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DE59712067D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE59712067D1
DE59712067D1 DE59712067T DE59712067T DE59712067D1 DE 59712067 D1 DE59712067 D1 DE 59712067D1 DE 59712067 T DE59712067 T DE 59712067T DE 59712067 T DE59712067 T DE 59712067T DE 59712067 D1 DE59712067 D1 DE 59712067D1
Authority
DE
Germany
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59712067T
Other languages
English (en)
Inventor
Juergen Meyer
Rudolf Bahnen
Hans-Josef Burghard
Wolfgang Giebmanns
Bernd Tennemann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Application granted granted Critical
Publication of DE59712067D1 publication Critical patent/DE59712067D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/02—Multi-stage pumps of stepped piston type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE59712067T 1996-08-27 1997-08-19 Vakuumpumpe Expired - Lifetime DE59712067D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19634519A DE19634519A1 (de) 1996-08-27 1996-08-27 Kolbenvakuumpumpe mit Eintritt und Austritt
PCT/EP1997/004509 WO1998009079A1 (de) 1996-08-27 1997-08-19 Eintrittsventil mit drosseleffekt und mehrstufige kolbenvakuumpumpe

Publications (1)

Publication Number Publication Date
DE59712067D1 true DE59712067D1 (de) 2004-12-09

Family

ID=7803766

Family Applications (3)

Application Number Title Priority Date Filing Date
DE19634519A Withdrawn DE19634519A1 (de) 1996-08-27 1996-08-27 Kolbenvakuumpumpe mit Eintritt und Austritt
DE59705578T Expired - Lifetime DE59705578D1 (de) 1996-08-27 1997-08-06 Kolbenvakuumpumpe mit eintritt und austritt
DE59712067T Expired - Lifetime DE59712067D1 (de) 1996-08-27 1997-08-19 Vakuumpumpe

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE19634519A Withdrawn DE19634519A1 (de) 1996-08-27 1996-08-27 Kolbenvakuumpumpe mit Eintritt und Austritt
DE59705578T Expired - Lifetime DE59705578D1 (de) 1996-08-27 1997-08-06 Kolbenvakuumpumpe mit eintritt und austritt

Country Status (3)

Country Link
EP (2) EP0922163B1 (de)
DE (3) DE19634519A1 (de)
WO (2) WO1998009077A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19831123A1 (de) * 1998-07-11 2000-01-13 Pfeiffer Vacuum Gmbh Gasballasteinrichtung für mehrstufige Verdrängerpumpen
DE19921711A1 (de) * 1999-05-12 2000-11-16 Leybold Vakuum Gmbh Kolbenvakuumpumpe
DE19926186A1 (de) * 1999-06-09 2000-12-14 Leybold Vakuum Gmbh Kolbenvakuumpumpe mit Auslassventil
DE19955688A1 (de) 1999-11-19 2001-05-23 Leybold Vakuum Gmbh Kolben-Vakuumpumpe
DE19962445A1 (de) 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
DE10048210B4 (de) * 2000-09-28 2007-02-15 Singulus Technologies Ag Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung
DE10127082A1 (de) * 2001-06-02 2002-12-05 Leybold Vakuum Gmbh Mehrstufige Kolbenvakuumpumpe und Verfahren zum Betrieb dieser Pumpe

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2032429A (en) * 1934-07-26 1936-03-03 Ingersoll Rand Co Load controlling apparatus for compressors
US2246932A (en) * 1939-09-21 1941-06-24 Chicago Pneumatic Tool Co Combination single and two stage vacuum pump
US2269620A (en) * 1940-06-15 1942-01-13 Chicago Pneumatic Tool Co Compressor regulator
US2765976A (en) * 1952-03-14 1956-10-09 Pennsylvania Pump & Compressor Two stage compressor
US3122162A (en) * 1963-06-20 1964-02-25 Asa D Sands Flow control device
DE1403963A1 (de) * 1963-07-02 1968-11-21 Kurt Braetsch Kompressor mit wenigstens drei Stufen
GB1089694A (en) * 1964-02-24 1967-11-01 J & E Hall Ltd Improvements in or relating to gas and vapour compressors
GB1258333A (de) * 1968-04-08 1971-12-30
DE1910848A1 (de) * 1969-03-04 1970-09-17 Kurt Braetsch Kompressor
US4171188A (en) * 1976-08-03 1979-10-16 Chicago Pneumatic Tool Company Rotary air compressors with intake valve control and lubrication system
US4396345A (en) * 1981-05-07 1983-08-02 Ingersoll-Rand Company Unloader valve having bypass valving means
AU564301B2 (en) * 1981-08-13 1987-08-06 Commonwealth Scientific And Industrial Research Organisation Reciprocatory piston and cylinder machine
JPS6085280A (ja) * 1983-10-18 1985-05-14 Shinku Kiko Kk ダイヤフラム形真空ポンプの逆流防止装置
US4854825A (en) * 1987-02-27 1989-08-08 Commonwealth Scientific And Industrial Research Organization Multi-stage vacuum pump
JPH02102385A (ja) * 1988-10-08 1990-04-13 Toyo Eng Corp 排気装置
US5482443A (en) * 1992-12-21 1996-01-09 Commonwealth Scientific And Industrial Research Organization Multistage vacuum pump
JP3505233B2 (ja) * 1994-09-06 2004-03-08 サンデン株式会社 圧縮機
DE4432263C2 (de) * 1994-09-10 1996-07-11 Walterscheid Gmbh Gkn Kombinationsventil für sauggedrosselte Hydraulikpumpen

Also Published As

Publication number Publication date
DE19634519A1 (de) 1998-03-05
EP0922163B1 (de) 2001-11-28
EP0922163A1 (de) 1999-06-16
WO1998009079A1 (de) 1998-03-05
EP0922165B1 (de) 2004-11-03
EP0922165A1 (de) 1999-06-16
WO1998009077A1 (de) 1998-03-05
DE59705578D1 (de) 2002-01-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition