CN112229338B - Double-spectrum confocal thickness measuring method without standard sheet zero alignment - Google Patents
Double-spectrum confocal thickness measuring method without standard sheet zero alignment Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 38
- 238000001228 spectrum Methods 0.000 title claims abstract description 37
- 238000005259 measurement Methods 0.000 claims abstract description 12
- 230000003287 optical effect Effects 0.000 claims abstract description 7
- 239000000835 fiber Substances 0.000 claims description 4
- 239000012780 transparent material Substances 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 abstract description 21
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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Abstract
A double-spectrum confocal thickness measuring method without standard plate alignment comprises the following steps of: the first sensor and the second sensor measure reference surfaces respectively; step 2: the first sensor and the second sensor mutually measure reference surfaces respectively; and step 3: the first sensor and the second sensor respectively measure the surface of a sample to be measured; and 4, step 4: and calculating the thickness of the sample to be measured. The invention realizes the direct calibration of the sensor distance by using the reference surface or the absolute zero point of the sensor, simplifies the zero alignment process and avoids the introduction of the uncertainty of a third-party thickness measuring instrument; the optical fiber branching unit can be used for sharing a plurality of sensor light sources and spectrometers, so that the number of optical components is reduced while the measurement accuracy is ensured; the transparent reference surface ensures that the two sensors can form visible light spots on the same surface at the same time, so that the relative pose of the two sensors can be adjusted in an auxiliary manner, and coaxial or collinear adjustment can be realized.
Description
Technical Field
The invention relates to the technical field of measurement, in particular to a dual-spectrum confocal thickness measurement method without standard plate alignment.
Background
For the measurement of the thickness of objects such as self-supporting films, transparent films, parallel flat plate samples and the like, a common non-contact measurement technology is a measurement method based on a dual-spectrum confocal sensor, namely, the two sensors are used for respectively measuring the upper surface and the lower surface of a sample to be measured to calculate the corresponding thickness values. However, since the spectral confocal sensor has no absolute zero point, the sensor spacing needs to be calibrated with a standard of known thickness before the thickness measurement, and the thickness accuracy of the standard and the calibration process affect the thickness measurement result.
Therefore, the problems of the prior art are to be further improved and developed.
Disclosure of Invention
The object of the invention is: the invention aims to provide a double-spectrum confocal thickness measuring method without a standard plate to zero, aiming at solving the problem that a third-party thickness measuring instrument measuring error is introduced by a calibration process and a thickness standard component in the confocal thickness measuring method double-sensor distance calibration.
The technical scheme is as follows: in order to solve the above technical problem, the present technical solution provides a dual-spectrum confocal thickness measuring method without standard plate alignment, comprising the following steps,
step 1: the first sensor and the second sensor measure reference surfaces respectively;
step 2: the first sensor and the second sensor mutually measure reference surfaces respectively;
and step 3: the first sensor and the second sensor respectively measure the surface of a sample to be measured;
and 4, step 4: and calculating the thickness of the sample to be measured.
The double-spectrum confocal thickness measuring method without the standard sheet zeroing comprises the steps that a first sensor and a second sensor measure a reference surface or a sample to be measured through light rays emitted by a light source, the light source is connected with an optical fiber branching unit, and the optical fiber branching unit is respectively connected with the first sensor and the second sensor to achieve the purpose that the first sensor and the second sensor share the light source.
The double-spectrum confocal thickness measuring method without standard plate alignment comprises the steps that the reference surface is made of a transparent material which allows continuous-wavelength laser to penetrate through the reference surface at the same time.
The double-spectrum confocal thickness measuring method without the standard plate alignment is characterized in that the first sensor and the second sensor are coaxially arranged oppositely, the first sensor and the second sensor are spectrum confocal sensors, and at least one of the first sensor and the second sensor comprises a reference surface.
The double-spectrum confocal thickness measuring method without the standard sheet zero alignment comprises the step 1 of receiving reflection signals of a first sensor and a second sensor which measure reference surfaces respectively and determining the absolute zero points of the first sensor and the second sensor.
The double-spectrum confocal thickness measuring method without the standard plate alignment comprises the step 2 of receiving reflection signals of a first sensor and a second sensor which mutually measure a reference surface respectively and determining the relative distance between the first sensor and the second sensor.
The double-spectrum confocal thickness measuring method without the standard sheet zeroing comprises the steps that a first sensor and a second sensor respectively measure a reflection signal of a reference surface and the reflection signals of the first sensor and the second sensor respectively mutually measure the reference surface and are received through a spectrometer, the spectrometer is connected with an optical fiber branching unit, and the optical fiber branching unit is respectively connected with the first sensor and the second sensor to achieve the purpose that the first sensor and the second sensor share the spectrometer.
The double-spectrum confocal thickness measuring method without standard sheet zero alignment is characterized in that the first sensor measures the distance from the reference surface of the first sensor to the reference surface of the second sensorv 0 The second sensor measures a distance from the second sensor reference surface to the first sensor reference surface asu 0 The relative distance between the first sensor and the second sensorlThe calculation formula is as follows:l=（v 0 +u 0 ）/ 2。
the double-spectrum confocal thickness measuring method without standard sheet zero alignment is characterized in that the step 3 comprises the step of respectively recording the measured values of the distances from the first sensor to the surface of the sample to be measured, and the measured values are measured by the second sensor.
The double-spectrum confocal thickness measuring method without standard sheet zero alignment is characterized in that the distance from a first sensor reference surface measured by a first sensor to the surface of a sample to be measured isvThe second sensor measures the distance from the reference surface of the second sensor to the surface of the sample to be measured asuThickness of sample to be measureddThe calculation formula is as follows:d=l-v-u。
(III) the beneficial effects are as follows: compared with the prior art, the double-spectrum confocal thickness measuring method without standard sheet zero alignment provided by the invention has the following advantages:
1. compared with the existing method for calibrating the distance between the upper sensor and the lower sensor by using a standard gauge block or a standard film, the method can realize the direct calibration of the distance between the sensors by using the reference surface or the absolute zero point of the sensor, simplify the calibration process and avoid the introduction of the uncertainty of a third-party thickness measuring instrument;
2. compared with the conventional confocal displacement sensor or double-confocal thickness measuring device, the invention can realize the sharing of a plurality of sensor light sources and spectrometers by using the optical fiber branching unit, thereby reducing the number of optical components while ensuring the measurement precision;
3. compared with the existing double confocal thickness measuring device, the transparent reference surface can ensure that the two sensors can form visible light spots on the same surface at the same time, so that the relative poses of the two sensors can be adjusted in an auxiliary manner, and coaxial or collinear adjustment can be realized.
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FIG. 1 is a schematic diagram of the steps of a dual-spectrum confocal thickness measurement method without standard plate alignment;
FIG. 2 is a schematic diagram of a dual-spectrum confocal thickness measurement without standard plate nulling according to the present invention;
FIG. 3 is a schematic diagram of the structure of the spectral confocal sensor with absolute zero point in the present invention;
FIG. 4 is a schematic diagram of the transmission and collection of sensor signals based on an optical fiber splitter;
FIG. 5 is a schematic view of a confocal thickness measurement system sensor layout;
FIG. 6 is a schematic diagram of relative distance measurement of a first sensor and a second sensor;
FIG. 7 is a schematic diagram of the first and second sensors for measuring the thickness of a sample;
100-a sensor; 101-a first sensor; 102-a second sensor; 201-a dispersive lens; 202-reference plane; 203-displacement amount; 300-a sample to be tested; 301-surface of sample to be measured; 400-a light source; 500-spectrometer; 600-optical splitter.
Detailed Description
The present invention will be described in further detail with reference to preferred embodiments, and more details are set forth in the following description in order to provide a thorough understanding of the present invention, but it is apparent that the present invention can be embodied in many other forms different from the description herein and can be similarly generalized and deduced by those skilled in the art based on the practical application without departing from the spirit of the present invention, and therefore, the scope of the present invention should not be limited by the contents of this detailed embodiment.
The drawings are schematic representations of embodiments of the invention, and it is noted that the drawings are intended only as examples and are not drawn to scale and should not be construed as limiting the true scope of the invention.
The application relates to a dual-spectrum confocal thickness measuring method without standard sheet zero alignment, in particular to a spectrum confocal thickness measuring method, which aims at solving the problem that the distance calibration change of two sensors influences the accuracy of a thickness measuring result in the existing thickness measuring process based on spectrum confocal and provides a spectrum confocal thickness measuring method without calibration.
On the basis of the structure of the existing spectrum confocal sensor, a transparent film is added to be used as a reference surface or an absolute zero point of the sensor; meanwhile, the zero alignment operation of the thickness measuring device based on the double-spectrum confocal sensor is realized by utilizing the mode that the two sensors mutually measure the reference surface; in addition, the optical fiber branching unit is utilized to realize the sharing of the light source and the spectrometer of the two spectrum confocal sensors in the thickness measuring device. The double-spectrum confocal thickness measuring method without the standard plate zero alignment can be used for measuring the thickness of objects such as self-supporting films, transparent films, parallel flat plate samples and the like.
The optical structure of the spectral confocal sensor is changed, the reference surface is added, at least one spectral confocal sensor in the two spectral confocal sensors comprises the reference surface, specifically, the two confocal sensors can be provided with the reference surfaces at the same time, or only one sensor is provided with the reference surface, and the reference surface layout of the two spectral confocal sensors can be as shown in three conditions in fig. 5.
The reference surface is made of transparent material which allows continuous wavelength laser to penetrate through simultaneously, and can be made of ultrathin transparent film material or transparent film material such as plastic, glass, acrylic and the like. The sensor is dispersedly focused on the reference surface to reflect back the spectral information, and the corresponding peak position is the absolute zero position of the sensor, namely, the thickness of the object to be measured is measured by using the spectral confocal displacement sensor with the absolute zero.
In addition, by means of mutual reference surface measurement of the two opposite sensors, the distance between the sensors can be directly calibrated on the premise of not using a standard film or a gauge block, the uncertainty of a third-party thickness measuring instrument is avoided, the measuring process is simplified, and the structure of the thickness measuring device is optimized.
The application relates to a dual-spectrum confocal thickness measuring method without standard sheet zero alignment, which is realized based on a confocal thickness measuring system.
The confocal thickness measuring system comprises two oppositely arranged spectrum confocal sensors, namely a first sensor and a second sensor. The confocal thickness measuring system using the spectrum confocal sensor is different from the traditional spectrum sensor in that the structure is provided with a reference surface, and the specific structure is shown in figure 3. The confocal thickness measuring system uses a spectrum confocal sensor to take the position corresponding to the reflection signal of the reference surface as the absolute zero point of the sensor.
At least one of the first sensor and the second sensor includes a reference surface, or the first sensor and the second sensor are respectively provided with a reference surface, as shown in three schematic layout diagrams of the confocal thickness measuring system sensor in fig. 5.
The spectral confocal sensor generally has only one port, and in the existing scheme, a signal sent by a light source and a reflected signal received by a spectrometer are combined into the same optical fiber through an optical fiber splitter and connected with the port of the spectral confocal sensor. Therefore, two sensors, a first sensor and a second sensor, respectively, require two light sources, two spectrometers and two fiber optic splitters. This application increases two optical fiber branching units respectively at emission light path and reflection light path, utilizes branching unit to close a bundle, the beam splitting function of light beam, realizes the sharing of the light source of two sensors, spectrum appearance. In principle, 4 fiber splitters are the same, and their function is to integrate or split optical signals. In practical engineering, their operating wavelength ranges may vary depending on the situation, but the functions are the same, i.e. the ranges may vary.
The layout of the light path for receiving the light source emission and reflection signals in the confocal thickness measuring system is shown in fig. 4: the light source is used for emitting light, the light source is respectively connected with the optical fiber branching unit connected with the first sensor and the second sensor through the optical fiber branching unit, and the light source of the two sensors is shared by the optical fiber branching unit; the spectrometer in the confocal thickness measuring system is used for receiving reflected signals, the spectrometer is respectively connected with the optical fiber branching unit connected with the first sensor and the second sensor through the optical fiber branching unit, and the optical fiber branching unit is used for sharing the two sensor spectrometers, as shown in fig. 4. The confocal thickness measuring system can also adopt a traditional mode, an optical fiber splitter is not used, and the two sensors independently use respective light sources and spectrometers.
A specific embodiment of the present application is described in detail below.
As shown in fig. 1, the method of the present invention comprises the steps of:
step 1: the first sensor and the second sensor measure reference surfaces respectively;
step 2: the first sensor and the second sensor mutually measure reference surfaces respectively;
and step 3: the first sensor and the second sensor respectively measure the surface of a sample to be measured;
and 4, step 4: and calculating the thickness of the sample to be measured.
The first sensor and the second sensor are arranged coaxially opposite to each other, and are herein arranged vertically opposite to each other, for example.
The step 1 further comprises the steps of receiving the reflection signals of the reference surface respectively measured by the first sensor and the second sensor, and determining the self absolute zero points of the first sensor and the second sensor.
And 2, receiving the reflection signals of the first sensor and the second sensor which mutually measure the reference surface respectively, and determining the relative distance between the first sensor and the second sensor.
The first sensor and the second sensor respectively measure the reflection signal of the reference surface and the reflection signal of the first sensor and the second sensor respectively mutually measuring the reference surface are received by the spectrometer, the spectrometer is connected with the optical fiber branching unit, and the optical fiber branching unit is respectively connected with the first sensor and the second sensor to realize the sharing of the spectrometer of the first sensor and the second sensor.
In step 2, the principle of measuring the relative distance between the sensors is as shown in fig. 6, and the upper and lower sensors respectively measure the reference surfaces of each other: the first sensor measures a distance from the first sensor reference surface to the second sensor reference surface asv 0 The second sensor measures a distance from the second sensor reference surface to the first sensor reference surface asu 0 The relative distance between the first sensor and the second sensorlThe calculation formula is as follows:l=（v 0 +u 0 ）/2。
and the step 3 comprises recording the measured values of the distances from the first sensor to the surface of the sample to be measured and the measured values from the second sensor to the surface of the sample to be measured respectively.
In step 4, the principle of measuring the thickness of the sample to be measured is shown in fig. 7, the first sensor and the second sensor (i.e. the upper sensor and the lower sensor) respectively measure the upper surface and the lower surface of the sample to be measured, and the distance from the reference surface of the first sensor measured by the first sensor to the surface of the sample to be measured isvThe second sensor measures the distance from the reference surface of the second sensor to the surface of the sample to be measured asuThickness of sample to be measureddThe calculation formula is as follows:d=l-v-u。
to this end, the sample thickness measurement based on the dual confocal sensor is completed.
A double-spectrum confocal thickness measuring method without standard sheet zero alignment is characterized in that a reference surface is added to an optical structure of a confocal sensor, and the distance calibration or zero alignment of the sensor is realized by utilizing a mode that the sensor mutually measures the reference surface; the sharing of two sensor light sources and a spectrometer in the measuring device is realized by utilizing the optical fiber branching unit; the reference surface is made of transparent materials, so that the two sensors can form visible light spots on the same surface at the same time, the relative poses of the two sensors can be adjusted in an auxiliary mode, and coaxial or collinear adjustment is achieved.
The above description is provided for the purpose of illustrating the preferred embodiments of the present invention and will assist those skilled in the art in more fully understanding the technical solutions of the present invention. However, these examples are merely illustrative, and the embodiments of the present invention are not to be considered as being limited to the description of these examples. For those skilled in the art to which the invention pertains, several simple deductions and changes can be made without departing from the inventive concept, and all should be considered as falling within the protection scope of the invention.
Claims (6)
1. A dual-spectrum confocal thickness measuring method without standard plate zero alignment is characterized in that a reference surface is made of a transparent material allowing continuous wavelength laser to penetrate through simultaneously, a first sensor and a second sensor are coaxially and oppositely arranged, the first sensor and the second sensor are spectrum confocal sensors, at least one of the first sensor and the second sensor comprises the reference surface, and the method comprises the following steps,
step 1: the first sensor and the second sensor measure reference surfaces respectively; receiving reflected signals of a reference surface respectively measured by a first sensor and a second sensor, and determining the absolute zero points of the first sensor and the second sensor;
and 2, step: the first sensor and the second sensor mutually measure reference surfaces respectively; receiving reflected signals of a first sensor and a second sensor which mutually measure a reference surface respectively, and determining the relative distance between the first sensor and the second sensor;
and step 3: the first sensor and the second sensor respectively measure the surface of a sample to be measured;
and 4, step 4: calculating the thickness of the sample to be measured, wherein the thickness d of the sample to be measured has the calculation formula: l-v-u.
2. The method as claimed in claim 1, wherein the first sensor and the second sensor measure the reference surface or the sample to be measured by the light emitted from the light source, the light source is connected to an optical splitter, and the optical splitter is respectively connected to the first sensor and the second sensor, so that the first sensor and the second sensor share the light source.
3. The method as claimed in claim 1, wherein the first sensor and the second sensor measure the reflection signal of the reference surface respectively, and the first sensor and the second sensor measure the reflection signal of the reference surface mutually respectively, and the first sensor and the second sensor are received by a spectrometer, the spectrometer is connected with a fiber splitter, and the fiber splitter is connected with the first sensor and the second sensor respectively, so that the first sensor and the second sensor share the spectrometer.
4. The method of claim 1, wherein the first sensor measures the distance v from the reference surface of the first sensor to the reference surface of the second sensor0The second sensor measures a distance u from the second sensor reference surface to the first sensor reference surface0The relative distance l between the first sensor and the second sensor is calculated by the formula: l-v0+u0)/2。
5. The method according to claim 1, wherein step 3 comprises recording the distance measurement values from the first sensor and the second sensor to the surface of the sample to be measured.
6. The method of claim 5, wherein the first sensor measures v the distance from the reference surface of the first sensor to the surface of the sample to be measured, and the second sensor measures u the distance from the reference surface of the second sensor to the surface of the sample to be measured.
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