JP2016114061A - 真空ポンプ - Google Patents

真空ポンプ Download PDF

Info

Publication number: JP2016114061A
Authority: JP; Japan
Prior art keywords: pump; vacuum pump; holbeck; gap; rotor
Prior art date: 2014-12-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP2015245410A

Other languages

English (en)

Japanese (ja)

Inventor

ベルント・ホフマン

Bernd Hoffman

ヤン・ホフマン

Jan Hofmann

ミルコ・メコタ

Mirko Mekota

ヨハネス・シュナール

Schnarr Johannes

ミヒャエル・シュヴァイクヘーファー

Michael Schweighoefer

トビアス・シュトル

Tobias Stoll

ペーター・フォルヴェルク

Vorwerk Peter

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2014-12-17

Filing date

2015-12-16

Publication date

2016-06-23

2015-12-16 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2016-06-23 Publication of JP2016114061A publication Critical patent/JP2016114061A/ja

Status Pending legal-status Critical Current

Images

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

JP2015245410A 2014-12-17 2015-12-16 真空ポンプ Pending JP2016114061A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE102014118881.0A DE102014118881A1 (de)	2014-12-17	2014-12-17	Vakuumpumpe
DE102014118881.0		2014-12-17

Publications (1)

Publication Number	Publication Date
JP2016114061A true JP2016114061A (ja)	2016-06-23

Family

ID=54697495

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2015245410A Pending JP2016114061A (ja)	2014-12-17	2015-12-16	真空ポンプ

Country Status (3)

Country	Link
EP (1)	EP3034882B1 (fr)
JP (1)	JP2016114061A (fr)
DE (1)	DE102014118881A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2579028A (en) *	2018-11-14	2020-06-10	Edwards Ltd	Molecular drag stage

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP3473858B1 (fr) *	2017-10-17	2020-07-01	Pfeiffer Vacuum Gmbh	Procédé d'optimisation de durée de vie des paliers à rouleaux d'une pompe à vide

Citations (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS60252197A (ja) *	1984-05-29	1985-12-12	Hitachi Ltd	真空ポンプ
JPS6355396A (ja) *	1986-08-21	1988-03-09	Hitachi Ltd	タ−ボ真空ポンプ
JPH08144992A (ja) *	1994-11-17	1996-06-04	Shimadzu Corp	モレキュラドラッグポンプ
JP2002168192A (ja) *	2000-12-01	2002-06-14	Seiko Instruments Inc	真空ポンプ
JP2007503193A (ja) *	2003-08-18	2007-02-15	フォルヴェルク・ウント・ツェーオー、インターホールディング・ゲーエムベーハー	リラクタンスモータ
JP2013174238A (ja) *	2012-02-23	2013-09-05	Pfeiffer Vacuum Gmbh	真空ポンプ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL184487C (nl) *	1977-02-25	1989-08-01	Ultra Centrifuge Nederland Nv	Moleculaire pomp.
US4708586A (en) *	1985-08-14	1987-11-24	Rikagaku Kenkyusho	Thread groove type vacuum pump
US6179573B1 (en) *	1999-03-24	2001-01-30	Varian, Inc.	Vacuum pump with inverted motor
US6302641B1 (en) *	2000-01-07	2001-10-16	Kashiyama Kougyou Industry Co., Ltd.	Multiple type vacuum pump
DE10020946A1 (de) *	2000-04-28	2001-11-15	Siemens Ag	Läufer für eine Induktionsmaschine mit hohen Drehzahlen
GB0327149D0 (en) *	2003-11-21	2003-12-24	Boc Group Plc	Vacuum pumping arrangement
WO2006111159A1 (fr) *	2005-04-22	2006-10-26	Temic Automotive Electric Motors Gmbh	Paquet de toles stator/rotor
DE102011114280A1 (de) *	2011-09-26	2013-03-28	Daimler Ag	Stator einer elektrischen Maschine
DE202013002969U1 (de) *	2013-03-27	2014-06-30	Oerlikon Leybold Vacuum Gmbh	Vakuumpumpe
DE102013214662A1 (de) *	2013-07-26	2015-01-29	Pfeiffer Vacuum Gmbh	Vakuumpumpe
DE102014113109A1 (de) *	2014-09-11	2016-03-17	Pfeiffer Vacuum Gmbh	Vakuumpumpe

2014
- 2014-12-17 DE DE102014118881.0A patent/DE102014118881A1/de active Pending
2015
- 2015-11-23 EP EP15195879.0A patent/EP3034882B1/fr active Active
- 2015-12-16 JP JP2015245410A patent/JP2016114061A/ja active Pending

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS60252197A (ja) *	1984-05-29	1985-12-12	Hitachi Ltd	真空ポンプ
JPS6355396A (ja) *	1986-08-21	1988-03-09	Hitachi Ltd	タ−ボ真空ポンプ
JPH08144992A (ja) *	1994-11-17	1996-06-04	Shimadzu Corp	モレキュラドラッグポンプ
JP2002168192A (ja) *	2000-12-01	2002-06-14	Seiko Instruments Inc	真空ポンプ
JP2007503193A (ja) *	2003-08-18	2007-02-15	フォルヴェルク・ウント・ツェーオー、インターホールディング・ゲーエムベーハー	リラクタンスモータ
JP2013174238A (ja) *	2012-02-23	2013-09-05	Pfeiffer Vacuum Gmbh	真空ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2579028A (en) *	2018-11-14	2020-06-10	Edwards Ltd	Molecular drag stage

Also Published As

Publication number	Publication date
EP3034882A2 (fr)	2016-06-22
EP3034882B1 (fr)	2024-08-14
EP3034882A3 (fr)	2016-10-26
DE102014118881A1 (de)	2016-06-23

Publication	Publication Date	Title
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US20240003357A1 (en)	2024-01-04	Centrifugal compressor for refrigeration system and refrigeration system
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CN117062986A (zh)	2023-11-14	具有防爆功能的涡轮压缩机
US20160090979A1 (en)	2016-03-31	Pump arrangement

Legal Events

Date	Code	Title	Description
2016-10-14	A977	Report on retrieval	Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20161013
2016-10-19	A131	Notification of reasons for refusal	Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20161019
2017-01-17	A601	Written request for extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20170117
2017-03-17	A601	Written request for extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20170317
2017-04-06	A521	Written amendment	Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170406
2017-07-05	A131	Notification of reasons for refusal	Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170705
2017-10-03	A601	Written request for extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20171003
2017-12-27	A521	Written amendment	Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20171227
2018-05-16	A02	Decision of refusal	Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20180516

JP2016114061A - 真空ポンプ - Google Patents

Info

Links

Images

Classifications

Landscapes

Applications Claiming Priority (2)

Publications (1)

Family

ID=54697495

Family Applications (1)

Country Status (3)

Cited By (1)

Families Citing this family (1)

Citations (6)

Family Cites Families (11)

Patent Citations (6)

Cited By (1)

Also Published As

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