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EP2902637A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2902637A3
EP2902637A3 EP15150410.7A EP15150410A EP2902637A3 EP 2902637 A3 EP2902637 A3 EP 2902637A3 EP 15150410 A EP15150410 A EP 15150410A EP 2902637 A3 EP2902637 A3 EP 2902637A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
holweckstator
holweckpumpstufe
holweckrotor
gas inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15150410.7A
Other languages
German (de)
French (fr)
Other versions
EP2902637B1 (en
EP2902637A2 (en
Inventor
Tobias Stoll
Jan Hofmann
Thorsten Burggraf
Jürgen KELLER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2902637A2 publication Critical patent/EP2902637A2/en
Publication of EP2902637A3 publication Critical patent/EP2902637A3/en
Application granted granted Critical
Publication of EP2902637B1 publication Critical patent/EP2902637B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Reciprocating Pumps (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe (1) mit wenigstens einer Holweckpumpstufe (70) mit wenigstens einem Holweckstator (74) und wenigstens einem Holweckrotor (72), bei der in dem Holweckstator (74) der wenigstens einen Holweckpumpstufe (70) wenigstens ein Gaseinlass (80, 82) vorgesehen ist.

Figure imgaf001
The invention relates to a vacuum pump (1) having at least one Holweckpumpstufe (70) with at least one Holweckstator (74) and at least one Holweckrotor (72), wherein in the Holweckstator (74) of at least one Holweckpumpstufe (70) at least one gas inlet (80 , 82) is provided.
Figure imgaf001
EP15150410.7A 2014-02-03 2015-01-08 Vacuum pump Active EP2902637B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014101257.7A DE102014101257A1 (en) 2014-02-03 2014-02-03 vacuum pump

Publications (3)

Publication Number Publication Date
EP2902637A2 EP2902637A2 (en) 2015-08-05
EP2902637A3 true EP2902637A3 (en) 2015-09-02
EP2902637B1 EP2902637B1 (en) 2017-11-08

Family

ID=52278512

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15150410.7A Active EP2902637B1 (en) 2014-02-03 2015-01-08 Vacuum pump

Country Status (2)

Country Link
EP (1) EP2902637B1 (en)
DE (1) DE102014101257A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6578838B2 (en) * 2015-09-15 2019-09-25 株式会社島津製作所 Vacuum pump and mass spectrometer

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
WO2004068099A1 (en) * 2003-01-25 2004-08-12 Inficon Gmbh Leak detector comprising an inlet
DE10308420A1 (en) * 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Test gas leak detector
DE202005019644U1 (en) * 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbo molecular pump, with a main inflow and at least one intermediate inflow, has a floating rotor supported by active magnet radial and radial-axial bearings
DE102008024764A1 (en) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Multi-stage vacuum pump
DE102009035332A1 (en) * 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh vacuum pump
WO2012104387A1 (en) * 2011-02-03 2012-08-09 Oerlikon Leybold Vacuum Gmbh Leakage search device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
WO2004068099A1 (en) * 2003-01-25 2004-08-12 Inficon Gmbh Leak detector comprising an inlet
DE10308420A1 (en) * 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Test gas leak detector
DE202005019644U1 (en) * 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbo molecular pump, with a main inflow and at least one intermediate inflow, has a floating rotor supported by active magnet radial and radial-axial bearings
DE102008024764A1 (en) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Multi-stage vacuum pump
DE102009035332A1 (en) * 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh vacuum pump
WO2012104387A1 (en) * 2011-02-03 2012-08-09 Oerlikon Leybold Vacuum Gmbh Leakage search device

Also Published As

Publication number Publication date
EP2902637B1 (en) 2017-11-08
EP2902637A2 (en) 2015-08-05
DE102014101257A1 (en) 2015-08-06

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