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EP2740943A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2740943A3
EP2740943A3 EP13194311.0A EP13194311A EP2740943A3 EP 2740943 A3 EP2740943 A3 EP 2740943A3 EP 13194311 A EP13194311 A EP 13194311A EP 2740943 A3 EP2740943 A3 EP 2740943A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
nanoparticles
production
metal
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13194311.0A
Other languages
German (de)
French (fr)
Other versions
EP2740943B1 (en
EP2740943A2 (en
Inventor
Bernd Koci
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2740943A2 publication Critical patent/EP2740943A2/en
Publication of EP2740943A3 publication Critical patent/EP2740943A3/en
Application granted granted Critical
Publication of EP2740943B1 publication Critical patent/EP2740943B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/90—Alloys not otherwise provided for
    • F05C2201/903—Aluminium alloy, e.g. AlCuMgPb F34,37
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/12—Light metals
    • F05D2300/121—Aluminium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/20—Oxide or non-oxide ceramics
    • F05D2300/22—Non-oxide ceramics
    • F05D2300/224—Carbon, e.g. graphite
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced
    • F05D2300/6032—Metal matrix composites [MMC]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/61—Syntactic materials, i.e. hollow spheres embedded in a matrix

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Powder Metallurgy (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe mit wenigstens einer Komponente (30), die ein Material umfasst oder daraus besteht, welches ein Metall und Nanopartikel enthält, sowie ein Verfahren zur Herstellung einer Vakuumpumpe.

Figure imgaf001
The invention relates to a vacuum pump with at least one component (30) which comprises or consists of a material which contains a metal and nanoparticles, and a method for the production of a vacuum pump.
Figure imgaf001
EP13194311.0A 2012-12-04 2013-11-25 Vacuum pump Active EP2740943B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012222230.8A DE102012222230A1 (en) 2012-12-04 2012-12-04 vacuum pump

Publications (3)

Publication Number Publication Date
EP2740943A2 EP2740943A2 (en) 2014-06-11
EP2740943A3 true EP2740943A3 (en) 2015-12-02
EP2740943B1 EP2740943B1 (en) 2018-01-10

Family

ID=49674192

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13194311.0A Active EP2740943B1 (en) 2012-12-04 2013-11-25 Vacuum pump

Country Status (4)

Country Link
EP (1) EP2740943B1 (en)
JP (1) JP2014111939A (en)
CN (1) CN103850949A (en)
DE (1) DE102012222230A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014109004A1 (en) * 2014-06-26 2015-12-31 Pfeiffer Vacuum Gmbh Siegbahn stage
WO2016071348A1 (en) * 2014-11-05 2016-05-12 Magna powertrain gmbh & co kg Compressor, and method for producing a compressor
EP3085964B1 (en) * 2015-04-21 2019-12-11 Pfeiffer Vacuum Gmbh Production of a vacuum pump part by metallic additive manufacturing
CN110382877B (en) * 2017-03-23 2022-01-14 埃地沃兹日本有限公司 Vacuum pump and vane part and rotor for the vacuum pump and fixed vane
JP7342574B2 (en) * 2019-09-27 2023-09-12 株式会社島津製作所 Vacuum pump

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10053663A1 (en) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanical kinetic vacuum pump with rotor and shaft
WO2007022332A2 (en) * 2005-08-16 2007-02-22 The Boc Group, Inc. Turbomolecular pump with static charge control
DE60030833T2 (en) * 1999-12-21 2007-03-29 Boc Edwards Japan Ltd. vacuum pump
WO2008130739A1 (en) * 2007-04-17 2008-10-30 General Electric Company Articles made from composite materials having toughened and untoughened regions
DE102008025700A1 (en) * 2008-05-29 2009-12-03 Siemens Aktiengesellschaft Radial fan i.e. disk fan, for e.g. self ventilation of e.g. compressor, has fan disk with radially running blades arranged on fan disk, where part of blades comprises flexible material e.g. polypropylene
DE102010021240A1 (en) * 2010-05-21 2011-11-24 Oerlikon Leybold Vacuum Gmbh Method for surface treatment of pumping elements or pump chamber inner walls of vacuum pump, involves flushing pump chamber with dispersion medium which is deposited on pump chamber inner walls or surfaces of pump elements
GB2490127A (en) * 2011-04-19 2012-10-24 Rolls Royce Plc Aerofoil assembly

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03107598A (en) * 1989-09-20 1991-05-07 Ntn Corp Surface treatment of axial-flow vacuum pump
US6095754A (en) 1998-05-06 2000-08-01 Applied Materials, Inc. Turbo-Molecular pump with metal matrix composite rotor and stator
JP2001221186A (en) * 2000-02-04 2001-08-17 Tokyo Electron Ltd Axial flow vacuum pump and processor
ITTO20020770A1 (en) * 2002-09-06 2004-03-07 Varian Spa METHOD FOR MANUFACTURING VACUUM PUMPS ROTORS AND PRODUCTS
DE102005027097A1 (en) * 2005-06-11 2006-12-14 Pfeiffer Vacuum Gmbh Stator disk for turbomolecular pump
EP2013483B1 (en) 2006-04-29 2010-03-03 Oerlikon Leybold Vacuum GmbH Method for producing rotors or stators of a turbomolecular pump
DE102007044031A1 (en) * 2007-09-14 2009-03-19 Bayer Materialscience Ag Carbon nanotube powder, carbon nanotubes and methods of making same
WO2010102655A2 (en) 2009-02-16 2010-09-16 Bayer International Sa A compound material comprising a metal and nano particles and a method for producing the same
WO2011032791A1 (en) 2009-09-17 2011-03-24 Bayer International Sa, Ftb A compound material comprising a metal and nanoparticles
US20120045318A1 (en) * 2010-08-19 2012-02-23 General Electric Company Method and apparatus for air flow control

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60030833T2 (en) * 1999-12-21 2007-03-29 Boc Edwards Japan Ltd. vacuum pump
DE10053663A1 (en) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanical kinetic vacuum pump with rotor and shaft
WO2007022332A2 (en) * 2005-08-16 2007-02-22 The Boc Group, Inc. Turbomolecular pump with static charge control
WO2008130739A1 (en) * 2007-04-17 2008-10-30 General Electric Company Articles made from composite materials having toughened and untoughened regions
DE102008025700A1 (en) * 2008-05-29 2009-12-03 Siemens Aktiengesellschaft Radial fan i.e. disk fan, for e.g. self ventilation of e.g. compressor, has fan disk with radially running blades arranged on fan disk, where part of blades comprises flexible material e.g. polypropylene
DE102010021240A1 (en) * 2010-05-21 2011-11-24 Oerlikon Leybold Vacuum Gmbh Method for surface treatment of pumping elements or pump chamber inner walls of vacuum pump, involves flushing pump chamber with dispersion medium which is deposited on pump chamber inner walls or surfaces of pump elements
GB2490127A (en) * 2011-04-19 2012-10-24 Rolls Royce Plc Aerofoil assembly

Also Published As

Publication number Publication date
DE102012222230A1 (en) 2014-06-05
EP2740943B1 (en) 2018-01-10
EP2740943A2 (en) 2014-06-11
JP2014111939A (en) 2014-06-19
CN103850949A (en) 2014-06-11

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