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DE69600167D1 - Tintenstrahldruckkopf und dessen Herstellungsverfahren - Google Patents

Tintenstrahldruckkopf und dessen Herstellungsverfahren

Info

Publication number
DE69600167D1
DE69600167D1 DE69600167T DE69600167T DE69600167D1 DE 69600167 D1 DE69600167 D1 DE 69600167D1 DE 69600167 T DE69600167 T DE 69600167T DE 69600167 T DE69600167 T DE 69600167T DE 69600167 D1 DE69600167 D1 DE 69600167D1
Authority
DE
Germany
Prior art keywords
manufacturing process
inkjet printhead
printhead
inkjet
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69600167T
Other languages
English (en)
Other versions
DE69600167T2 (de
Inventor
Masato Shimada
Kazumasa Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69600167D1 publication Critical patent/DE69600167D1/de
Application granted granted Critical
Publication of DE69600167T2 publication Critical patent/DE69600167T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69600167T 1995-04-03 1996-04-03 Tintenstrahldruckkopf und dessen Herstellungsverfahren Expired - Lifetime DE69600167T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7763495 1995-04-03
JP721796 1996-01-19

Publications (2)

Publication Number Publication Date
DE69600167D1 true DE69600167D1 (de) 1998-04-02
DE69600167T2 DE69600167T2 (de) 1998-10-22

Family

ID=26341483

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69600167T Expired - Lifetime DE69600167T2 (de) 1995-04-03 1996-04-03 Tintenstrahldruckkopf und dessen Herstellungsverfahren

Country Status (4)

Country Link
US (2) US5933167A (de)
EP (1) EP0736385B1 (de)
DE (1) DE69600167T2 (de)
HK (1) HK1008143A1 (de)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2719804B1 (fr) * 1994-04-26 1997-10-17 Seiko Epson Corp Tête d'enregistrement à jets d'encre et son procédé de fabrication.
DE69600167T2 (de) * 1995-04-03 1998-10-22 Seiko Epson Corp Tintenstrahldruckkopf und dessen Herstellungsverfahren
JP3503386B2 (ja) * 1996-01-26 2004-03-02 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法
EP0800920B1 (de) 1996-04-10 2002-02-06 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf
JP3267151B2 (ja) * 1996-04-12 2002-03-18 ミノルタ株式会社 圧電振動部材およびその製造方法
JP3713921B2 (ja) 1996-10-24 2005-11-09 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
JPH10211701A (ja) * 1996-11-06 1998-08-11 Seiko Epson Corp 圧電体素子を備えたアクチュエータ及びインクジェット式記録ヘッド、並びにこれらの製造方法
JPH10202874A (ja) * 1997-01-24 1998-08-04 Seiko Epson Corp インクジェットプリンタヘッド及びその製造方法
JP3414227B2 (ja) * 1997-01-24 2003-06-09 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP3763175B2 (ja) * 1997-02-28 2006-04-05 ソニー株式会社 プリンタ装置の製造方法
AU736216B2 (en) * 1997-03-27 2001-07-26 Smith & Nephew, Inc. Method of surface oxidizing zirconium alloys and resulting product
DE69839540D1 (de) * 1997-06-20 2008-07-10 Seiko Epson Corp Piezoelektrisches Schichtelement, Verfahren zum Herstellen und Tintenstrahldruckkopf
US6648453B2 (en) 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
US6935724B2 (en) 1997-07-15 2005-08-30 Silverbrook Research Pty Ltd Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point
US6682174B2 (en) 1998-03-25 2004-01-27 Silverbrook Research Pty Ltd Ink jet nozzle arrangement configuration
US7556356B1 (en) 1997-07-15 2009-07-07 Silverbrook Research Pty Ltd Inkjet printhead integrated circuit with ink spread prevention
US6855264B1 (en) 1997-07-15 2005-02-15 Kia Silverbrook Method of manufacture of an ink jet printer having a thermal actuator comprising an external coil spring
US6712453B2 (en) 1997-07-15 2004-03-30 Silverbrook Research Pty Ltd. Ink jet nozzle rim
US7468139B2 (en) 1997-07-15 2008-12-23 Silverbrook Research Pty Ltd Method of depositing heater material over a photoresist scaffold
US7195339B2 (en) 1997-07-15 2007-03-27 Silverbrook Research Pty Ltd Ink jet nozzle assembly with a thermal bend actuator
US7465030B2 (en) 1997-07-15 2008-12-16 Silverbrook Research Pty Ltd Nozzle arrangement with a magnetic field generator
US7337532B2 (en) 1997-07-15 2008-03-04 Silverbrook Research Pty Ltd Method of manufacturing micro-electromechanical device having motion-transmitting structure
US7381340B2 (en) * 1997-07-15 2008-06-03 Silverbrook Research Pty Ltd Ink jet printhead that incorporates an etch stop layer
JP3882946B2 (ja) * 1998-03-04 2007-02-21 セイコーエプソン株式会社 圧電体素子の製造方法
JP3379479B2 (ja) * 1998-07-01 2003-02-24 セイコーエプソン株式会社 機能性薄膜、圧電体素子、インクジェット式記録ヘッド、プリンタ、圧電体素子の製造方法およびインクジェット式記録ヘッドの製造方法、
US6290339B1 (en) * 1998-07-22 2001-09-18 Eastman Kodak Company Method of directing fluid between a reservoir and a micro-orifice manifold
DE19859914A1 (de) * 1998-07-22 2000-02-03 Samsung Electro Mech Verfahren zum Herstellen eines Aktuators für einen Tintenstrahldruckkopf
US6291345B1 (en) * 1998-07-27 2001-09-18 Honeywell International Inc. Controlled-stress stable metallization for electronic and electromechanical devices
US6502928B1 (en) * 1998-07-29 2003-01-07 Seiko Epson Corporation Ink jet recording head and ink jet recording apparatus comprising the same
EP0980103B1 (de) * 1998-08-12 2006-11-29 Seiko Epson Corporation Piezoelektrischer Aktuator, Tintenstrahlkopf, Drucker, Herstellungsverfahren für den piezoelektrischen Aktuator, Herstellungsverfahren für den Tintenstrahlkopf
US6594875B2 (en) * 1998-10-14 2003-07-22 Samsung Electro-Mechanics Co. Method for producing a piezoelectric/electrostrictive actuator
JP3517876B2 (ja) * 1998-10-14 2004-04-12 セイコーエプソン株式会社 強誘電体薄膜素子の製造方法、インクジェット式記録ヘッド及びインクジェットプリンタ
US6254223B1 (en) * 1998-10-21 2001-07-03 Samsung Electro-Mechanics Co., Ltd Ink jet printer head actuator and manufacturing method thereof
JP3328609B2 (ja) * 1998-12-30 2002-09-30 三星電子株式会社 インクジェットプリンタヘッドアクチュエータ及びその製造方法
KR100289606B1 (ko) * 1999-01-25 2001-05-02 이형도 잉크젯 프린트헤드용 챔버판의 패터닝방법과 그에 의해 제조되는 액츄에이터
CN1170681C (zh) * 1999-05-24 2004-10-13 松下电器产业株式会社 一种墨水喷射头
JP3389987B2 (ja) * 1999-11-11 2003-03-24 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法
JP2001171133A (ja) * 1999-12-10 2001-06-26 Samsung Electro Mech Co Ltd インクジェットプリンタヘッドの製造方法
KR100566846B1 (ko) * 1999-12-24 2006-04-03 후지 샤신 필름 가부시기가이샤 잉크젯 기록 헤드의 제조 방법
WO2001075985A1 (fr) * 2000-03-30 2001-10-11 Fujitsu Limited Actionneur piezoelectrique, son procede de fabrication et tete a jet d'encre dotee de cet actionneur
JP3796394B2 (ja) * 2000-06-21 2006-07-12 キヤノン株式会社 圧電素子の製造方法および液体噴射記録ヘッドの製造方法
JP3833070B2 (ja) * 2001-02-09 2006-10-11 キヤノン株式会社 液体噴射ヘッドおよび製造方法
JP3661775B2 (ja) * 2001-02-14 2005-06-22 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
US6903491B2 (en) * 2001-04-26 2005-06-07 Matsushita Electric Industrial Co., Ltd. Piezoelectric element, actuator, and inkjet head
TW506908B (en) * 2001-09-06 2002-10-21 Nanodynamics Inc Piezoelectric ink jet print head and the manufacturing process thereof
JP3861673B2 (ja) * 2001-11-30 2006-12-20 ブラザー工業株式会社 インクジェット記録ヘッド
JP3903936B2 (ja) * 2002-03-18 2007-04-11 セイコーエプソン株式会社 圧電素子、圧電アクチュエータ、及び、液体噴射ヘッド
KR100519764B1 (ko) * 2003-03-20 2005-10-07 삼성전자주식회사 잉크젯 프린트헤드의 압전 액츄에이터 및 그 형성 방법
JP2005035013A (ja) 2003-07-15 2005-02-10 Brother Ind Ltd 液体移送装置の製造方法
JP3975979B2 (ja) * 2003-07-15 2007-09-12 ブラザー工業株式会社 液体移送装置の製造方法
JPWO2005056295A1 (ja) * 2003-12-09 2007-07-05 セイコーエプソン株式会社 アクチュエータ装置の製造方法及び液体噴射装置
JP2005249645A (ja) * 2004-03-05 2005-09-15 Matsushita Electric Ind Co Ltd 角速度センサおよびその製造方法
US7427126B2 (en) * 2004-08-31 2008-09-23 Brother Kogyo Kabushiki Kaisha Liquid transport device and method for manufacturing liquid transport device
US7473278B2 (en) 2004-09-16 2009-01-06 Smith & Nephew, Inc. Method of surface oxidizing zirconium and zirconium alloys and resulting product
US7422315B2 (en) * 2004-09-21 2008-09-09 Fujifilm Corporation Liquid ejection head and image forming apparatus comprising same
JP4858670B2 (ja) * 2004-12-20 2012-01-18 セイコーエプソン株式会社 アクチュエータ装置の製造方法及び液体噴射装置
DE602006017457D1 (de) * 2005-02-21 2010-11-25 Brother Ind Ltd Verfahren zur Herstellung eines piezoelektrischen Aktors
JP2006239958A (ja) * 2005-03-01 2006-09-14 Fuji Photo Film Co Ltd 液体吐出ヘッドの製造方法
US20060255692A1 (en) * 2005-03-22 2006-11-16 Motohiro Yasui Piezoelectric Actuator, Ink-Jet Head, Method Of Producing Piezoelectric Actuator, And Method Of Producing Ink-Jet Head
JP2007019084A (ja) * 2005-07-05 2007-01-25 Seiko Epson Corp 圧電素子の製造方法及び液体噴射ヘッドの製造方法
JP5044902B2 (ja) * 2005-08-01 2012-10-10 日立電線株式会社 圧電薄膜素子
JP5063892B2 (ja) * 2005-12-20 2012-10-31 富士フイルム株式会社 液体吐出ヘッドの製造方法
JP5188076B2 (ja) * 2006-04-03 2013-04-24 キヤノン株式会社 圧電素子及びその製造方法、電子デバイス、インクジェット装置
JP4881126B2 (ja) * 2006-10-25 2012-02-22 株式会社東芝 ノズルプレートの製造方法、および液滴吐出ヘッドの製造方法
JP5344120B2 (ja) * 2007-07-05 2013-11-20 セイコーエプソン株式会社 アクチュエータ装置及びその製造方法並びに液体噴射ヘッド
US7963566B2 (en) * 2007-11-15 2011-06-21 Ge-Hitachi Nuclear Energy Americas Llc Apparatus and method for repairing a core spray line pipe weld joint
US7963568B2 (en) * 2007-11-16 2011-06-21 GE-Hitachi Nuclear Energy Americans LLC Apparatus and method for repairing a core spray line elbow weld joint
US8361381B2 (en) 2008-09-25 2013-01-29 Smith & Nephew, Inc. Medical implants having a porous coated surface
JP2010120270A (ja) * 2008-11-19 2010-06-03 Seiko Epson Corp 液体噴射ヘッド、液体噴射装置、アクチュエータ装置及び液体噴射ヘッドの製造方法
JP2010228272A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 液体噴射ヘッドの製造方法、液体噴射ヘッド及び液体噴射装置
JP2012206824A (ja) * 2011-03-29 2012-10-25 Fuji Xerox Co Ltd 内部残留応力算出装置、及びプログラム
DE102011109008A1 (de) * 2011-07-29 2013-01-31 Epcos Ag Verfahren zur Herstellung eines piezoelektrischen Vielschichtbauelements
JP2013201198A (ja) 2012-03-23 2013-10-03 Ricoh Co Ltd 電気機械変換素子及びその製造方法、圧電型アクチュエータ、液滴吐出ヘッド、インクジェット記録装置
JP6948763B2 (ja) * 2015-12-21 2021-10-13 セイコーエプソン株式会社 圧電素子応用デバイス

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4609427A (en) * 1982-06-25 1986-09-02 Canon Kabushiki Kaisha Method for producing ink jet recording head
US4789425A (en) * 1987-08-06 1988-12-06 Xerox Corporation Thermal ink jet printhead fabricating process
US5265315A (en) * 1990-11-20 1993-11-30 Spectra, Inc. Method of making a thin-film transducer ink jet head
JP2665106B2 (ja) * 1992-03-17 1997-10-22 日本碍子株式会社 圧電／電歪膜型素子
WO1993022140A1 (en) * 1992-04-23 1993-11-11 Seiko Epson Corporation Liquid jet head and production thereof
JPH06334140A (ja) * 1992-12-16 1994-12-02 Ricoh Co Ltd 強誘電体材料および該材料を用いた半導体メモリ、光記録媒体ならびに微小変位制御素子
JP3120260B2 (ja) * 1992-12-26 2000-12-25 日本碍子株式会社 圧電／電歪膜型素子
JPH06297720A (ja) * 1993-04-15 1994-10-25 Seiko Epson Corp インクジェット記録ヘッドの製造方法
EP0636593B1 (de) * 1993-07-27 1998-09-30 Ngk Insulators, Ltd. Membranstruktur aus Zirkoniumoxid, Verfahren zu ihrer Herstellung und eine piezoelektrische/elektrostriktive Schichtenanordnung mit der Membranstruktur aus Zirkoniumoxid
US5376875A (en) * 1993-12-03 1994-12-27 Motorola, Inc. Battery charger status monitor circuit and method therefor
US5493320A (en) * 1994-09-26 1996-02-20 Lexmark International, Inc. Ink jet printing nozzle array bonded to a polymer ink barrier layer
DE69600167T2 (de) * 1995-04-03 1998-10-22 Seiko Epson Corp Tintenstrahldruckkopf und dessen Herstellungsverfahren

Also Published As

Publication number Publication date
DE69600167T2 (de) 1998-10-22
HK1008143A1 (en) 1999-04-30
US5802686A (en) 1998-09-08
EP0736385B1 (de) 1998-02-25
EP0736385A1 (de) 1996-10-09
US5933167A (en) 1999-08-03

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