JP2004174308A - Sheet material washing equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide sheet material washing equipment which can still more enhance the quality of a sheet material such as large-sized thin sheet glass or the like and can rapidly perform effective washing treatment to the sheet material. <P>SOLUTION: This sheet material washing equipment is equipped with a belt conveyor 2 for supporting the lower end of the vertically held sheet glass G, a fluid guide 8 for supporting the sheet glass G in an erected state by allowing the pressure of a fluid to act on the side surface of the sheet glass G, a detergent washing device 3 for supplying a washing liquid to the surface of the sheet glass G from the fluid guide 8, a high pressure liquid spray washing device 4 having a high pressure liquid spray member 19, which ejects high pressure liquid spray to both surfaces of the sheet glass, provided thereto in an up and down movable manner and a drain device 6 equipped with a drain member 30 for spraying an air knife being a film-like air flow extending in an up and down direction on both surfaces of the sheet glass. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
TECHNICAL FIELD The present invention relates to a plate cleaning apparatus. More specifically, for cleaning the surface of a plate material such as rare metal, silicon, and flat display glass with a detergent, cleaning the surface of the plate material with a high-pressure liquid spray, and removing water from the cleaned surface of the plate material. The present invention relates to a plate material washing facility.
[0002]
[Prior art]
Conventionally, sheet glass has been used in various fields. In particular, a sheet glass (hereinafter, referred to as a glass substrate) used for a liquid crystal display, a plasma display, or the like is very thin. For example, many products having a thickness of about 0.7 mm and a size of about 550 mm × 650 mm are produced. Such processing such as trimming and cutting of the glass substrate is generally performed in a horizontal state (horizontal state), the sheet glass is conveyed by a belt conveyor or the like, and each apparatus is in a horizontal state. Washing of the processed glass sheet is also performed in a horizontal state (for example, see Patent Documents 1 and 2). Further, among such apparatuses for cleaning in a horizontal state, a cleaning facility provided with an ultrasonic cleaning apparatus for further improving the cleaning effect has been proposed (for example, see Patent Document 3).
[0003]
Further, an apparatus has been proposed in which a glass sheet is transported in a state of leaning against a row of rollers, and each edge of the glass sheet is polished in the leaning state (for example, see Patent Document 4).
[0004]
On the other hand, in recent years, in the field of glass substrates and the like, motherboards serving as a basis for a plurality of glass substrates have been developed for the purpose of improving yield in order to improve productivity, and for supporting larger displays and the like. There is a demand for increasing the size of glass. Increasing the size of the mother glass increases the number of glass substrates that can be obtained from one mother glass, thereby improving the yield. Further, a glass substrate for a large display can be manufactured. In addition, there is a demand to improve the performance of a display or the like by further reducing the thickness of the glass substrate, and the mother glass tends to be thinner. In addition, the requirements for the quality of the glass substrate are getting stricter each year, and there is also a demand for cost reduction.
[0005]
[Patent Document 1]
JP-A-11-44877
[Patent Document 2]
Japanese Patent No. 2699911
[Patent Document 3]
JP-A-9-19667
[Patent Document 4]
Japanese Patent No. 2623476
[0006]
[Problems to be solved by the invention]
However, in the technology of transporting and cleaning the plate glass in the horizontal state as described above, and the technology of transporting the plate glass in a state of standing against some structural member, when processing a large, thin plate glass, it is caused by its own weight. There is a possibility that cracks may occur due to bending or the like, or cracks may occur due to a reaction force from a structural member supporting the surface of the sheet glass. Of course, the same problem occurs when cleaning the glass sheet. Further, when the plate glass is in contact with the structure, it is difficult to clean that portion. Further, a material having a degree of cleanliness higher than that obtained by ultrasonic cleaning is required.
[0007]
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and a cleaning process for a plate material including a large and thin plate glass, which prevents damage such as cracks and enables further improvement of the quality of the plate material. It is an object of the present invention to provide a plate material washing facility capable of performing the following.
[0008]
[Means for Solving the Problems]
The plate material detergent cleaning device according to the present invention, a support device that supports the lower end of the plate material in an upright state,
A fluid guide that supports the plate in a non-contact manner in a standing state by applying a fluid pressure to the side surface of the plate;
A cleaning liquid supply unit for supplying a cleaning liquid to the plate material in an upright state,
The cleaning liquid supply unit includes at least a part of the fluid guide, and at least a part of the fluid guide is configured to supply a flow of the cleaning liquid to the side surface of the plate.
[0009]
With this configuration, both sides and the periphery of the plate can be thoroughly washed with the detergent without being affected by the weight of the plate and a large reaction force from the structure. Therefore, not only dust but also oils and fats can be removed.
[0010]
A fluid guide constituting the above-mentioned cleaning liquid supply section has a plurality of upper and lower first fluid ejection sections extending in the horizontal direction, and a detergent cleaning in which a plurality of washing liquid ejection nozzles are arranged in the first fluid ejection section. The device is preferred. This is because the detergent can be supplied to the entire surface of the plate material by gravity. Such an operation can be achieved by a simple configuration.
[0011]
The fluid guide that constitutes the cleaning liquid supply unit further includes a second fluid ejection unit that extends in the vertical direction and is disposed at intervals from each other in the horizontal direction. A detergent cleaning device in which cleaning liquid jet nozzles are arranged is preferable. This is because, in the case of a device in which the plate material is transferred, even if the transfer speed increases, the cleaning liquid can be supplied to the entire surface of the plate material.
[0012]
In addition, it is preferable that the supporting device has a transport unit that transports the plate material in the horizontal direction in a state where the plate material is erected, and a detergent cleaning device in which the fluid guide is disposed along a transport path of the transport unit. This is because the transport unit and the fluid guide allow the plate material to be carried into and out of the detergent cleaning device in an upright state.
[0013]
Further, an air curtain portion is provided along the up-down direction of the plate material in an upright state on the upstream end side and the downstream end side of the cleaning liquid supply section as viewed in the transport direction of the plate material. Is preferably a detergent cleaning device having a plurality of air jet nozzles arranged in a vertical direction. This is because the air curtain portion can prevent the transfer of moisture to the upstream and downstream processes, and can prevent the entry of moisture from the upstream and downstream processes. By doing so, for example, fluctuations in the concentration of the cleaning liquid can be suppressed as much as possible.
[0014]
The high-pressure liquid spray cleaning device of the present invention, a support device that supports the lower end of the plate material in an upright state,
A fluid guide that supports the plate in a non-contact manner in a standing state by applying a fluid pressure to the side surface of the plate;
A high-pressure liquid spray unit for spraying a high-pressure liquid spray from both sides of the plate material in an upright state is provided.
[0015]
With this configuration, both surfaces of the plate can be cleaned by the high-pressure liquid spray without being affected by the weight of the plate and a large reaction force from the structure. Therefore, high-quality cleaning can be performed without causing damage such as cracking of a large-sized and thinned plate material. In addition, it is possible to remove dust and the like that are separated from the surface of the plate material and float in the water by the fluid from the fluid guide.
[0016]
A high-pressure liquid spray cleaning device is preferred in which the support device has a transport unit that transports the plate material in a horizontal direction in an upright state, and the fluid guide is disposed along the transport path of the transport unit. This is because the transport unit and the fluid guide allow the plate material to be carried into and out of the high-pressure liquid spray cleaning device in an upright state.
[0017]
Furthermore, the high-pressure liquid spray section has a high-pressure liquid spray nozzle that is movable in the vertical direction, and the high-pressure liquid spray nozzles arranged on both sides of the plate material face each other across the plate material support position. A high pressure liquid spray cleaning device is preferred. This is because the high-pressure liquid spray is sprayed from both sides while the plate material is being conveyed while standing by the conveyance unit, and thus the entire surface of the plate material can be washed only by moving the high-pressure liquid spray nozzle in the vertical direction. Further, by opposing the high-pressure liquid spray nozzles on both sides, damage to the plate material due to the high-pressure liquid can be prevented.
[0018]
Alternatively, the high-pressure liquid spray unit has a plurality of high-pressure liquid spray nozzles arranged in the vertical direction, and the high-pressure liquid spray nozzles arranged on both sides of the plate face each other across the plate support position. A high-pressure liquid spray cleaning device is preferred. Since the high-pressure liquid spray is sprayed from both sides while the plate material is conveyed while standing by the conveying unit, the entire surface of the plate material can be washed only by arranging a plurality of high-pressure liquid spray nozzles vertically. is there.
[0019]
The high-pressure liquid spray cleaning device is preferably configured such that the high-pressure liquid spray nozzle is configured to rotate around a rotation axis substantially perpendicular to the surface of the plate material to be cleaned. This is because a wider surface of the plate material can be cleaned.
[0020]
In addition, a high-pressure liquid spray cleaning device in which a movable fluid guide that is vertically movable integrally with the high-pressure liquid spray nozzle is disposed adjacent to the high-pressure liquid spray nozzle is preferable. The water flow is sprayed on the plate at a relatively high pressure, but the vibration of the plate caused by the high-pressure liquid spray can be attenuated by the action of the adjacent mobile fluid guide.
[0021]
Alternatively, on the upstream end side as viewed in the transport direction of the plate material of the present invention, a washing section is provided along the up and down direction of the plate material in an upright state, and a plurality of the washing sections are arranged in the up and down direction. A high-pressure liquid spray cleaning device having a water jet nozzle is preferred. This is because the water washing unit can wash off the deposits in the upstream process, for example, the cleaning liquid.
[0022]
The plate material draining device of the present invention, a conveying device that supports the lower end of the plate material in an upright state and conveys in the horizontal direction,
A fluid guide that supports the plate in a non-contact manner in a standing state by applying a fluid pressure to the side surface of the plate;
Each of the upright plate members is provided with a draining portion extending from the upper surface to the lower surface of the plate material so as to correspond to the plate material from above and below, and spraying a film-like airflow toward the plate material.
[0023]
With this configuration, the film material is blown onto the outer surface of the plate while the plate is being transported in an upright state by the transport unit and the fluid guide, so that moisture is blown off, and the influence of the weight of the plate and the influence from the structure. Moisture can be effectively removed from both sides and the periphery of the plate material without receiving a large reaction force. It can be dried, so to speak.
[0024]
On the upstream side of the two draining portions, a washing portion is provided along the vertical direction on each side of the plate material in the upright state, and a plurality of water jet nozzles in which the washing portions are arranged in the vertical direction. Is preferred. This is because reattachment of dust and the like is prevented.
[0025]
Alternatively, a water draining device in which the water washing section is arranged to be inclined in the upstream direction as viewed in the transport direction of the plate material is preferable. This is because new water can be supplied to the surface of the plate material moving in the transport direction.
[0026]
Alternatively, a water draining device in which the water draining portion is arranged to be inclined in the upstream direction as viewed in the transport direction of the plate material is preferable. This is because moisture on the surface of the plate material can be blown downward and in the upstream direction.
[0027]
The plate material cleaning equipment of the present invention, a transport device that supports and transports the lower end of the plate material in an upright state,
A fluid guide that supports the plate in a non-contact manner in a standing state by applying a fluid pressure to the side surface of the plate;
Arranged in the transport path of the transport device, any one of the detergent cleaning devices described above,
The high-pressure liquid spray cleaning device according to any one of the high-pressure liquid spray cleaning devices described above, which is disposed on the downstream side of the detergent cleaning device in the transport path,
Any one of the above-described drainers, which is disposed downstream of the high-pressure liquid spray cleaning device in the transport path,
It has.
[0028]
With this configuration, the plate material is efficiently washed and drained without being affected by its own weight or receiving a large reaction force from the structure.
[0029]
Further, a finish cleaning device is provided between the high-pressure liquid spray cleaning device and the draining device, and a cleaning facility in which the finish cleaning device has the fluid guides on both sides of the transfer device is preferable. This is because in the high-pressure liquid spray cleaning device, dust and the like floating from the plate material and floating in the water are washed away by the fluid from the fluid guide.
[0030]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an embodiment of a plate material cleaning facility of the present invention and a detergent cleaning device, a high-pressure liquid spray cleaning device, and a draining device suitably used in the cleaning device will be described with reference to the accompanying drawings.
[0031]
FIG. 1 is a front view showing an embodiment of the cleaning equipment of the present invention, and FIG. 2 is a plan view thereof.
[0032]
The illustrated cleaning equipment 1 is provided with a belt conveyor 2 for supporting a bottom side of a rectangular plate glass G in an upright state and transporting the plate glass G in a horizontal direction. Not only a belt conveyor but also a known conveyor such as a roller conveyor can be used. A detergent cleaning device 3 for cleaning the surface of the sheet glass G with a detergent along the conveying direction of the belt conveyor 2, that is, along the pass line L of the sheet glass, and a high-pressure liquid spray (also referred to as a water jet) on the surface of the sheet glass G. High-pressure liquid spray cleaning device 4 for cleaning by a high-pressure liquid spray cleaning device 4, a finish cleaning device 5 for removing dust and the like floating from the plate glass G detached from the plate glass G by the high-pressure liquid spray cleaning device 4, A draining device 6 for removing water is arranged in this order from upstream. In addition, the draining device 6 of this embodiment is configured such that finish cleaning is further performed before the draining operation. However, it is not limited to this.
[0033]
Fluid guides 8 for supporting the surface of the sheet glass G in a non-contact manner are provided on both sides of the belt conveyor 2 along the conveying direction (pass line L). The fluid guide 8 is divided into portions for each of the devices 3, 4, 5, and 6 along the transport direction. As will be described later, since the structure of the fluid guide in the water draining device 6 is different from those of the other devices 3, 4, and 5, the fluid guide of the water draining device 6 is indicated by reference numeral 27.
[0034]
The fluid guide 8 includes a frame member 9 and a guide plate 10 attached to the frame member 9 as is apparent from FIG. 4 which is a side view of the detergent cleaning device 3. On a plane formed by the guide plate 10, a fluid ejection portion 11 for applying a supporting fluid pressure toward the surface of the plate glass G is provided.
[0035]
The fluid jetting portion 11 is adjustable so as to be entirely parallel to the surface of the sheet glass G. In the fluid ejection section 11, fluid ejection nozzles 11c for ejecting a fluid toward the surface of the sheet glass are arranged at intervals.
[0036]
Since the fluid guides 8 are provided on both the left and right sides of the pass line L, the fluid pressure acting on both sides of the sheet glass is balanced, so that the sheet glass can be maintained almost vertically without contacting the structural members. In the present embodiment, water is used as the supporting fluid. By using a liquid as the supporting fluid, cullet particles and other dust can be effectively removed from the glass sheet. As this water, tap water, pure water, detergent aqueous solution, and the like are selected as necessary.
[0037]
Further, instead of arranging a large number of fluid ejection sections 11, a porous fluid guide that allows liquid to seep out on the guide surface using a porous material may be provided. The porous fluid guide can also utilize the surface tension of the guide liquid, and can support the plate glass in an upright state without contacting the structural member.
[0038]
The supporting fluid is not limited to a liquid, and may be, for example, a clean gas. When a fluid guide using gas as a supporting fluid is provided only on one side of the pass line L, the sheet glass G is slightly tilted toward the fluid guide, so that the lateral component of the own weight of the sheet glass and the jetting gas It is supported by the fluid guide in a non-contact manner by a balance with a pressure force. However, since the cleaning of the glass sheet is performed by a liquid, it is preferable that the supporting fluid is also a liquid.
[0039]
The detergent cleaning device 3 will be described with reference to FIGS. In the detergent cleaning device 3, a portion of the belt conveyor 2 corresponding to the detergent cleaning device 3 functions as a plate glass support device in the detergent cleaning device 3. The front view of FIG. 3B shows a state in which the fluid guide 8 on the near side is removed for easy understanding.
[0040]
In the detergent cleaning device 3, a first fluid ejection unit 11 a and a second fluid ejection unit 11 b are provided as the fluid ejection unit 11. The first fluid jetting portion 11a extends in the horizontal direction, and is provided in a plurality of stages with a vertical interval. Further, a plurality of the second fluid jetting parts 11b are arranged in the vertical direction at intervals in the sheet glass conveying direction. Fluid ejection nozzles 11c for ejecting a fluid toward the surface of the sheet glass are arranged at intervals in each of the fluid ejection portions 11a and 11b. These fluid ejection parts 11a and 11b can be adjusted so as to be entirely parallel to the surface of the sheet glass G.
[0041]
The detergent cleaning device 3 is configured such that a detergent is supplied to the fluid guide 8 from a detergent supply source (not shown), and a detergent aqueous solution (cleaning liquid) is ejected from the fluid ejection nozzle 11c. With this configuration, in the detergent cleaning device 3, the entire surface of the plate glass is cleaned with the cleaning liquid, and even oils and fats are removed from the surface of the plate glass. Of course, in the other devices 4, 5, and 6 disposed on the downstream side, pure water or the like may be used instead of the cleaning liquid as the fluid used for the fluid guide. Further, the fluid guide 8 of the detergent cleaning device 3 does not need to be configured to inject the cleaning liquid to all of them, and the cleaning liquid may be injected from a part of the fluid guide 8. Further, by increasing the temperature of the cleaning liquid (for example, about 80 ° C.), the effect of removing oils and fats is further improved.
[0042]
As shown in FIGS. 3 and 5, the detergent cleaning device 3 has a position slightly displaced from the position corresponding to the upper side of the conveyed sheet glass G (the position along the upper side of the sheet glass G) toward the anti-fluid guide side. The detergent supply pipe 12 is extended. A large number of detergent nozzles 13 are arranged in the detergent supply pipe 12 for spraying and spraying a detergent on one side of the plate glass G from the upper side. Detergent is fed to the detergent supply pipe 12 from a detergent supply source (not shown). The detergent supply pipe 12 is configured to move up and down according to the up and down size of the plate glass to be washed.
[0043]
Detergent is supplied by the plurality of detergent nozzles 13 over the upper side of one surface of the glass sheet. The detergent flows by gravity onto the entire surface of the one side of the glass sheet, and cleans the one side. Although the present detergent cleaning device 3 includes a single detergent supply pipe 12, the present invention is not limited to such a configuration. For example, if a plurality of detergent supply pipes 12 are provided vertically separated from each other, the detergent can be sufficiently spread over the surface of the plate glass even when the conveying speed of the plate glass is increased.
[0044]
As described above, in the detergent cleaning device 3, the fluid guides 8 for ejecting the cleaning liquid are provided on both sides of the pass line L. However, when the detergent supply pipe 12 is provided, the detergent supply The fluid guide may be provided only on the opposite side of the tube 12. Since the supporting fluid is a liquid, even if the fluid guide 8 is installed on only one side of the pass line L, the glass sheet G is sucked, so to speak, by the surface tension of the liquid filling the gap between the surface and the fluid ejection part 11. Therefore, it can be transported while maintaining a substantially vertical state without contact. However, since the fluid guide is considered to have a higher cleaning effect than the detergent supply pipe 12 having the above structure, it is preferable to provide the fluid guides 8 for ejecting the cleaning liquid on both sides of the pass line L.
[0045]
Detergent cleaning by the detergent cleaning device 3 can release not only dust but also oils and fats from the surface of the plate glass.
[0046]
An air curtain member 14 is provided at the upstream end and the downstream end of the detergent cleaning device 3 so as to extend vertically. As shown in FIG. 5, the air curtain member 14 includes an air supply pipe 15 that supplies clean air that is vertically opposed to both sides of the pass line L and that extends in the vertical direction. A large number of air nozzles (also called liquid drain nozzles) 16 for blowing clean air toward the surface of the sheet glass G are provided. The clean air is air from which dust and the like have been removed by a filter or the like. Clean air is pumped into the air supply pipe 15 from an air supply source (not shown). From each of the air curtain members 14 at the upstream end and the downstream end, clean air is jetted onto the conveyed sheet glass to form an air curtain. Therefore, entry of moisture and the like into the detergent cleaning device 3 from the upstream process and the downstream process is prevented. Therefore, the fluctuation of the concentration of the cleaning liquid is prevented. Further, transfer of the cleaning liquid to the upstream process and the downstream process is prevented.
[0047]
In FIG. 3B and FIG. 5, reference numeral 17 denotes a water receiving channel disposed below the belt conveyor 2. Reference numeral 18 denotes a water collecting pipe for collecting the liquid received in the water receiving channel 17 and collecting the liquid in a lower cleaning liquid tank (not shown). The plate glass after the detergent cleaning is transferred to the high-pressure liquid spray cleaning device 4 (FIG. 1).
[0048]
The high pressure liquid spray cleaning device 4 will be described with reference to FIGS. In the high-pressure liquid spray cleaning device 4, the portion of the belt conveyor 2 corresponding to the high-pressure liquid spray cleaning device 4 functions as a plate glass support device in the high-pressure liquid spray cleaning device 4. As described above, in the high-pressure liquid spray cleaning device 4, the fluid guides 8 are provided on both sides of the pass line L. A high-pressure liquid spray member 19 is provided at an intermediate portion of the fluid guide 8 when viewed in the transport direction. In FIG. 6, the fluid guide 8 is partially cut away for easy understanding of the high-pressure liquid spray member 19.
[0049]
Each of the high-pressure liquid spray members 19 sandwiching the pass line L has a nozzle support frame 41. A pair of high-pressure liquid spray nozzles 20 that are vertically separated from each other are attached to the nozzle support frame 41. The upper and lower separation distances can be changed. From the high-pressure liquid spray nozzle 20, a high-pressure water stream (water jet) is jetted. The high-pressure liquid spray nozzles 20 with the pass line L interposed therebetween face each other. This is to balance the pressure of the high-pressure water from the high-pressure liquid spray nozzle 20 on both sides of the sheet glass.
[0050]
As shown in FIGS. 6 and 7, the nozzle support frame 41 is moved up and down by a linear guide mechanism 21 laid vertically on a base frame 42 of the high-pressure liquid spray member 19. As a result, the high-pressure liquid spray nozzle 20 is moved up and down relatively to the sheet glass. Further, the nozzle support portion 41a of the nozzle support frame 41 is attached to the base 41b of the nozzle support frame 41 via a hinge 41c so as to be pivotable outward. By rotating the nozzle support portion 41a, the high-pressure liquid spray nozzle 20 is moved to an operation position facing the surface of the sheet glass and to a non-operation position retracted outward. Maintenance is performed on the high-pressure liquid spray nozzle 20 in a state where the nozzle is opened to a non-operating position. Reference numeral 43 denotes a knob of a fixture for fixing and separating the nozzle support 41a to and from the base frame 42.
[0051]
The high-pressure liquid spray nozzle 20 is configured to rotate around a rotation axis 20a (see FIGS. 7 and 8) perpendicular to the sheet glass. As a result, each nozzle 20 moves up and down while rotating, so that even a small number of nozzles 20 can clean a wide range of sheet glass surface. Reference numeral 20b denotes a balance weight for stabilizing the rotation of the high-pressure liquid spray nozzle 20.
[0052]
A movable fluid guide 22 that moves up and down integrally with the high-pressure liquid spray nozzle 20 is provided. This is for preventing the vibration of the plate glass due to the high-pressure water flow from the high-pressure liquid spray nozzle 20. The movable fluid guides 22 also face each other across the pass line L. Although the illustrated movable fluid guide 22 is disposed only above or below the high-pressure liquid spray nozzle 20, it is not particularly limited to this configuration. For example, it may be arranged in two directions up and down, two directions in left and right, four directions in up and down and left and right.
[0053]
A plurality of upper and lower fluid guides 23 arranged vertically adjacent to each other are arranged on both sides of the high-pressure liquid spray member 19 in the transport direction. Since the upper and lower fluid guides 23 are arranged on both sides of the high-pressure liquid spray member 19 so as to be in close contact with each other, vibration of the plate glass by the high-pressure liquid spray nozzle can be more effectively prevented.
[0054]
At an upstream end of the high-pressure liquid spray cleaning device 4, a water-washing member 24 extends in the vertical direction. As shown in FIG. 9, the washing member 24 includes a water supply pipe 25 for supplying pure water vertically opposed to each other across the pass line L and extending along the water supply pipe 25. And a plurality of water nozzles 26 for spraying water toward the surface of the glass sheet G. Water is supplied to the water supply pipe 25 from a water supply source (not shown). Since water is sprayed on the glass sheet to be conveyed by the upstream washing member 24, the water flows over the entire surface of the glass sheet without leakage. The cleaning liquid that may be attached in the previous process is washed away from the sheet glass by the water washing member 24 at the upstream end. In addition, it is possible to prevent dust and the like from adhering due to drying of the surface.
[0055]
At the downstream end of the high-pressure liquid spray cleaning device 4, an air curtain member 14 similar to that described in the above-described detergent cleaning device 3 is vertically extended (FIG. 6). Since the configuration and the installation purpose are the same as those described above, the description is omitted.
[0056]
In the high-pressure liquid spray cleaning device 4, one high-pressure liquid spray member 19 is disposed on both sides of the pass line L, but the present invention is not limited to such a configuration. A plurality of high-pressure liquid spray members 19 may be arranged on both sides of the pass line L. Thus, sufficient cleaning can be performed even when the transport speed of the glass sheet is increased. Further, the number of high-pressure liquid spray nozzles 20 provided in each high-pressure liquid spray member 19 may be increased or decreased as necessary. By increasing the number of high-pressure spray nozzles, it becomes possible to clean the entire surface of the plate glass by high-pressure liquid spray without particularly moving the high-pressure spray nozzles up and down. In this case, the high-pressure spray nozzles may be arranged particularly densely in the vertical direction.
[0057]
The high pressure liquid spray cleaning greatly improves the cleaning effect as compared with conventional ultrasonic cleaning, brush cleaning, and the like. The plate glass having been subjected to the high pressure liquid spray cleaning is then conveyed to the finish cleaning device 5 (FIG. 1).
[0058]
The finish cleaning device 5 shown in FIG. 10 is installed in order to more carefully wash out oils and fats, dusts, and the like released from the surface of the sheet glass in the detergent cleaning device 3 and the high-pressure liquid spray cleaning device 4 with circulating pure water. ing. Therefore, in the finish cleaning device 5, only the fluid guides 8 are disposed on both sides of the pass line L, and no other special devices are provided. This is because the glass sheet is washed by the water supplied to the surface from the fluid guide 8. In some cases, the finishing cleaning device 5 may be omitted from the cleaning equipment 1. The glass sheet having been subjected to the finish cleaning is then conveyed to the draining device 6 (FIG. 1).
[0059]
The draining device 6 will be described with reference to FIGS. In the draining device 6, a portion of the belt conveyor 2 corresponding to the draining device 6 functions as a sheet glass support device in the draining device 6. As described above, in the drainer 6, the fluid guides 27 are installed on both sides of the pass line L.
[0060]
Further, as shown in FIGS. 11, 13 and 14, two flush portions are provided on both sides of the pass line L and in the middle of the fluid guide 27 as viewed in the transport direction in parallel from the upstream at intervals. Members 28 and 29 and a draining member 30 are provided. The fluid guide 27 differs from the fluid guide 8 described above, in that a portion 27a upstream of a separator 35 described later uses water as a supporting fluid, and a portion 27b downstream of the separator 35 uses ultra-clean air. Used as a supporting fluid. The ultra-clean air is air that has been subjected to a cleaning process using a filter with a finer mesh than the above-described clean air.
[0061]
As shown in FIG. 13, both of the water washing members 28 and 29 are provided with a water supply pipe 31 that extends slightly inclining from the vertical direction toward the upstream side, and a number of water supply pipes 31 arranged along the longitudinal direction of the water supply pipe 31. And two water nozzles 32. Pure water is supplied under pressure from a water supply source (not shown) to the water supply pipe 31, and each water nozzle 32 injects the pure water toward the surface of the sheet glass G. The water washing members 28 and 29 are used to wash out oils and fats, dust, and the like from the surface of the sheet glass more carefully by repeating the same washing as the washing in the finish washing device 5. In the washing members 28 and 29, pure water is used one-through instead of circulating pure water (so-called disposable pure water) to improve the cleanliness of the sheet glass.
[0062]
The draining member 30 is composed of an air supply pipe (also referred to as an air knife frame) 33 that extends in parallel to the water supply pipe 31 and slightly inclines from the vertical direction to the upstream side. Ultra-clean air is supplied under pressure from a supply source (not shown) to the supply pipe 33. As shown in FIGS. 12 and 14, the air supply pipe 33 is formed with a narrow slit 34 for blowing air toward the surface of the sheet glass. The draining member 30 is configured such that the film-like airflow N spouting from both sides of the pass line L is blown to corresponding portions on both sides of the sheet glass. The slit 34 is formed continuously along the longitudinal direction of the air supply pipe 33 or is formed intermittently at a small interval. In any case, a continuous film-like high-pressure airflow N is continuously blown onto the glass sheet G in the vertical direction (slightly inclined toward the upstream side). This airflow is injected at a speed close to the speed of sound. This airflow is called an air knife N.
[0063]
As shown in FIG. 12, the air supply pipe 33 is configured to rotate around its central axis in the longitudinal direction. As a result, the direction of the air knife N is changed. For example, it can be oriented perpendicular to the surface of the sheet glass, and then both upstream and downstream. Further, since the air supply pipe 33 is slightly inclined from the vertical to the upstream side, the air knife N turns the air knife N slightly toward the upstream side by rotating the air supply pipe 33, so that the air knife N removes the moisture on the surface of the plate glass to the upstream side. Can be blown slightly downwards. As a result, the water is blown off from the air knife frame 33 downward on the upstream side, and does not move downstream. Moisture and the like are removed from the entire surface of the sheet glass that has passed through the air knife N, and the sheet glass is dried.
[0064]
Further, since the washing members 28 and 29 are slightly inclined to the upstream side from the vertical, fresh water is supplied to any portion in the vertical direction from the upper portion of the conveyed sheet glass, and high-quality washing can be performed. . Further, like the air supply pipe 33, the washing members 28 and 29 are also configured to rotate around the longitudinal central axis. As a result, the injection direction of the pure water is changed.
[0065]
As shown in FIG. 12, separators 35 are provided near the drain members 30 on both sides of the pass line L. The separator 35 is for preventing water from moving from the drainer 30 to the downstream side. Each of the separators 35 protrudes outward from the drainer 30 in a direction perpendicular to a vertical plane (substantially the glass surface) including the pass line L. The separator 35 extends in parallel to the air supply pipe 33 and the washing members 28 and 29 so as to be inclined from the vertical direction to the upstream side. As a result, no matter how much the water jetted on the upstream side jumps, the separating plate 35 prevents the water jetted on the downstream side from moving toward the draining member 30. The separating plate 35 may be provided, for example, in the vicinity of the draining member 30, or in the vicinity of the downstream side of the downstream washing member 29.
[0066]
As described above, the fluid guide 27 uses pure water as a supporting fluid upstream of the separator 35, and uses ultra-clean air as a supporting fluid downstream of the separator 35. Therefore, no water is used downstream from the air knife frame 33, and the glass sheet is dried.
[0067]
Although not shown, a part of the belt conveyor 2 which is a supporting device in each of the devices 3, 4, 5, and 6 of the cleaning equipment 1 is configured to be movable so as to drop the supported glass sheet downward. Can be. For example, if the plate glass can be moved in a direction perpendicular to the transport direction, the glass sheet on the belt conveyor falls downward. Alternatively, by inclining the belt portion, the belt may be retracted from the pass line L of the glass sheet to drop the glass sheet. With this configuration, even if the product cannot be commercialized due to, for example, damage at the time of cleaning, the damaged plate glass can be easily removed without contaminating the transport line and the cleaning equipment with the glass fragments.
[0068]
According to the cleaning equipment 1, since the fluid guides 8 and 27 are provided on one side or both sides of the pass line L, the gap between the fluid guide and the plate glass has a constant thickness due to the surface tension of the supporting liquid. Thus, the sheet glass can be transported while being supported in a state of not contacting the structure. Further, by using a liquid as the guide fluid, cullet particles and other dust can be more effectively removed from the glass sheet.
[0069]
Further, in the above embodiment, a sheet glass is exemplified as a processing target, but the present invention is not limited to a sheet glass. For example, various plate materials such as a plate material made of rare metal or silicon, a flat display glass, and the like can be processed.
[0070]
In the cleaning equipment 1 described above, the detergent cleaning device 3, the high-pressure liquid spray cleaning device 4, the finish cleaning device 5, and the draining device 6 are arranged in a straight line, but the present invention is not limited to such a configuration. For example, the transfer lines may be arranged so as to be orthogonal from the middle, or may be arranged in parallel.
[0071]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to this invention, the quick and effective washing | cleaning process which enabled the further improvement of the quality to the plate material containing the plate glass which became large-sized and thinned can be performed.
[Brief description of the drawings]
FIG. 1 is a front view showing an embodiment of the cleaning equipment of the present invention.
FIG. 2 is a plan view of the cleaning equipment of FIG.
3 (a) is a plan view showing one embodiment of a detergent cleaning device in the cleaning equipment of FIG. 1, and FIG. 3 (b) is a front view of FIG. 3 (a), which is easy to understand. For this reason, the fluid guide on the near side has been removed.
FIG. 4 is a sectional view taken along line IV-IV in FIG.
FIG. 5 is a side view of the detergent cleaning apparatus of FIG. 3 and is a view taken along line VV of FIG. 3 (b).
FIG. 6 is a partially cutaway front view showing one embodiment of the high-pressure liquid spray cleaning device in the cleaning equipment of FIG. 1;
FIG. 7 is a plan view of the high-pressure liquid spray cleaning device of FIG. 6;
8 (a) is a front view showing an example of a high-pressure liquid spray nozzle in the high-pressure liquid spray cleaning device of FIG. 6, and FIG. 8 (b) is a sectional view taken along line VIII-VIII of FIG. 8 (a). It is.
9 is a side view showing an example of a washing member in the high-pressure liquid spray washing apparatus of FIG. 6, and is a view corresponding to a view taken along line IX-IX in FIG.
FIG. 10 is a front view showing an example of a finish cleaning device in the cleaning equipment of FIG. 1;
FIG. 11 is a front view showing one embodiment of a drainer in the cleaning facility of FIG. 1;
FIG. 12 is a plan view of the drainer of FIG. 11;
13 is a side view showing a water washing member in the water draining device of FIG. 11, and is a diagram corresponding to a cross-sectional view taken along line XIII-XIII in FIG.
14 (a) is a side view showing a draining member in the draining device of FIG. 11, and is a view corresponding to a cross-sectional view taken along line XIV-XIV in FIG. 11, and FIG. 14 (b) is FIG. It is a top view of a).
[Explanation of symbols]
1. Cleaning equipment
2 .... Belt conveyor
3. Detergent cleaning device
4. High pressure liquid spray cleaning device
5 ... Finishing cleaning device
6 ... Drainer
8. Fluid guide
9 Frame members
10 Guide plate
11 ··· Fluid ejection section
11a: First fluid ejection part
11b: second fluid ejection part
11c ・ ・ ・ Fluid ejection nozzle
12. Detergent supply pipe
13. Detergent nozzle
14. Air curtain member
15 ... Air supply pipe
16. Air nozzle
17. Water receiving channel
18. Drain pipe
19 ・ ・ ・ ・ High pressure liquid spray member
20 ・ ・ ・ ・ High pressure liquid spray nozzle
20a ... (High pressure liquid spray nozzle) rotating shaft
20c ... balance weight
21 ··· Linear guide mechanism
22 ... Movable fluid guide
23 ・ ・ ・ ・ Top and bottom fluid guide
24 ・ ・ ・ ・ Washing member
25 ... water pipe
26 ・ ・ ・ ・ Water nozzle
27..Fluid guide
28, 29 ··· Washing member
30 Draining member
31 ··· Water supply pipe
32 ··· Water nozzle
33 ... Air knife frame
34 ... Slit
35 ・ ・ ・ ・ ・ ・ Separation plate
41 ... Nozzle support frame
41a... Nozzle support (of the nozzle support frame)
41b... Base (of nozzle support frame)
41c ... hinge
42 ... Base frame
43 ・ ・ ・ ・ Knob (of fixture)
G: Flat glass
L ··· (Plate glass) pass line

Claims (18)

A support device for supporting the lower end of the plate material in an upright state,
A fluid guide that supports the plate material in a non-contact manner in a standing state by applying fluid pressure to the side surface of the plate material;
A cleaning liquid supply unit for supplying a cleaning liquid to the plate material in an upright state,
A detergent cleaning apparatus for a plate material, wherein the cleaning liquid supply unit includes at least a part of the fluid guide, and the at least a part of the fluid guide is configured to supply a flow of the cleaning liquid to a side surface of the plate material. The fluid guide constituting the cleaning liquid supply unit has a plurality of upper and lower first fluid ejection portions extending horizontally, and a plurality of cleaning liquid ejection nozzles are arranged in the first fluid ejection portion. 2. The detergent cleaning apparatus for plate materials according to claim 1. The fluid guide forming the cleaning liquid supply unit further includes a second fluid ejection unit extending in a vertical direction and disposed at intervals in a horizontal direction, and a plurality of the second fluid ejection units are provided in the second fluid ejection unit. The apparatus for cleaning detergent of a plate according to claim 1, wherein the cleaning liquid spray nozzles are arranged. 2. The detergent cleaning apparatus according to claim 1, wherein the support device has a transport unit that transports the plate material in a horizontal direction in an upright state, and the fluid guide is disposed along a transport path of the transport unit. . An air curtain portion is provided along the vertical direction of the plate material in an upright state at the upstream end side and the downstream end side of the cleaning liquid supply section as viewed in the transport direction of the plate material. 5. The apparatus according to claim 4, wherein the apparatus has a plurality of air jet nozzles arranged in directions. A support device for supporting the lower end of the plate material in an upright state,
A fluid guide that supports the plate material in a non-contact manner in a standing state by applying fluid pressure to the side surface of the plate material;
A high-pressure liquid spray cleaning apparatus for a plate material, comprising: a high-pressure liquid spray unit for spraying a high-pressure liquid spray from both sides of the plate material in an upright state. 7. The high-pressure liquid spray for a plate material according to claim 6, wherein the support device has a transport portion for transporting the plate material in a horizontal state in an upright state, and the fluid guide is arranged along a transport path of the transport portion. Cleaning equipment. The high-pressure liquid spray unit has a high-pressure liquid spray nozzle movable vertically, and the high-pressure liquid spray nozzles disposed on both sides of the plate are opposed to each other across the plate support position. Item 7. A high-pressure liquid spray cleaning apparatus for a plate material according to item 7. The high-pressure liquid spray unit has a plurality of high-pressure liquid spray nozzles arranged in the vertical direction, and the high-pressure liquid spray nozzles arranged on both sides of the plate are opposed to each other across the plate support position. The high-pressure liquid spray cleaning apparatus for a plate material according to claim 7. The high-pressure liquid spray cleaning apparatus for a plate according to claim 8 or 9, wherein the high-pressure liquid spray nozzle is configured to rotate around a rotation axis substantially perpendicular to a surface of the plate to be cleaned. 9. The high-pressure liquid spray cleaning apparatus for a plate material according to claim 8, wherein a movable fluid guide integrally movable with the high-pressure liquid spray nozzle is disposed adjacent to the high-pressure liquid spray nozzle. On the upstream end side as viewed in the transport direction of the plate material, a washing section is provided along the vertical direction of the plate material in an upright state, and a plurality of water injection nozzles in which the wash sections are arranged in the vertical direction. The high-pressure liquid spray cleaning apparatus for a plate material according to claim 7, which is provided. A transport device that supports the lower end of the plate material in an upright state and transports the horizontal in the horizontal direction,
A fluid guide that supports the plate material in a non-contact manner in a standing state by applying fluid pressure to the side surface of the plate material;
A water draining device for a plate material, comprising: a water draining portion that extends from the upper surface to the lower surface of the plate material so as to correspond to the plate material from both sides thereof and injects a film-like airflow toward the plate material. A plurality of water jet nozzles are provided on the upstream side of the two draining portions, and the washing portions are arranged vertically on both sides of the plate material in an upright state, and the washing portions are vertically arranged. 14. The device for draining plate material according to claim 13, comprising: 14. The apparatus for draining a plate material according to claim 13, wherein the water draining portion is disposed so as to be inclined in an upstream direction as viewed in a transport direction of the plate material. 14. The apparatus according to claim 13, wherein the water-washing section is disposed inclining in an upstream direction as viewed in a conveying direction of the plate material. A transport device that supports and transports the lower end of the plate material in an upright state,
A fluid guide that supports the plate material in a non-contact manner in a standing state by applying fluid pressure to the side surface of the plate material;
The detergent cleaning device according to any one of claims 1 to 5, which is disposed on a transport path of the transport device,
The high-pressure liquid spray cleaning device according to any one of claims 6 to 12, which is disposed downstream of the detergent cleaning device in the transport path.
17. A plate cleaning equipment comprising: the drainage device according to claim 13 disposed downstream of the high-pressure liquid spray cleaning device in the transport path. The cleaning of a plate material according to claim 17, wherein a finish cleaning device is provided between the high-pressure liquid spray cleaning device and the draining device, and the finish cleaning device has the fluid guides on both sides of the transport device. Facility.

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