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EP3280229A1 - Substrate provided with transparent conductive film - Google Patents

Substrate provided with transparent conductive film Download PDF

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Publication number
EP3280229A1
EP3280229A1 EP16771816.2A EP16771816A EP3280229A1 EP 3280229 A1 EP3280229 A1 EP 3280229A1 EP 16771816 A EP16771816 A EP 16771816A EP 3280229 A1 EP3280229 A1 EP 3280229A1
Authority
EP
European Patent Office
Prior art keywords
transparent conductive
conductive film
substrate
laser
patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP16771816.2A
Other languages
German (de)
French (fr)
Other versions
EP3280229A4 (en
Inventor
Masanori Wada
Ken KASHIWADANI
Toru Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Electric Glass Co Ltd
Original Assignee
Nippon Electric Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co Ltd filed Critical Nippon Electric Glass Co Ltd
Publication of EP3280229A1 publication Critical patent/EP3280229A1/en
Publication of EP3280229A4 publication Critical patent/EP3280229A4/en
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • H10K71/421—Thermal treatment, e.g. annealing in the presence of a solvent vapour using coherent electromagnetic radiation, e.g. laser annealing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0296—Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces
    • H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
    • H05B33/28—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode of translucent electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/621—Providing a shape to conductive layers, e.g. patterning or selective deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10—Substrates, e.g. flexible substrates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/90—Other aspects of coatings
    • C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/90—Other aspects of coatings
    • C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C03C2217/948—Layers comprising indium tin oxide [ITO]
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/328—Partly or completely removing a coating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/032—Materials
    • H05K2201/0326—Inorganic, non-metallic conductor, e.g. indium-tin oxide [ITO]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00—Constructional details relating to the organic devices covered by this subclass
    • H10K2102/10—Transparent electrodes, e.g. using graphene
    • H10K2102/101—Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO]
    • H10K2102/103—Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO] comprising indium oxides, e.g. ITO
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes
    • H10K50/81—Anodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes
    • H10K50/82—Cathodes
    • H10K50/828—Transparent cathodes, e.g. comprising thin metal layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/85—Arrangements for extracting light from the devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells

Definitions

  • the present invention relates to transparent conductive film-equipped substrates.
  • Patent Literatures 1 and 2 In relation to plasma displays, electroluminescent devices, and the like, it is known that a transparent conductive film for use as an electrode is formed on a substrate, such as a glass substrate, and the transparent conductive film is subjected to patterning by laser (Patent Literatures 1 and 2) .
  • an insulating film is provided on a portion of the substrate from which the transparent conductive film has been removed by patterning.
  • the above insulating film is required not to easily peel off from the substrate.
  • An object of the present invention is to provide a transparent conductive film-equipped substrate that makes it difficult for an insulating film provided on a portion from which a transparent conductive film has been removed to peel off.
  • the present invention is directed to a transparent conductive film-equipped substrate including a substrate and a transparent conductive film provided on the substrate and subjected to patterning, the transparent conductive film-equipped substrate being made up so that: a removal region where the transparent conductive film has been removed by patterning, a non-removal region where the transparent conductive film is left unremoved, and a boundary region provided between the removal region and the non-removal region are formed on the substrate; and the boundary region is formed with insular portions in which the transparent conductive film is formed in insular shapes.
  • the insular portions as viewed in plan preferably have an area within 25% to 75% of an area of the boundary region.
  • the substrate is preferably a transparent substrate.
  • the substrate is preferably a glass substrate.
  • the patterning that can be cited is patterning by laser.
  • the laser is preferably femtosecond laser.
  • an insulating film provided on a portion from which a transparent conductive film has been removed can be inhibited from peeling off.
  • Fig. 1 is a schematic cross-sectional view showing a transparent conductive film-equipped substrate according to one embodiment of the present invention.
  • a transparent conductive film-equipped substrate 10 according to this embodiment includes a substrate 1 and a transparent conductive film 2 provided on a principal surface 1a of the substrate 1.
  • the transparent conductive film 2 is patterned.
  • a removal region A1 where the transparent conductive film 2 has been removed by patterning and a non-removal region A2 where the transparent conductive film 2 is left unremoved are formed on the principal surface 1a of the substrate 1.
  • a boundary region A3 is also formed on the principal surface 1a of the substrate 1 .
  • the thickness of the transparent conductive film 2 gradually decreases with approach to the removal region A1.
  • the transparent conductive film 2 examples include thin films of composite oxides having electrical conductivity, such as indium tin oxides (ITO), aluminum zinc oxides (AZO), indium zinc oxides (IZO), and fluorine-doped tin oxides (FTO). Indium tin oxides are particularly preferably used.
  • the transparent conductive film 2 is made of an indium tin oxide. The thickness of the transparent conductive film 2 is preferably within a range of 20 nm to 200 nm and more preferably within a range of 50 nm to 150 nm.
  • the substrate 1 is preferably a transparent substrate, such as a glass substrate.
  • a transparent substrate such as a glass substrate.
  • examples that can be used as the glass substrate include soda-lime glasses, aluminosilicate glasses, borosilicate glasses, and alkali-free glasses.
  • a glass substrate made of a soda-lime glass is used.
  • the patterning of the transparent conductive film 2 is preferably patterning by laser. By patterning the transparent conductive film 2 by laser, part of the transparent conductive film 2 is removed to form the removal region A1.
  • the laser that is used is a laser as to the wavelength of which the transparent conductive film 2 has a high absorptance.
  • an ITO film exhibits high absorptance of wavelengths of 1000 nm or more. Therefore, the ITO film can be patterned using a laser having a wavelength of 1000 nm or more to partly remove the ITO film by laser irradiation, thus forming a removal region A1.
  • the boundary region A3 is formed around the removal region A1.
  • the wavelength of the laser is, for example, preferably 1000 nm or more, more preferably 1300 nm or more, and still more preferably 1500 nm or more. No particular limitation is placed on the upper limit of the wavelength of the laser, but the wavelength of the laser is generally not more than 2000 nm.
  • the laser is preferably a sub-10-picosecond pulse laser, more preferably a subpicosecond, ultrashort pulse laser, and particularly preferably a femtosecond laser.
  • a laser having such a short pulse width a multiphoton absorption phenomenon is generated, so that patterning can be achieved without diffusing heat to the surrounding portions.
  • the spot diameter of the laser is preferably within a range of 0.2 times to 5 times the width of the removal region A1 in the y direction and more preferably within a range of 0.5 times to twice the width thereof.
  • the width of the removal region A1 in the y direction is generally preferably within a range of 3 ⁇ m to 50 ⁇ m and more preferably 5 ⁇ m to 20 ⁇ m.
  • the patterning may be performed by operating the laser plural times or using a plurality of lasers to somewhat overlap the laser spots.
  • the width of the boundary region A3 in the y direction is generally preferably within a range of 0.3 ⁇ m to 10 ⁇ m and more preferably 0.5 ⁇ m to 5 ⁇ m.
  • the laser is generally applied in the direction of thickness of the transparent conductive film 2 (z direction) from the transparent conductive film 2 side.
  • the transparent conductive film-equipped substrate 10 according to the embodiment shown in Fig. 1 can be used, for example, as an electrode substrate for an organic electroluminescent device.
  • an organic electroluminescent layer is provided on top of the transparent conductive film-equipped substrate 10.
  • an underlying glass layer having a higher refractive index than the substrate 1 may be provided between the substrate 1 and the transparent conductive film 2.
  • Fig. 2 is a schematic cross-sectional view showing a state where an insulating film is provided on the transparent conductive film-equipped substrate according to the embodiment shown in Fig. 1 .
  • an insulating film 3 is provided to cover a portion of the principal surface 1a of the substrate 1 located in the removal region A1 of the transparent conductive film-equipped substrate 10 and the boundary region A3.
  • the insulating film 3 is provided mainly for the purpose of passivation or the like.
  • the insulating film 3 can be made of an inorganic material, such as silicon nitride, silicon oxide, silicon oxynitride, or aluminum oxide or an organic material, such as epoxy resin, acrylic resin, or urethane resin.
  • Fig. 3 is a scanning electron micrograph showing the boundary region of the transparent conductive film-equipped substrate according to the one embodiment of the present invention.
  • Figs. 4 and 5 are plan views schematically showing the boundary region shown in Fig. 3 .
  • Fig. 5 is a schematic plan view in which insular portions in the boundary region shown in Fig. 4 are hatched.
  • Figs. 3 , 4 , and 5 show the boundary region A3 and its neighboring removal region A1 and non-removal region A2 in plan view, i.e., as viewed from the z direction.
  • Figs. 3 , 4 , and 5 show a state shown in Fig. 1 in which the insulating film 3 is not yet provided.
  • the boundary region A3 is formed with: peninsular portions 2a made of the transparent conductive film 2 formed continuously from the non-removal region A2 to extend in the y direction; and insular portions 2b made of the transparent conductive film 2 formed substantially separately from the non-removal region A2.
  • the insular portions 2b made of the transparent conductive film 2 can be formed in the boundary region A3 by patterning on predetermined conditions using a laser having a wavelength or pulse width according to the material or other characteristics of the transparent conductive film 2.
  • the insulating film 3 provided on top of the insular portions 2b can be inhibited from peeling off.
  • the reason why the insulating film 3 can be inhibited from peeling off can be understood as follows.
  • the insulating film 3 When an insulating film 3 is provided on top of the insular portions 2b, the insulating film 3 is formed to make contact with the peripheral sidewalls of the insular portions 2b. Therefore, the insulating film 3 is formed to extend deep in between the adjacent insular portions 2b. Furthermore, the insular portions 2b also lie extended deep in the insulating film 3. It can be understood that for the above reason strong anchoring effects can be exerted to inhibit the insulating film 3 from peeling off. Note that in order to effectively inhibit peeling of the insulating film 3, the area of the insular portions 2b (the hatched, partial area of the insulating film 3) as viewed in plan is preferably within a range of 25% to 75% of the area of the boundary region A3.
  • the area of the insular portions 2b is smaller than the above range, the number of insular portions 2b extending deep in the insulating film 3 is small, so that the effect of inhibiting peeling of the insulating film 3 may not be achieved. Also, if the area of the insular portions 2b is larger than the above range, the number of portions of the insulating film 3 extending deep in between the insular portions 2b is small, so that the effect of inhibiting peeling of the insulating film 3 may not be achieved.
  • the area of the insular portions 2b is more preferably within a range of 40% to 60% of the area of the boundary region A3.
  • the size of each single insular portion 2b is, in terms of circle-equivalent diameter, preferably within a range of 0.1 ⁇ m to 0.6 ⁇ m and more preferably 0.1 ⁇ m to 0.3 ⁇ m.
  • the borderline position between the non-removal region A2 and the boundary region A3 is, as shown in Figs. 4 and 5 , a position where the transparent conductive film 2 begins to be removed to expose the principal surface 1a and the borderline position between the boundary region A3 and the removal region A1 is a position where the insular portions 2b substantially disappear.
  • the percentage of the area of the insular portions 2b to the area of the boundary region A3 is preferably determined in a field of view where the area of the boundary region A3 is within a range of 0.7 ⁇ m 2 to 25 ⁇ m 2 .
  • the preferred patterning condition for allowing the area of the insular portions 2b to fall within the above range in the present invention is to use a femtosecond laser.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Electromagnetism (AREA)
  • Laser Beam Processing (AREA)
  • Electroluminescent Light Sources (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Non-Insulated Conductors (AREA)
  • Laminated Bodies (AREA)

Abstract

Provided is a transparent conductive film-equipped substrate that makes it difficult for an insulating film provided on a portion from which a transparent conductive film has been removed to peel off. The transparent conductive film-equipped substrate 10 includes a substrate 1 and a transparent conductive film 2 provided on the substrate 1 and subjected to patterning, wherein the transparent conductive film-equipped substrate is made up so that: a removal region A1 where the transparent conductive film 2 has been removed by patterning, a non-removal region A2 where the transparent conductive film is left unremoved, and a boundary region A3 provided between the removal region A1 and the non-removal region A2 are formed on the substrate 1; and the boundary region A3 is formed with insular portions 2b in which the transparent conductive film 2 is formed in insular shapes.

Description

    [Technical Field]
  • The present invention relates to transparent conductive film-equipped substrates.
    • [Background Art]
  • In relation to plasma displays, electroluminescent devices, and the like, it is known that a transparent conductive film for use as an electrode is formed on a substrate, such as a glass substrate, and the transparent conductive film is subjected to patterning by laser (Patent Literatures 1 and 2) .
  • Generally, for passivation or the like, an insulating film is provided on a portion of the substrate from which the transparent conductive film has been removed by patterning.
    • [Citation List] [Patent Literature]
    • [PTL 1]
      JP-A-2007-207554
    • [PTL 2]
      JP-A-2006-267834
    [Summary of Invention] [Technical Problem]
  • The above insulating film is required not to easily peel off from the substrate.
  • An object of the present invention is to provide a transparent conductive film-equipped substrate that makes it difficult for an insulating film provided on a portion from which a transparent conductive film has been removed to peel off.
    • [Solution to Problem]
  • The present invention is directed to a transparent conductive film-equipped substrate including a substrate and a transparent conductive film provided on the substrate and subjected to patterning, the transparent conductive film-equipped substrate being made up so that: a removal region where the transparent conductive film has been removed by patterning, a non-removal region where the transparent conductive film is left unremoved, and a boundary region provided between the removal region and the non-removal region are formed on the substrate; and the boundary region is formed with insular portions in which the transparent conductive film is formed in insular shapes.
  • The insular portions as viewed in plan preferably have an area within 25% to 75% of an area of the boundary region.
  • The substrate is preferably a transparent substrate.
  • The substrate is preferably a glass substrate.
  • An example of the patterning that can be cited is patterning by laser. In this case, the laser is preferably femtosecond laser.
    • [Advantageous Effects of Invention]
  • According to the present invention, an insulating film provided on a portion from which a transparent conductive film has been removed can be inhibited from peeling off.
    • [Brief Description of Drawings]
    • [Fig. 1]
      Fig. 1 is a schematic cross-sectional view showing a transparent conductive film-equipped substrate according to one embodiment of the present invention.
    • [Fig. 2]
      Fig. 2 is a schematic cross-sectional view showing a state where an insulating film is provided on the transparent conductive film-equipped substrate according to the embodiment shown in Fig. 1.
    • [Fig. 3]
      Fig. 3 is a scanning electron micrograph showing a boundary region of the transparent conductive film-equipped substrate according to the one embodiment of the present invention.
    • [Fig. 4]
      Fig. 4 is a plan view schematically showing the boundary region shown in Fig. 3.
    • [Fig. 5]
      Fig. 5 is a schematic plan view in which insular portions in the boundary region shown in Fig. 4 are hatched.
    [Description of Embodiments]
  • Hereinafter, a description will be given of a preferred embodiment. However, the following embodiment is merely illustrative and the present invention is not limited to the following embodiment. Throughout the drawings, members having substantially the same functions may be referred to by the same reference characters.
  • Fig. 1 is a schematic cross-sectional view showing a transparent conductive film-equipped substrate according to one embodiment of the present invention. As shown in Fig. 1, a transparent conductive film-equipped substrate 10 according to this embodiment includes a substrate 1 and a transparent conductive film 2 provided on a principal surface 1a of the substrate 1. The transparent conductive film 2 is patterned. By patterning the transparent conductive film 2, a removal region A1 where the transparent conductive film 2 has been removed by patterning and a non-removal region A2 where the transparent conductive film 2 is left unremoved are formed on the principal surface 1a of the substrate 1.
  • Also formed on the principal surface 1a of the substrate 1 is a boundary region A3 provided between the removal region A1 and the non-removal region A2. As shown in Fig. 1, in the boundary region A3, the thickness of the transparent conductive film 2 gradually decreases with approach to the removal region A1.
  • Examples of the transparent conductive film 2 that can be used include thin films of composite oxides having electrical conductivity, such as indium tin oxides (ITO), aluminum zinc oxides (AZO), indium zinc oxides (IZO), and fluorine-doped tin oxides (FTO). Indium tin oxides are particularly preferably used. In this embodiment, the transparent conductive film 2 is made of an indium tin oxide. The thickness of the transparent conductive film 2 is preferably within a range of 20 nm to 200 nm and more preferably within a range of 50 nm to 150 nm.
  • The substrate 1 is preferably a transparent substrate, such as a glass substrate. Examples that can be used as the glass substrate include soda-lime glasses, aluminosilicate glasses, borosilicate glasses, and alkali-free glasses. In this embodiment, a glass substrate made of a soda-lime glass is used.
  • The patterning of the transparent conductive film 2 is preferably patterning by laser. By patterning the transparent conductive film 2 by laser, part of the transparent conductive film 2 is removed to form the removal region A1. The laser that is used is a laser as to the wavelength of which the transparent conductive film 2 has a high absorptance. For example, an ITO film exhibits high absorptance of wavelengths of 1000 nm or more. Therefore, the ITO film can be patterned using a laser having a wavelength of 1000 nm or more to partly remove the ITO film by laser irradiation, thus forming a removal region A1. By this patterning, concurrently with the formation of the removal region A1, the boundary region A3 is formed around the removal region A1.
  • No particular limitation is placed on the wavelength of the laser so long as the transparent conductive film 2 has a high absorptance of the wavelength. The wavelength of the laser is, for example, preferably 1000 nm or more, more preferably 1300 nm or more, and still more preferably 1500 nm or more. No particular limitation is placed on the upper limit of the wavelength of the laser, but the wavelength of the laser is generally not more than 2000 nm.
  • The laser is preferably a sub-10-picosecond pulse laser, more preferably a subpicosecond, ultrashort pulse laser, and particularly preferably a femtosecond laser. By the use of a laser having such a short pulse width, a multiphoton absorption phenomenon is generated, so that patterning can be achieved without diffusing heat to the surrounding portions.
  • The spot diameter of the laser is preferably within a range of 0.2 times to 5 times the width of the removal region A1 in the y direction and more preferably within a range of 0.5 times to twice the width thereof. The width of the removal region A1 in the y direction is generally preferably within a range of 3 µm to 50 µm and more preferably 5 µm to 20 µm. When the removal region A1 is wide, the patterning may be performed by operating the laser plural times or using a plurality of lasers to somewhat overlap the laser spots. Furthermore, the width of the boundary region A3 in the y direction is generally preferably within a range of 0.3 µm to 10 µm and more preferably 0.5 µm to 5 µm.
  • The laser is generally applied in the direction of thickness of the transparent conductive film 2 (z direction) from the transparent conductive film 2 side.
  • The transparent conductive film-equipped substrate 10 according to the embodiment shown in Fig. 1 can be used, for example, as an electrode substrate for an organic electroluminescent device. In this case, an organic electroluminescent layer is provided on top of the transparent conductive film-equipped substrate 10. Furthermore, in this case, in order to increase the extraction efficiency of light from the organic electroluminescent layer, an underlying glass layer having a higher refractive index than the substrate 1 may be provided between the substrate 1 and the transparent conductive film 2.
  • Fig. 2 is a schematic cross-sectional view showing a state where an insulating film is provided on the transparent conductive film-equipped substrate according to the embodiment shown in Fig. 1. As shown in Fig. 2, an insulating film 3 is provided to cover a portion of the principal surface 1a of the substrate 1 located in the removal region A1 of the transparent conductive film-equipped substrate 10 and the boundary region A3. The insulating film 3 is provided mainly for the purpose of passivation or the like.
  • The insulating film 3 can be made of an inorganic material, such as silicon nitride, silicon oxide, silicon oxynitride, or aluminum oxide or an organic material, such as epoxy resin, acrylic resin, or urethane resin.
  • Fig. 3 is a scanning electron micrograph showing the boundary region of the transparent conductive film-equipped substrate according to the one embodiment of the present invention. Figs. 4 and 5 are plan views schematically showing the boundary region shown in Fig. 3. Fig. 5 is a schematic plan view in which insular portions in the boundary region shown in Fig. 4 are hatched. Figs. 3, 4, and 5 show the boundary region A3 and its neighboring removal region A1 and non-removal region A2 in plan view, i.e., as viewed from the z direction. Furthermore, Figs. 3, 4, and 5 show a state shown in Fig. 1 in which the insulating film 3 is not yet provided.
  • As shown in Figs. 3, 4, and 5, in the present invention, the boundary region A3 is formed with: peninsular portions 2a made of the transparent conductive film 2 formed continuously from the non-removal region A2 to extend in the y direction; and insular portions 2b made of the transparent conductive film 2 formed substantially separately from the non-removal region A2. The insular portions 2b made of the transparent conductive film 2 can be formed in the boundary region A3 by patterning on predetermined conditions using a laser having a wavelength or pulse width according to the material or other characteristics of the transparent conductive film 2. By forming the insular portions 2b made of the transparent conductive film 2 in the boundary region A3 in this manner, the insulating film 3 provided on top of the insular portions 2b can be inhibited from peeling off. The reason why the insulating film 3 can be inhibited from peeling off can be understood as follows.
  • When an insulating film 3 is provided on top of the insular portions 2b, the insulating film 3 is formed to make contact with the peripheral sidewalls of the insular portions 2b. Therefore, the insulating film 3 is formed to extend deep in between the adjacent insular portions 2b. Furthermore, the insular portions 2b also lie extended deep in the insulating film 3. It can be understood that for the above reason strong anchoring effects can be exerted to inhibit the insulating film 3 from peeling off. Note that in order to effectively inhibit peeling of the insulating film 3, the area of the insular portions 2b (the hatched, partial area of the insulating film 3) as viewed in plan is preferably within a range of 25% to 75% of the area of the boundary region A3. If the area of the insular portions 2b is smaller than the above range, the number of insular portions 2b extending deep in the insulating film 3 is small, so that the effect of inhibiting peeling of the insulating film 3 may not be achieved. Also, if the area of the insular portions 2b is larger than the above range, the number of portions of the insulating film 3 extending deep in between the insular portions 2b is small, so that the effect of inhibiting peeling of the insulating film 3 may not be achieved. The area of the insular portions 2b is more preferably within a range of 40% to 60% of the area of the boundary region A3. Furthermore, the size of each single insular portion 2b is, in terms of circle-equivalent diameter, preferably within a range of 0.1 µm to 0.6 µm and more preferably 0.1 µm to 0.3 µm.
  • The borderline position between the non-removal region A2 and the boundary region A3 is, as shown in Figs. 4 and 5, a position where the transparent conductive film 2 begins to be removed to expose the principal surface 1a and the borderline position between the boundary region A3 and the removal region A1 is a position where the insular portions 2b substantially disappear.
  • The percentage of the area of the insular portions 2b to the area of the boundary region A3 is preferably determined in a field of view where the area of the boundary region A3 is within a range of 0.7 µm2 to 25 µm2.
  • Furthermore, the preferred patterning condition for allowing the area of the insular portions 2b to fall within the above range in the present invention is to use a femtosecond laser.
    • [Reference Signs List]
    • 1
    substrate
    1a
    principal surface
    2
    transparent conductive film
    2a
    peninsular portion
    2b
    insular portion
    3
    insulating film
    10
    transparent conductive film-equipped substrate
    A1
    removal region
    A2
    non-removal region
    A3
    boundary region

Claims (6)

  1. A transparent conductive film-equipped substrate comprising a substrate and a transparent conductive film provided on the substrate and subjected to patterning, the transparent conductive film-equipped substrate being made up so that:
    a removal region where the transparent conductive film has been removed by patterning, a non-removal region where the transparent conductive film is left unremoved, and a boundary region provided between the removal region and the non-removal region are formed on the substrate; and
    the boundary region is formed with insular portions in which the transparent conductive film is formed in insular shapes.
  2. The transparent conductive film-equipped substrate according to claim 1, wherein the insular portions as viewed in plan have an area within 25% to 75% of an area of the boundary region.
  3. The transparent conductive film-equipped substrate according to claim 1 or 2, wherein the substrate is a transparent substrate.
  4. The transparent conductive film-equipped substrate according to any one of claims 1 to 3, wherein the substrate is a glass substrate.
  5. The transparent conductive film-equipped substrate according to any one of claims 1 to 4, wherein the patterning is patterning by laser.
  6. The transparent conductive film-equipped substrate according to claim 5, wherein the laser is femtosecond laser.
EP16771816.2A 2015-03-31 2016-01-13 Substrate provided with transparent conductive film Withdrawn EP3280229A4 (en)

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PCT/JP2016/050754 WO2016157930A1 (en) 2015-03-31 2016-01-13 Substrate provided with transparent conductive film

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WO2016157930A1 (en) 2016-10-06
US20180007786A1 (en) 2018-01-04
JP2016190392A (en) 2016-11-10
JP6519277B2 (en) 2019-05-29
TW201635875A (en) 2016-10-01
TWI687141B (en) 2020-03-01
US10187980B2 (en) 2019-01-22
KR20170133313A (en) 2017-12-05
CN107211506A (en) 2017-09-26
KR102381105B1 (en) 2022-03-30
CN107211506B (en) 2019-05-14

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