EP2902637A3 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number: EP2902637A3
Authority: EP; European Patent Office
Prior art keywords: vacuum pump; holweckstator; holweckpumpstufe; holweckrotor; gas inlet
Prior art date: 2014-02-03
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP15150410.7A

Other languages

German (de)

English (en)

Other versions

EP2902637A2 (fr

EP2902637B1 (fr

Inventor

Tobias Stoll

Jan Hofmann

Thorsten Burggraf

Jürgen KELLER

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2014-02-03

Filing date

2015-01-08

Publication date

2015-09-02

2015-01-08 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2015-08-05 Publication of EP2902637A2 publication Critical patent/EP2902637A2/fr

2015-09-02 Publication of EP2902637A3 publication Critical patent/EP2902637A3/fr

2017-11-08 Application granted granted Critical

2017-11-08 Publication of EP2902637B1 publication Critical patent/EP2902637B1/fr

Status Active legal-status Critical Current

2035-01-08 Anticipated expiration legal-status Critical

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)
Reciprocating Pumps (AREA)

EP15150410.7A 2014-02-03 2015-01-08 Pompe à vide Active EP2902637B1 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE102014101257.7A DE102014101257A1 (de)	2014-02-03	2014-02-03	Vakuumpumpe

Publications (3)

Publication Number	Publication Date
EP2902637A2 EP2902637A2 (fr)	2015-08-05
EP2902637A3 true EP2902637A3 (fr)	2015-09-02
EP2902637B1 EP2902637B1 (fr)	2017-11-08

Family

ID=52278512

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP15150410.7A Active EP2902637B1 (fr)	2014-02-03	2015-01-08	Pompe à vide

Country Status (2)

Country	Link
EP (1)	EP2902637B1 (fr)
DE (1)	DE102014101257A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP6578838B2 (ja) *	2015-09-15	2019-09-25	株式会社島津製作所	真空ポンプおよび質量分析装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5733104A (en) *	1992-12-24	1998-03-31	Balzers-Pfeiffer Gmbh	Vacuum pump system
WO2004068099A1 (fr) *	2003-01-25	2004-08-12	Inficon Gmbh	Detecteur de fuites muni d'une admission
DE10308420A1 (de) *	2003-02-27	2004-09-09	Leybold Vakuum Gmbh	Testgaslecksuchgerät
DE202005019644U1 (de) *	2005-12-16	2007-04-26	Leybold Vacuum Gmbh	Turbomolekularpumpe
DE102008024764A1 (de) *	2008-05-23	2009-11-26	Oerlikon Leybold Vacuum Gmbh	Mehrstufige Vakuumpumpe
DE102009035332A1 (de) *	2009-07-30	2011-02-03	Pfeiffer Vacuum Gmbh	Vakuumpumpe
WO2012104387A1 (fr) *	2011-02-03	2012-08-09	Oerlikon Leybold Vacuum Gmbh	Installation de détection de fuite

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB0409139D0 (en)	2003-09-30	2004-05-26	Boc Group Plc	Vacuum pump

2014
- 2014-02-03 DE DE102014101257.7A patent/DE102014101257A1/de active Pending
2015
- 2015-01-08 EP EP15150410.7A patent/EP2902637B1/fr active Active

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5733104A (en) *	1992-12-24	1998-03-31	Balzers-Pfeiffer Gmbh	Vacuum pump system
WO2004068099A1 (fr) *	2003-01-25	2004-08-12	Inficon Gmbh	Detecteur de fuites muni d'une admission
DE10308420A1 (de) *	2003-02-27	2004-09-09	Leybold Vakuum Gmbh	Testgaslecksuchgerät
DE202005019644U1 (de) *	2005-12-16	2007-04-26	Leybold Vacuum Gmbh	Turbomolekularpumpe
DE102008024764A1 (de) *	2008-05-23	2009-11-26	Oerlikon Leybold Vacuum Gmbh	Mehrstufige Vakuumpumpe
DE102009035332A1 (de) *	2009-07-30	2011-02-03	Pfeiffer Vacuum Gmbh	Vakuumpumpe
WO2012104387A1 (fr) *	2011-02-03	2012-08-09	Oerlikon Leybold Vacuum Gmbh	Installation de détection de fuite

Also Published As

Publication number	Publication date
EP2902637A2 (fr)	2015-08-05
DE102014101257A1 (de)	2015-08-06
EP2902637B1 (fr)	2017-11-08

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