation of the particle size distribution is 4.6% of the average particle size, and the density is 1.19 g / cm. ³ And the elastic modulus is 480 kgf / mm ² Met.
[0144]
-8A- Next, the substrate with the concave portion for the second microlens was bonded to the surface of the substrate with the concave portion for the first microlens coated with the resin. At this time, a uniform pressure was applied to the entire second microlens recessed substrate so that the second microlens recessed substrate came into contact with the spacer.
[0145]
-9A- Next, using the first alignment mark and the second alignment mark, alignment between the first concave portion and the second concave portion was performed.
[0146]
-10A- Next, the resin was cured by irradiating ultraviolet rays to form a resin layer and a microlens.
The formed microlens has a focal length of 55 μm, a maximum thickness (Tm) of 30 μm, and an edge thickness (distance between opposing end surfaces of the first microlens recessed substrate and the second microlens recessed substrate). Was 10 μm.
[0147]
-11A- Finally, the substrate with concave portions for second microlenses was ground and polished to a thickness (T2) of 30 μm to obtain a microlens substrate.
[0148]
(Evaluation)
For each of the microlens substrates manufactured in Examples 1 and 2 and Comparative Example, an opening was provided at a position corresponding to the microlens of the substrate with concave portions for the second microlens (an aperture ratio of 43%) by using a sputtering method and a photolithography method. A light-shielding film (Cr film) having a thickness of 0.16 μm, that is, a black matrix was formed. Further, an ITO film (transparent conductive film) having a thickness of 0.15 μm was formed on the black matrix by a sputtering method to manufacture a counter substrate for a liquid crystal panel.
[0149]
Then, after subjecting the facing substrate for liquid crystal panel and a separately prepared TFT substrate (glass substrate made of quartz glass) to an orientation treatment, both are treated as spacers made of spherical silica fine particles (elastic modulus 7454 kgf / mm). ² ) And a sealing material. Next, liquid crystal is injected into the gap from the sealing hole in the gap formed between the counter substrate for the liquid crystal panel and the TFT substrate, and then the sealing hole is closed to form a structure as shown in FIG. TFT liquid crystal panels each having a structure as referred to in (1).
[0150]
The contrast ratio (all white / all black) of each of the obtained TFT liquid crystal panels was measured. The results are shown below.
Example 1: 480
Example 2: 450
Comparative Example 1: 320
From these results, it can be seen that the microlens substrate of the present embodiment can provide a high contrast ratio.
[0151]
Further, a liquid crystal projector (projection display device) having a structure as shown in FIG. 10 was assembled using the TFT liquid crystal panels obtained in the respective examples. As a result, each of the obtained liquid crystal projectors could project a bright and high-contrast image on the screen.
[0152]
【The invention's effect】
As described above, according to the present invention, a microlens composed of a biconvex lens that can condense (converge) light into a predetermined size (diameter) and emit it as parallel light (parallel light flux) is provided. A configured microlens substrate can be provided.
In particular, with the microlens substrate of the present invention, it is possible to prevent damage such as partial deterioration or deterioration due to concentration of light energy.
[0153]
Therefore, for example, in a liquid crystal panel and a projection display device including the microlens substrate of the present invention, a high contrast ratio and a high transmittance can be obtained without deterioration over a long period of time.
[Brief description of the drawings]
FIG. 1 is a schematic longitudinal sectional view showing an embodiment of a microlens substrate of the present invention.
FIG. 2 is a schematic diagram showing a state of light transmitted through a resin layer of the microlens substrate of the present invention.
FIG. 3 is another embodiment of the microlens substrate of the present invention, wherein the microlens substrate is made of SiO. ₂ FIG. 3 is a schematic longitudinal sectional view showing a microlens substrate on which a film is formed.
FIG. 4 is a diagram illustrating a method for manufacturing a microlens substrate according to the present invention.
FIG. 5 is a diagram illustrating a method for manufacturing a microlens substrate according to the present invention.
FIG. 6 is a diagram for explaining a method for manufacturing a microlens substrate according to the present invention.
FIG. 7 is a diagram for explaining a method for manufacturing a microlens substrate according to the present invention.
FIG. 8 is a diagram for explaining a method for manufacturing a microlens substrate according to the present invention.
FIG. 9 is a schematic longitudinal sectional view showing an embodiment of the liquid crystal panel of the present invention.
FIG. 10 is a diagram schematically illustrating an optical system of a projection display device according to an embodiment of the present invention.
FIG. 11 is a longitudinal sectional view showing a conventional microlens substrate.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Micro lens board, 99 ... Effective lens area, 100 ... Non-effective lens area, 2 ... Substrate with concave part for 1st micro lens, 2A ... 1st micro lens substrate body, 28 ... Transparent substrate type, 29 ... First glass substrate, 31 ... First concave part, 32 ... Second concave part, 4 ... Micro lens, 5 ... Spacer, 6 ... Mask Layer, 61: Opening, 62: Second opening, 69: Backside protective layer, 71: First alignment mark, 72: Second alignment mark, 75: Protective layer, 8 ... Substrate with concave portion for second microlens, 89 second glass substrate, 9 resin layer, 91 first resin layer, 92 second resin layer, 93 SiO ₂ Film, 94, 95, 96 ... resin, L ... light, Q ... optical axis, R1, R2 ... radius of curvature, T1, T2 ... thickness, Tm ... maximum thickness Reference numeral 10: Counter substrate for liquid crystal panel, 11: Black matrix, 111: Opening, 12: Transparent conductive film, 16: Liquid crystal panel, 17: TFT substrate, 171 ... Glass substrate, 172 pixel electrode, 173 thin film transistor, 18 liquid crystal layer, 19 second spacer, 300 projection display device, 301 light source, 302, 303 ..Integrator lenses, 304, 306, 309: mirrors, 305, 307, 308: dichroic mirrors, 310 to 314: condenser lens, 320: screen, 20: optical block, 21 ... Dichro , Prisms, 211, 212 ... dichroic mirror surfaces, 213-215 ... surfaces, 216 ... emission surfaces, 22 ... projection lenses, 23 ... display units, 24-26 ... liquid crystal light valves , 900: micro lens substrate, 902: glass substrate, 903: concave portion, 904: micro lens, 908: cover glass, 909: resin layer

Claims (18)

A first substrate provided with a plurality of first concave portions having a lens curved surface on a surface thereof, and a second substrate provided with a plurality of second concave portions provided with a lens curved surface on a surface, wherein the first concave portion and the second concave portion are provided. A microlens substrate which is bonded via a resin layer so that a second concave portion is opposed to the first concave portion, and a microlens formed of a biconvex lens is formed between the first substrate and the second substrate. ,
The resin layer is disposed on the first substrate side on which light is incident, and has a first resin layer having a higher refractive index than the first substrate, and is disposed on the second substrate side and is more refracted than the second substrate. A microlens substrate comprising: a second resin layer having a low ratio. 2. The microlens substrate according to claim 1, wherein a difference in refractive index between the first substrate and the first resin layer is 0.07 to 0.70. 3. The microlens substrate according to claim 1, wherein a difference in a refractive index between the second substrate and the second resin layer is 0.07 to 0.70. A first substrate provided with a plurality of first concave portions having a lens curved surface on a surface thereof, and a second substrate provided with a plurality of second concave portions provided with a lens curved surface on a surface, wherein the first concave portion and the second concave portion are provided. A microlens substrate which is bonded via a resin layer so that a second concave portion is opposed to the first concave portion, and a microlens formed of a biconvex lens is formed between the first substrate and the second substrate. ,
The resin layer is disposed on a first substrate side on which light is incident, a first resin layer having a higher refractive index than the first substrate and the second substrate, and a first resin layer disposed on the second substrate side. A microlens substrate comprising: one substrate; and a second resin layer having a lower refractive index than the second substrate. The microlens substrate according to claim 4, wherein a difference in refractive index between the first substrate and the second substrate and the first resin layer is 0.07 to 0.70, respectively. The microlens substrate according to claim 4, wherein a difference in refractive index between the first substrate, the second substrate, and the second resin layer is 0.07 to 0.70, respectively. The microlens substrate according to claim 1, wherein the first substrate is a quartz glass substrate. The microlens substrate according to claim 1, wherein the second substrate is a quartz glass substrate. 9. The microlens substrate according to claim 1, wherein an SiO ₂ film is formed at an interface between the first resin layer and the second resin layer. The microlens substrate according to claim 9, wherein the thickness of the SiO ₂ film is 0.005 to 50 μm. A counter substrate for a liquid crystal panel, comprising the microlens substrate according to any one of claims 1 to 10. An opposing substrate for a liquid crystal panel, comprising: the microlens substrate according to any one of claims 1 to 10, a black matrix provided on the microlens substrate, and a conductive film covering the black matrix. A liquid crystal panel comprising the liquid crystal panel counter substrate according to claim 11. 13. A liquid crystal driving substrate provided with a pixel electrode, a liquid crystal panel opposing substrate according to claim 11 joined to the liquid crystal driving substrate, and a liquid crystal driving substrate and the liquid crystal panel opposing substrate sealed in a gap. And a liquid crystal panel. 15. The liquid crystal panel according to claim 14, wherein the liquid crystal driving substrate is a TFT substrate including the pixel electrodes arranged in a matrix and a thin film transistor connected to the pixel electrodes. A projection type display device comprising the liquid crystal panel according to claim 13. A projection type display device, comprising: a light valve provided with the liquid crystal panel according to claim 13, wherein at least one light valve modulates light to project an image. Three light valves corresponding to red, green, and blue for forming an image, a light source, and a color that separates light from the light source into red, green, and blue light and guides each light to the corresponding light valve. A projection display apparatus having a separation optical system, a color combining optical system that combines the images, and a projection optical system that projects the combined image,
A projection type display device, wherein the light valve includes the liquid crystal panel according to any one of claims 13 to 15.

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