DE69820547D1 - Vakuum-Pumpsystem - Google Patents
Vakuum-PumpsystemInfo
- Publication number
- DE69820547D1 DE69820547D1 DE69820547T DE69820547T DE69820547D1 DE 69820547 D1 DE69820547 D1 DE 69820547D1 DE 69820547 T DE69820547 T DE 69820547T DE 69820547 T DE69820547 T DE 69820547T DE 69820547 D1 DE69820547 D1 DE 69820547D1
- Authority
- DE
- Germany
- Prior art keywords
- pumping system
- vacuum pumping
- vacuum
- pumping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0207—Surge control by bleeding, bypassing or recycling fluids
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Control Of Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9717400.7A GB9717400D0 (en) | 1997-08-15 | 1997-08-15 | Vacuum pumping systems |
GB9717400 | 1997-08-15 |
Publications (3)
Publication Number | Publication Date |
---|---|
DE69820547D1 true DE69820547D1 (de) | 2004-01-29 |
DE69820547T2 DE69820547T2 (de) | 2004-11-18 |
DE69820547T3 DE69820547T3 (de) | 2008-07-10 |
Family
ID=10817597
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69820547T Expired - Lifetime DE69820547T3 (de) | 1997-08-15 | 1998-08-14 | Vakuum-Pumpsystem |
Country Status (5)
Country | Link |
---|---|
US (1) | US6200107B1 (de) |
EP (1) | EP0898083B2 (de) |
JP (1) | JP4219450B2 (de) |
DE (1) | DE69820547T3 (de) |
GB (1) | GB9717400D0 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002168192A (ja) * | 2000-12-01 | 2002-06-14 | Seiko Instruments Inc | 真空ポンプ |
JP4335469B2 (ja) * | 2001-03-22 | 2009-09-30 | 株式会社荏原製作所 | 真空排気装置のガス循環量調整方法及び装置 |
SE519641C2 (sv) * | 2001-08-08 | 2003-03-25 | Metso Paper Inc | Kombinerad centrifugal- och vakuumpump för pumpning av massa |
US6589023B2 (en) * | 2001-10-09 | 2003-07-08 | Applied Materials, Inc. | Device and method for reducing vacuum pump energy consumption |
GB0124731D0 (en) * | 2001-10-15 | 2001-12-05 | Boc Group Plc | Vacuum pumps |
US20030175112A1 (en) * | 2002-03-13 | 2003-09-18 | Hirotaka Namiki | Vacuum pump system and vacuum pump RPM control method |
US6739840B2 (en) | 2002-05-22 | 2004-05-25 | Applied Materials Inc | Speed control of variable speed pump |
GB0229353D0 (en) | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping system and method of operating a vacuum pumping arrangement |
GB0329839D0 (en) * | 2003-12-23 | 2004-01-28 | Boc Group Plc | Vacuum pump |
GB0401396D0 (en) * | 2004-01-22 | 2004-02-25 | Boc Group Plc | Pressure control method |
WO2006006906A1 (en) * | 2004-07-13 | 2006-01-19 | Delaval Holding Ab | Controllable vacuum source |
US7140847B2 (en) * | 2004-08-11 | 2006-11-28 | The Boc Group, Inc. | Integrated high vacuum pumping system |
EP1739308B1 (de) * | 2005-06-30 | 2008-06-18 | VARIAN S.p.A. | Vakuumpumpe |
KR100706792B1 (ko) * | 2005-08-01 | 2007-04-12 | 삼성전자주식회사 | 펌프 유닛을 가지는 반도체 소자 제조 장치 및 상기 펌프유닛을 세정하는 방법 |
US7438534B2 (en) * | 2005-10-07 | 2008-10-21 | Edwards Vacuum, Inc. | Wide range pressure control using turbo pump |
JP5408825B2 (ja) * | 2008-10-23 | 2014-02-05 | 中外ハイテック有限会社 | 内循環乳化分散機 |
JP5486184B2 (ja) * | 2008-12-10 | 2014-05-07 | エドワーズ株式会社 | 真空ポンプ |
GB0901872D0 (en) * | 2009-02-06 | 2009-03-11 | Edwards Ltd | Multiple inlet vacuum pumps |
DE102009017887A1 (de) * | 2009-04-17 | 2010-10-21 | Oerlikon Leybold Vacuum Gmbh | Grobpumpverfahren für eine Verdrängerpumpe |
JP5862943B2 (ja) * | 2011-11-16 | 2016-02-16 | 新東工業株式会社 | 真空装置及び真空装置の真空容器内の圧力制御方法 |
US10428807B2 (en) * | 2011-12-09 | 2019-10-01 | Applied Materials, Inc. | Pump power consumption enhancement |
AU2013376868B2 (en) | 2013-01-31 | 2017-03-30 | Danfoss A/S | Centrifugal compressor with extended operating range |
WO2017135949A1 (en) | 2016-02-04 | 2017-08-10 | Danfoss A/S | Active surge control in centrifugal compressors using microjet injection |
ES2984721T3 (es) * | 2019-12-04 | 2024-10-30 | Ateliers Busch S A | Sistema de bombeo redundante y método de bombeo mediante este sistema de bombeo |
GB2592043A (en) * | 2020-02-13 | 2021-08-18 | Edwards Ltd | Axial flow vacuum pump |
JP2022061344A (ja) * | 2020-10-06 | 2022-04-18 | エドワーズ株式会社 | 真空排気システム |
CN112483433B (zh) * | 2020-11-11 | 2022-07-05 | 上海裕达实业有限公司 | 一种内置真空传感器的便携式仪器分子泵 |
GB2606392B (en) * | 2021-05-07 | 2024-02-14 | Edwards Ltd | A fluid routing for a vacuum pumping system |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT204163B (de) * | 1958-02-19 | 1959-07-10 | Enfo Grundlagen Forschungs Ag | Verfahren und Einrichtung zur stufenlosen Regelung der Liefermenge von mehrstufigen Verdichtern |
US4850806A (en) * | 1988-05-24 | 1989-07-25 | The Boc Group, Inc. | Controlled by-pass for a booster pump |
EP0344345B1 (de) * | 1988-06-01 | 1991-09-18 | Leybold Aktiengesellschaft | Pumpsystem für ein Lecksuchgerät |
FR2647853A1 (fr) | 1989-06-05 | 1990-12-07 | Cit Alcatel | Pompe primaire seche a deux etages |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
DE4228313A1 (de) * | 1992-08-26 | 1994-03-03 | Leybold Ag | Gegenstrom-Lecksucher mit Hochvakuumpumpe |
DE4410903A1 (de) * | 1994-03-29 | 1995-10-05 | Leybold Ag | System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen |
JP3847357B2 (ja) * | 1994-06-28 | 2006-11-22 | 株式会社荏原製作所 | 真空系の排気装置 |
DE19704234B4 (de) * | 1997-02-05 | 2006-05-11 | Pfeiffer Vacuum Gmbh | Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen |
-
1997
- 1997-08-15 GB GBGB9717400.7A patent/GB9717400D0/en not_active Ceased
-
1998
- 1998-08-12 US US09/132,889 patent/US6200107B1/en not_active Expired - Lifetime
- 1998-08-14 DE DE69820547T patent/DE69820547T3/de not_active Expired - Lifetime
- 1998-08-14 EP EP98306490A patent/EP0898083B2/de not_active Expired - Lifetime
- 1998-08-17 JP JP26719598A patent/JP4219450B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69820547T3 (de) | 2008-07-10 |
JP4219450B2 (ja) | 2009-02-04 |
EP0898083A3 (de) | 1999-07-07 |
JPH11153087A (ja) | 1999-06-08 |
EP0898083B2 (de) | 2008-04-23 |
EP0898083A2 (de) | 1999-02-24 |
EP0898083B1 (de) | 2003-12-17 |
DE69820547T2 (de) | 2004-11-18 |
GB9717400D0 (en) | 1997-10-22 |
US6200107B1 (en) | 2001-03-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69820547D1 (de) | Vakuum-Pumpsystem | |
DE69821453D1 (de) | Vakuumpumpen | |
DE69729686D1 (de) | Vakuumpumpe | |
DE69727514D1 (de) | Verdrängungsvakuumpumpe | |
DE19882536T1 (de) | Doppelpumpenanlage | |
DE69625401D1 (de) | Vakuumpumpe | |
DE69717231D1 (de) | Vakuumpumpgerät | |
NO972093L (no) | Pumpesystem | |
DE69924558D1 (de) | Vakuumpumpe | |
DE59805694D1 (de) | Vakuumpumpe | |
DE59707441D1 (de) | Förderpumpe | |
EE9800340A (et) | Pump | |
DE59902761D1 (de) | Vacuumpumpe | |
DE19981942D2 (de) | Vakuumpumpe | |
DE69807787D1 (de) | Luftpumpe | |
DE59812819D1 (de) | Vakuumspannsystem | |
DE69801080D1 (de) | Zweistufige vakuumpumpanlage | |
DE69820824D1 (de) | Vakuumpumpen | |
DE19882987T1 (de) | Vakuumpumpe | |
DE59811454D1 (de) | Vakuumspannsystem | |
DE69928172D1 (de) | Vacuumpumpe | |
DE59706325D1 (de) | Reibungsvakuumpumpe | |
NO981995D0 (no) | Horisontalpumpesystem | |
DE19782185T1 (de) | Pumpensystem | |
DK0803258T3 (da) | Udsugningspumpe |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: EDWARDS LTD., CRAWLEY, WEST SUSSEX, GB |
|
8366 | Restricted maintained after opposition proceedings |