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CN113695646A - Machining device for full-surface micro-pit structure of thin-wall spherical shell type micro component - Google Patents

Machining device for full-surface micro-pit structure of thin-wall spherical shell type micro component Download PDF

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Publication number
CN113695646A
CN113695646A CN202111063285.XA CN202111063285A CN113695646A CN 113695646 A CN113695646 A CN 113695646A CN 202111063285 A CN202111063285 A CN 202111063285A CN 113695646 A CN113695646 A CN 113695646A
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CN
China
Prior art keywords
axle
axis
thin
spherical shell
shell type
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Granted
Application number
CN202111063285.XA
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Chinese (zh)
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CN113695646B (en
Inventor
陈明君
郭锐阳
李国�
于天宇
周星颖
王广洲
杨辉
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Harbin Institute of Technology
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Harbin Institute of Technology
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Priority to CN202111063285.XA priority Critical patent/CN113695646B/en
Publication of CN113695646A publication Critical patent/CN113695646A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C3/00—Milling particular work; Special milling operations; Machines therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
    • B23Q1/015—Frames, beds, pillars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2428—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring existing positions of tools or workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2703/00—Work clamping
    • B23Q2703/02—Work clamping means
    • B23Q2703/04—Work clamping means using fluid means or a vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2703/00—Work clamping
    • B23Q2703/02—Work clamping means
    • B23Q2703/10—Devices for clamping workpieces of a particular form or made from a particular material

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Machine Tool Units (AREA)
  • Milling Processes (AREA)

Abstract

The invention discloses a processing device of a full-surface micro-pit structure of a thin-wall spherical shell type micro component, which relates to the technical field of micro component surface processing devices and solves the problems of special structural characteristics, non-uniform material, asymmetric surface, fine surface defects, fluid mechanics instability in the processing process and the like of the thin-wall spherical shell type micro component under the constraint of micro space scale. The rotary motion of the workpiece adopts an air static pressure workpiece shaft, and the milling shaft is obliquely arranged, so that higher processing speed and processing precision can be achieved.

Description

Machining device for full-surface micro-pit structure of thin-wall spherical shell type micro component
Technical Field
The invention relates to the technical field of micro component surface processing devices, in particular to a processing device of a full-surface micro pit structure of a thin-wall spherical shell type micro component.
Background
With the increasing development of modern science and technology, various thin-wall spherical shell type micro components with high precision and high surface quality are widely applied in the fields of national defense and military, aerospace, electronic industry, biomedical treatment and the like. The surface shape of the parts usually requires the shape precision of submicron order, the surface roughness of nanometer order and the minimal subsurface damage. For example, the diameter of a thin-wall spherical shell type micro component ball for energy research is 1-5 mm, the thickness of a shell layer is 20-120 μm, tens to hundreds of micro pit structures with the longitudinal size of 0.5-20 μm and the transverse size of 50-200 μm need to be processed on the whole surface, the profile error is required to be better than 0.3 μm, the surface roughness Ra is required to be better than 20nm, and the pit pitch error reaches the micron-scale precision. The existing single processing device for ultra-precision cutting and the like for controlling the surface profile and the micro-topography of a macro-size part is limited by factors such as a manufacturing principle, machine tool errors and the like, can only realize the manufacturing precision of a characteristic structure with a transverse dimension of 100 mu m, a profile error of 0.5 mu m and a surface roughness of Ra-40 nm, and cannot meet the ultra-precision manufacturing requirement of a structure with uniformly distributed micro pits on a nano-precision surface under the constraint of a micro-space dimension.
Under the constraint of micro-space scale, a series of problems of special structural characteristics, non-uniform material, asymmetric surface, fine surface defects, fluid mechanics instability in the processing process and the like of the thin-wall spherical shell type micro-component exist, and higher urgent requirements are provided for a full-surface micro-pit structure processing device and a manufacturing method. At present, in the existing processing device for uniformly distributing the micro-pit structures on the whole surface of the thin-wall spherical shell type micro component, only the processing of the hemispherical micro-pit structure can be realized, and key performance indexes such as the distribution uniformity of the micro-pit structure, the surface shape precision, the surface roughness and the like can not meet the requirements.
Disclosure of Invention
The invention aims to provide a processing device for a full-surface micro-pit structure of a thin-wall spherical shell type micro component, aiming at the problems of special structural characteristics, non-uniform material, asymmetric surface, fine surface defects, fluid mechanics instability in the processing process and the like of the thin-wall spherical shell type micro component under the constraint of micro-space scale.
In order to achieve the purpose, the invention adopts the technical scheme that:
a processing device of a full-surface micro-pit structure of a thin-wall spherical shell type micro component comprises: base 1, X axle straight line unit 2, Y axle straight line unit 4, Z axle straight line unit 24, first high resolution CCD camera group, second high resolution CCD camera group, aerostatic pressure work piece axle 5, revolving platform 23, first clamping anchor clamps group, secondary clamping anchor clamps group and milling cutter tool group, a serial communication port, X axle straight line unit 2 with Z axle straight line unit 24 all installs the upper surface at base 1, X axle straight line unit 2's one side is located to Z axle straight line unit 24, X axle straight line unit 2 includes: the X-axis linear motor drives the X-axis motion carriage to move along the X-axis direction, the X-axis direction is a horizontal direction, and the Z-axis linear unit 24 includes: the Z-axis linear motor drives the Z-axis movement carriage 31 to move along the Z-axis direction, the Z-axis direction is a horizontal direction perpendicular to the X-axis direction, the upper surfaces of the Y-axis linear unit 4 and the X-axis movement carriage are connected, and the Y-axis linear unit 4 comprises: the Y-axis linear motor drives the Y-axis motion carriage to move along the Y-axis direction, and the Y-axis direction is vertical;
the Y-axis moving carriage is provided with a mounting hole for mounting the aerostatic workpiece shaft 5, the Y-axis linear unit 4 is also internally provided with a first rotating motor connected with the aerostatic workpiece shaft 5, the first rotating motor is mounted on the Y-axis moving carriage, the primary clamping fixture group is mounted on the aerostatic workpiece shaft 5, the first rotating motor drives the primary clamping fixture group to rotate along the central axis of the primary clamping fixture group through the aerostatic workpiece shaft 5, and the first high-resolution CCD camera group is mounted on the Y-axis moving carriage;
the rotary table 23 is mounted on the Z-axis movement carriage 31, a second rotating motor connected with the rotary table 23 is further arranged in the Z-axis linear unit 24, the second rotating motor is mounted on the Z-axis movement carriage 31, the second rotating motor drives the rotary table 23 to rotate along the central axis of the rotary table, a transition disc 22 is connected to the upper surface of the rotary table 23, and the secondary clamping fixture set, the milling cutter tool set and the second high-resolution CCD camera set are all mounted on the transition disc 22;
first clamping anchor clamps group includes: the device comprises a primary clamping zero-point positioning device 13 and a primary clamping vacuum adsorption clamp 14, wherein an aerostatic workpiece shaft 5 and the primary clamping vacuum adsorption clamp 14 are detachably connected through the primary clamping zero-point positioning device 13, first vacuum pipelines which are mutually communicated are arranged inside the aerostatic workpiece shaft 5, the primary clamping zero-point positioning device 13 and the primary clamping vacuum adsorption clamp 14, a first vacuum generator communicated with the first vacuum pipeline is further arranged in a Y-axis linear unit 4, and the primary clamping vacuum adsorption clamp 14 is controlled to operatively perform vacuum adsorption on the thin-wall spherical shell type micro component 15 through the first vacuum generator;
the secondary clamping anchor clamps group includes: a secondary clamping vacuum adsorption clamp 18, a secondary clamping zero-point positioning device 19 and a secondary clamping zero-point positioning device mounting plate 20, wherein the lower end of the secondary clamping zero-point positioning device mounting plate 20 is connected with the upper surface of a transition disc 22, the secondary clamping zero-point positioning device mounting plate 20 and the secondary clamping vacuum adsorption clamp 18 are detachably connected through the secondary clamping zero-point positioning device 19, the secondary clamping vacuum adsorption clamp 18, the secondary clamping zero-point positioning device 19 and the secondary clamping zero-point positioning device mounting plate 20 are internally provided with second vacuum pipelines which are communicated with each other, a second vacuum generator communicated with a second vacuum pipeline is also arranged in the Z-axis linear unit 24, the second vacuum generator controls the secondary clamping vacuum adsorption clamp 18 to operatively perform vacuum adsorption on the thin-wall spherical shell type micro component 15;
the milling cutter tool set comprises: the milling shaft support 17, the milling shaft 16 and the milling cutter 35, wherein the lower end of the milling shaft support 17 is connected with the upper surface of the transition disc 22, the milling shaft 16 is installed on the milling shaft support 17, the milling cutter 35 is connected with the milling shaft 16, and the milling cutter 35 is used for processing the surface of the thin-wall spherical shell type micro component 15;
the first high-resolution CCD camera group includes: the device comprises a first high-resolution CCD camera 12, a first precise fine-tuning displacement table 11 and a CCD quick-change system 10, wherein the CCD quick-change system 10 is connected with a Y-axis motion carriage, the first high-resolution CCD camera 12 is connected with the CCD quick-change system 10 through the first precise fine-tuning displacement table 11, the first high-resolution CCD camera 12 is arranged above a primary clamping vacuum adsorption clamp 14, and the first high-resolution CCD camera 12 is used for monitoring the position relation between a secondary clamping vacuum adsorption clamp 18 and a thin-wall spherical shell type micro component 15;
the second high-resolution CCD camera group includes: the second high-resolution CCD camera 30 is connected with the upper surface of the transition disc 22 through the second fine tuning displacement table 21, and the second high-resolution CCD camera 30 is used for monitoring the processing position of the surface of the thin-wall spherical shell type micro component 15.
The processing device of the full-surface micro-pit structure of the thin-wall spherical shell type micro component is characterized in that the X-axis linear unit 2 further comprises: the X-axis box, the lower surface of X-axis box with the upper surface of base 1 is connected, X-axis linear electric motor installs in the X-axis box, the upper surface of X-axis box is connected with first X to wind musical instrument protection casing 25, second X to wind musical instrument protection casing 27 and X axle apron 28, first X to wind musical instrument protection casing 25X axle motion planker second X to wind musical instrument protection casing 27 with X axle apron 28 is interconnect in proper order along X axle direction.
The processing device of the full-surface micro-pit structure of the thin-wall spherical shell type micro component, wherein the Z-axis linear unit 24 further includes: the Z axle box, the lower surface of Z axle box with the upper surface of base 1 connects, Z axle linear electric motor the second rotates the motor with second vacuum generator all installs in the Z axle box, the upper surface of Z axle box is connected with Z axle apron 33, first Z to wind musical instrument protection casing 34 and second Z to wind musical instrument protection casing 36, Z axle apron 33 first Z to wind musical instrument protection casing 34Z axle motion planker 31 with second Z to wind musical instrument protection casing 36 is interconnect in proper order along the Z axle direction.
The machining device for the full-surface micro-pit structure of the thin-wall spherical shell type micro component comprises a Y-axis linear unit 4 and is characterized in that: the Y-axis box body is connected with the upper surface of the X-axis movement carriage along the X-axis direction, the Y-axis box body moves along the X-axis direction along with the X-axis movement carriage, the Y-axis linear motor, the first rotating motor and the first vacuum generator are all installed in the Y-axis box body, Y-axis baffles 3 are installed on two sides of the Y-axis box body, and a protective cover 9 is installed on the upper side of the Y-axis box body.
The processing device of the full-surface micro-pit structure of the thin-wall spherical shell type micro component comprises a first high-resolution CCD camera group and a second high-resolution CCD camera group, wherein the first high-resolution CCD camera group further comprises: the adapter plate 7 is connected with the Y-axis movement carriage, the lower end of the CCD quick-change system mounting plate 8 is connected with the upper surface of the adapter plate 7, and the CCD quick-change system 10 is installed on the Y-axis movement carriage through the CCD quick-change system mounting plate 8.
The machining device for the full-surface micro-pit structure of the thin-wall spherical shell type micro component comprises a milling cutter tool set and a cutter head, wherein the milling cutter tool set further comprises: a milling shaft holder 32, said milling shaft holder 32 being connected to the upper end of the milling shaft support 17, said milling shaft 16 being mounted on said milling shaft holder 32.
In the machining device for the full-surface micro-pit structure of the thin-wall spherical shell type micro component, the milling shaft 16 is obliquely arranged.
In the machining device for the full-surface micro-pit structure of the thin-wall spherical shell type micro component, the milling cutter 35 is a ball head milling cutter.
The processing device of the full-surface micro-pit structure of the thin-wall spherical shell type micro component further comprises: x axle tow chain 26 and Z axle tow chain 29, X axle tow chain 26 with Z axle tow chain 29 all with the upper surface of base 1 is connected, X axle tow chain 26 locates the opposite side of X axle straight line unit 2, X axle tow chain 26 is on a parallel with the setting of X axle direction, Z axle tow chain 29 is on a parallel with the setting of Z axle direction.
The machining device for the full-surface micro-pit structure of the thin-wall spherical shell type micro component comprises a primary clamping fixture set and a secondary clamping fixture set, wherein the primary clamping fixture set further comprises: and the transition plate 6, the aerostatic workpiece shaft 5 and the primary clamping zero point positioning device 13 are connected through the transition plate 6.
Due to the adoption of the technology, compared with the prior art, the invention has the following positive effects:
(1) the invention can realize high-precision processing of tens to hundreds of uniformly distributed micro-pit structures with the longitudinal size of 0.5-20 mu m and the transverse size of 50-200 mu m on the whole surface of a thin-wall spherical shell type micro component with the spherical diameter of 1-5 mm and the shell thickness of 20-120 mu m, the contour error is better than 0.3 mu m, and the surface roughness Ra is better than 20 nm;
(2) according to the invention, a workpiece clamping system, a high-resolution CCD monitoring system, a zero point positioning system and a turning secondary clamping quick-change system are integrated on one working platform, the structural design is compact, and the technical problems of clamping, turning, tool setting, capturing and identifying a micro-pit structure and the like of a thin-wall spherical shell type micro component can be effectively solved;
(3) the invention adopts the high-precision linear unit and the rotary unit as the main moving parts of the device, the straightness of the X/Y/Z linear axis is better than 0.2 mu m/full stroke, the straightness of any 10mm is better than 0.05 mu m, the positioning precision of the linear guide rail is better than +/-0.5 mu m/full stroke, the positioning precision of any 10mm is better than +/-0.3 mu m, and the rotation precision of the rotary table is better than +/-1 arc-sec;
(4) according to the invention, the workpiece is flexibly configured by adopting an air static pressure workpiece shaft in the rotary motion, the rotary precision is better than 50nm, the axial and radial synchronous errors are better than 12nm, the milling shaft is obliquely arranged, the inclination angle ranges from 10 degrees to 15 degrees, and according to the characteristics of spherical surface processing and structure, the high processing speed can be achieved, the surface quality is effectively prevented from being reduced because the top speed of the ball head milling cutter is 0, and the processing precision is further improved;
(5) in the invention, the base is made of granite material, and can absorb vibration well, thereby greatly improving the performance of the device.
Drawings
FIG. 1 is a schematic structural diagram of a processing device of a full-surface micro-pit structure of a thin-wall spherical shell type micro component according to the present invention.
FIG. 2 is a front view of the machining device of the whole-surface micro-pit structure of the thin-wall spherical shell type micro-component of the invention.
FIG. 3 is a top view of the processing apparatus of the present invention for the whole surface micro-pit structure of the thin-walled spherical shell type micro-component.
FIG. 4 is a side view of the processing device of the whole surface micro-pit structure of the thin-wall spherical shell type micro-component of the present invention.
FIG. 5 is an axial view of a machining apparatus for a full-surface dimple structure of a small member such as a thin-walled spherical shell according to the present invention.
In the drawings: 1. a base; 2. an X-axis linear unit; 3. a Y-axis baffle; 4. a Y-axis linear unit; 5. air static pressure workpiece shaft; 6. a transition plate; 7. an adapter plate; 8. a CCD quick-change system mounting plate; 9. a protective cover; 10. a CCD quick-change system; 11. a first fine tuning displacement table; 12. a first high resolution CCD camera; 13. a zero point positioning device for initial clamping; 14. clamping a vacuum adsorption clamp for the first time; 15. a thin-walled spherical shell type micro member; 16. milling a shaft; 17. milling a shaft support; 18. secondarily clamping the vacuum adsorption clamp; 19. a secondary clamping zero point positioning device; 20. mounting plates of the secondary clamping zero-point positioning devices; 21. a second fine tuning displacement table; 22. a transition disk; 23. a turntable; 24. a Z-axis linear unit; 25. a first X-direction harmonica shield; 26. an X-axis drag chain; 27. a second X-direction harmonica shield; 28. an X-axis cover plate; 29. a Z-axis drag chain; 30. a second high resolution CCD camera; 31. a Z-axis motion carriage; 32. a milling spindle holder; 33. a Z-axis cover plate; 34. a first Z-direction harmonica shield; 35. milling cutters; 36. and a second Z-direction wind organ protective cover.
Detailed Description
The invention is further described with reference to the following drawings and specific examples, which are not intended to be limiting.
Referring to fig. 1 to 5, a processing apparatus for a full-surface dimple structure of a thin-wall spherical shell type micro component is shown, which includes: base 1, X axle linear unit 2, Y axle linear unit 4, Z axle linear unit 24, first high resolution CCD camera group, second high resolution CCD camera group, aerostatic pressure work piece axle 5, revolving platform 23, first clamping anchor clamps group, secondary clamping anchor clamps group and milling cutter instrument group, its characterized in that, X axle linear unit 2 and Z axle linear unit 24 are all installed at the upper surface of base 1, X axle linear unit 2's one side is located to Z axle linear unit 24, X axle linear unit 2 includes: x axle linear electric motor and X axle motion planker, X axle linear electric motor drive X axle motion planker along X axle direction motion, and X axle direction is a horizontal direction, and Z axle linear unit 24 includes: z axle linear electric motor and Z axle motion planker 31, Z axle linear electric motor drive Z axle motion planker 31 moves along Z axle direction, Z axle direction be with X axle direction mutually perpendicular's a horizontal direction, the upper surface connection of Y axle linear unit 4 and X axle motion planker, Y axle linear unit 4 includes: the Y-axis linear motor drives the Y-axis motion carriage to move along the Y-axis direction, and the Y-axis direction is vertical;
a mounting hole for mounting an air static pressure workpiece shaft 5 is formed in the Y-axis motion carriage, a first rotating motor connected with the air static pressure workpiece shaft 5 is further arranged in the Y-axis linear unit 4, the first rotating motor is mounted on the Y-axis motion carriage, the primary clamping fixture group is mounted on the air static pressure workpiece shaft 5, the first rotating motor drives the primary clamping fixture group to rotate along the central axis of the primary clamping fixture group through the air static pressure workpiece shaft 5, and the first high-resolution CCD camera group is mounted on the Y-axis motion carriage;
a rotary table 23 is arranged on the Z-axis motion carriage 31, a second rotating motor connected with the rotary table 23 is further arranged in the Z-axis linear unit 24, the second rotating motor is arranged on the Z-axis motion carriage 31 and drives the rotary table 23 to rotate along the central axis of the rotary table, a transition disc 22 is connected to the upper surface of the rotary table 23, and a secondary clamping fixture set, a milling cutter tool set and a second high-resolution CCD camera set are all arranged on the transition disc 22;
first clamping anchor clamps group includes: the primary clamping zero-point positioning device 13 and the primary clamping vacuum adsorption clamp 14 are detachably connected, the aerostatic workpiece shaft 5 and the primary clamping vacuum adsorption clamp 14 are detachably connected through the primary clamping zero-point positioning device 13, first vacuum pipelines which are mutually communicated are arranged inside the aerostatic workpiece shaft 5, the primary clamping zero-point positioning device 13 and the primary clamping vacuum adsorption clamp 14, a first vacuum generator communicated with the first vacuum pipelines is further arranged inside the Y-axis linear unit 4, and the primary clamping vacuum adsorption clamp 14 is controlled by the first vacuum generator to operatively perform vacuum adsorption on the thin-wall spherical shell type micro component 15;
the secondary clamping anchor clamps group includes: the secondary clamping vacuum adsorption fixture 18, the secondary clamping zero-point positioning device 19 and the secondary clamping zero-point positioning device mounting plate 20 are arranged, the lower end of the secondary clamping zero-point positioning device mounting plate 20 is connected with the upper surface of the transition disc 22, the secondary clamping zero-point positioning device mounting plate 20 is detachably connected with the secondary clamping vacuum adsorption fixture 18 through the secondary clamping zero-point positioning device 19, second vacuum pipelines which are communicated with one another are arranged inside the secondary clamping vacuum adsorption fixture 18, the secondary clamping zero-point positioning device 19 and the secondary clamping zero-point positioning device mounting plate 20, a second vacuum generator communicated with the second vacuum pipelines is further arranged in the Z-axis linear unit 24, and the secondary clamping vacuum adsorption fixture 18 is controlled to operatively perform vacuum adsorption on the thin-wall spherical shell type micro component 15 through the second vacuum generator;
a milling cutter tool set comprising: the milling shaft comprises a milling shaft support 17, a milling shaft 16 and a milling cutter 35, wherein the lower end of the milling shaft support 17 is connected with the upper surface of the transition disc 22, the milling shaft 16 is installed on the milling shaft support 17, the milling cutter 35 is connected with the milling shaft 16, and the milling cutter 35 is used for processing the surface of the thin-wall spherical shell type micro component 15;
the first high-resolution CCD camera group includes: the device comprises a first high-resolution CCD camera 12, a first precise fine-tuning displacement table 11 and a CCD quick-changing system 10, wherein the CCD quick-changing system 10 is connected with a Y-axis motion carriage, the first high-resolution CCD camera 12 is connected with the CCD quick-changing system 10 through the first precise fine-tuning displacement table 11, the first high-resolution CCD camera 12 is arranged above a primary clamping vacuum adsorption clamp 14, and the first high-resolution CCD camera 12 is used for monitoring the position relation between a secondary clamping vacuum adsorption clamp 18 and a thin-wall spherical shell type micro component 15;
the second high-resolution CCD camera group includes: the second high-resolution CCD camera 30 is connected with the upper surface of the transition disc 22 through the second fine tuning displacement table 21, and the second high-resolution CCD camera 30 is used for monitoring the processing position of the surface of the thin-wall spherical shell type micro component 15.
Further, in a preferred embodiment, the X-axis linear unit 2 further includes: the X-axis box body, the lower surface of X-axis box body and the upper surface of base 1are connected, X-axis linear motor installs in the X-axis box body, and the upper surface of X-axis box body is connected with first X to wind musical instrument protection casing 25, second X to wind musical instrument protection casing 27 and X axle apron 28, and first X is to wind musical instrument protection casing 25, X axle motion planker, second X to wind musical instrument protection casing 27 and X axle apron 28 interconnect in proper order along the X axle direction.
Further, in a preferred embodiment, the Z-axis linear unit 24 further includes: the lower surface of the Z-axis box body is connected with the upper surface of the base 1, the Z-axis linear motor, the second rotating motor and the second vacuum generator are all installed in the Z-axis box body, the upper surface of the Z-axis box body is connected with a Z-axis cover plate 33, a first Z-direction wind organ protective cover 34 and a second Z-direction wind organ protective cover 36, and the Z-axis cover plate 33, the first Z-direction wind organ protective cover 34, the Z-axis movement carriage 31 and the second Z-direction wind organ protective cover 36 are sequentially connected with one another along the Z-axis direction.
Further, in a preferred embodiment, the Y-axis linear unit 4 further includes: the Y-axis box body is connected with the lower surface of the Y-axis box body and the upper surface of the X-axis movement carriage, the Y-axis box body moves along the X-axis direction along with the X-axis movement carriage, the Y-axis linear motor, the first rotation motor and the first vacuum generator are all installed in the Y-axis box body, Y-axis baffles 3 are installed on two sides of the Y-axis box body, and a protective cover 9 is installed on the upper side of the Y-axis box body.
Further, in a preferred embodiment, the first high-resolution CCD camera group further includes: the adapter plate 7 is connected with the CCD quick-change system mounting plate 8, the adapter plate 7 is connected with the Y-axis motion carriage, the lower end of the CCD quick-change system mounting plate 8 is connected with the upper surface of the adapter plate 7, and the CCD quick-change system 10 is mounted on the Y-axis motion carriage through the CCD quick-change system mounting plate 8.
Further, in a preferred embodiment, the milling cutter tool set further comprises: a milling shaft holder 32, the milling shaft holder 32 and the upper end of the milling shaft support 17 are connected, and the milling shaft 16 is mounted on the milling shaft holder 32.
Further, in a preferred embodiment, the milling spindle 16 is arranged obliquely.
Further, in a preferred embodiment, the milling cutter 35 is a ball end mill.
Further, in a preferred embodiment, the method further comprises: x axle tow chain 26 and Z axle tow chain 29, X axle tow chain 26 and Z axle tow chain 29 all are connected with the upper surface of base 1, and X axle tow chain 26 locates the opposite side of X axle sharp unit 2, and X axle tow chain 26 sets up in a parallel with the X axle direction, and Z axle tow chain 29 sets up in a parallel with the Z axle direction.
Further, in a preferred embodiment, the primary clamping fixture set further includes: the transition plate 6, the air static pressure workpiece shaft 5 and the initial clamping zero point positioning device 13 are connected through the transition plate 6.
The above are merely preferred embodiments of the present invention, and the embodiments and the protection scope of the present invention are not limited thereby.
The present invention also has the following embodiments in addition to the above:
in a further embodiment of the invention, a special vacuum adsorption fixture and an adsorption method are used for carrying out adsorption clamping on the thin-wall spherical shell type micro component 15 to reduce clamping deformation, a zero positioning system is used for carrying out quick change and head turning secondary clamping to realize high-precision repeated clamping positioning, two high-resolution CCD cameras are arranged to realize accurate tool setting under the constraint of micro-space scale, identification and capture of secondary clamping track points, determination of characteristic micro-pit structure coordinates and omnibearing monitoring of a machining process, and due to the adoption of the inclined arrangement mode of the milling shaft 16, the condition that the top speed of the ball-end milling cutter 35 is zero to reduce the quality of a machined surface can be effectively avoided, and the special vacuum adsorption fixture and the adsorption method are particularly suitable for precise ultra-precision machining of a cross-scale characteristic micro-pit structure uniformly distributed on the whole surface of the thin-wall spherical shell type micro component 15.
In a further embodiment of the invention, the invention relates to an ultra-precision machining device with a cross-scale micro-pit structure uniformly distributed on the whole surface of a complex micro component, which is monitored by double sensors and subjected to high-precision turning and secondary clamping.
In a further embodiment of the invention, the base 1 is a large platform made of granite material, which can absorb vibration well and improve the performance of the device greatly, and the four corners are provided with mounting holes which can be connected with other horizontal platforms.
In a further embodiment of the invention, the X-axis linear unit 2 is connected with the base 1 through a screw, and an X-axis motion carriage of the X-axis linear unit 2 is driven by a linear motor, so that high-precision reciprocating linear movement can be realized in the horizontal direction.
In a further embodiment of the invention, the Y-axis linear unit 4 is fixed on the carriage of the X-axis linear unit 2 through screws, and the Y-axis motion carriage of the Y-axis linear unit 4 is driven by a linear motor, so that high-precision reciprocating linear motion in the vertical direction can be realized, and the Y-axis motion carriage has a higher verticality requirement with the X-axis linear unit 2 so as to meet the required machining precision.
In a further embodiment of the invention, the X-axis motion carriage moves along the X-axis direction, the straightness of the moving track is better than 0.2 mu m/full stroke, the full stroke of the moving track is 200mm, and the straightness of any 10mm is better than 0.05 mu m.
In a further embodiment of the invention, the Y-axis motion carriage moves along the Y-axis direction, the straightness of the moving track is better than 0.2 μm/full stroke, the full stroke of the moving track is 100mm, and the straightness of any 10mm is better than 0.05 μm.
In a further embodiment of the invention, the aerostatic workpiece shaft 5 is fixedly connected in a mounting hole of a Y-axis motion carriage of the Y-axis linear unit 4 through a screw, moves along with the Y-axis motion carriage and realizes high-precision rotary motion.
In a further embodiment of the invention, the revolution precision of the aerostatic spindle is better than 50nm, and the axial and radial synchronous errors are better than 12 nm.
In a further embodiment of the invention, the transition plate 6 is connected with the end part of the aerostatic workpiece shaft 5 through an inner hexagon screw, and the initial clamping zero point positioning device 13 is connected on the transition plate 6 through an inner hexagon screw.
In a further embodiment of the present invention, the primary clamping vacuum adsorption jig 14 is connected to the primary clamping zero-point positioning device 13 by an allen screw, and can be quickly replaced and disassembled along with the primary clamping zero-point positioning device 13.
In a further embodiment of the invention, a vacuum pipeline is arranged inside the primary clamping vacuum adsorption clamp 14, and the thin-wall spherical shell type micro component 15 is tightly connected to a suction head of the primary clamping vacuum adsorption clamp 14 under vacuum negative pressure adsorption, so that the clamping of the thin-wall spherical shell type micro component 15 is realized.
In a further embodiment of the invention, the adapter plate 7 is connected to the Y-axis moving carriage of the Y-axis linear unit 4 through screws, the CCD quick-change system mounting plate 8 is connected to the adapter plate 7 through socket head cap screws, and the CCD quick-change system 10 is connected to the CCD quick-change system mounting plate 8 through socket head cap screws.
In a further embodiment of the present invention, one end of the first fine tuning displacement stage 11 is connected to the CCD fast-changing system 10 through a socket head cap screw, the other end of the first fine tuning displacement stage 11 is connected to the first high-resolution CCD camera 12 through a locking device, the first fine tuning displacement stage 11 is driven by two coarse tuning micrometer heads, and can perform adjustment of linear displacement along two perpendicular directions, respectively, the coarse tuning minimum reading of the micrometer heads is 10 μm, the fine tuning minimum reading is 0.5 μm, so as to ensure the precision of displacement adjustment, and the linear guide rail thereof is equipped with a locking knob, which facilitates position locking of the adjusted platform.
In a further embodiment of the present invention, the first high-resolution CCD camera 12 can implement precise tool setting and monitoring of the machining process under the micro-scale constraint, and can be quickly replaced and removed along with the CCD quick-change system 10, so as to expand other uses of the device.
In a further embodiment of the invention, a Z-axis motion carriage of the Z-axis linear unit 24 is driven by a linear motor to move along the Z-axis direction, the straightness of a moving track is better than 0.2 mu m/full stroke, the full stroke of the moving track is 200mm, the straightness of any 10mm is better than 0.05 mu m, the Z-axis linear unit 24 is connected with the base 1 through a screw, and the Z-axis motion carriage can realize high-precision reciprocating linear motion in the Z-axis direction.
In a further embodiment of the present invention, the turntable 23 is mounted on the Z-axis movable carriage 31 through a socket head cap screw, and can move along with the Z-axis movable carriage 31 along the Z-axis direction, and the rotation precision of the turntable 23 is better than ± 1 are-sec.
In a further embodiment of the invention, the transition disc 22 is connected to the turntable 23 by means of socket head cap screws.
In a further embodiment of the present invention, a milling shaft bracket 17, a second fine tuning displacement table 21 and a secondary clamping zero point positioning device mounting plate 20 are mounted on the transition disc 22.
In a further embodiment of the present invention, four mounting holes are provided around the bottom of the milling shaft bracket 17 to connect with the transition disc 22.
In a further embodiment of the invention, the milling shaft holder 32 is screwed to the milling shaft support 17, the milling shaft 16 is mounted in an inner bore of the milling shaft holder 32, the clearance between the inner bore of the milling shaft holder 32 and the outer cylindrical surface of the milling shaft 16 can be adjusted by tightening the screw, and the milling shaft 16 is pressed by friction.
In a further embodiment of the present invention, the amount of the pressing force must be tightly controlled during installation to prevent damage to the milling spindle 16.
In a further embodiment of the present invention, the milling shaft 16 drives the ball end mill 35 to perform a high-speed rotation motion, and the rotation axis thereof forms an included angle of 10 ° to 15 ° with the horizontal plane in space, thereby forming an oblique axis processing mode.
In a further embodiment of the present invention, the second high-resolution CCD camera 30 is connected to the second fine tuning displacement stage 21 by hexagon socket head cap screws, so as to realize the identification and capture of the track point during the secondary clamping, the monitoring of the position of the micro-pit structure and the determination of the coordinates.
In a further embodiment of the present invention, the second fine tuning displacement stage 21 is connected to the transition plate 22 by screws, the second fine tuning displacement stage 21 is driven by two coarse tuning micrometer heads, and can perform linear displacement adjustment along two perpendicular directions, respectively, the coarse tuning minimum reading of the micrometer heads is 10 μm, and the fine tuning minimum reading is 0.5 μm, so as to ensure the precision of the displacement adjustment, and meanwhile, the linear guide rail is also provided with a locking knob, which facilitates the position locking of the adjusted platform.
In a further embodiment of the present invention, the bottom of the mounting plate 20 of the secondary clamping zero-point positioning device is provided with a mounting hole, and the mounting hole can be connected with the transition disc 22 through a screw.
In a further embodiment of the present invention, the secondary clamping zero point positioning device 19 is connected to the secondary clamping zero point positioning device mounting plate 20 by screws.
In a further embodiment of the invention, the secondary clamping vacuum adsorption clamp 18 is connected to the secondary clamping zero-point positioning device 19 through a screw for adjusting the head and secondary clamping.
In a further embodiment of the invention, before primary processing and turning clamping, the secondary clamping vacuum adsorption clamp 18 can be disassembled together with the secondary clamping zero-point positioning device 19, so that interference in the processing process is avoided.
In a further embodiment of the present invention, the Y-axis baffle 3, the first X-direction wind organ protection cover 25, the second X-direction wind organ protection cover 27, the first Z-direction wind organ protection cover 34, the second Z-direction wind organ protection cover 36, the X-axis cover plate 28, the Z-axis cover plate 33, and the protection cover 9 are all used to provide a dustproof effect for the linear motor moving parts located therebelow, and at the same time, to prevent some processing liquids from splashing, thereby providing a good protection effect for the usability and the service life of the high-precision linear motor.
In a further embodiment of the invention, the processing device of the structure with the uniformly distributed micro pits on the whole surface of the thin-wall spherical shell type micro component comprises three linear shafts, two rotating shafts, a milling shaft and two dismountable high-resolution CCD cameras, the micro pit structure is uniformly distributed on the surface of the thin-wall spherical shell type micro component 15, the linear shafts and the rotating shafts of the processing device are respectively controlled by independent drivers and feedback signal lines in a linkage mode or independently controlled through a multi-shaft controller, the high-precision processing of tens to hundreds of uniformly distributed micro pit structures with the longitudinal size of 0.5-20 mu m and the transverse size of 50-200 mu m can be realized on the whole surface of the thin-wall spherical shell type micro component with the spherical diameter of 1-5 mm and the shell thickness of 20-120 mu m, the contour error is better than 0.3 mu m, and the surface roughness Ra is better than 20 nm.
In a further embodiment of the present invention, the specific operation flow is as follows:
(1) before the primary processing of the hemispherical micro-pit structure, applying a vacuum negative pressure environment, carrying out adsorption and tightening on the thin-wall spherical shell type micro component 15 by utilizing vacuum negative pressure through a primary clamping vacuum adsorption clamp 14, and keeping a vacuum adsorption state in the processing process;
(2) the accurate tool setting operation of the thin-wall spherical shell type micro component 15 is carried out, according to the processing condition requirement of the inclined shaft processing mode, the sphere center of the ball end milling cutter 35 needs to be adjusted to be overlapped with the rotary axis of the air static pressure workpiece shaft 5, the requirements of various processing tracks are met, the contact area and the tool setting process of the ball end milling cutter 35 and the thin-wall spherical shell type micro component 15 are monitored in an all-dimensional mode through two high-resolution CCD cameras, and the high-precision tool setting operation under the micro-scale constraint can be realized;
(3) after finishing high-precision tool setting, carrying out primary micro milling processing on the surface micro-pit structure, and finishing processing on the hemispherical micro-pit structure according to a preset track by adopting a spline motion mode and multi-axis interpolation linkage control;
(4) after the hemispherical micro-pit structure is machined, entering a secondary turning and clamping preparation stage, enabling a secondary clamping vacuum adsorption clamp 18 to be coaxial with an aerostatic workpiece shaft 5 through multi-shaft linkage, moving a Z-axis motion carriage 31 to enable a suction head of the secondary clamping vacuum adsorption clamp 18 to be in contact with the machined surface of the thin-wall spherical shell type micro component 15, starting secondary clamping vacuum adsorption, and adsorbing the thin-wall spherical shell type micro component 15;
(5) the primary clamping vacuum adsorption clamp 14 releases vacuum adsorption, and the thin-wall spherical shell type micro component 15 is transferred to the secondary clamping vacuum adsorption clamp 18 from the primary clamping vacuum adsorption clamp 14;
(6) then, by utilizing the high repeated positioning precision of the zero positioning system, the primary clamping zero positioning device 13 on the workpiece shaft is taken down, and the secondary clamping zero positioning device 19 is transferred to the aerostatic workpiece shaft 5, so that high-precision quick secondary turning and clamping are realized;
(7) and capturing the coordinates of the initially processed micro-pit structure by using two high-resolution CCD cameras, and finishing the processing of the residual hemispherical micro-pit structure in a multi-axis linkage manner according to a preset track so as to realize the high-precision micro-milling processing of the whole-surface micro-pit structure of the thin-wall spherical shell type micro component 15.
In a further embodiment of the invention, the processing accuracy and error analysis of the device: in the actual high-precision machining process of uniformly distributing the micro-pit structures on the whole surface of the thin-wall spherical shell type micro component, due to the existence of installation errors and motion errors, the machining track has position deviation. The device is modeled as two kinematic chains consisting of rigid bodies, each with its own local cartesian coordinate system. A kinematic chain from the base of the device to the ball end mill and establishing a tool coordinate system; the other kinematic chain is from the base to the workpiece and establishes a workpiece coordinate system. Any axis error can be divided into linear error deltamnAngle error thetamnAnd position error betamn。
The coordinate of the tool point under the tool coordinate system and the coordinate of the point to be processed under the workpiece coordinate system are converted to the global coordinate system by the homogeneous coordinate conversion principle, and the conversion matrix between any adjacent assemblies of the device can be divided into:
(1) ideal static variation matrix:
Figure BDA0003257261120000121
(2) actual stationary transformation error matrix:
Figure BDA0003257261120000122
(3) ideal motion change matrix:
Figure BDA0003257261120000123
(4) actual motion transformation error matrix:
Figure BDA0003257261120000124
the ideal transformation matrix:
j iT＝j iTp j iTs
actual transformation matrix:
j iTe＝j iTp j iTpe j iTs j iTse
under ideal conditions, the tool nose point coincides with a point to be processed on the workpiece under ideal conditions, that is, the position of the tool nose point under the tool coordinate system coincides with the position of the point to be processed under the workpiece coordinate system under the global coordinate system, that is, the tool nose point coincides with the point to be processed under the workpiece coordinate system under the global coordinate system
Figure BDA0003257261120000125
Wherein, P(w)＝[Pwx,Pwy,Pwz,1]TPosition of cutting point, P, under workpiece coordinate systemt＝[Ptx,Pty,Ptz,1]TTaking the coordinate of cutting point under the tool coordinate system, and taking Pt＝[0，0，0，1]T
(1) The ideal tool path in the workpiece coordinate system is:
Figure BDA0003257261120000131
(2) the actual tool path in the workpiece coordinate system is:
Figure BDA0003257261120000132
further, when the straightness of the X/Y/Z guide rail is 50nm/10mm, the positioning precision is 0.3 mu m/10mm, the rotation precision of the B axis is +/-1 arc-sec, and the rotation precision of the C axis is +/-1 arc-sec, the actual processing error in a 10mm stroke is calculated:
E＝Pw_actual-Pw_ideal＝0.48μm
therefore, the double-high-resolution CCD camera monitoring and high-precision turning secondary clamping ultra-precision machining device can uniformly distribute the cross-scale micro-pit structure on the whole surface of the thin-wall spherical shell type micro component, and the machining precision meets the requirement.
In a further embodiment of the invention, the device can realize high-precision processing of tens to hundreds of uniformly distributed micro-pit structures with the longitudinal size of 0.5-20 mu m and the transverse size of 50-200 mu m on the whole surface of a thin-wall spherical shell type micro component with the spherical diameter of 1-5 mm and the shell thickness of 20-120 mu m, the contour error is better than 0.3 mu m, and the surface roughness Ra is better than 20 nm.
In a further embodiment of the invention, the workpiece clamping system, the high-resolution CCD monitoring system, the zero positioning system and the turning secondary clamping quick-change system are integrated on one working platform, the structural design is compact, and the technical problems of clamping, turning, tool setting, capturing and identifying a pit structure and the like of a thin-wall spherical shell type micro component can be effectively solved.
In a further embodiment of the invention, a high-precision linear unit and a high-precision rotary unit are adopted as main moving parts of the device, the straightness of an X/Y/Z linear axis is better than 0.2 mu m/full stroke, the straightness of any 10mm is better than 0.05 mu m, the positioning precision of a linear guide rail is better than +/-0.5 mu m/full stroke, and the positioning precision of any 10mm is better than +/-0.3 mu m; the rotary table 23 has a precision of rotation better than + -1 arc-sec.
In a further embodiment of the invention, the workpiece is rotated by using the air static pressure workpiece shaft 5, the configuration is flexible, the rotation precision is better than 50nm, the axial and radial synchronous errors are better than 12nm, the milling shaft 16 is obliquely arranged, the inclination angle ranges from 10 degrees to 15 degrees, according to the characteristics of spherical surface processing and the structure, the high processing speed can be achieved, the surface quality is effectively prevented from being reduced because the top speed of the ball head milling cutter 35 is 0, and the processing precision is further improved.
In a further embodiment of the invention, the base is made of granite material, so that vibration can be well absorbed, and the performance of the device can be greatly improved.
In a further embodiment of the invention, the aerostatic workpiece shaft 5 is fixedly connected in a mounting hole of a Y-axis motion carriage of the Y-axis linear unit 4 through a screw, moves along with the Y-axis motion carriage and realizes high-precision rotary motion, the rotary precision of the aerostatic workpiece shaft 5 is better than 50nm, and the axial and radial synchronous errors are better than 12 nm.
In a further embodiment of the invention, the transition plate 6 is connected to the end of the aerostatic workpiece shaft 5 by means of socket head cap screws.
In a further embodiment of the present invention, the initial clamping zero point positioning device 13 is connected to the transition plate 6 by a socket head cap screw.
In a further embodiment of the present invention, the primary clamping vacuum adsorption jig 14 is connected to the primary clamping zero-point positioning device 13 by an allen screw, and can be quickly replaced and disassembled along with the primary clamping zero-point positioning device 13.
In a further embodiment of the invention, a vacuum pipeline is arranged inside the primary clamping vacuum adsorption clamp 14, during primary clamping, vacuum negative pressure is generated by a vacuum generator which is arranged inside a Y-axis box body and is positioned at the tail end of the aerostatic workpiece shaft 5, the vacuum negative pressure is conveyed to the tail end of the aerostatic workpiece shaft 5 through a special vacuum air path inside the aerostatic workpiece shaft 5 in sequence, the vacuum negative pressure is transmitted to the inside of a cavity of the primary clamping vacuum adsorption clamp 14 through a transition plate 6 and a channel inside the primary clamping zero-point positioning device 13 through a vacuum pipeline, the joint of the primary clamping vacuum adsorption clamp 14 and a reference sheet is sealed by a sealing ring, so that good air tightness can be ensured, the thin-wall spherical shell type micro component 15 is tightly connected to a suction head of the primary clamping vacuum adsorption clamp 14 under vacuum negative pressure adsorption, and clamping of the thin-wall spherical shell type micro component 15 is realized.
In a further embodiment of the invention, the motion controller of the whole device adopts a UMAC multi-axis motion controller to realize linkage control of the X-axis motion carriage, the Y-axis motion carriage, the Z-axis motion carriage 31, the rotary table 23 and the aerostatic workpiece shaft 5, and the special control cabinet realizes control of the milling shaft 16.
In a further embodiment of the invention, the X-axis linear motor and the Z-axis linear motor are high-precision I-Force series coreless linear motors of PARKER company, the model number 410-6N-LC, and the linear amplifier TA333 of Trust company is matched to drive the X-axis movement carriage to move along the X-axis direction and the shaft movement carriage 31 to move along the Z-axis direction.
In a further embodiment of the present invention, the X-axis linear motor, the Y-axis linear motor, and the Z-axis linear motor are all hydrostatic guideway linear motors, the linear motor is composed of a stator and a rotor, the stator and the guideway are installed on the base 1, and the rotor is used for connecting a moving worktable.
In a further embodiment of the invention, the base 1 is a large platform made of granite material, which can absorb vibration well and improve the performance of the device greatly, and the four corners are provided with mounting holes which can be connected with other horizontal platforms.
In a further embodiment of the invention, the X-axis linear unit 2 is connected to the base 1 through a lower hexagon socket head cap screw, and can realize high-precision reciprocating linear motion of the X-axis motion carriage in the horizontal direction through electromagnetic thrust drive of an internal linear motor, the Y-axis linear unit 4 is fixed on the carriage of the X-axis linear unit 2 through the hexagon socket head cap screw, and can realize high-precision reciprocating linear motion of the Y-axis motion carriage in the vertical direction through electromagnetic map thrust drive of the internal linear motor, and has a higher verticality requirement with the X-axis linear unit 2 so as to meet the required processing precision.
In a further embodiment of the invention, the Z-axis linear unit 24 is connected with the base 1 through a hexagon socket screw and driven by the electromagnetic thrust of an internal linear motor, the straightness is better than 0.2 mu m/full stroke, the full stroke is 200mm, the straightness of any 10mm is better than 0.05 mu m, and the Z-axis motion carriage 31 can realize high-precision reciprocating linear motion in the horizontal direction.
In a further embodiment of the invention, the Y-axis linear motor is a high-precision I-Force series coreless high-precision linear motor of park corporation, the model of which is 310-3M-LC, and the linear amplifier TA333 of Trust corporation is matched to drive the Y-axis motion carriage to move along the Y-axis direction.
In a further embodiment of the present invention, the CCD camera is 14.5 × 14, 16.5; lens: LM1138TC, magnification 2 times, market range 6.4X 4.8mm, Japan KOWA Corp; a camera: ME2P-2621-15U3M, resolution 5120X 5120, great constancy in China.
In a further embodiment of the invention, the aerostatic workpiece spindle is the german Professional Instruments company, model ISO 5.5 PG.
In a further embodiment of the invention, a vacuum generator of model ZP3 from SMC Japan is used, the principle of the vacuum generating device being as follows: compressed air is sprayed at high speed through the spray pipe, jet flow is formed at the outlet of the spray pipe, entrainment flow is generated, air around the spray pipe is continuously sucked, the pressure in the suction cavity is reduced to be below the atmosphere, and vacuum is formed.
The continuity equation for an incompressible gas is:
A1ν1＝A2ν2
in the formula, A1 and A2 are pipeline areas, v1 and v2 are gas flow rates, and when the section is increased, the flow rate is reduced; the cross section is reduced, and the flow speed is increased;
the ideal energy equation for gas is:
Figure BDA0003257261120000151
p1 and P2 are corresponding pressure at sections A1 and A2, v1 and v2 are corresponding flow speed at sections A1 and A2, gamma is fluid gravity, g is gravity acceleration, the flow speed is known to increase, the pressure is known to decrease, when v2 is more than or equal to v1, P1 is more than or equal to P2, when v2 is increased to a certain value, P2 is less than one atmospheric pressure, namely negative pressure is generated, so the negative pressure is obtained by increasing the flow speed, and suction force is generated.
In a further embodiment of the present invention, during processing, the movement process of the whole device is as follows: the method comprises the following specific steps that multi-axis linkage is realized through the multi-axis motion controller, a ball-end milling cutter 35 is moved to the position close to a micro pit point to be processed through interpolation motion of an X-axis motion carriage and a Z-axis motion carriage 31, the Y-axis motion carriage is controlled to move, the height of a thin-wall spherical shell type micro component 15 is adjusted, the spherical center of the thin-wall spherical shell type micro component 15 and the spherical center of the ball-end milling cutter 15 are located on the same plane, further, a rotary table 23 is controlled to rotate for a certain angle, the ball-end milling cutter 15 reaches the position above the micro pit structure to be processed, and a tool setting flow is started.
In a further embodiment of the present invention, the tool setting process: the position images of the ball center of the ball head milling cutter relative to the thin-wall spherical shell type micro component 15 in the space are respectively obtained through two high-resolution CCD cameras, the position images are transmitted to a numerical control system, the distance between the ball center of the ball head milling cutter 35 and the thin-wall spherical shell type micro component 15 in the space is obtained through image processing, the high-precision linear unit and the high-precision rotary unit are controlled to move through the multi-axis motion controller, the gap is adjusted, and accurate tool setting is achieved.
In a further embodiment of the invention, after tool setting is finished, a surface micro-pit structure processing flow is started, after precise tool setting is carried out on the processing of a specific micro-pit structure, the feeding motion of a tool along the radial direction of a thin-wall spherical shell is realized by controlling the linkage of an X-axis motion carriage and a Z-axis motion carriage 31, the removal of redundant materials of the micro-pit structure at the position is realized by high-speed rotation of a milling shaft 16, the micro-pit processing is completed, further, according to a preset planning track, the linkage of the X-axis motion carriage and the Z-axis motion carriage 31 is controlled, a milling cutter 35 is returned to a safe position, an air static pressure workpiece shaft 5 is controlled to rotate, so that the next micro-pit to be processed rotates to the side close to the tool, the linkage of the X-axis motion carriage and the Z-axis motion carriage 31 is controlled, and the processing of the micro-pit structure at the position is realized according to the preset track. And then, finishing the processing of the residual micro-pit structure according to the pre-generated track.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention.

Claims (10)

1. A processing device of a full-surface micro-pit structure of a thin-wall spherical shell type micro component comprises: base (1), X axle straight line unit (2), Y axle straight line unit (4), Z axle straight line unit (24), first high resolution CCD camera group, second high resolution CCD camera group, aerostatic press work piece axle (5), revolving platform (23), first clamping anchor clamps group, secondary clamping anchor clamps group and milling cutter instrument group, a serial communication port, X axle straight line unit (2) with the upper surface at base (1) is all installed in Z axle straight line unit (24), one side of X axle straight line unit (2) is located in Z axle straight line unit (24), X axle straight line unit (2) include: the X-axis linear motor drives the X-axis motion carriage to move along the X-axis direction, the X-axis direction is a horizontal direction, and the Z-axis linear unit (24) comprises: z axle linear electric motor and Z axle motion planker (31), Z axle linear electric motor drive Z axle motion planker (31) move along Z axle direction, Z axle direction be with X axle direction mutually perpendicular's a horizontal direction, the upper surface connection of Y axle linear unit (4) and X axle motion planker, Y axle linear unit (4) include: the Y-axis linear motor drives the Y-axis motion carriage to move along the Y-axis direction, and the Y-axis direction is vertical;
the Y-axis motion carriage is provided with a mounting hole for mounting the aerostatic workpiece shaft (5), the Y-axis linear unit (4) is also internally provided with a first rotating motor connected with the aerostatic workpiece shaft (5), the first rotating motor is mounted on the Y-axis motion carriage, the primary clamping fixture group is mounted on the aerostatic workpiece shaft (5), the first rotating motor drives the primary clamping fixture group to rotate along the central axis of the primary clamping fixture group through the aerostatic workpiece shaft (5), and the first high-resolution CCD camera group is mounted on the Y-axis motion carriage;
the rotary table (23) is mounted on the Z-axis motion planker (31), a second rotating motor connected with the rotary table (23) is further arranged in the Z-axis linear unit (24), the second rotating motor is mounted on the Z-axis motion planker (31), the second rotating motor drives the rotary table (23) to rotate along the central axis of the rotary table, a transition disc (22) is connected to the upper surface of the rotary table (23), and the secondary clamping fixture set, the milling cutter tool set and the second high-resolution CCD camera set are mounted on the transition disc (22);
first clamping anchor clamps group includes: the clamping device comprises a primary clamping zero-point positioning device (13) and a primary clamping vacuum adsorption clamp (14), wherein an aerostatic workpiece shaft (5) and the primary clamping vacuum adsorption clamp (14) are detachably connected through the primary clamping zero-point positioning device (13), a first vacuum pipeline which is communicated with each other is arranged inside the aerostatic workpiece shaft (5), the primary clamping zero-point positioning device (13) and the primary clamping vacuum adsorption clamp (14), a first vacuum generator communicated with the first vacuum pipeline is further arranged in a Y-axis linear unit (4), and the primary clamping vacuum adsorption clamp (14) is controlled to operatively perform vacuum adsorption on the thin-wall spherical shell type micro component (15) through the first vacuum generator;
the secondary clamping anchor clamps group includes: secondary clamping vacuum adsorption anchor clamps (18), secondary clamping positioner (19) and secondary clamping positioner mounting panel (20) at zero point, the lower extreme of secondary clamping positioner mounting panel (20) at zero point and the upper surface connection of transition dish (22) on, secondary clamping positioner mounting panel (20) at zero point with pass through between secondary clamping vacuum adsorption anchor clamps (18) secondary clamping positioner (19) at zero point can be dismantled and connect, secondary clamping vacuum adsorption anchor clamps (18), secondary clamping positioner (19) at zero point with the inside of secondary clamping positioner mounting panel (20) at zero point is equipped with the second vacuum pipeline of mutual intercommunication, still be equipped with the second vacuum generator who communicates with the second vacuum pipeline in Z axle straight line unit (24), through second vacuum generator control secondary clamping vacuum adsorption anchor clamps (18) are right the small component of spherical shell class (15) are operatably carried out the vacuum and are inhaled Attaching;
the milling cutter tool set comprises: the milling shaft comprises a milling shaft support (17), a milling shaft (16) and a milling cutter (35), wherein the lower end of the milling shaft support (17) is connected with the upper surface of the transition disc (22), the milling shaft (16) is installed on the milling shaft support (17), the milling cutter (35) is connected with the milling shaft (16), and the milling cutter (35) is used for processing the surface of the thin-wall spherical shell type micro component (15);
the first high-resolution CCD camera group includes: the device comprises a first high-resolution CCD camera (12), a first precise fine-tuning displacement table (11) and a CCD quick-changing system (10), wherein the CCD quick-changing system (10) is connected with a Y-axis motion carriage, the first high-resolution CCD camera (12) is connected with the CCD quick-changing system (10) through the first precise fine-tuning displacement table (11), the first high-resolution CCD camera (12) is arranged above a primary clamping vacuum adsorption clamp (14), and the first high-resolution CCD camera (12) is used for monitoring the position relation between a secondary clamping vacuum adsorption clamp (18) and a thin-walled spherical shell type micro component (15);
the second high-resolution CCD camera group includes: the second high-resolution CCD camera (30) is connected with the upper surface of the transition disc (22) through the second fine tuning displacement table (21), and the second high-resolution CCD camera (30) is used for monitoring the machining position of the surface of the thin-wall spherical shell type micro component (15).
2. The machining device of the full-surface micro-pit structure of the thin-wall spherical shell type micro-component according to claim 1, wherein the X-axis linear unit (2) further comprises: the X axle box, the lower surface of X axle box with the upper surface of base (1) is connected, X axle linear electric motor installs in the X axle box, the upper surface of X axle box is connected with first X to wind musical instrument protection casing (25), second X to wind musical instrument protection casing (27) and X axle apron (28), first X to wind musical instrument protection casing (25) X axle motion planker second X to wind musical instrument protection casing (27) with X axle apron (28) are interconnect in proper order along X axle direction.
3. The machining device of the full-surface micro-pit structure of the thin-wall spherical shell type micro-component according to claim 1, wherein the Z-axis linear unit (24) further comprises: the Z axle box, the lower surface of Z axle box with the upper surface of base (1) is connected, Z axle linear electric motor the second rotate the motor with second vacuum generator all installs in the Z axle box, the upper surface of Z axle box is connected with Z axle apron (33), first Z to wind musical instrument protection casing (34) and second Z to wind musical instrument protection casing (36), Z axle apron (33) first Z to wind musical instrument protection casing (34) Z axle motion planker (31) with second Z is to wind musical instrument protection casing (36) along Z axle direction interconnect in proper order.
4. The machining device of the full-surface micro-pit structure of the thin-wall spherical shell type micro-component according to claim 1, wherein the Y-axis linear unit (4) further comprises: the Y-axis box body is connected with the upper surface of the X-axis movement carriage along the X-axis direction, the Y-axis box body moves along the X-axis direction along with the X-axis movement carriage, the Y-axis linear motor, the first rotating motor and the first vacuum generator are all installed in the Y-axis box body, Y-axis baffles (3) are installed on two sides of the Y-axis box body, and a protective cover (9) is installed on the upper side of the Y-axis box body.
5. The machining device for the full-surface micro-pit structure of the thin-wall spherical shell type micro component according to claim 1, wherein the first high-resolution CCD camera group further comprises: adapter plate (7) and CCD quick change system mounting panel (8), adapter plate (7) with the Y axle motion planker is connected, the lower extreme of CCD quick change system mounting panel (8) and the upper surface connection of adapter plate (7), CCD quick change system (10) pass through CCD quick change system mounting panel (8) are installed on the Y axle motion planker.
6. The machining device for the full-surface micro-pit structure of the thin-wall spherical shell type micro-component according to claim 1, wherein the milling cutter tool set further comprises: a milling shaft holder (32), the milling shaft holder (32) being connected to an upper end of a milling shaft support (17), the milling shaft (16) being mounted on the milling shaft holder (32).
7. The machining device for the full-surface micro-pit structure of the thin-wall spherical shell type micro component is characterized in that the milling shaft (16) is obliquely arranged.
8. The machining device of the full-surface micro-pit structure of the thin-wall spherical shell type micro component as claimed in claim 7, wherein the milling cutter (35) is a ball head milling cutter.
9. The processing device of the full-surface micro-pit structure of the thin-wall spherical shell type micro component according to claim 1, further comprising: x axle tow chain (26) and Z axle tow chain (29), X axle tow chain (26) with Z axle tow chain (29) all with the upper surface of base (1) is connected, the opposite side of X axle straight line unit (2) is located in X axle tow chain (26), X axle tow chain (26) are on a parallel with X axle direction sets up, Z axle tow chain (29) are on a parallel with Z axle direction sets up.
10. The machining device for the full-surface micro-pit structure of the thin-wall spherical shell type micro component according to claim 1, wherein the primary clamping fixture set further comprises: and the transition plate (6) is used for connecting the aerostatic workpiece shaft (5) and the primary clamping zero point positioning device (13) through the transition plate (6).
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114453641A (en) * 2022-01-27 2022-05-10 哈尔滨工业大学 Six-axis linkage machine tool weak electric control system, six-axis linkage machine tool and milling method
CN114535625A (en) * 2022-04-08 2022-05-27 哈尔滨工业大学 Ultra-precision turning machine tool for tiny conical rotary body component and tool setting and processing monitoring method
CN116441638A (en) * 2023-06-16 2023-07-18 沈阳和研科技股份有限公司 Dicing saw
CN118372197A (en) * 2024-06-27 2024-07-23 西南科技大学 Clamp and device for detecting surface defects and contours of microspheres

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203156460U (en) * 2013-04-16 2013-08-28 易兴 Interpolation device of CNC (computerized numerical control) system and used for thin-wall curved surface processing
CN104772656A (en) * 2015-04-02 2015-07-15 西安交通大学 Online measuring system and method for rotary part of lathe
CN207414445U (en) * 2017-11-23 2018-05-29 兰州工业学院 A kind of novel hollow spherome surface slotting attachment
KR101882231B1 (en) * 2017-02-21 2018-07-26 중앙대학교 산학협력단 End effector of fixture for walled workpieces
CN108526492A (en) * 2018-06-26 2018-09-14 北京理工大学 A kind of tool changing processing method based on CCD camera on-position measure
KR20180118845A (en) * 2017-04-21 2018-11-01 한국정밀기계(주) Module type flexible jig system
CN110000606A (en) * 2019-04-18 2019-07-12 哈尔滨工业大学 A kind of presetting cutter method for processing Terahertz slow-wave structure part
CN110293233A (en) * 2019-07-30 2019-10-01 中国工程物理研究院材料研究所 A kind of thin-wall semi shells automatization processing method
CN112276176A (en) * 2020-10-20 2021-01-29 哈尔滨工业大学 Micro-milling burr suppression method applied to folded waveguide slow-wave structure
CN212526942U (en) * 2019-11-15 2021-02-12 西华大学 Machining is with hemisphere casing vacuum adsorption frock clamp
CN112571089A (en) * 2020-11-19 2021-03-30 首都航天机械有限公司 Dot-matrix flexible fixed supporting device for integral spinning hemispherical shell
CN112917205A (en) * 2021-04-21 2021-06-08 大连理工大学 Large spherical crown thin-wall part array type internal support clamp and flexible clamping method

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203156460U (en) * 2013-04-16 2013-08-28 易兴 Interpolation device of CNC (computerized numerical control) system and used for thin-wall curved surface processing
CN104772656A (en) * 2015-04-02 2015-07-15 西安交通大学 Online measuring system and method for rotary part of lathe
KR101882231B1 (en) * 2017-02-21 2018-07-26 중앙대학교 산학협력단 End effector of fixture for walled workpieces
KR20180118845A (en) * 2017-04-21 2018-11-01 한국정밀기계(주) Module type flexible jig system
CN207414445U (en) * 2017-11-23 2018-05-29 兰州工业学院 A kind of novel hollow spherome surface slotting attachment
CN108526492A (en) * 2018-06-26 2018-09-14 北京理工大学 A kind of tool changing processing method based on CCD camera on-position measure
CN110000606A (en) * 2019-04-18 2019-07-12 哈尔滨工业大学 A kind of presetting cutter method for processing Terahertz slow-wave structure part
CN110293233A (en) * 2019-07-30 2019-10-01 中国工程物理研究院材料研究所 A kind of thin-wall semi shells automatization processing method
CN212526942U (en) * 2019-11-15 2021-02-12 西华大学 Machining is with hemisphere casing vacuum adsorption frock clamp
CN112276176A (en) * 2020-10-20 2021-01-29 哈尔滨工业大学 Micro-milling burr suppression method applied to folded waveguide slow-wave structure
CN112571089A (en) * 2020-11-19 2021-03-30 首都航天机械有限公司 Dot-matrix flexible fixed supporting device for integral spinning hemispherical shell
CN112917205A (en) * 2021-04-21 2021-06-08 大连理工大学 Large spherical crown thin-wall part array type internal support clamp and flexible clamping method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
张杰: "复杂结构薄壁件小直径永磁球头磁流变抛光技术", 《航空精密制造技术》 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114453641A (en) * 2022-01-27 2022-05-10 哈尔滨工业大学 Six-axis linkage machine tool weak electric control system, six-axis linkage machine tool and milling method
CN114453641B (en) * 2022-01-27 2023-08-18 哈尔滨工业大学 Six-axis linkage machine tool weak electricity control system, six-axis linkage machine tool and milling method
CN114535625A (en) * 2022-04-08 2022-05-27 哈尔滨工业大学 Ultra-precision turning machine tool for tiny conical rotary body component and tool setting and processing monitoring method
CN116441638A (en) * 2023-06-16 2023-07-18 沈阳和研科技股份有限公司 Dicing saw
CN116441638B (en) * 2023-06-16 2023-09-08 沈阳和研科技股份有限公司 Dicing saw
CN118372197A (en) * 2024-06-27 2024-07-23 西南科技大学 Clamp and device for detecting surface defects and contours of microspheres
CN118372197B (en) * 2024-06-27 2024-08-16 西南科技大学 Clamp and device for detecting surface defects and contours of microspheres

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