CN211506169U - Double-sided automatic alignment exposure equipment - Google Patents
Double-sided automatic alignment exposure equipment Download PDFInfo
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- CN211506169U CN211506169U CN202020483893.0U CN202020483893U CN211506169U CN 211506169 U CN211506169 U CN 211506169U CN 202020483893 U CN202020483893 U CN 202020483893U CN 211506169 U CN211506169 U CN 211506169U
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- 238000001179 sorption measurement Methods 0.000 claims description 46
- 238000004140 cleaning Methods 0.000 claims description 28
- 238000007599 discharging Methods 0.000 claims description 19
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Abstract
The utility model provides an equipment of two-sided automatic alignment exposure, its equipment is provided with the frame subassembly that shines once in the unloading district on the work piece, it shines the frame subassembly and another frame subassembly that shines down to be provided with in the exposure district, on shine the frame subassembly and shine the last counterpoint mechanism that the frame carries out translation adjustment counterpoint including shining the frame on with the drive, it shines the frame subassembly down including shining the frame down, work piece locating pin and drive work piece locating pin carry out the lower counterpoint mechanism that translation adjustment counterpointed, its exposure district still is provided with the lift power unit that the frame subassembly goes up and down shines in the drive, be located and shine the lower counterpoint CCD visual component of frame subassembly below on shining frame subassembly top and be located down, it shines the frame power component under that frame subassembly transposition in turn to still be provided with the drive between the unloading district of its work piece and its work piece exposure district under and shine. According to the technical scheme, the technical problems of low alignment precision, low production efficiency, high film use cost and the like in the conventional double-sided automatic alignment exposure method can be effectively solved.
Description
Technical Field
The utility model relates to a printed circuit board processing technology field especially relates to an equipment of two-sided automatic alignment exposure.
Background
The most widely used method for automatic double-sided alignment and simultaneous exposure in the process of transferring printed circuit patterns at present comprises the following steps: at an upper feeding station and a lower feeding station, a workpiece (or a PCB) is placed in a drying frame which is formed by combining a lower drying frame and an upper drying frame (upper films and lower films are respectively attached to the upper drying frame and the lower drying frame in glass); firstly closing an upper film drying frame and a lower film drying frame, fixing the relative positions of an upper film and a lower film by a mechanical positioning pin, and controlling an automatic alignment mechanism arranged on the lower film drying frame by a CCD vision system to adjust a workpiece positioned between the upper film and the lower film to simultaneously complete double-sided alignment of the workpiece and the upper film and the lower film; then the double-sided simultaneous exposure is completed in the exposure station.
However, in the actual production process, the above method has the following major problems: 1. because the upper film and the lower film are fixed, the workpiece is only moved to carry out simultaneous alignment on two surfaces, so that the reference misalignment error is large, and the alignment precision is low. 2. Because the drying frame is opened and closed, the workpiece is taken and placed, and double-side alignment is completed at the upper feeding station and the lower feeding station, the difference between the production rhythm of the drying frame and the production rhythm of the exposure station is large, and the production efficiency is reduced. 3. When the equipment works, the two sets of drying frames alternately operate at the upper station, the lower station and the exposure station, and four films are needed, so that the use cost of the films is greatly increased.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide an equipment of two-sided automatic alignment exposure, it aims at solving and has technical problem such as the counterpoint precision is low, production efficiency is low, film use cost height in the method of current two-sided automatic alignment exposure.
For realizing the above-mentioned purpose, the utility model provides a two-sided automatic alignment exposure's equipment, equipment includes unloading district and work piece exposure area on the work piece, unloading district is provided with shines a frame subassembly once on the work piece, the exposure area is provided with and shines a frame subassembly and another down of setting relatively, it includes to shine a frame and drive to shine a frame subassembly on it carries out the last counterpoint mechanism that translation adjustment was counterpointed to shine the frame, shine a frame subassembly down including shining the frame down, locating shine work piece locating pin and drive on the frame down the work piece locating pin carries out the lower counterpoint mechanism that translation adjustment was counterpointed, the exposure area still is provided with the drive go up and shine a lift power unit that frame subassembly goes up and down, be located shine last counterpoint CCD visual component of frame subassembly top and be located shine last lower counterpoint CCD visual component of frame subassembly below down, the work piece with still be provided with the drive two between the work piece area shine two down advance between the frame subassembly And the lower sunning frame power assembly is alternately transposed.
Optionally, on shine the frame including on shine frame glass, encircle fixedly on shine frame glass shine the frame and right on shine frame glass's the lower surface on shining frame glass and carry out vacuum pumping's a plurality of first vacuum air cocks, a plurality of first vacuum air cocks set firmly on shining frame glass on, shine the frame down including shining frame glass down, encircle fixedly under shine frame glass shine the frame and right under shine frame glass's a plurality of second vacuum air cocks that the upper surface shines frame glass down carries out vacuum pumping, a plurality of second vacuum air cocks set firmly under shine on the frame glass.
Optionally, the workpiece loading and unloading area is further provided with a loading manipulator for transferring a workpiece to be exposed from a previous station to the lower frame exposure assembly and a unloading manipulator for transferring an exposed workpiece from the lower frame exposure assembly to a next station; the feeding manipulator comprises a feeding adsorption gripper, a feeding lifting mechanism for driving the feeding adsorption gripper to lift and a feeding translation mechanism for driving the feeding adsorption gripper to translate between the previous station and the lower drying frame assembly; the blanking manipulator comprises a blanking adsorption hand grip, a blanking lifting power motor for driving the blanking adsorption hand grip to lift and a blanking translation mechanism for driving the blanking adsorption hand grip to translate between the lower drying frame assembly and the next station.
Optionally, a lower film cleaning roller is arranged above a joint between the workpiece loading and unloading area and the workpiece exposure area, so as to perform roll coating cleaning on a lower film on the lower frame component.
Optionally, one side of the lower frame-drying frame of the lower frame-drying assembly is further provided with an upper film cleaning roller to perform roll coating cleaning on the upper film on the upper frame-drying assembly.
In addition, in order to achieve the above object, the present invention further provides a double-sided automatic alignment exposure apparatus, which comprises a workpiece feeding and discharging area and a workpiece exposure area, wherein the workpiece feeding and discharging area is provided with a lower exposure frame assembly, the exposure area is provided with an upper exposure frame assembly and another lower exposure frame assembly which are oppositely arranged, the upper exposure frame assembly comprises an upper exposure frame and an upper alignment mechanism for driving the upper exposure frame to perform translation adjustment alignment, the lower exposure frame assembly comprises a lower exposure frame and a workpiece positioning pin arranged on the lower exposure frame, the workpiece feeding and discharging area is further provided with a feeding manipulator for accurately transferring a workpiece to be exposed from a previous station to a lower alignment CCD visual assembly on the lower exposure frame assembly, the exposure area is further provided with a lifting power mechanism for driving the upper exposure frame assembly to lift and an upper alignment CCD visual assembly positioned above the upper exposure frame assembly, and a lower frame drying power component for driving the two lower frame drying components to alternately change positions is further arranged between the workpiece feeding and discharging area and the workpiece exposure area.
Optionally, on shine the frame including on shine frame glass, encircle fixedly on shine frame glass shine the frame and right on shine frame glass's the lower surface on shining frame glass and carry out vacuum pumping's a plurality of first vacuum air cocks, a plurality of first vacuum air cocks set firmly on shining frame glass on, shine the frame down including shining frame glass down, encircle fixedly under shine frame glass shine the frame and right under shine frame glass's a plurality of second vacuum air cocks that the upper surface shines frame glass down carries out vacuum pumping, a plurality of second vacuum air cocks set firmly under shine on the frame glass.
Optionally, the workpiece loading and unloading area is further provided with a loading manipulator for transferring the exposed workpiece from the lower exposure frame assembly to the next station; the feeding manipulator further comprises a feeding adsorption gripper, a feeding lifting mechanism for driving the feeding adsorption gripper and the lower alignment CCD visual assembly to lift together, and a feeding translation mechanism for driving the feeding adsorption gripper and the lower alignment CCD visual assembly to translate together between the upper station and the lower exposure frame assembly; the blanking manipulator comprises a blanking adsorption hand grip, a blanking lifting power motor for driving the blanking adsorption hand grip to lift and a blanking translation mechanism for driving the blanking adsorption hand grip to translate between the lower drying frame assembly and the next station.
Optionally, a lower film cleaning roller is arranged above a joint between the workpiece loading and unloading area and the workpiece exposure area, so as to perform roll coating cleaning on a lower film on the lower frame component.
Optionally, one side of the lower frame-drying frame of the lower frame-drying assembly is further provided with an upper film cleaning roller to perform roll coating cleaning on the upper film on the upper frame-drying assembly.
The utility model provides a two-sided automatic alignment exposure's equipment, it is successively accomplished through counterpoint CCD visual component down and treats the counterpoint work of exposure work piece and lower film and accomplish the counterpoint work of going up film and treating exposure work piece (or lower film) through last counterpoint CCD visual component, has avoided the random error that upper and lower film benchmark does not coincide and leads to, has improved the counterpoint precision. Meanwhile, the lower frame-drying power assembly drives the two lower frame-drying assemblies to alternately change positions between the workpiece feeding and discharging area and the workpiece exposure area, and the lower frame-drying assemblies only alternately convey workpieces without opening, closing and waiting of the drying frame, so that the working efficiency of feeding and discharging is improved, the automatic alignment work of the upper surface and the lower surface can be reasonably distributed on the feeding station, the discharging station and the exposure station, the working rhythms of the upper surface and the lower surface are better matched, and the production efficiency is improved. Compared with the traditional method of using four films (upper and lower fixed matching) for double-sided automatic alignment exposure, the equipment only needs three films (two lower films are matched with one upper film in turn), and can complete double-sided automatic alignment exposure operation of the workpiece to be exposed while ensuring that the whole working efficiency is not reduced, so that the use cost of the films is reduced. Therefore, the technical scheme can effectively solve the technical problems of low alignment precision, low production efficiency, high film use cost and the like in the conventional double-sided automatic alignment exposure method.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of a double-sided automatic alignment exposure apparatus according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of an operating state of the apparatus for double-sided automatic alignment exposure shown in fig. 1.
Detailed Description
The following describes the present invention with reference to the accompanying drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features related to the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example one
As shown in fig. 1 and fig. 2, an embodiment of the present invention provides a double-sided automatic alignment exposure apparatus 100, the apparatus 100 includes a workpiece feeding and discharging area and a workpiece exposure area, the workpiece feeding and discharging area is provided with a lower exposure frame assembly 110, the exposure area is provided with an upper exposure frame assembly 120 and another lower exposure frame assembly 110 which are oppositely arranged, the upper exposure frame assembly 120 includes an upper alignment mechanism 122 for driving the upper exposure frame 121 and the upper exposure frame 121 to perform translational adjustment alignment, the lower exposure frame assembly 110 includes a lower exposure frame 111, a workpiece positioning pin (not shown) disposed above the lower exposure frame 111, and a lower alignment mechanism 112 for driving the workpiece positioning pin to perform translational adjustment alignment, the exposure area is further provided with a lifting power mechanism 130 for driving the upper exposure frame assembly 120 to lift, an upper alignment CCD vision assembly 141 disposed above the upper exposure frame assembly 120, and a lower alignment CCD vision assembly 142 disposed below the lower exposure frame assembly 110, a lower frame-drying power component 150 for driving the two lower frame-drying components 110 to alternately change positions is also arranged between the workpiece loading and unloading area and the workpiece exposure area.
In the present embodiment, as shown in fig. 1 and fig. 2, the lower frame power assembly 150 drives the two lower frame assemblies 110 to alternately change positions through the cooperation of the motor and the double-layer transmission belt. The upper sunning frame 121 comprises upper sunning frame glass, an upper sunning frame surrounding the upper sunning frame glass, and a plurality of first vacuum air nozzles for vacuumizing the lower surface of the upper sunning frame glass, wherein the first vacuum air nozzles are fixedly arranged on the upper sunning frame glass. Because the size of the upper sunning frame glass is larger than that of the workpiece or the upper film graph area, the first vacuum air nozzles are specifically arranged at the edge position of the upper sunning frame glass, so that the effective light transmission range of the upper sunning frame glass is influenced. The lower sunning frame 111 comprises lower sunning frame glass, a lower sunning frame surrounding the fixed lower sunning frame glass, and a plurality of second vacuum air nozzles for vacuumizing the upper surface of the lower sunning frame glass, and the second vacuum air nozzles are fixedly arranged on the lower sunning frame glass. Because the size of the lower frame drying glass is larger than that of the workpiece or the lower film pattern area, the plurality of second vacuum air nozzles are specifically arranged at the edge position of the lower frame drying glass, so that the effective light transmission range of the lower frame drying glass is influenced. A plurality of first vacuum air cocks and a plurality of second vacuum air cocks all communicate with same vacuum pump 10, because a plurality of first vacuum air cocks are to the lower surface of the last frame glass that shines and carry out evacuation processing, when last film was arranged in on the lower surface of the last frame glass that shines, it can be under the vacuum adsorption, tightly attached realization is fixed on the lower surface of the last frame glass that shines, and the same reason, a plurality of second vacuum air cocks are to the upper surface of the frame glass that shines down and carry out evacuation processing, when the film was arranged in on the upper surface of the frame glass that shines down, it can be under the vacuum adsorption, tightly attached realization is fixed on the upper surface of the frame glass that shines down.
As shown in fig. 1, the workpiece loading and unloading area is further provided with a loading robot 160 for transferring the workpiece to be exposed from the previous station to the lower frame assembly 110, and a unloading robot 170 for transferring the exposed workpiece from the lower frame assembly 110 to the next station. Specifically, the feeding manipulator 160 includes a feeding suction gripper, a feeding lifting mechanism for driving the feeding suction gripper to lift, and a feeding translation mechanism for driving the feeding suction gripper to translate between the previous station and the lower sunning frame assembly 110. The discharging manipulator 170 includes a discharging adsorption gripper, a discharging lifting power motor for driving the discharging adsorption gripper to lift, and a discharging translation mechanism for driving the discharging adsorption gripper to translate between the lower sunning frame assembly 110 and the next station. After the loading adsorption gripper is translated to the position above the previous station under the driving of the loading translation mechanism, the loading lifting mechanism drives the loading adsorption gripper to slowly descend until the loading adsorption gripper adsorbs a workpiece to be exposed, then the loading adsorption gripper slowly ascends, finally the loading adsorption gripper is translated to the position above the lower drying frame assembly 110 in the loading and unloading area of the workpiece under the driving of the loading translation mechanism, and the loading lifting mechanism drives the loading adsorption gripper to slowly descend until the workpiece to be exposed is fixed on the workpiece positioning pin of the lower drying frame assembly 110 and then resets, and then the loading operation of the workpiece to be exposed is completed. Similarly, after the unloading adsorption gripper is driven by the unloading translation mechanism to translate to the position above the lower drying frame assembly 110 in the workpiece loading and unloading area, the loading lifting mechanism drives the unloading adsorption gripper to slowly descend until the unloading adsorption gripper adsorbs an exposed workpiece, then slowly raises the workpiece, finally, the unloading adsorption gripper is driven by the unloading translation mechanism to translate to the position above the next station, and is driven by the unloading lifting power motor to slowly descend until the exposed workpiece is placed on the next station and then resets, so that the unloading operation of the exposed workpiece is completed.
As shown in fig. 1 and 2, a lower film cleaning roller 181 is disposed above a joint between the workpiece loading/unloading area and the workpiece exposure area to perform roll coating cleaning on the lower film 300 on the lower frame unit 110. An upper film cleaning roller 182 is further disposed on one side of the lower frame of the lower frame assembly 110 to perform roll coating cleaning on the upper film 200 on the upper frame assembly 120. Specifically, lower film cleaning roller 181 and last film cleaning roller 182 are the glutinous dirt roller, so, when a certain lower film 300 that shines on frame subassembly 110 needs to be cleaned, only need shine the back with the work piece of placing on the frame subassembly 110 under, through setting up the double-cylinder promotion lower film cleaning roller 181 in the unloading district on the work piece, roll through shine the lower film 300 surface on frame subassembly 110 under and just can glue away the pollutant on it to realize the automatic roll-on cleaning of lower film 300. When the upper film 200 on the upper frame component 120 needs to be cleaned, the lower frame component 110 provided with the upper film cleaning roller 182 can be driven by the lower frame power component 150 to be replaced to the workpiece exposure area from the workpiece loading and unloading area, in the process, the upper film cleaning roller 182 can roll all the way from the left side of the upper film 200 to the right side through the surface of the upper film 200, and then the pollutants on the upper film 200 are adhered away by the upper film cleaning roller 182, so that the automatic roll coating cleaning of the upper film 200 is realized.
In addition, as shown in fig. 1 and 2, the exposure area is further provided with an upper exposure lamp 191 located above the upper frame assembly 120 and a lower exposure lamp 192 located below the lower frame assembly 110, the upper exposure lamp 191 can perform an upper surface exposure operation of the workpiece 400 to be exposed through the upper film 200, and the lower exposure lamp 192 can perform a lower surface exposure operation of the workpiece 400 to be exposed through the lower film 300.
During operation, as shown in fig. 2, an upper film 200 is adsorbed below the upper frame glass of the upper frame 121, a lower film 300 is adsorbed above the lower frame glass of each lower frame 111, when the lower frame assembly 110 performs a blanking operation on an exposed workpiece and a loading operation on a workpiece 400 to be exposed in a loading and unloading area of the workpiece, another lower frame assembly 110 carries the workpiece 400 to be exposed to enter an exposure area and performs a double-sided alignment exposure operation of the workpiece synchronously, and the double-sided alignment exposure operation of the workpiece specifically includes: the position deviation between the lower film 300 on the lower frame assembly 110 and the workpiece 400 to be exposed is calculated by the lower alignment CCD visual assembly 142, the lower alignment mechanism 112 is controlled to drive the workpiece 400 to be exposed (since the workpiece 400 to be exposed is fixed on the workpiece positioning pin, when the lower alignment mechanism 112 drives the workpiece positioning pin to perform the front-back and left-right translation adjustment, it can drive the workpiece 400 to be exposed to perform the front-back and left-right translation adjustment alignment) to perform the translation adjustment alignment, so as to realize the alignment between the lower film 300 and the workpiece 400 to be exposed, meanwhile, the position deviation between the upper film 200 on the upper frame assembly 120 and the workpiece 400 to be exposed (or the lower film 300) is calculated by the upper alignment CCD visual assembly 141, and the upper alignment mechanism 122 is controlled to drive the upper film 200 (since the upper film 200 is fixed on the upper frame 121, when the upper alignment mechanism 122 drives the upper frame 121 to perform the front-back and left-right translation adjustment, which can drive the upper film 200 to perform front-back left-right translation adjustment alignment) to perform translation adjustment alignment, so as to realize alignment between the upper film 200 and the workpiece 400 to be exposed (or the lower film 300), and finally, the upper frame assembly 120 is driven by the lifting power mechanism 130 to fall to the lower frame assembly 110, so as to realize vacuum bonding among the upper film 200, the workpiece 400 to be exposed and the lower film 300, and simultaneously, the upper exposure lamp 191 and the lower exposure lamp 192 respectively perform double-sided exposure on the workpiece 400 to be exposed. After exposure, the lifting power mechanism 130 drives the upper frame-drying assembly 120 to ascend, so that the upper film 200 is separated from the exposed workpiece, and the lower frame-drying power assembly 150 drives the two lower frame-drying assemblies 110 to alternately change positions to perform exposure operation on the next workpiece 400 to be exposed.
Example two
The embodiment of the utility model provides a two-sided automatic alignment exposure's equipment is provided, this equipment is compared with the two-sided automatic alignment exposure's that embodiment one provided equipment, the difference only lies in, the lower frame subassembly that shines of equipment in this embodiment includes shines the frame down and locates the work piece locating pin that shines the frame top down, and simultaneously, be provided with down counterpoint CCD visual component on the material loading manipulator of equipment in this embodiment, it can be used to treat that the exposure work piece shines the frame subassembly under this by last station accurate transfer, when the material loading manipulator will treat that the exposure work piece shines the frame subassembly under this by last station transfer promptly, alright accomplish the counterpoint work of waiting to expose work piece and lower film in advance through this down counterpoint CCD visual component, make and treat that the exposure work piece shines on the frame subassembly under this by last station accurate transfer. Specifically, the feeding manipulator comprises a feeding adsorption gripper, a feeding lifting mechanism for driving the feeding adsorption gripper to lift together with the lower alignment CCD visual assembly, and a feeding translation mechanism for driving the feeding adsorption gripper to translate together with the lower alignment CCD visual assembly between an upper station and a lower sunning frame assembly.
It can be seen that, different from the apparatus for double-sided automatic alignment exposure in the first embodiment, the lower frame exposure assembly of the apparatus in the first embodiment reduces a lower alignment mechanism for driving the workpiece positioning pin to perform translation adjustment alignment, and simultaneously, the lower alignment CCD vision assembly below the workpiece exposure area is transferred to the feeding manipulator, so that when the feeding manipulator transfers the workpiece to be exposed from the previous station to the lower frame exposure assembly, the alignment of the workpiece to be exposed and the lower film can be completed in advance. After the loading adsorption gripper is driven by the loading translation mechanism to translate to the position above the previous station, the loading lifting mechanism drives the loading lifting mechanism to slowly descend until the loading adsorption gripper adsorbs a workpiece to be exposed, then the loading adsorption gripper slowly ascends, and finally the loading adsorption gripper is driven by the loading translation mechanism to translate to the position above a lower exposure frame assembly in a loading area of the workpiece, at the moment, a lower alignment CCD visual assembly starts to work, the position deviation between a lower film on the lower exposure frame assembly and the workpiece to be exposed is calculated, and the workpiece 400 to be exposed is accurately placed above the lower film 300 by controlling the actions of a loading manipulator (including the translation adjustment of the loading translation mechanism and the lifting adjustment of the loading lifting mechanism), and is fixed through a workpiece positioning pin.
The utility model provides a two-sided automatic alignment exposure's equipment, it is successively accomplished through counterpoint CCD visual component down and treats the counterpoint work of exposure work piece and lower film and accomplish the counterpoint work of going up film and treating exposure work piece (or lower film) through last counterpoint CCD visual component, has avoided the random error that upper and lower film benchmark does not coincide and leads to, has improved the counterpoint precision. Meanwhile, the lower frame-drying power assembly drives the two lower frame-drying assemblies to alternately change positions between the workpiece feeding and discharging area and the workpiece exposure area, and the lower frame-drying assemblies only alternately convey workpieces without opening, closing and waiting of the drying frame, so that the working efficiency of feeding and discharging is improved, the automatic alignment work of the upper surface and the lower surface can be reasonably distributed on the feeding station, the discharging station and the exposure station, the working rhythms of the upper surface and the lower surface are better matched, and the production efficiency is improved. Compared with the traditional method of using four films (upper and lower fixed matching) for double-sided automatic alignment exposure, the equipment only needs three films (two lower films are matched with one upper film in turn), and can complete double-sided automatic alignment exposure operation of the workpiece to be exposed while ensuring that the whole working efficiency is not reduced, so that the use cost of the films is reduced. Therefore, the technical scheme can effectively solve the technical problems of low alignment precision, low production efficiency, high film use cost and the like in the conventional double-sided automatic alignment exposure method.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in the embodiments without departing from the principles and spirit of the invention, and the scope of the invention is to be accorded the full scope of the claims.
Claims (10)
1. The utility model provides an equipment of two-sided automatic alignment exposure, a serial communication port, equipment includes unloading district and work piece exposure area on the work piece, the unloading district is provided with and shines a frame subassembly once on the work piece, the exposure area is provided with and shines a frame subassembly and another and shines a frame subassembly down on setting up relatively, on shine a frame subassembly including shining frame and drive on shine the frame and carry out the last counterpoint mechanism that translation adjustment was counterpointed, it includes and shines the frame, locates to shine a frame subassembly down shine work piece locating pin and drive on the frame down the work piece locating pin carries out the lower counterpoint mechanism that translation adjustment was counterpointed, the exposure area still is provided with the drive go up and shine lift power unit that a frame subassembly goes up and down, be located shine last counterpoint CCD visual component of frame subassembly top and be located shine under the CCD visual component below counterpoint, the work piece go up and down go up the unloading district with still be provided with the drive two between the work piece exposure area shine under and shine Shine frame power component.
2. The apparatus according to claim 1, wherein the upper frame comprises an upper frame glass, a upper frame rim surrounding and fixing the upper frame glass, and a plurality of first vacuum nozzles for vacuuming the lower surface of the upper frame glass, the plurality of first vacuum nozzles are fixedly arranged on the upper frame glass, the lower frame comprises a lower frame glass, a lower frame rim surrounding and fixing the lower frame glass, and a plurality of second vacuum nozzles for vacuuming the upper surface of the lower frame glass, and the plurality of second vacuum nozzles are fixedly arranged on the lower frame glass.
3. The apparatus as claimed in claim 1, wherein the workpiece loading and unloading area is further provided with a loading robot for transferring the workpiece to be exposed from the previous station to the lower frame assembly and a unloading robot for transferring the exposed workpiece from the lower frame assembly to the next station; the feeding manipulator comprises a feeding adsorption gripper, a feeding lifting mechanism for driving the feeding adsorption gripper to lift and a feeding translation mechanism for driving the feeding adsorption gripper to translate between the previous station and the lower drying frame assembly; the blanking manipulator comprises a blanking adsorption hand grip, a blanking lifting power motor for driving the blanking adsorption hand grip to lift and a blanking translation mechanism for driving the blanking adsorption hand grip to translate between the lower drying frame assembly and the next station.
4. The apparatus of claim 1, wherein a lower film cleaning roller is disposed above a junction between the workpiece loading and unloading area and the workpiece exposure area to perform roll coating cleaning on a lower film on the lower frame assembly.
5. The apparatus of claim 2, wherein a side of the lower frame of the lower frame assembly is further provided with an upper film cleaning roller for roll-on cleaning of the upper film on the upper frame assembly.
6. The utility model provides a two-sided automatic alignment exposure's equipment, its characterized in that, equipment includes unloading district and work piece exposure area on the work piece, unloading district is provided with and shines a frame subassembly once on the work piece, exposure area is provided with and shines a frame subassembly and another and shines a frame subassembly down on setting up relatively, on shine a frame subassembly including last shine the frame with the drive go up shine the frame and carry out the last counterpoint mechanism of translation adjustment counterpoint, shine a frame subassembly down including shining the frame down and locate under shine the work piece locating pin on the frame, the unloading district still is provided with the material loading manipulator that is used for transferring the work piece of waiting to expose from last station accuracy to shine under shine the lower counterpoint CCD visual component on the frame subassembly, the exposure area still is provided with the drive go up and down the lift power mechanism that shines a frame subassembly and be located shine a frame subassembly top counterpoint CCD visual component, and a lower frame drying power component for driving the two lower frame drying components to alternately change positions is further arranged between the workpiece feeding and discharging area and the workpiece exposure area.
7. The apparatus according to claim 6, wherein the upper frame comprises an upper frame glass, a frame surrounding and fixing the upper frame glass, and a plurality of first vacuum nozzles for vacuuming the lower surface of the upper frame glass, the plurality of first vacuum nozzles are fixedly arranged on the upper frame glass, the lower frame comprises a lower frame glass, a lower frame surrounding and fixing the lower frame glass, and a plurality of second vacuum nozzles for vacuuming the upper surface of the lower frame glass, and the plurality of second vacuum nozzles are fixedly arranged on the lower frame glass.
8. The apparatus as claimed in claim 6, wherein the workpiece loading and unloading area is further provided with a loading robot for transferring the exposed workpiece from the lower frame assembly to a next station; the feeding manipulator further comprises a feeding adsorption gripper, a feeding lifting mechanism for driving the feeding adsorption gripper and the lower alignment CCD visual assembly to lift together, and a feeding translation mechanism for driving the feeding adsorption gripper and the lower alignment CCD visual assembly to translate together between the upper station and the lower exposure frame assembly; the blanking manipulator comprises a blanking adsorption hand grip, a blanking lifting power motor for driving the blanking adsorption hand grip to lift and a blanking translation mechanism for driving the blanking adsorption hand grip to translate between the lower drying frame assembly and the next station.
9. The apparatus of claim 6, wherein a lower film cleaning roller is disposed above a junction between the workpiece loading and unloading area and the workpiece exposure area to perform roll coating cleaning on a lower film on the lower frame assembly.
10. The apparatus of claim 7, wherein a side of the lower frame of the lower frame assembly is further provided with an upper film cleaning roller for roll-on cleaning of the upper film on the upper frame assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020483893.0U CN211506169U (en) | 2020-04-03 | 2020-04-03 | Double-sided automatic alignment exposure equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020483893.0U CN211506169U (en) | 2020-04-03 | 2020-04-03 | Double-sided automatic alignment exposure equipment |
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| CN211506169U true CN211506169U (en) | 2020-09-15 |
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| CN202020483893.0U Withdrawn - After Issue CN211506169U (en) | 2020-04-03 | 2020-04-03 | Double-sided automatic alignment exposure equipment |
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|---|---|
| CN (1) | CN211506169U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111258189A (en) * | 2020-04-03 | 2020-06-09 | 深圳市大川光电设备有限公司 | Double-sided automatic alignment exposure equipment and method |
| WO2022110683A1 (en) * | 2020-11-30 | 2022-06-02 | 苏州微影激光技术有限公司 | Transfer device having multiple platforms for double-sided processing, and processing system |
-
2020
- 2020-04-03 CN CN202020483893.0U patent/CN211506169U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111258189A (en) * | 2020-04-03 | 2020-06-09 | 深圳市大川光电设备有限公司 | Double-sided automatic alignment exposure equipment and method |
| CN111258189B (en) * | 2020-04-03 | 2024-06-07 | 深圳市大川光电设备有限公司 | Double-sided automatic alignment exposure equipment and method |
| WO2022110683A1 (en) * | 2020-11-30 | 2022-06-02 | 苏州微影激光技术有限公司 | Transfer device having multiple platforms for double-sided processing, and processing system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20200915 Effective date of abandoning: 20240607 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20200915 Effective date of abandoning: 20240607 |