Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N25/00—Investigating or analyzing materials by the use of thermal means
  • G01N25/56—Investigating or analyzing materials by the use of thermal means by investigating moisture content
  • G01N25/66—Investigating or analyzing materials by the use of thermal means by investigating moisture content by investigating dew-point
  • G01N25/68—Investigating or analyzing materials by the use of thermal means by investigating moisture content by investigating dew-point by varying the temperature of a condensing surface
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B81—MICROSTRUCTURAL TECHNOLOGY
  • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
  • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
  • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
  • B81B3/0081—Thermal properties
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B81—MICROSTRUCTURAL TECHNOLOGY
  • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
  • B81B2203/00—Basic microelectromechanical structures
  • B81B2203/01—Suspended structures, i.e. structures allowing a movement
  • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B81—MICROSTRUCTURAL TECHNOLOGY
  • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
  • B81C2201/00—Manufacture or treatment of microstructural devices or systems
  • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
  • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
  • B81C2201/0111—Bulk micromachining
  • B81C2201/0115—Porous silicon
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
  • H01L2924/0001—Technical content checked by a classifier
  • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

• Physics & Mathematics (AREA)
• General Health & Medical Sciences (AREA)
• General Physics & Mathematics (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Health & Medical Sciences (AREA)
• Life Sciences & Earth Sciences (AREA)
• Chemical & Material Sciences (AREA)
• Thermal Sciences (AREA)
• Biochemistry (AREA)
• Engineering & Computer Science (AREA)
• Analytical Chemistry (AREA)
• Immunology (AREA)
• Pathology (AREA)
• Investigating Or Analyzing Materials Using Thermal Means (AREA)
• Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
• Materials For Medical Uses (AREA)
• Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
• Prostheses (AREA)
• Radiation Pyrometers (AREA)
• Micromachines (AREA)

Applications Claiming Priority (1)

Publications (2)

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Family Applications (1)

Country Status (5)

Families Citing this family (23)

Family Cites Families (9)

• 2000
  • 2000-10-27 DE DE10053326A patent/DE10053326A1/de not_active Ceased
• 2001
  • 2001-10-16 IT IT2001MI002128A patent/ITMI20012128A1/it unknown
  • 2001-10-24 JP JP2001326179A patent/JP2002205299A/ja active Pending
  • 2001-10-26 FR FR0113866A patent/FR2815953B1/fr not_active Expired - Fee Related
  • 2001-10-29 US US10/017,772 patent/US6832523B2/en not_active Expired - Fee Related

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