EP0169744A3 - Ion source - Google Patents
Ion source Download PDFInfo
- Publication number
- EP0169744A3 EP0169744A3 EP85305339A EP85305339A EP0169744A3 EP 0169744 A3 EP0169744 A3 EP 0169744A3 EP 85305339 A EP85305339 A EP 85305339A EP 85305339 A EP85305339 A EP 85305339A EP 0169744 A3 EP0169744 A3 EP 0169744A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- ion source
- ions
- source
- plasma
- malecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
Abstract
An ion source in which a gaseous material, the source of
the ions, is excited to a plasma state by means of a radio
frequency electromagnetic field. The wall of the chamber
containing the plasma is maintained at a high temperature
and there is provided a solenoidal or radial multipolar
electric field thereby to cause the ion source to produce
atomic rather than malecular ions.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB848419070A GB8419070D0 (en) | 1984-07-26 | 1984-07-26 | Magnetic analyser |
GB848419039A GB8419039D0 (en) | 1984-07-26 | 1984-07-26 | Ion source |
GB8419070 | 1984-07-26 | ||
GB8419039 | 1984-07-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0169744A2 EP0169744A2 (en) | 1986-01-29 |
EP0169744A3 true EP0169744A3 (en) | 1987-06-10 |
Family
ID=26288028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP85305339A Withdrawn EP0169744A3 (en) | 1984-07-26 | 1985-07-26 | Ion source |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0169744A3 (en) |
GB (1) | GB2162365B (en) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR920003562B1 (en) * | 1986-03-31 | 1992-05-04 | 가부시끼가이샤 도시바 | Non-ferrous metal mechanical part having a wear resistant and smooth surface |
JPS62296332A (en) * | 1986-06-16 | 1987-12-23 | Hitachi Ltd | Ion source |
DE3632340C2 (en) * | 1986-09-24 | 1998-01-15 | Leybold Ag | Inductively excited ion source |
GB8905073D0 (en) * | 1989-03-06 | 1989-04-19 | Nordiko Ltd | Ion gun |
GB2235086A (en) * | 1989-06-01 | 1991-02-20 | Ion Tech Ltd | Ion beam source |
US5208512A (en) * | 1990-10-16 | 1993-05-04 | International Business Machines Corporation | Scanned electron cyclotron resonance plasma source |
US6264812B1 (en) | 1995-11-15 | 2001-07-24 | Applied Materials, Inc. | Method and apparatus for generating a plasma |
KR100489918B1 (en) | 1996-05-09 | 2005-08-04 | 어플라이드 머티어리얼스, 인코포레이티드 | Coils for generating a plasma and for sputtering |
US6254746B1 (en) | 1996-05-09 | 2001-07-03 | Applied Materials, Inc. | Recessed coil for generating a plasma |
US6368469B1 (en) | 1996-05-09 | 2002-04-09 | Applied Materials, Inc. | Coils for generating a plasma and for sputtering |
US6190513B1 (en) | 1997-05-14 | 2001-02-20 | Applied Materials, Inc. | Darkspace shield for improved RF transmission in inductively coupled plasma sources for sputter deposition |
US6254737B1 (en) | 1996-10-08 | 2001-07-03 | Applied Materials, Inc. | Active shield for generating a plasma for sputtering |
US6514390B1 (en) | 1996-10-17 | 2003-02-04 | Applied Materials, Inc. | Method to eliminate coil sputtering in an ICP source |
US5961793A (en) * | 1996-10-31 | 1999-10-05 | Applied Materials, Inc. | Method of reducing generation of particulate matter in a sputtering chamber |
TW358964B (en) | 1996-11-21 | 1999-05-21 | Applied Materials Inc | Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma |
US6451179B1 (en) | 1997-01-30 | 2002-09-17 | Applied Materials, Inc. | Method and apparatus for enhancing sidewall coverage during sputtering in a chamber having an inductively coupled plasma |
US6599399B2 (en) | 1997-03-07 | 2003-07-29 | Applied Materials, Inc. | Sputtering method to generate ionized metal plasma using electron beams and magnetic field |
US6103070A (en) * | 1997-05-14 | 2000-08-15 | Applied Materials, Inc. | Powered shield source for high density plasma |
US6210539B1 (en) | 1997-05-14 | 2001-04-03 | Applied Materials, Inc. | Method and apparatus for producing a uniform density plasma above a substrate |
US6077402A (en) * | 1997-05-16 | 2000-06-20 | Applied Materials, Inc. | Central coil design for ionized metal plasma deposition |
US6579426B1 (en) | 1997-05-16 | 2003-06-17 | Applied Materials, Inc. | Use of variable impedance to control coil sputter distribution |
US6652717B1 (en) | 1997-05-16 | 2003-11-25 | Applied Materials, Inc. | Use of variable impedance to control coil sputter distribution |
US6361661B2 (en) | 1997-05-16 | 2002-03-26 | Applies Materials, Inc. | Hybrid coil design for ionized deposition |
US6235169B1 (en) | 1997-08-07 | 2001-05-22 | Applied Materials, Inc. | Modulated power for ionized metal plasma deposition |
US6375810B2 (en) | 1997-08-07 | 2002-04-23 | Applied Materials, Inc. | Plasma vapor deposition with coil sputtering |
US6345588B1 (en) | 1997-08-07 | 2002-02-12 | Applied Materials, Inc. | Use of variable RF generator to control coil voltage distribution |
US6565717B1 (en) | 1997-09-15 | 2003-05-20 | Applied Materials, Inc. | Apparatus for sputtering ionized material in a medium to high density plasma |
US6042700A (en) * | 1997-09-15 | 2000-03-28 | Applied Materials, Inc. | Adjustment of deposition uniformity in an inductively coupled plasma source |
US6023038A (en) | 1997-09-16 | 2000-02-08 | Applied Materials, Inc. | Resistive heating of powered coil to reduce transient heating/start up effects multiple loadlock system |
US6280579B1 (en) | 1997-12-19 | 2001-08-28 | Applied Materials, Inc. | Target misalignment detector |
US6254738B1 (en) | 1998-03-31 | 2001-07-03 | Applied Materials, Inc. | Use of variable impedance having rotating core to control coil sputter distribution |
US6146508A (en) * | 1998-04-22 | 2000-11-14 | Applied Materials, Inc. | Sputtering method and apparatus with small diameter RF coil |
TW434636B (en) | 1998-07-13 | 2001-05-16 | Applied Komatsu Technology Inc | RF matching network with distributed outputs |
US6132566A (en) * | 1998-07-30 | 2000-10-17 | Applied Materials, Inc. | Apparatus and method for sputtering ionized material in a plasma |
US6231725B1 (en) | 1998-08-04 | 2001-05-15 | Applied Materials, Inc. | Apparatus for sputtering material onto a workpiece with the aid of a plasma |
US6238528B1 (en) | 1998-10-13 | 2001-05-29 | Applied Materials, Inc. | Plasma density modulator for improved plasma density uniformity and thickness uniformity in an ionized metal plasma source |
US6217718B1 (en) | 1999-02-17 | 2001-04-17 | Applied Materials, Inc. | Method and apparatus for reducing plasma nonuniformity across the surface of a substrate in apparatus for producing an ionized metal plasma |
DE10058326C1 (en) | 2000-11-24 | 2002-06-13 | Astrium Gmbh | Inductively coupled high-frequency electron source with reduced power requirements due to electrostatic confinement of electrons |
DE102008022181B4 (en) * | 2008-05-05 | 2019-05-02 | Arianegroup Gmbh | Ion engine |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4017403A (en) * | 1974-07-31 | 1977-04-12 | United Kingdom Atomic Energy Authority | Ion beam separators |
US4447773A (en) * | 1981-06-22 | 1984-05-08 | California Institute Of Technology | Ion beam accelerator system |
US4598231A (en) * | 1982-11-25 | 1986-07-01 | Nissin-High Voltage Co. Ltd. | Microwave ion source |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3302026A (en) * | 1963-07-25 | 1967-01-31 | Exxon Production Research Co | Ion source neutron generator having magnetically stabilized plasma |
GB1399603A (en) * | 1971-09-07 | 1975-07-02 | Boswell R W Christiansen P J N | Ion sources |
FR2475798A1 (en) * | 1980-02-13 | 1981-08-14 | Commissariat Energie Atomique | METHOD AND DEVICE FOR PRODUCING HIGHLY CHARGED HEAVY IONS AND AN APPLICATION USING THE METHOD |
-
1985
- 1985-07-26 EP EP85305339A patent/EP0169744A3/en not_active Withdrawn
- 1985-07-26 GB GB8518922A patent/GB2162365B/en not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4017403A (en) * | 1974-07-31 | 1977-04-12 | United Kingdom Atomic Energy Authority | Ion beam separators |
US4447773A (en) * | 1981-06-22 | 1984-05-08 | California Institute Of Technology | Ion beam accelerator system |
US4598231A (en) * | 1982-11-25 | 1986-07-01 | Nissin-High Voltage Co. Ltd. | Microwave ion source |
Non-Patent Citations (4)
Title |
---|
ATOMKERNENERGIE, vol. 14, no. 5, September-October 1969, pages 329-332, Munich, DE; N.N. HANNA et al.: "High current radio frequency ion source with non-magnetic analyzer" * |
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, vol. NS-30, no. 4, August 1983, part 1, pages 2719-2721, IEEE, New York, US; D.J. CLARK et al.: "An ECR heavy ion source for the LBL 88-inch cyclotron" * |
REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 55, no. 4, April 1984, pages 449-456, American institute of Physics, New York, US; J. ISHIKAWA et al.: "Axial magnetic field extraction-type microwave ion source with a permanent magnet" * |
REVUE DE PHYSIQUE APPLIQUEE, vol. 15, no. 5, May 1980, pages 995-1005, Paris, FR; R. GELLER et al.: "Micromafios source d'ions multichargés basée sur la résonance cyclotronique des électrons" * |
Also Published As
Publication number | Publication date |
---|---|
GB8518922D0 (en) | 1985-09-04 |
GB2162365A (en) | 1986-01-29 |
EP0169744A2 (en) | 1986-01-29 |
GB2162365B (en) | 1989-06-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Designated state(s): CH DE FR LI NL SE |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): CH DE FR LI NL SE |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 19880211 |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: GREEN, THOMAS STANLEY Inventor name: INMAN, MICHAEL |