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CN112397426B - 基板搬送装置 - Google Patents

基板搬送装置 Download PDF

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CN112397426B
CN112397426B CN202010692764.7A CN202010692764A CN112397426B CN 112397426 B CN112397426 B CN 112397426B CN 202010692764 A CN202010692764 A CN 202010692764A CN 112397426 B CN112397426 B CN 112397426B
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CN112397426A (zh
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吴丞倍
内山昌彦
李锡准
赵宽英
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Rorze Systems Corp
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Abstract

本发明公开一种能够减少所需氮气量及设备停机时间的基板搬送装置。这种基板搬送装置具有换气部驱动室、前开式晶圆盒收容室、驱动设备室及换气管。所述换气部驱动室具有向下部吹空气的主风扇。所述前开式晶圆盒收容室配置于所述换气部驱动室到下部，收容用于储存基板的前开式晶圆盒(FOUP)。所述驱动设备室配置在所述前开式晶圆盒收容室的下部。所述换气管连接所述前开式晶圆盒收容室与所述换气部驱动室。

Description

基板搬送装置
技术领域
本发明涉及基板搬送装置，更具体来讲涉及一种在晶圆收纳容器与工程设备之间搬送晶圆的基板搬送装置。
背景技术
半导体是在作为晶圆的硅基板通过各种工程制成的。
这种半导体逐渐高集成化或电路细微化，为了防止颗粒或水分附着到晶圆表面，晶圆周边需要保持高清洁度。并且，为了防止发生晶圆表面氧化等表面特性变化，将晶圆周边形成为作为惰性气体的氮气气氛或真空状态。
为了适当保持这种晶圆周边的气氛，将晶圆放在叫作前开式晶圆盒(FOUP：Front-Opening Unified Pod)的密闭式收纳盒的内部管理，在其内部填充氮。并且，为了在对晶圆进行处理的处理装置与FOUP之间收受晶圆而利用叫作前段设备模组(EFEM：EquipmentFront End Module)的基板搬送装置。
图1为示出现有基板搬送装置的剖面图。
参见图1，现有基板搬送装置100包括换气部驱动室110、前开式晶圆盒收容室120、驱动设备室130及换气管150。
换气部驱动室110上设有主风扇140，为了清洁基板搬送装置100内部而向下部吹入氮气(或空气)。
这样吹入的氮气经过前开式晶圆盒收容室120吹至驱动设备室130，通过连接形成于驱动设备室130下部的第一开口部A及形成于换气部驱动室110上部的第二开口部B的换气管150再次流入换气部驱动室110。即，直至不需要换气的驱动设备室130的大范围区域都被换气，因此所需氮气量增加，发生设备停机时间增加的问题。
【现有技术文献】
【专利文献】
(专利文献0001)韩国公开专利第10-2017-0121190
发明内容
技术问题
因此，本发明要解决的技术问题是提供能够减少所需氮气量且能够减少设备停机时间的基板搬送装置。
技术方案
用于解决这种技术问题的本发明的例示性实施例的基板搬送装置包括换气部驱动室、前开式晶圆盒收容室、驱动设备室及换气管。所述换气部驱动室具有向下部吹空气的主风扇。所述前开式晶圆盒收容室配置于所述换气部驱动室的下部，收容用于储存基板的前开式晶圆盒(FOUP)。所述驱动设备室配置在所述前开式晶圆盒收容室的下部。所述换气管连接所述前开式晶圆盒收容室与所述换气部驱动室。
例如，所述前开式晶圆盒收容室包括形成于其下部的第一开口部，所述换气部驱动室包括形成于其上部的第二开口部，所述换气管可连接所述第一开口部及所述第二开口部。
在此，这种基板搬送装置还可以包括设于所述第一开口部的副风扇。
另外，根据本发明的基板搬送装置，所述前开式晶圆盒收容室包括向下部升降以开闭前开式晶圆盒收容室的一侧的开闭门，还可以包括开闭门收容室及排气室。所述开闭门收容室配置在所述前开式晶圆盒收容室的所述一侧的下部且与所述驱动设备室相邻。所述排气室配置在所述前开式晶圆盒收容室的另一侧且与所述驱动设备室相邻。
在此，这种基板搬送装置还可以包括连接所述开闭门收容室及所述排气室的连接流道。
并且，这种基板搬送装置还可以包括副阀及主阀。所述副阀设于所述连接流道开闭所述连接流道。所述主阀能够向外部排出所述排气室的气体。
技术效果
根据上述本发明的基板搬送装置，作为不需要换气的空间的驱动设备室被排除作为换气空间，从而能够减少所需氮气量及设备停机时间。
并且，相比于现有技术，能够减小主风扇的旋转速度，因此能够减少电能消耗。
并且，在形成于前开式晶圆盒收容室的第一开口部附加副风扇的情况下，能够通过减小前开式晶圆盒收容室内的湍流(turbulence)诱导氮气顺畅地流动。
并且，形成有开闭门收容室的情况下，能够通过连接开闭门收容室与排气室的连接流道吹扫开闭门收容室内部，能够通过主阀向外部排出流入的颗粒。
附图说明
图1为示出现有基板搬送装置的剖面图；
图2为示出本发明例示性的一个实施例的基板搬送装置的剖面图；
图3及图4为示出本发明的例示性的另一实施例的基板搬送装置的剖面图，其中图3为示出开闭门关闭的状态的剖面图，图4为示出开闭门打开的状态的剖面图。
附图标记说明
100：现有基板搬送装置
200、400：本发明的实施例的基板搬送装置
110：换气部驱动室 120：前开式晶圆盒收容室
121：开闭门收容室 122：开闭门
123：排气室
130：驱动设备室 140：主风扇
150：换气管 160：连接流道
170：主阀 180：副阀
190：副风扇 A：第一开口部
B：第二开口部 RP：装载端口
J：夹具 F：前开式晶圆盒
具体实施方式
本发明可进行多种变更，可具有多种形态，以下在附图中示出特定实施例并在说明书中进行具体说明。但其目的并非使本发明限定于特定的公开形态，因此应理解为包括属于本发明的思想及技术范围的所有变更、等同物及替代物。在说明各附图方面，对相近的构成要素标注相近的附图标记。为确保本发明的明确性，附图中构件的尺寸可能显示得比实际夸张。
第一、第二等术语可用于说明多种构成要素，但所述构成要素不得受限于所述术语。使用所述术语的目的在于使一个构成要素区分于其他构成要素。例如，在不脱离本发明的范围的前提下，可以将第一构成要素命名为第二构成要素，也可以类似地将第二构成要素命名为第一构成要素。
本申请中使用的术语只是用于说明特定实施例，目的并非限定本发明。若记载内容中无另行定义，则单数的表述还包括复数的表述。应理解本申请中的术语“包括”或“具有”等术语用于指定存在说明书中记载的特征、数字、步骤、动作、构成要素、部件或其组合，而并非预先排除一个或一个以上的其他特征、数字、步骤、动作、构成要素、部件或其组合的存在或附加可能性。并且，A和B‘连接’、‘结合’不仅包括A和B直接连接或结合的情况，还包括A和B之间具有其他构成要素C以连接或结合A和B的情况。
在无另行定义的前提下，本说明书中使用的包括技术术语或科学术语在内的所有术语均表示具有与本发明所属技术领域的普通技术人员的一般理解相同的含义。通常使用的词典定义过的术语应解释为与相关技术的文章脉络相一致的含义，本申请中无明确定义的前提下不得解释为理想或过度形式性的含义。并且，在对方法发明的权利要求中各步骤并未明确约束于顺序的情况下，各步骤的顺序也可以互换。
以下参见附图更具体地说明本发明的实施例。
图2为示出本发明例示性的一个实施例的基板搬送装置的剖面图。
参见图2，用于解决这种技术问题的本发明例示性的一个实施例的基板搬送装置200包括换气部驱动室110、前开式晶圆盒收容室120、驱动设备室130及换气管150。换气部驱动室110、前开式晶圆盒收容室120及驱动设备室130是在基板搬送装置200的外壳内部划分得到的。从下部起依次配置有所述驱动设备室130、所述前开式晶圆盒收容室120及换气部驱动室110。
所述换气部驱动室110设有主风扇140。所述主风扇140向下部方向吹空气(或氮气)。另外，附图上示出所述换气部驱动室110与前开式晶圆盒收容室120通过外壳的隔墙(partition)分离，但这只是为了便利而划分的，实际上构成为空气能够从换气部驱动室110流动到前开式晶圆盒收容室120。
所述前开式晶圆盒收容室120配置在所述换气部驱动室110下部，收容用于储存基板的前开式晶圆盒(FOUP)。虽未图示，前开式晶圆盒收容室120上设有开闭门。通过这种开闭门(未图示)，配置在装载端口(RP)的夹具J上部的前开式晶圆盒能够被移送到前开式晶圆盒收容室120内部。
在此，所述开闭门(未图示)可上升到换气部驱动室110打开，复位到前开式晶圆盒收容室120闭合。另外，图3及图4示出的基板搬送装置400如现有的一样开闭门下降到下部的驱动设备室130打开，复位到前开式晶圆盒收容室120闭合，后续将参见图3及图4对此时的实施例进行具体说明。
所述驱动设备室130配置在所述前开式晶圆盒收容室120下部。所述驱动设备室130可设有驱动基板搬送装置的设备。
所述换气管150连接所述前开式晶圆盒收容室120与所述换气部驱动室110。例如，所述前开式晶圆盒收容室120包括形成于其下部的第一开口部A，所述换气部驱动室110包括形成于其上部的第二开口部B，所述换气管150可连接所述第一开口部A及所述第二开口部B。
另外，图2示出所述换气管150形成于装载端口RP的反侧(例如背面)，但不限于此。即，所述换气管150也可以形成于侧面。
这种基板搬送装置200还可以包括设于所述第一开口部A的副风扇(未图示)。将参见图3更具体地说明这种副风扇。
图3及图4为示出本发明的例示性的另一实施例的基板搬送装置的剖面图，图3为示出开闭门关闭的状态的剖面图，图4为示出开闭门打开的状态的剖面图。图3及图4公开的本发明另一实施例的基板搬送装置400相比于图2所示的基板搬送装置200，如现有基板搬送装置100构成为开闭门能够向下部往复开闭，因此相比于图2的基板搬送装置200具有复杂的构成。对图3及图4所示的构成要素中与图2所示的基板搬送装置200的构成要素相同、相近的构成要素并用相同的附图标记并省略重复说明。
参见图3及图4，本发明的例示性的另一实施例的基板搬送装置400包括换气部驱动室110、前开式晶圆盒收容室120、驱动设备室130及换气管150。
根据本发明的基板搬送装置400，所述前开式晶圆盒收容室120包括向下部升降开闭前开式晶圆盒收容室的一侧的开闭门122，还可以包括开闭门收容室121及排气室123。
所述开闭门收容室121配置在所述前开式晶圆盒收容室120的所述一侧下部且与所述驱动设备室130相邻。
所述排气室123配置在所述前开式晶圆盒收容室120的另一侧且与所述驱动设备室130相邻。
在此，这种基板搬送装置400还可以包括连接所述开闭门收容室121及所述排气室123的连接流道160。可通过这种连接流道160将开闭门收容室121内部的空气诱导到排气室123，通过排气室123排出流入的颗粒。
并且，这种基板搬送装置400还可以包括副阀180及主阀170。
所述副阀180设于所述连接流道160开闭所述连接流道160。所述主阀170可向外部排出所述排气室123的气体。
设于所述换气部驱动室110的内部的主风扇140驱动时，所述副阀180及所述主阀170可打开，在此，优选的是所述主阀170只稍微打开。
并且，所述主风扇140一般驱动时所述副阀180及/或所述主阀170闭合，可间歇地打开排出基板搬送装置400内部的颗粒。并且，所述主风扇140一般驱动时所述副阀180及/或所述主阀170闭合的情况下，所述开闭门收容室121及所述排气室123仅一侧打开，另一侧闭合，因此没有空气能够流入的空间，因此实质上如图2所示的基板搬送装置200，空气只在换气部驱动室110与前开式晶圆盒收容室120循环。
如上所述，根据本发明的基板搬送装置200、400排除作为不需要换气的空间的驱动设备室130作为换气空间，从而能够减少所需氮气量及设备停机时间。
并且，相比于现有技术，能够减小主风扇140的旋转速度，因此能够减少电能消耗。即，为了向收容在前开式晶圆盒收容室120的前开式晶圆盒吹一定强度的空气，可相对减小主风扇140的旋转速度。现有基板搬送装置100采用空气循环至驱动设备室130的结构，因此主风扇140的旋转速度必须相对大，而本发明的基板搬送装置200、400采用空气只循环到前开式晶圆盒收容室120的结构，因此能够相对减小主风扇140的旋转速度。
在以上说明的本发明的具体说明中参照本发明的优选实施例进行了说明，但本技术领域的熟练技术人员或掌握本技术领域的普通技术人员应知晓可以在不超出所附权利要求记载的本发明的思想及技术领域的范围内对本发明进行多种修改及变更。

Claims (3)

1.一种基板搬送装置，其中，包括：
换气部驱动室，其设有向下部吹空气的主风扇；
前开式晶圆盒收容室，其配置于所述换气部驱动室的下部，收容用于储存基板的前开式晶圆盒；
驱动设备室，其配置于所述前开式晶圆盒收容室的下部；以及
换气管，其连接所述前开式晶圆盒收容室与所述换气部驱动室；
其中，所述前开式晶圆盒收容室包括向下部升降以开闭前开式晶圆盒收容室的一侧的开闭门，并且还包括：
开闭门收容室，其配置在所述前开式晶圆盒收容室的所述一侧的下部且与所述驱动设备室相邻；以及
排气室，其配置在所述前开式晶圆盒收容室的另一侧且与所述驱动设备室相邻；
其中，所述基板搬送装置还包括：
连接流道，其连接所述开闭门收容室及所述排气室；
副阀，其设于所述连接流道开闭所述连接流道；以及
主阀，其用于向外部排出所述排气室的气体。
2.根据权利要求1所述的基板搬送装置，其特征在于：
所述前开式晶圆盒收容室包括形成于其下部的第一开口部，
所述换气部驱动室包括形成于其上部的第二开口部，
所述换气管连接所述第一开口部及所述第二开口部。
3.根据权利要求2所述的基板搬送装置，其特征在于，还包括：
副风扇，其设于所述第一开口部。
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