CN110530257A - Femto-second laser distribution interferometer system - Google Patents
Femto-second laser distribution interferometer system Download PDFInfo
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- CN110530257A CN110530257A CN201910917274.XA CN201910917274A CN110530257A CN 110530257 A CN110530257 A CN 110530257A CN 201910917274 A CN201910917274 A CN 201910917274A CN 110530257 A CN110530257 A CN 110530257A
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- 230000003287 optical effect Effects 0.000 claims abstract description 70
- 230000000243 photosynthetic effect Effects 0.000 claims abstract description 6
- 239000013307 optical fiber Substances 0.000 claims description 45
- 230000003595 spectral effect Effects 0.000 claims description 30
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- 230000010287 polarization Effects 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
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- Engineering & Computer Science (AREA)
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- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The application provides a kind of femto-second laser distribution interferometer system.It is divided into multichannel by the light that the first optical frequency com and the second optical frequency com issue and measures light and the sub- local oscillator light of multichannel.One way measures light and a way local oscillator light corresponds, and is incident to an interferometer.At this point, son measurement light exposes to testee through interferometer, interferometer is incident to after testee reflects, the son measurement light of interferometer outgoing and sub- local oscillator are photosynthetic simultaneously, form interference signal.Interferometer obtains the metrical information of testee according to interference signal.Light, a way local oscillator light and an interferometer realization is measured by a way to detect the metrical information of a testee.Femto-second laser distribution interferometer system realizes double light comb light sources while measuring multiple testees, may be implemented to detect a large amount of testee, considerably reduces system cost, save detection time, improve detection efficiency.
Description
Technical field
This application involves laser measuring technique fields, more particularly to a kind of femto-second laser distribution interferometer system.
Background technique
Femtosecond laser is a kind of ultra-short pulse laser, and time domain pulse width is in the femtosecond order of magnitude.Since femtosecond laser has
Have the advantages that spectral region is wide, pulse width is narrow, repetition rate stability is high and peak power is high, and reliably provides optical frequency
The connection approach in domain and radio frequency domains, so swashing in precision distance measurement, spectral measurement, frequency measurement, Fast Process observation, femtosecond
Light processing and other fields are widely studied and applied.
However, traditional femto-second laser interferometer system is used to realize the measurement to single Place object.In industrial intelligence
In the environment of energyization manufacture, when needing to detect the metrical information of a large amount of measured target on a large scale, then a large amount of tradition is needed
Femto-second laser interferometer system respectively detects multiple measured targets, so that whole detection cost is too high, detection efficiency
It is low.
Summary of the invention
Based on this, it is necessary to for when detecting the metrical information of multiple measured targets on a large scale, traditional femto-second laser
Interferometer system detects problem single, at high cost, that detection efficiency is low, and providing one kind may be implemented double light comb light sources while measuring
The femto-second laser distribution interferometer system that multiple measured targets, testing cost are low, detection efficiency is high.
It includes the first optical frequency com, the second optics frequency that the application, which provides a kind of femto-second laser distribution interferometer system,
Rate comb, the first spectral module, the second spectral module and multiple interferometers.First optical frequency com is for providing survey
Away from light source.Second optical frequency com is for providing local oscillator light source.First spectral module is set to the ranging light source
Optical path on, for by the ranging light source be divided into multichannel measurement light.Second spectral module is set to the local oscillator light
In the optical path in source, for the local oscillator light source to be divided into the sub- local oscillator light of multichannel.The sub- measurement light and all the way the son sheet all the way
Vibration light is incident to the interferometer respectively.The sub- measurement light exposes to testee through the interferometer,
The sub- measurement light after testee reflection is incident to the interferometer, through described in interferometer outgoing
Son measurement light and the sub- local oscillator are photosynthetic simultaneously, form interference signal.The interferometer obtains institute according to the interference signal
State the metrical information of testee.
The application provides a kind of above-mentioned femto-second laser distribution interferometer system.What first optical frequency com issued
Light is split by first spectral module, and the ranging light source is divided into multichannel measurement light.The second optics frequency
The light that rate comb issues is split by second spectral module, and the local oscillator light source is divided into the sub- local oscillator light of multichannel.Wherein,
The sub- measurement light and all the way sub- local oscillator light one-to-one correspondence all the way, and it is incident to the interferometer.At this point, institute
It states sub- measurement light and exposes to testee through the interferometer, the sub- measurement light after testee reflection enters
It is incident upon the interferometer, and photosynthetic simultaneously with the sub- local oscillator, forms interference signal.The interferometer is according to described dry
The metrical information of the testee can be obtained by relating to signal.At this point, passing through the sub- measurement light, all the way sub- local oscillator all the way
Light and an interferometer may be implemented to detect the metrical information of a testee.
Therefore, the femto-second laser distribution interferometer system is by dividing the ranging light source and the local oscillator light source
It is not split to form multichannel measurement light and the sub- local oscillator light of multichannel, realizes double light comb light sources while measuring multiple described tested
Object.To may be implemented to detect a large amount of testee by the femto-second laser distribution interferometer system
Metrical information considerably reduces system cost, saves detection time, improves detection efficiency.
Detailed description of the invention
Fig. 1 is the whole principle flow chart of femto-second laser distribution interferometer system provided by the present application；
Fig. 2 is the structural schematic diagram of femto-second laser distribution interferometer system in one embodiment provided by the present application；
Fig. 3 is the interferometer of femto-second laser distribution interferometer system in one embodiment provided by the present application
Structural schematic diagram；
Fig. 4 is the structural representation of femto-second laser distribution interferometer system in another embodiment provided by the present application
Figure；
Fig. 5 is the interferometer of femto-second laser distribution interferometer system in another embodiment provided by the present application
Structural schematic diagram.
Description of symbols
Femto-second laser distribution interferometer system 100, the first optical frequency com 10, the second optical frequency com 20, first
Spectral module 30, the first optical fiber splitter 310,320, second third spectroscopes 330 of the 1st third spectroscope, third the
410, first three spectroscopes 340, the second reflecting mirror 350, the second spectral module 40, the second optical fiber splitter the 4th spectroscopes
420, second the 4th spectroscope 430, third the 4th spectroscope 440, third reflecting mirror 450, interferometer 50, the first light
Fine collimation focusing mirror 510, the second fiber optic collimator focus lamp 520, the first spectroscope 530, the second spectroscope 540, the first reflecting mirror
550, the first photodetector 560, the 4th reflecting mirror 571, the 5th reflecting mirror 572, the 6th reflecting mirror 573, the 5th spectroscope
574, the 6th spectroscope 575, the second photodetector 576, mobile device 70.
Specific embodiment
In order to which the objects, technical solutions and advantages of the application are more clearly understood, by the following examples, and combine attached
Figure, is further elaborated the application.It should be appreciated that specific embodiment described herein is only to explain this Shen
Please, it is not used to limit the application.
It is herein component institute serialization number itself, such as " first ", " second " etc., is only used for distinguishing described object,
Without any sequence or art-recognized meanings.And " connection ", " connection " described in the application, unless otherwise instructed, include directly and
It is indirectly connected with (connection).In the description of the present application, it is to be understood that term " on ", "lower", "front", "rear", " left side ",
The orientation of the instructions such as " right side ", "vertical", "horizontal", "top", "bottom", "inner", "outside", " clockwise ", " counterclockwise " or position are closed
System indicates to be based on the orientation or positional relationship shown in the drawings, being merely for convenience of description the application and simplifying description
Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand
For the limitation to the application.
In this application unless specifically defined or limited otherwise, fisrt feature in the second feature " on " or " down " can be with
It is that the first and second features directly contact or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature be directly above or diagonally above the second feature, or be merely representative of
First feature horizontal height is higher than second feature.Fisrt feature can be under the second feature " below ", " below " and " below "
One feature is directly under or diagonally below the second feature, or is merely representative of first feature horizontal height less than second feature.
Referring to Figure 1, it includes the first optical frequency that the application, which provides a kind of femto-second laser distribution interferometer system 100,
Comb the 10, second optical frequency com 20, the first spectral module 30, the second spectral module 40 and multiple interferometers 50.It is described
First optical frequency com 10 is for providing ranging light source.Second optical frequency com 20 is for providing local oscillator light source.Described
One spectral module 30 is set in the optical path of the ranging light source, for the ranging light source to be divided into multichannel measurement light.Institute
It states the second spectral module 40 to be set in the optical path of the local oscillator light source, for the local oscillator light source to be divided into the sub- local oscillator of multichannel
Light.The sub- measurement light and sub- local oscillator light is incident to the interferometer 50 respectively all the way all the way.The sub- survey
It measures light and exposes to testee 60 through the interferometer 50, the sub- measurement light after the testee 60 reflection enters
It is incident upon the interferometer 50, the sub- measurement light and the sub- local oscillator through the interferometer 50 outgoing are photosynthetic simultaneously,
Form interference signal.The interferometer 50 obtains the metrical information of the testee 60 according to the interference signal.
The light that first optical frequency com 10 issues is split by first spectral module 30, by the ranging
Light source is divided into multichannel measurement light.The light that second optical frequency com 20 issues is divided by second spectral module 40
The local oscillator light source is divided into the sub- local oscillator light of multichannel by beam.Wherein, the sub- measurement light and sub- local oscillator light is one by one all the way all the way
It is corresponding, and it is incident to the interferometer 50.At this point, the sub- measurement light through the interferometer 50 expose to by
Object 60 is surveyed, the sub- measurement light after the testee 60 reflection is incident to the interferometer 50, through described dry
The sub- measurement light and the sub- local oscillator that interferometer device 50 is emitted are photosynthetic simultaneously, form interference signal.
The interferometer 50 can obtain the metrical information of the testee 60 according to the interference signal.This
When, it may be implemented by the sub- measurement light all the way, all the way sub- local oscillator light and an interferometer 50 to one
The metrical information of the testee 60 is detected.
Therefore, the femto-second laser distribution interferometer system 100 is by by the ranging light source and the local oscillator light
Source is split to form multichannel measurement light and the sub- local oscillator light of multichannel respectively, realizes double light comb light sources while measuring multiple described
Testee 60.To may be implemented to detect a large amount of quilt by the femto-second laser distribution interferometer system 100
The metrical information for surveying object 60, considerably reduces system cost, saves detection time, improve detection efficiency.
Fig. 2 is referred to, in one embodiment, first spectral module 30 includes the first optical fiber splitter 310.It is described
The input terminal of first optical fiber splitter 310 is connect with 10 optical fiber of the first optical frequency com, first optical fiber splitter 310
Output end connect respectively with multiple 50 optical fiber of interferometer.
First optical fiber splitter 310 is for realizing the branch of light-wave energy and the device of combining.Pass through described first
The ranging light source is divided into multichannel measurement light by optical fiber splitter 310, and passes through the output of first optical fiber splitter 310
End is connect with multiple 50 optical fiber of interferometer respectively.At this point, each way measurement light is incident to the interferometer
Device 50, connects one to one.
Wherein, first optical fiber splitter 310 have added losses are low, good directionality, polarization sensitivity are low, environment and
The advantages of mechanical stability height and high performance-price ratio.The femtosecond can be both reduced by first optical fiber splitter 310 to swash
The cost of light device distribution interferometer system 100, is also ensured stability of the ranging light source in transmission process, is conducive to really
Protect the measurement accuracy of the femto-second laser distribution interferometer system 100.
Fig. 2 is referred to, in one embodiment, second spectral module 40 includes the second optical fiber splitter 410.It is described
The input terminal of second optical fiber splitter 410 is connect with 20 optical fiber of the second optical frequency com.Second optical fiber splitter 410
Output end connect respectively with multiple 50 optical fiber of interferometer.
Second optical fiber splitter 410 is for realizing the branch of light-wave energy and the device of combining.Pass through described second
The local oscillator light source is divided into the sub- local oscillator light of multichannel by optical fiber splitter 410, and passes through the output of second optical fiber splitter 410
End is connect with multiple 50 optical fiber of interferometer respectively.At this point, each way local oscillator light is incident to the interferometer
Device 50, connects one to one.Also, a way local oscillator light, a way measurement light are incident to the interferometer 50.
Wherein, second optical fiber splitter 410 have added losses are low, good directionality, polarization sensitivity are low, environment and
The advantages of mechanical stability height and high performance-price ratio.The femtosecond can be both reduced by second optical fiber splitter 410 to swash
The cost of light device distribution interferometer system 100, is also ensured stability of the ranging light source in transmission process, is conducive to really
Protect the measurement accuracy of the femto-second laser distribution interferometer system 100.
Fig. 3 is referred to, in one embodiment, each interferometer 50 includes the first fiber optic collimator focus lamp
510, the second fiber optic collimator focus lamp 520, the first spectroscope 530, the second spectroscope 540 and the first reflecting mirror 550, the first light
Electric explorer 560.
The first fiber optic collimator focus lamp 510 is connect with 310 optical fiber of the first optical fiber splitter.Second optical fiber
Collimation focusing mirror 520 is connect with 410 optical fiber of the second optical fiber splitter.First spectroscope 530 is set to through described
In the optical path of the sub- measurement light after one fiber optic collimator focus lamp 510, being used for will be through the first fiber optic collimator focus lamp 510
The sub- measurement light afterwards is divided into two bundles vertical the first son measurement light and the second son measurement light.
Second spectroscope 540 is set to the sub- local oscillator optical path after the second fiber optic collimator focus lamp 520
On.First reflecting mirror 550 is set in the optical path of the first son measurement light, for first son to be measured light reflection
It is back to first spectroscope 530.It is anti-through the testee 60 that the second son measurement illumination is incident upon the testee 60
It is emitted back towards to first spectroscope 530, and is mixed with the first son measurement light reflected through first reflecting mirror 550.Through
The first son measurement light that first reflecting mirror 550 reflects and second son through the testee 60 reflection measure
The mixed light of light is incident to second spectroscope 540 through first spectroscope 530.
First photodetector 560 be used for through first reflecting mirror 550 reflect it is described first son measure light,
The second son measurement light through the testee 60 reflection and the sub- local oscillator through second spectroscope 540 transmission
The mixed light of light is detected.
Multichannel multichannel needed for first optical frequency com 10 is generated by 310 beam splitting of the first optical fiber splitter is sub
Measure light.Corresponding the first fiber optic collimator focus lamp is transferred to through single mode optical fiber respectively per the sub- measurement light described all the way
510.It is divided into two bundles vertical light by first spectroscope 530, i.e., the described first son measurement light and the second son measurement
Light.The first son measurement light returns to first spectroscope 530 after first reflecting mirror 550 reflection.Described second
Son measurement light returns to corresponding first spectroscope 530 after the reflective surface of the corresponding testee 60, and
It is mixed with the first son measurement light reflected through first reflecting mirror 550, forms mixed light.
Second optical frequency com 20 generates the required sub- local oscillator of multichannel by 410 beam splitting of the second optical fiber splitter
Light.It is transferred on the corresponding second fiber optic collimator focus lamp 520 through single mode optical fiber respectively per the sub- local oscillator light described all the way.It is logical
The sub- local oscillator light, first son through first reflecting mirror 550 reflection that second spectroscope 540 transmits is crossed to measure
Light, the second son measurement light through the testee 60 reflection are mixed.
First photodetector 560 respectively to through first reflecting mirror 550 reflect it is described first son measurement light,
The second son measurement light through the testee 60 reflection and the sub- local oscillator through second spectroscope 540 transmission
The mixed light of light is detected.The measurement of available multiple 60 height of testee of first photodetector 560
Signal.The testee 60 can be the objects such as screw.
At this point, can be with by the sub- measurement light all the way, all the way sub- local oscillator light and interferometer 50
Realization detects the metrical information of a testee 60.The femto-second laser distribution interferometer system 100
Multichannel measurement light and the sub- local oscillator light of multichannel are formed by the way that the ranging light source and the local oscillator light source to be split respectively, it is real
Show double light comb light sources while measuring multiple testees 60.To pass through the femto-second laser distribution interferometer
System 100 may be implemented to detect the metrical information of a large amount of testee 60, considerably reduces system cost, saves
Detection time improves detection efficiency.
Fig. 4 is referred to, in one embodiment, first spectral module 30 includes multiple third spectroscopes.One institute
It states third spectroscope to be correspondingly arranged with an interferometer 50, the multiple third spectroscope is used for the ranging light
Source is divided into multichannel measurement light.
1st third spectroscope 320 is set in the optical path of the ranging light source, for the ranging light source to be divided into two
Son described in road measures light, and the sub- measurement light is incident to the interferometer 50 all the way, and the sub- measurement light enters all the way
It is incident upon the 2nd third spectroscope 330.
2nd third spectroscope 330 is set to the sub- survey described all the way after the 1st 320 beam splitting of third spectroscope
In the optical path for measuring light, for two-way institute will to be divided into through the sub- measurement light described all the way after the 1st 320 beam splitting of third spectroscope
State sub- measurement light.At this point, son described in two-way measures light, all the way sub- measurement after the 2nd 330 beam splitting of third spectroscope
Light is incident to the interferometer 50, and the measurement light of son described in another way is incident to the 3rd third spectroscope 340.
3rd third spectroscope 340 is set to the sub- survey described all the way after the 2nd 330 beam splitting of third spectroscope
In the optical path for measuring light, for two-way institute will to be divided into through the sub- measurement light described all the way after the 2nd 330 beam splitting of third spectroscope
State sub- measurement light.At this point, son described in two-way measures light, all the way sub- measurement after the 3rd 340 beam splitting of third spectroscope
Light is incident to the interferometer 50, and the measurement light of son described in another way is incident to the 4th third spectroscope.
And so on, i-th of third spectroscope is set to the sub- survey described all the way after (i-1)-th third spectroscope beam splitting
In the optical path for measuring light, for two-way institute will to be divided into through the sub- measurement light described all the way after (i-1)-th third spectroscope beam splitting
Sub- measurement light is stated, the sub- measurement light is incident to the interferometer 50 all the way, and the sub- measurement light is incident to all the way
I+1 third spectroscope.Wherein, i is the positive integer greater than 1.
Wherein, i-th of third spectroscope is set to the sub- measurement light described all the way after (i-1)-th third spectroscope beam splitting
Optical path on.At this point, the sub- measurement light described all the way after (i-1)-th third spectroscope beam splitting is to be divided through (i-1)-th third
The sub- measurement described all the way of (i-1)-th interferometer 50 is not incident in the measurement light of son described in two-way after mirror beam splitting
In the optical path of light.
By the multiple third spectroscope, the ranging light source can be divided into multichannel measurement light, and incident respectively
To the corresponding interferometer 50.
Fig. 4 is referred to, in one embodiment, the number of the multiple interferometer 50 is N number of, the multiple third
Spectroscopical number is N-1, and first spectral module 30 further includes the second reflecting mirror 350.Second reflecting mirror 350 is set
It is placed in the optical path of the sub- measurement light described all the way after the N-1 third spectroscope beam splitting, for will be through the N-1 the
The sub- measurement light described all the way after three spectroscope beam splitting reflexes to the interferometer 50.
By second reflecting mirror 350 light will be measured by son described in two-way after the N-1 third spectroscope beam splitting
In be not incident to the sub- measurement light described all the way of the corresponding interferometer 50, it is right to reflex to second reflecting mirror 350
One answered the interferometer 50.At this point, interferometer 50 described in the corresponding n-th of second reflecting mirror 350.
Specifically, corresponding 1st interferometer 50 of the 1st third spectroscope 320.2nd third
Spectroscope 330 corresponds to the 2nd interferometer 50.Corresponding 3rd interferometer of 3rd third spectroscope 340
50.And so on, interferometer 50 described in the corresponding n-th of second reflecting mirror 350.
At this point, the femto-second laser distribution interferometer system 100 is by the multiple third spectroscope by the survey
It is split to form multichannel measurement light away from light source, considerably reduces system cost, save detection time, improve detection
Efficiency.
Fig. 4 is referred to, in one embodiment, second spectral module 40 includes multiple 4th spectroscopes.One institute
It states the 4th spectroscope to be correspondingly arranged with an interferometer 50, the multiple 4th spectroscope is used for the local oscillator light
Source is divided into the sub- local oscillator light of multichannel.
1st the 4th spectroscope 420 is set in the optical path of the local oscillator light source, for the local oscillator light source to be divided into two
Sub- local oscillator light described in road, the sub- local oscillator light is incident to the interferometer 50 all the way, and the sub- local oscillator light enters all the way
It is incident upon the 2nd the 4th spectroscope 430.
2nd the 4th spectroscope 430 is set to the sub- local oscillator light described all the way after the 1st 420 beam splitting of the 4th spectroscope
Optical path on, for son described in two-way will to be divided into through the sub- local oscillator light described all the way after the 1st 420 beam splitting of the 4th spectroscope
Local oscillator light, the sub- local oscillator light is incident to the interferometer 50 all the way, and the sub- local oscillator light is incident to the 3rd all the way
4th spectroscope 440.
3rd the 4th spectroscope 440 is set to the sub- local oscillator light described all the way after the 2nd 430 beam splitting of the 4th spectroscope
Optical path on, for sub- local oscillator described in two-way will to be divided into through the sub- local oscillator light described all the way after the 2nd 430 beam splitting of the 4th spectroscope
Light, the sub- local oscillator light is incident to the interferometer 50 all the way, and the sub- local oscillator light is incident to the 4th the 4th all the way
Spectroscope.
And so on, i-th of the 4th spectroscopes are set to the son described all the way after (i-1)-th the 4th spectroscope beam splitting originally
It shakes in the optical path of light, for two-way institute will to be divided into through the sub- local oscillator light described all the way after (i-1)-th the 4th spectroscope beam splitting
Sub- local oscillator light is stated, the sub- local oscillator light is incident to the interferometer 50 all the way, and the sub- local oscillator light is incident to all the way
The 4th spectroscope of i+1.Wherein, i is the positive integer greater than 1.
Wherein, i-th of the 4th spectroscopes are set to the sub- local oscillator light described all the way after (i-1)-th the 4th spectroscope beam splitting
Optical path on.At this point, the sub- local oscillator light described all the way after (i-1)-th the 4th spectroscope beam splitting is to be divided through (i-1)-th the 4th
The sub- local oscillator described all the way of (i-1)-th interferometer 50 is not incident in sub- local oscillator light described in two-way after mirror beam splitting
In the optical path of light.
By the multiple 4th spectroscope, the local oscillator light source can be divided into the sub- local oscillator light of multichannel, and entered respectively
It is incident upon the corresponding interferometer 50.
Refer to Fig. 4, in one embodiment, the number of the multiple interferometer 50 be it is N number of, the multiple 4th
Spectroscopical number is N-1, and second spectral module 40 further includes third reflecting mirror 450.The third reflecting mirror 450 is set
It is placed in the optical path of the sub- measurement light described all the way after N-1 the 4th spectroscope beam splitting, for will be through the N-1 the
The sub- local oscillator light described all the way after four spectroscope beam splitting reflexes to the interferometer 50.
By the third reflecting mirror 450 will after the N-1 the 4th spectroscope beam splitting sub- local oscillator light described in two-way
In be not incident to the sub- local oscillator light described all the way of the corresponding interferometer 50, it is right to reflex to the third reflecting mirror 450
One answered the interferometer 50.At this point, interferometer 50 described in the corresponding n-th of the third reflecting mirror 450.
Specifically, corresponding 1st interferometer 50 of the 1st the 4th spectroscope 420.Described 2nd the 4th
Spectroscope 430 corresponds to the 2nd interferometer 50.Corresponding 3rd interferometer of 3rd the 4th spectroscope 440
Device 50.And so on, interferometer 50 described in the corresponding n-th of the third reflecting mirror 450.
At this point, the femto-second laser distribution interferometer system 100 is by the multiple 4th spectroscope by described
Vibration light source is split to form the sub- local oscillator light of multichannel, can considerably reduce system cost, save detection time, improve
Detection efficiency.
Fig. 5 is referred to, in one embodiment, each interferometer 50 includes that the 4th reflecting mirror the 571, the 5th is anti-
Penetrate mirror 572, the 6th reflecting mirror 573, the 5th spectroscope 574, the 6th spectroscope 575 and the second photodetector 576.
4th reflecting mirror 571 is set in the optical path of the sub- measurement light, and being used for will be after the third spectroscope
The sub- measurement light reflex to the 6th spectroscope 575.6th spectroscope 575 will be reflected through the 4th reflecting mirror 571
The sub- measurement light afterwards is divided into two bundles vertical third measurement light and the 4th son measurement light.6th reflecting mirror 573 is set
It is placed in the optical path of the third measurement light, for third measurement light to be reflected back into the 6th spectroscope 575.
The 4th son measurement illumination is incident upon the testee 60.The 6th spectroscope is reflected back into through the testee 60
575, and mixed with the third measurement light reflected through the 6th reflecting mirror 573.
5th reflecting mirror 572 is set in the optical path of the sub- local oscillator light, and being used for will be after the 4th spectroscope
The sub- local oscillator light reflex to the 5th spectroscope 574.5th spectroscope 574 is set to through the 5th reflecting mirror 572
In the optical path of the sub- local oscillator light after reflection.Third through the 6th reflecting mirror 573 reflection measures light and through institute
The mixed light for stating the 4th son measurement light of the reflection of testee 60 is incident to described 5th point through the 6th spectroscope 575
Light microscopic 574.
Second photodetector 576 be used to measure third that reflect through the 6th reflecting mirror 573 light,
The 4th son measurement light through the testee 60 reflection and the sub- local oscillator through the 5th spectroscope 574 transmission
The mixed light of light is detected.
First optical frequency com 10 is split through the multiple third spectroscope generates multichannel measurement light.It is each
The measurement light of son described in road is incident on corresponding 4th reflecting mirror 571, is reflexed to by the 4th reflecting mirror 571 described
6th spectroscope 575.It is divided into two bundles vertical light by the 6th spectroscope 575, i.e., described third measures light and the 4th
Son measurement light.The third measurement light returns to the 6th spectroscope 575 after the 6th reflecting mirror 573 reflection.Institute
It states the 4th son measurement light and returns to corresponding 6th spectroscope after the reflective surface of the corresponding testee 60
575, and mixed with the third measurement light reflected through the 6th reflecting mirror 573, form mixed light.
Second optical frequency com 20 is split through the multiple 4th spectroscope and generates the sub- local oscillator light of multichannel.It is each
Sub- local oscillator light described in road is incident on corresponding 5th reflecting mirror 572, is reflected by corresponding 5th reflecting mirror 572
To the 5th spectroscope 574.The light transmitted by the 5th spectroscope 574, the institute reflected through the 6th reflecting mirror 573
State third measurement light, the 4th son measurement light through the testee 60 reflection is mixed, formation mixed light.
Second photodetector 576 respectively to reflected through the 6th reflecting mirror 573 third measurement light,
The 4th son measurement light through the testee 60 reflection and the sub- local oscillator through the 5th spectroscope 574 transmission
The mixed light of light is detected.The measurement of available multiple 60 height of testee of second photodetector 576
Signal.
At this point, can be with by the sub- measurement light all the way, all the way sub- local oscillator light and interferometer 50
Realization detects the metrical information of a testee 60.The femto-second laser distribution interferometer system 100
Multichannel measurement light and the sub- local oscillator light of multichannel are formed by the way that the ranging light source and the local oscillator light source to be split respectively, it is real
Show double light comb light sources while measuring multiple testees 60.To pass through the femto-second laser distribution interferometer
System 100 may be implemented to detect the metrical information of a large amount of testee 60, considerably reduces system cost, saves
Detection time improves detection efficiency.
The metrical information of the testee 60 can be the assembly height L of the testee 60.By to described
The measuring signal that one photodetector 560 or second photodetector 576 obtain 60 height of testee is solved
It adjusts, the variation of double light comb interference fringe time delays is obtained, it is hereby achieved that the tested height of multiple testees 60
L。
The repetition of first optical frequency com 10 and second optical frequency com 20 is respectively fr1With fr2.Difference is
Δfr.And then the time of measuring that the turnover rate of the femto-second laser distribution interferometer system 100, i.e. single measurement need is
Tupdate=1/ Δ fr.It is Tupdate=1/ Δ fr according to the time of measuring that single measurement needs, it is known that if Δ fr value foot
It is enough big, by the very fast measuring speed of correspondence.
In one embodiment, the driving frequency of electrooptic modulator is about 10GHz, if setting 1MHz for Δ fr value,
The repetition rate of i.e. described first optical frequency com 10 is 10GHz, and the repetition rate of second optical frequency com 20 is
10.001GHz.The turnover rate of the femto-second laser distribution interferometer system 100 is just 1MHz, and the time of single measurement is only
For 1 μ s.However, the time of measuring of double light comb range-measurement systems of traditional fiber resonance cavity optical frequency com is about 0.5ms.Cause
This, the time of measuring of herein described femto-second laser distribution interferometer system 100 is than traditional fiber resonance cavity optics frequency
The time of measuring of double light comb range-measurement systems of rate comb saves 500 times.Pass through the femto-second laser distribution interferometer system
100 may be implemented to detect the metrical information of a large amount of testee 60, and save detection time, improve detection effect
Rate.
For per the sub- measurement light described all the way and per the sub- local oscillator light described all the way, the tested height L of testee 60 may be used
To indicate are as follows:
Wherein, c is the light velocity in vacuum, ngFor the group index of pulsed light, Δ t is that reflecting mirror is corresponding with measured target
Real time delay, Δ τ are directly to measure obtained time delay.The non-fuzzy range of double light comb absolute distance measurement systems can
To indicate are as follows:
In herein described femto-second laser distribution interferometer system 100, repetition rate 10GHz, then the femtosecond
The non-fuzzy range of range measurement in laser distribution interferometer system 100 is only 15mm.Meanwhile herein described femtosecond
The non-fuzzy range of laser distribution interferometer system 100 can significantly be extended by adjusting repetition rate realization.
Assuming that the repetition rate of the ranging light source is fr1When, measuring distance results is L1.Change the ranging light source
Repetition rate is fr11, measuring distance results is L2.Then being tested distance L can indicate are as follows:
Wherein, m is integer, can pass through precise measurement L1With L2Acquire m.According to the principle of synthetic wavelength, by the non-of ranging
Fuzzy ranges greatly extend.Non-fuzzy range after extension can indicate are as follows:
In above formula, the ranging non-fuzzy range after extension is inversely proportional with the repetition rate difference for adjusting front and back.Assuming that repeating
The difference of frequency is 10kHz, and corresponding non-fuzzy range is up to 15km.It can thus be seen that herein described femtosecond laser
Large scale and the measurement of remote height distance can be achieved in device distribution interferometer system 100 in wide ranging range, can
Realize the remote calibration and calibration of workpiece.
In one embodiment, the femto-second laser distribution interferometer system 100 further includes mobile device 70.It is described
Mobile device 70 is detachably connected with the interferometer 50, for controlling the position of the mobile interferometer 50.
The mobile device 70 can be robot arm, can control the movement rail for realizing the interferometer 50
Mark.The corresponding interferometer 50 of one mobile device 70, to the movement interferometer 50.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
The several embodiments of the application above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously
The limitation to the application the scope of the patents therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the concept of this application, various modifications and improvements can be made, these belong to the guarantor of the application
Protect range.Therefore, the scope of protection shall be subject to the appended claims for the application patent.
Claims (10)
1. a kind of femto-second laser distribution interferometer system characterized by comprising
First optical frequency com (10), for providing ranging light source；
Second optical frequency com (20), for providing local oscillator light source；
First spectral module (30) is set in the optical path of the ranging light source, for the ranging light source to be divided into multichannel
Measure light；
Second spectral module (40) is set in the optical path of the local oscillator light source, for the local oscillator light source to be divided into multichannel
Local oscillator light；
Multiple interferometers (50), all the way the sub- measurement light and all the way the sub- local oscillator light be incident to respectively one it is described dry
Interferometer device (50)；
The sub- measurement light exposes to testee (60) through the interferometer (50), reflects through the testee (60)
The sub- measurement light afterwards is incident to the interferometer (50), the sub- measurement being emitted through the interferometer (50)
Light and the sub- local oscillator are photosynthetic simultaneously, form interference signal；
The interferometer (50) obtains the metrical information of the testee (60) according to the interference signal.
2. femto-second laser distribution interferometer system as described in claim 1, which is characterized in that first spectral module
It (30) include the first optical fiber splitter (310) input terminal and first optical frequency of first optical fiber splitter (310)
Comb (10) optical fiber connection, the output end of first optical fiber splitter (310) respectively with multiple interferometer (50) light
Fibre connection.
3. femto-second laser distribution interferometer system as claimed in claim 2, which is characterized in that second spectral module
It (40) include the second optical fiber splitter (410) input terminal and second optical frequency of second optical fiber splitter (410)
Comb (20) optical fiber connection, the output end of second optical fiber splitter (410) respectively with multiple interferometer (50) light
Fibre connection.
4. femto-second laser distribution interferometer system as claimed in claim 3, which is characterized in that each interferometer dress
Setting (50) includes:
First fiber optic collimator focus lamp (510) is connect with the first optical fiber splitter (310) optical fiber；
Second fiber optic collimator focus lamp (520) is connect with the second optical fiber splitter (410) optical fiber；
First spectroscope (530) is set to the optical path of the sub- measurement light after the first fiber optic collimator focus lamp (510)
On, it is surveyed for the sub- measurement light after the first fiber optic collimator focus lamp (510) to be divided into two bundles the first vertical son
Measure light and the second son measurement light；
Second spectroscope (540) is set in the sub- local oscillator optical path after the second fiber optic collimator focus lamp (520)；
First reflecting mirror (550) is set in the optical path of the first son measurement light, for first son to be measured light reflection
It is back to first spectroscope (530)；
The second son measurement illumination is incident upon the testee (60), is reflected back into described first through the testee (60)
Spectroscope (530), and mixed with the first son measurement light reflected through first reflecting mirror (550)；
First son through first reflecting mirror (550) reflection measures light and through the described of the testee (60) reflection
The mixed light of second son measurement light is incident to second spectroscope (540) through first spectroscope (530)；
First photodetector (560), for the first son measurement light, the warp reflected through first reflecting mirror (550)
The second son measurement light that the testee (60) is reflected and the son through second spectroscope (540) transmission are originally
The mixed light of vibration light is detected.
5. femto-second laser distribution interferometer system as described in claim 1, which is characterized in that first spectral module
(30) include:
Multiple third spectroscopes, a third spectroscope is correspondingly arranged with an interferometer (50), described more
A third spectroscope is used to for the ranging light source being divided into multichannel measurement light；
1st third spectroscope (320) is set in the optical path of the ranging light source, for the ranging light source to be divided into two-way
The sub- measurement light, the sub- measurement light is incident to the interferometer (50) all the way, and the sub- measurement light enters all the way
It is incident upon the 2nd third spectroscope (330)；
I-th of third spectroscope is set to the optical path of the sub- measurement light described all the way after (i-1)-th third spectroscope beam splitting
On, for the measurement light of son described in two-way will to be divided into through the sub- measurement light described all the way after (i-1)-th third spectroscope beam splitting,
The sub- measurement light is incident to the interferometer (50) all the way, and the sub- measurement light is incident to i+1 all the way
Three spectroscopes；
Wherein, i is the positive integer greater than 1.
6. femto-second laser distribution interferometer system as claimed in claim 5, which is characterized in that the multiple interferometer dress
Set (50) number be it is N number of, the multiple spectroscopical number of third is N-1, first spectral module (30) further include:
Second reflecting mirror (350) is set to the optical path of the sub- measurement light described all the way after the N-1 third spectroscope beam splitting
On, for the interferometer will to be reflexed to through the sub- measurement light described all the way after the N-1 third spectroscope beam splitting
Device (50).
7. femto-second laser distribution interferometer system as claimed in claim 6, which is characterized in that second spectral module
(40) include:
Multiple 4th spectroscopes, the 4th spectroscope is correspondingly arranged with an interferometer (50), described more
A 4th spectroscope is used to the local oscillator light source being divided into the sub- local oscillator light of multichannel；
1st the 4th spectroscope (420), is set in the optical path of the local oscillator light source, for the local oscillator light source to be divided into two
Sub- local oscillator light described in road, the sub- local oscillator light is incident to the interferometer (50) all the way, all the way the sub- local oscillator light
It is incident to the 2nd the 4th spectroscope (430)；
I-th of the 4th spectroscopes are set to the optical path of the sub- local oscillator light described all the way after (i-1)-th the 4th spectroscope beam splitting
On, for sub- local oscillator light described in two-way will to be divided into through the sub- local oscillator light described all the way after (i-1)-th the 4th spectroscope beam splitting,
The sub- local oscillator light is incident to the interferometer (50) all the way, and the sub- local oscillator light is incident to i+1 all the way
Four spectroscopes；
Wherein, i is the positive integer greater than 1.
8. femto-second laser distribution interferometer system as claimed in claim 7, which is characterized in that the multiple interferometer dress
Set (50) number be it is N number of, the multiple 4th spectroscopical number is N-1, second spectral module (40) further include:
Third reflecting mirror (450) is set to the optical path of the sub- measurement light described all the way after N-1 the 4th spectroscope beam splitting
On, for the interferometer will to be reflexed to through the sub- local oscillator light described all the way after the N-1 the 4th spectroscope beam splitting
Device (50).
9. femto-second laser distribution interferometer system as claimed in claim 8, which is characterized in that each interferometer dress
Setting (50) includes:
4th reflecting mirror (571) is set in the optical path of the sub- measurement light, described in will be after the third spectroscope
Son measurement light reflexes to the 6th spectroscope (575)；
The sub- measurement light after the 4th reflecting mirror (571) reflection is divided into two bundles vertical by the 6th spectroscope (575)
Straight third measurement light and the 4th son measurement light；
6th reflecting mirror (573) is set in the optical path of the third measurement light, for reflecting third measurement light
It is back to the 6th spectroscope (575)；
The 4th son measurement illumination is incident upon the testee (60), is reflected back into the described 6th through the testee (60)
Spectroscope (575), and mixed with the third measurement light reflected through the 6th reflecting mirror (573)；
5th reflecting mirror (572) is set in the optical path of the sub- local oscillator light, described in will be after the 4th spectroscope
Sub- local oscillator light reflexes to the 5th spectroscope (574)；
5th spectroscope (574) is set to the optical path of the sub- local oscillator light after the 5th reflecting mirror (572) reflection
On；
Third through the 6th reflecting mirror (573) reflection measures light and through the described of the testee (60) reflection
The mixed light of 4th son measurement light is incident to the 5th spectroscope (574) through the 6th spectroscope (575)；
Second photodetector (576), for third measurement light, the warp reflected through the 6th reflecting mirror (573)
The 4th son measurement light that the testee (60) is reflected and the son through the 5th spectroscope (574) transmission are originally
The mixed light of vibration light is detected.
10. femto-second laser distribution interferometer system as described in claim 1, which is characterized in that the femto-second laser
Distributed interferometer system further include:
Mobile device (70) is detachably connected with the interferometer (50), for controlling the mobile interferometer
(50) position.
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| CN111157025A (en) * | 2020-01-22 | 2020-05-15 | 深圳市威富视界有限公司 | Scanning debugging equipment and scanning debugging method |
| CN111351511A (en) * | 2020-04-21 | 2020-06-30 | 深圳市威富视界有限公司 | Laser interferometry system |
| CN111351640A (en) * | 2020-03-06 | 2020-06-30 | 山西大学 | Optical lens quality detection system and method based on double-optical-comb interferometry |
| CN112998648A (en) * | 2021-02-02 | 2021-06-22 | 深圳市威富视界有限公司 | Imaging system |
| CN115201843A (en) * | 2022-09-16 | 2022-10-18 | 成都量芯集成科技有限公司 | Phase ranging structure and method based on multi-frequency light emission |
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